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1 2013 8/9 11 CMEMS D 22 25

2 35 DRAM PRAM high-k : Hafnium precursors Zirconium precursors Silicate precursors Titanium precursors Strontium precursors Yttrium and Lanthanide precursors tell me more airproducts.com/highk 2013 Air Products and Chemicals, Inc.

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4 ణ Contents 2013ᒪ8/9ᴾ ㅢ ᵕ ሷ䶘 Ӂ Cover Story 11 Ḋᙝᱴ ಞ 䙖 φງᯏ㮺 㺢ᓋ ᐛрⲺ᥇ᡎ! "# # # ලႠ၂๖ഗ ڦ ሰ௬ଣጣଇ Ⴀ ڦ ă ڼ ᅃLjᅜ ᆶ ڦ ӱ၂๖ഗ ۼ ፕ ሞի ڹת ฉLj د ཥ၂๖ഗ ڦ ի ۼڹת ߑႠ ᅟໟ ڦ ă ڼ Lj ᆶߛ ݴ Ր୲၂๖ ഗ ۼ ᆩକԋఈ ۉ ୟንଚ ࠃ ۉ უई ۉ ઠ੦ ၂๖ഗฉ ڦ ၂๖ă ኄዖԋఈഗॲ ᆩኈ ק ओ ਗ਼ ᅝઠ ڦ Ljኄዖ ᅝरຍ ૧ ᆩକի ڹת ਏᆶ ߛڦ ኝ ఱߛ ڦ ༬Ⴀă କ ਸ ڦ क़ዜ Lj Ⴔᄲ ૧ᆩ၄ᆶ ڦ ए إ ยแLjᅺ Ljፕ ڦپ ලႠ ڦڹת ଙႠ ᄲ ଉথৎի ڦڹת ฉ ଙ༬Ⴀă - NickColaneri, Flexible Display Center, ArizonaStateUniversity, Phoenix, AZ ᢶᵥᮽㄖ Technical Articles 15 CMEMS ᢶᵥ φ䟽 䠅 CMOS 䙖ᐛ㢰 ӝะӄ MEMS Ⲻ仇 ಞԬ CMEMS Technology: Using bulk CMOS manufacturing process to produce frequency control devices based on MEMS ሞࡗ ڦ LjMEMS ਦ ݛ ӄᅙঢ় օ ᆯ ᆈ ਦ ݛ ӄ ฉӥ ڦ ୲੦ ăӵໜጣ CMEMS रຍ ڦ ᆩLjSilicon Labs ሞᅃ ୲੦ ฉइ ڥ ٷ ೦Ljཚࡗሞ ڦ ႑ IC ኮฉ থ ၿናഗLjઠइ ڥ ኝ ڦ ڇ ਦ ݛ ӄLjኄ ኈኟ ڦ MEMS+CMOS ၹཞย ăcmems रຍ ୲੦ ᄽ ټ ઠ၂ዸ ڦ ᆫ LjԈઔ Ă ߛႠ Ă گ Ԩ ڦ કቛႠă - Emmanuel Quevy, Silicon Laboratories 22 ሯ 2.5D ሷ㻻Ⲻ俌⅗䎻༦ᡆ First 2.5D acoustic imaging ޙ 2.5D ހ ጎ ᅭ ڦ ዐ DŽinterposersDžॽ ሞᅃଇ ཨ ࡀٷ ఇ Lj ᅜ ܔ ড ڦ گ Ԩ๑ ހ ጎ ߛ ࠀܠڟٳ Ⴀ ڦ Ⴔ൱ă Lj2.5D ዐ ణമ ت ᇀሞย ჺ ೦മ ॻڦ Ljኄᄺኟ Sonoscan ࠅ ඇ ਸ ג ำ रຍ ڦ ᇱᅺă ג ำ रຍ ᅜ ހܔ ጎ Ă ݥ ೦ Ⴀ ڦ ॠ Lj ଙ ኮक़ ڦ ޏ ଆ - Tom Adams, Sonoscan, Inc., Elk Grove Village, IL 25 䬬㓵Ƚ 䬬㓵Ƚ䬬䫥 䠇㓵ҁᱴᗤ㓺㓽 ᙝф ծᙝ䍞 ガ Research on the microstructure characteristics and the tensile properties of sliver wire, rare earth silver wire, silver palladium alloy wire ᆀ ਏᆶߛ ୲ڞۉ ᆫᅴჽቛႠLjᅺ ৎଇ ۉڟ ጱ ހ ጎ ᄽዘ ओटೠࠚᆀ ൽ پ ڦ Ⴀăਲ਼ஓ रण ষዺ ဦཟ ᇑჺ ए إ Ljศ ༪ᆀ ဣཥሞ၂ ፇኯ ٶ ൰ ऐႁႠዊ ڦ ăణമᅙኍ ܔ ০ =18 m ك ᆀ Ăဏ ᆀ ᆀ ቛਸ ଙႠዊჺ༪ăཪࡗඤ ت ( ײ 225ņ -275ņLj 30min) ॠ༪ᆀ ڦ ൰മࢫ ڦ ઙฦऐႁႠዊLj ൰ և ڦ ౡ ऐ ᄺԥ ဆ༪ஃă Lj ܔ և ݻ ᆀ ᇑဏ ᆀ ( ཁ La: 500ppm, Ag-La) ሞፇኯᇑ ઙฦऐႁ༬Ⴀฉᄺ Բড - 僅 〇ᢶ䳼ഘ, ളᇬ㓝儎 ᢶᵥԷѐ 2

