VCSEL Vertical-Cavity Surface Emitting VCSEL Laser VCSEL VCSEL Edge Emitting Laser VCSEL VCSEL LED EEL VCSEL VCSEL (ma) 100 40 12 (Ohms) 3 6 30 (GHz) > 0.1 1-10 1-10 (db/hz) -120-120 EMI (ma) NA 15 0.5-5 (mw/ma) 0.001 0.3-0.9 0.2-0.7 (degree) 180 40 15 (nm) 50 3 < 0.3 (ns) 5 < 0.1 < 0.1 (µm) 0 7 0 NA 2D Arrays dλ/dt(nm/ o C) 0.3 0.3 0.06 (hrs) 10 5 10 6 AXT 57
1977 H. Soda K. Iga VCSEL 1984 Pulse Operation 1988 VCSEL VCSEL 2. Epi-Wafer VCSEL VCSEL Agilent Agilent Infineon Epi-Wafer IQEATMI Honeywell Mitel AXT Bandwidth9 Novalux VCSEL PicolightAvalon photonic Siros Technology ULM Photonics EMCORE AOI VCSEL AgilentCielo CommunicationInfineon VCSEL AMPLytelSumitomoMolexMethode Electronics Siemens PicolightStratos Lightwave NTT VCSEL 2D- 2D-Arrays 780nm 120X12 VCSEL Arrays PROW Tech 780nm Sandia National Lab.University of IllinoisUniversity of TexasXerox 120X12 PARCBell LabUCSB VCSEL VCSEL 850nm VCSEL single mode 780nm CD-DVD VCSEL EEL650nm VCSEL 58
VCSEL VCSEL 1 VCSEL LANWAN Gigabit Ethernet Worldwide Semiconductor Optoelectronic Compounds VCSEL WDM VCSEL LANWAN Gigabit Ethernet WDM SONET SONET SDH SDH Si-based 1.3µm 1.55µm EEL Laser VCSEL 1.3µm 1.55µm VCSEL MOCVD VCSEL MBE Bandwidth9 MBE 2 InP VCSEL University of California MBE 1.55um VCSEL VCSEL 3 59
Blue Sky Research Flextronic & Gore NTT Emcore Gore Photonics CieloInfineonE2O Nova Crystal Bandwidth9 CoreTek Cielo Communications Infineon E2O MEMS-based VCSEL 1530nm~1570nm Si VCSEL 0.38mA 1.55umVCSEL 10Gbps 850nm VCSEL Wafer 1300nm GaAs based DBR optical pump InGaAsN GaAs-based DBR 1mW 2.5Gbps1310nm InP-Based VCSEL 10Gbps 1310nm VCSEL 7mW Bandwidth9 1550nm InP-Based VCSEL 2.5Gbps 150Km 75 o C 1550nm 0.5mW MEMS-Based VCSEL 40Gbps 1514~1564nm MBE GaAs-basd 1289nm VCSEL 10Gbps 10km 125 o C 1mW 1308nmVCSEL 2~2.2mA 1mW 10Gbps 1320nmVCSEL 2mW InP-Based VCSEL 2.5Gbps 150Km VCSEL MBE MOCVD GaAs InP VCSEL VCSEL Ion Implanted Oxide Confined VCSEL Local Area NetworkLAN Storage Area NetworkSAN MetroAccess 60
VCSEL AlGaNGaN UV VCSEL MOCVD HBT LED MOCVD HBT HBT LED VCSEL LED VCSEL LD LD VCSEL VCSEL 4 2001/08 61
VCSEL VCSEL VCSEL VCSEL 62
LED LD LED 50lmW LED 120lmW LED Cree 21 lmw 67 LED ---- LED LED 180 2001 5 LED 2001 3 21 JPO1999 JPO 1999 10 26 Toyoda Gosei 10 26 JP2737053 Toyoda Gosei 2001 5 15 1999 12 24 Nichia Cree JP2737053 GaN LED JP2918139 dismiss 2001 5 24 Cree Lighting Nichia Nichia America GaN US5686738 Cree Cree LightingBoston University Cree NCSU ROHM 63
Nichia Nichia Toyoda Gosei 1998 7 Toyoda Gosei Nichia 2001 3 21 Toyoda Gosei JP2737053 Toyoda Gosei JP2737053 1990 12 1998 1 Toyoda Gosei GaN LED doublehetero structure non-doped light emitting layer Toyoda Gosei buffer layer AlN Toyoda Gosei Toyoda Gosei buffer layer GaN LED Akazaki Nichia 2001 4 64
2 2001 5 Nichia Nichia Cree Lighting Boston University Dr. Shuji Nakamura Nichia LED Nichia 2001 5 15 Nichia 1999 12 24 Nichia Cree GaN LED Nichia JP2918139 Cree GaN LED Nichia GaN LED Nichia Cree Nichia 2 Nichia LED 3 Nichia LED 4 Nichia Cree LED Nichia 3 2 3 4 2 Nichia 4 Cree Cree 2 Nichia JP2918139 LED 3 Nichia 2 4 Nichia Cree LED Nichia LED sapphire GaN n-type GaN p-type GaN sapphire n-type GaN 65
P-type contact layer(gan) P-type GaN(contact layer) p P-type cladding layer(ga1-za1zn) P-type Ga1-z A1 zn ( 0 < z < 1) (cladding layer) Mg-doped P-type GaN(contact layer) n-type (Ga1-xA1xN) Mg-doped P-type Ga0.8A1 0.2N n-type cladding layer(ga 1-yA1yN) n-type Ga1-yA1 yn ( 0 x<1, x < y, x < z ) (Zn+Si)doped n-type GaN n-type GaN Si-doped n-type GaN GaN n-type Ga1-xA1xN (0<y<1) (cladding layer) Si-doped n-type GaA1N Si-doped n-type Ga 0.8A1 0.2N Sapphire nsic 0 x<1,x<y,x<z 0<y<1 0<z<1 Nikkei Electronics Cree LED SiC n-type GaAlN p-type GaN SiC SiC Nichia sapphire GaN n-type GaN Cree Cree Sic sapphire GaN n-type GaN Nichia sapphire SiC sapphire n-type GaN Cree SiC SiC Boston University Cree 3 4 2001 5 24 Cree Lighting Nichia Nichia America 66
LED GaN buffer layer US5686738 Boston University 1997 11 license Cree Lighting Boston University Cree Lighting Cree Dr. Shuji Nakamura Cree Lighting Dr. Shuji Nakamura Nichia Nichia 2000 12 21 Cree Nichia; Cree Dr. Shuji Nakamura LED LD Dr. Shuji Nakamura Nichia Dr. Shuji Nakamura Nichia 100 Nichia Nihcia Dr. Shuji Nakamura Slave Nakamura LED Dr. Nakamura LED 67