裝置吸收式熱泵為甲醇燃料電池汽車空調系統之研究

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1 Journal of China Institute of Technology Vol The Theoretical and Practical Study of Pollution Control of Volatile Organic Compounds of High Technology Electronic Industries Shing-Chung Onn 1, Miao-Shen Liu 2, Ay Su 3, Sheng-Hsing Liu China Institute of Technology 1 Shin Puu Technology Co., Ltd. 2 Yuan-Ze University E kg/hr (1) (2) 90% 0.6kg/hr 0.095kg/hr 185

2 (3) (4) (a)(b) (5)(3)(4) Abstract The high technology electronic industries are the superior those in Republic of China. Under the support and the assistance of the R.O.C. government for a long time, they have grown up and become to the top industries over the world. Based on the theoretical rule considerations of the five countries and the practical testing results, the air pollution problems of volatile organic compounds (VOCs) emitted by the eight factories of the three electronic industries are evaluated. They represent the semi-conductor, the optronics, and the printed circuit board industries. In this study, the computed results of the emission rates of the three electronic industries indicate that the one factory of the semi-conductor provides ton-vocs/year, 3 factories of the optronics contribute ton-vocs/year, and 4 factories of the printed circuit board emit ton-vocs/year. Thus, it can be found that the optronics industry contributes the largest VOCs emission rate among the three electronic industries. Since January 1, 2003, the regulation of the emission rate of the optronics industry became valid. The E factory of the optronics industry should be expected theoretically to provide about the reduction rate of 758 ton-vocs/year. Thus, it can also be anticipated furthermore that due to the regulation of the air pollution control for the optronics industry became valid since January 1, 2003, the air quality of the whole Taiwan area should also be improved significantly. The results evaluated respectively by the rules of the 5 countries can finally be compared among them. The following conclusions can then be found: (1)Except R.O.C. and United States, the other 3 countries (Japan, Netherlands, and Mainland China) have 186

3 Journal of China Institute of Technology Vol not had the special regulations of the pollution control of the VOCs emission rate of the semi-conductor industry. In these 3 countries, the regulations of the single emission standard for all industries are employed to monitor the process operation of their semi-conductor industry. (2)The reduction rate of the regulation of the semi-conductor industry is 90% for both the United States and R.O.C.. But, in R.O.C., the maximum VOCs emission rate of the regulation of the semi-conductor industry is 0.6 kg/hr which is about six times of kg/hr of U.S. regulation. It means that the maximum VOCs emission rate of the R.O.C. regulation of the semi-conductor industry should be able to be corrected up if the best achieved control technology (BACT) may be imported and employed in R.O.C. (3)In this study, both the reduction rate and the emission rate of the only one semi-conductor factory are up to the standard of all regulations of the 5 countries. For the other 7 factories of both the optronics and the printed circuit board industries, the emission rates passed our regulation of the emission standard of stationary pollution sources. But, their VOCs emission rates could almost not pass the examinations of the regulations of the other 4 countries. (4)For the three electronic industries in this study, there two unreasonable facts about the R.O.C. regulations must be presented in the following: (a)first, there have different trichloroethylene emission standards between the semi-conductor and the printed circuit board industries. (b)secondly, for the regulation of the R.O.C. semi-conductor industry, the effective measurement ratio for every season must be larger than 80%. It indicates that the other 20% invalid measurement ratio is accepted by the present regulation. (5)Based on the above results of (3) and (4), it means that the more rigorous regulations for both the optronics and the printed circuit board industries are respectively and urgently required to be corrected and constructed to improve the air quality of Taiwan. Keywords : volatile organic compounds, electronic industry, emission amount, reduction amount, emission standard, control policy () (Volatile Organic Compounds VOCs) (Hazardous Air Pollutant HAP) 20760mmHg 0.1mmHg 187

4 HAP VOCs 83 6 HAP HAP 30 HAP 1[1] 21 VOCs 4 3 VOCs 1 30 Benzene 85 1 A Styrene ,2-Dichoroethane1, B Trichloroethylene 60 4 Ethyl benzene Choloroform 45 6 Toluene 45 7 Xylene Tetrachloroethylene Methylene chloride Dimethyl formanide ,1-Dichloroethane1, Phenol Terachloromethane ,1,1-Dichloroethane1,1, Methanol Furans Methyl phenol Methyl isobutyl ketone Butylacetate Carbon disulfide Arsenic 49 1 Chromium C D C 188

5 Journal of China Institute of Technology Vol Cadmium 36 3 Lead 25 4 Nitric acid Hydrogen chloride 17 2 Sulfuric acid 17 3 D Carcinogienic PAHS 73 1 B Naphthalene C (Foundry) IDM(Integrate Device Manufacturing)(Memory) 2 95% 2. 2 (Foundry) IDM (Memory) ,147 [3] ,939 [3] 10.7% , % 189