5 ణ Contents 2013ᒪ8/9ᴾ ㅢ ᵕ 30 䬒 ぁ䠇ኔඇ 㕰䲭Ⲻ ガ Study on craterdefect in the copper BEOL ཟ ײ ᅙঢ় ݘ ᆌᆩᇀ ࡀٷ ఇण ۉ ୟ ڦ ײ ዐă ਏᆶ ႠߛĂዊ Ă ჽቛႠ ڪ ᆫ ۅ Lj ཟ ۉگڦ ፆ୲Lj ᅜᆶ ই گ RC ពăԨ ዷᄲ ถକཟ ײ ዐ ք ዷᄲඍ ጒඍ ڦ ᇱ Lj༪ஃକबዖᅺ ܔ ඍ ڦ ᆖၚLjժቴ ᅃ ዖ ਦඍ ڦ ᆶ Ӹ ă - 㫁, ᓭ ᱛ, ᆏᰛ䖿 ; ѣ㣥ള䱻䳼ᡆ 䐥 䙖 ( р ) ᴿ䲆 ޢ ਮ ᐛ㢰ଞ Process Watch 32 㬓ᇓ ะᶵ㕰䲭Ỷ LED substrate defectivity - Rebecca Howland ঐ༡,KLA-Tencor 䳼ഘ儎㓝ѱ ;Tom Piersonis,KLA-Tencor ޢ ਮ Candela Ӂѐ䜞儎㓝ӝ 㩛䬶㔅 4 㕌㘻䈓 Editorial 5 ӝѐ 䰱 Wafer News 8 䟽䇵ᣛ䚉 Interview 33 ネ New Products 36 ᒵ ᕋ Advertisement Index ᇀჯ ࡔ ฆრ ACTࡔ ૬ᇀ1998 Lj ߛ ሺ ڦ ዐࡔ ዐ ߛٷ रຍ ᄽ ޜ ခăACTࡔ ཚࡗ ڦ ᅃဣଚ ljԉઔሗኾ ฉ Ӳ Ă ᅱ ऄ ۯ lj ࡔࠅ तዐࡔഓᄽॐยକྊቛዐࡔ ڦ ă ACTࡔ ڦ Ԉઔๆዖरຍሗኾ ڦ በLjᅜत ዖ ᅱLj ޜ ခᇀӷ ڞ ሰĂ ӷ ڞ Ă ޚ / ᄞ Ă ۉ ጱย Ă ۉ ጱ ሰĂ ක੦ Ăघ / ۉ ጱĂ ཚ႑ĂLEDरຍĂพ / հ ڪ ଶᇘ ڦ ๆ ܠ ጆᄽ ኁă ACTࡔ ᅨ ߅๘হଶ रຍ Ӳมतቛ ڦ پ ă ACTࡔ ጺևሞၑߗLjሞԛ Ăฉ ศᒰยᆶ ஏ ت ă About ACT International Media Group ACT International, established 1998, serves a wide range of high technology sectors in the high-growth China market. Through its range of products -- including magazines and online publishing, conferences and events -- ACT delivers proven access to the China market for international marketing companies and local enterprises. ACT's portfolio includes ten technical magazine titles and related websites plus a $ # %&& &&& * 46; solar energy, electronic design, electronic manufacturing, contamination control, laser/photonics, optical communications, LED technology and RF/microwave. ACT International is also the sales representative for a number of world leading technical publishers and event organizers. <>" G * H J K# # K# N# P QQQP P P#V ᇀĖė ᆯჯ ࡔ ฆრACT InternationalዷӸ Ӳ ڦ ĖKK" <4 ># ėሗኾᅙঢ় ظ ᇈ10 ăėėइ ڥ ๘হኪ ಈሗኾĖSolid State Technologyė Ė< $ 4 V ė ڦ Ӳ Ⴙ Lj ᅜ० ዐ ᅳ ඹժ Ӳ ăඇ Ӳ6 DŽມሆ Dž ሗኾᆇ Ӳ9,000 Ljཞ ஏӲ ۉ ጱሗኾ ሞ ሗኾ በLj ዐࡔӷ ڞ ᄽጆ Ă ײ रຍ ײ ঢ় ࠃፌႎरຍĂ ጨრतฆᄽ ࠔ႑တă About Solid State Technology-Advanced Packaging China # # %& KK" <4 ># N # <>" X Q Q K K " # < $ 4 V ># P 4 # # # # KK" <4 ># # Q N $ # # readers. P KK" <4 ># # $ * Q # $ Y &&& V? * ># 3

