Tel:03-5915020,Fax:03 5915020,Fax:03-59184705918470 E-mail:jan@itri.org.tw
(Literature Search/Industry Survey) (Preliminary Hazard Analysis, PHA) (Relative Ranking) (Plant Walk-through) (Checklist Analysis) (Safety Audit). (What-if Review/Brainstorming) (Failure Modes and Effects Analysis, FMEA) (Hazard and Operability Study, HazOp) (Fault Tree Analysis, FTA) (Event Tree Analysis, FTA)
1. (MSDS) 2. 3. 4. (PFD) 5. 6. 7. 8. (Commuity Map) 9. (Site Plot) 10. (Plant Layout)
a. A b. B c. C /
45 / /
45
/ / / 45
1 1
A 1. 2. 3. CO CO 2 4. 5. 6.
Q20% TQ Oxidation Nitration Halogenation Organmetallics Diazotization Hydrogenation / Thermal Decomposition Polymerization Sulphonation Condensation LEL UEL 100 P 10psig1.75atm. Abs. TA.I.T. P 20/ 2 P 500Hg D P 4
(0 (0-4) 4) 5. 5. (1 (1-3) 3) 4. 4. (1 (1-4) 4) 3. 3. (1 (1-3) 3) 2. 2. (1 (1-4) 4) 1. 1. (0 (0-5) 5)
( ) (0 (0-4) 4) 5. 5. (1 (1-3) 3) 4. 4. (1 (1-4) 4) 3. 3. (1 (1-3) 3) 2. 2. (1 (1-4) 4) 1. 1. (0 (0-4) 4)
() (0-4) 4) (0-4) (0-5)
( ) 5 (0 (0-5) 5) 4 3 (0 (0-4) 4) (0 (0-4) 4) 144 144 36 36 3 3 5. 5. (1 (1-3) 3) 2 2 4. 4. (1 (1-4) 4) 3 1 3. 3. (1 (1-3) 3) 2 2 2. 2. (1 (1-4) 4) 4 3 1. 1. (0 (0-5) 5) (0 (0-4) 4) AMT Producer AMT Producer SiH SiH 4 NF NF 3 CVD CVD
(More) (Less) (No) (Reverse) (Part of) (As Well As) / (Other Than)
(Chamber) / LOCAL SCRUBBER
(VMB VMBSiH4 SiH4 )
Chamber Pump Local Scrubber...
Gas Cabinet VMB/P Gas Box/Panel Tool (Chamber) Foreline (Pumping Line) Local Scrubber Central Scrubber Fan
P&ID
Central Scrubber Fume Exhaust Purge vent Scrubber VMB SiH4 Gas Cabinet PECVD Vacuum Local Scrubb
PI LI 250 psig PCV-1 N2 (200 psig) A.O. PI A.O. 90 T HCV-1 HCV-2 250 psig LI 1 T LAH N2
() PI LI 250 psig PCV-1 N2 (200 psig) A.O. PI A.O. 90 T HCV-1 HCV-2 250 psig LI 1 T LAH N2