6 2001 CD-RW TFT-LCD 4,428 [3] 10.7% World Trade Organization, WTO [4] [4] ( A ) : (1) 2002 D A 190

7 Journal of China Institute of Technology Vol % (2) 2002 BEH E B E A 78.2% (3) 2002 A CFG D 1 E B 3 H A C F G [5] AsCl Pb 191

8 LED AsClPb LCD AsCl Pb PbSn PCB VOCs (1)(2) VOCs (3)VOCs (4)(5) 5 5 VOCs [6] 192

9 Journal of China Institute of Technology Vol VOCs 6[6] VOCs VOCs 10~20mgC/m3500~5,000 mgc/m35,000~10,000 mgc/m3 ~1,000 mgc/m3 6 VOCs [6] 193

10 1.mgC/m 3 <300> <80=80~95>95 3./ VOC<5000=5000~15000>15000 VOCs VOCs [7] 7 [7] / /

11 Journal of China Institute of Technology Vol [7] 8 [7] kg/hr kg/hr kg/hr kg/hr LCDLED [8] / /

12 [8] kg/hr kg/hr kg/hr kg/hr kg/hr kg/hr kg/hr kg/hr () 196

13 Journal of China Institute of Technology Vol CFR PART 60(Amended 59FR 12427,March 16, 1994) SCAQMD RULE 1164 SEMICONDUCTOR MANUFACTURING[9] didoes, zeners, stacks, IC, light-sensing, Light-emitting device, solar cells 2. VOCs [10] VOCs 3. [10] VOCs 4. (GB ) 33 [10] NMHC 2 (1) 197

14 (2) ( ) (3) ( ) VOCs () () SCAQMD RULE1164 SCAQMD RULE1164 PCB 40CFR PART 60 VOCs VOCs VOCs VOCs VOCs VOCs PCB 12 VOCs () 150mg/m3 (NMHC) () 90% 90% 0.6kg/hr 3kg/hr 200PPM 0.095kg/hr 150mg/m3 (NMHC) 90% 3kg/hr 200PPM 0.095kg/hr 150mg/m3 (NMHC) 3kg/hr 200PPM 198

15 Journal of China Institute of Technology Vol A B 13 PPM g/s g/s kg/hr p P p1~ p4~ P C P D Base on p E 60 F G H p p p p p p p p p p A B C D E F G H A A (20 A A A A THC( B 5 B B A B B 60 ) ) B C C 60 C

16 NM HC ( ) ( ) A B C D E F G H A 15 A 132 A A 15 A A 239 A 280 B 1323 B 142 m CMM (kg/hr) C 519 B B 192 B 416 C 5395 A 491 B 1821 C RULE CFR PART 60 VOCs 3kg/hr VOCs 200ppm 200

17 (%) (%)Journal of China Institute of Technology Vol A B C D E F G H kg/h m NMHC 150mg/m3 ( 210ppm Base on ) ~ 3 1 路 (33%)B (25%)G 路 201

18 (%) 2 2 路 3 ( 3) B 25% 2 ( 25%) 25% 25% 25%

19 Journal of China Institute of Technology Vol / / CMM PPM CMM PPM / / (/) 320 P P P001~P P P004~P P P P P P P P P P VOCs VOCs 203

20 量 CD EH ABF G 4 E kg/hr % VOCs ( A ) KG/HR (1) h = = 14 () (2) b = = 80 () (3) b 2 = (14-6) = 6,

Journal of China Institute of Technology Vol.30-2004.6 (4) a2 = 1.

21 Journal of China Institute of Technology Vol (4) a2 = 1.1 X 10-5 X A [11] (5) A = 269 mg/m3[12] (6) q = a2 X b 2 = 19.1 g/sec = 19.1 X 60 X 60 /1000 = KG/HR [11] 5 5 [11] 0.02 KG/HR(1) (2) 1. 25% 25% 25% 205

22 2. (1) /0 / (2) / /(3) / / E 0.6Kg/hr / 3. 80% 20% VOCs VOCs 6. PCB VOCs 206

23 Journal of China Institute of Technology Vol VOCs 7. BGA() BGA BGA VOCs 8. VOCs [1] EPA-2-F [2] 2001 ITIS [3] 2001 [4] 2000 [5] B5-1~B5-14 [6] 1993 VOC 48 15~31 [7] 1999 [8] 2001 [9] USEPAAmended January SCAQMD RULE Semiconductor Manufacturing [10] [11] 1999 [12]

我国原奶及乳制品安全生产和质量安全管理研究

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