6 Պኁ Editorial Publisher Adonis Mak 䮵 哜অ Editor in Chief Sunnie Zhao ѱ㕌 䎫䴠㣯 SiC ۉ୲ࠀ ጱ ႎ Editor Greta Lee 㕌䗇 ᶄ Managing Editor Katie Huang 㕌䗇 哺㧰 Editorial Director Simon Lian 㕌䗇ᙱⴇ 䘔㔛ӷ Publishing House ACT International 䳻 ള䱻 䇥 Unit B,13/F, Por Yen Building, No.478 Castle Peak Road, 俏⑥ғ嗏 䮵 䶈ኧ䚉478ਭ Cheung Sha Wan, Ⲵ⅙ཝড় Kowloon, Hong Kong 13ᾲBᇚ Tel: (852) Fax: (852) Beijing Ӣ Tel/Fax: Shanghai р Tel: Fax: Shenzhen ൩ Tel: Fax: ጲ 2011 ڹ ਸ๔Ljࠀ୲ ۉ ጱ ਸ๔ گ Lj2012 ই ڟٳ ޗ କ 20%ă SiC ഗॲ ڦ ၄ඐടട ݒ Lj գआଇዘཀă2012 Lj ڟ ඇ൰ ঢ়षփৠഘ ڪ ևᅺ ڦ ᆖၚLjSiC ഗॲ ඐධ ԍ 38% ڦ ሺ ăsic रຍ ԥ Փথ Lj၄ሞᅙঢ় ᅜፕ ࡂ ڦ پ ă Yole Développement ჺ৯Ԓߢ၂๖ ǖ ٷ և ۉݴ ᇸఇ Վഗ ሰฆᅙঢ়ॽ SiC ፕ ቛୟ ڦ ᅃ ၜ, ईኁፕ ՂႷၜణă Ljਏ ฉ क़ ܔ ᇀփཞ ڦ ᆌᆩሶփ ཞLjߵ ᆌᆩ ܔ ᇀ ԨĂႠ Ă ᆩႠ ݛڪ ௬ ڦ ᄲ൱ઠඓ ă ԲසLj 2012 ޚ ړ ཉ, ڍ ޚ Վഗ ၄ ܔ SiC ഗॲ ڦ ҺLj SiC ഗॲ ڦ ፌ ٷ ݯ ኁă SiC ഗॲDŽԈઔ ई ހ ጎ ݴڦ ૬ഗॲDž ሞ 2012 ٷ ሺ ڟٳ ሀ 7500 ᇮLj ಇ മଇ ڦ ᆈ ݧ ଲ Lj ڍ Ljઠጲᅪ ӷ ڞ ஆఛ DŽRohmDž ڦ ৪ኛLjኟሞᅃ ݴڦۅۅ ڦ ܮݻ ă ᆯᇀ ႙ ՎഗᆌᆩLjሞ LjSiC ट ᄽခ ፌऄሂ ڦ ă Lj Yole ႑ JFET MOSFET ഗॲॽტ ጕߋฉઠ, ڟ 2016 SiC ᄽခ ڦ ዷ ڞ ă Yole ࠚ Lj၄ሞඇ൰ᆶ 30 ࠅ ܠ ᅙॺ૬କጆ ڦ SiC ഗॲ ሰ Lj ᆶ ୲ࠀࡂڦ ഗॲ ฆᄺ ۼ ई ܠ ईณऄሂሞ SiC ڦ փཞ ă 2012 Lj أ କᆈ ݧ ଲ LjRohm, Microsemi,GeneSiCLjST ࠅڪ ቛᄺ Lj ᇨ๖ႎ ڦ ॽ ሞ ࢫब ă ᆶ 4 ࠅ - RaytheonLjAscatronLjIBS Fraunhofer IISB बࢭཞ ჇքLj ࠃ SiC ޜ پ ခईኁ ሀ ሰ ޜ ခăॺ૬ኄ ᄽခఇ๕ ኍ ܔ ઠ Fabless ࠅ US OFFICE Extension Media th Street San Francisco, CA Tel: President & Founder - Vince Ridley vridley@extensionmedia.com SolidState Technology & Advanced Packaging Chief Editor - Pete Singer psinger@extensionmedia.com Solid State Technology China, ISSN is published bi-monthly by ACT International. Unit B, 13/F, Por Yen Building, No.478 Castle Peak Road, Cheung Sha Wan, Kowloon, Hong Kong, under the license of Extension Media Inc., th Street, San Francisco, CA Copyright All rights reserved. This publication contains article run in Solid State Technology magazine. Solid State Technology is exclusively owned and published by Extension Media Inc. Extension Media Inc., is not responsible in any way for the editorial policy and expressly disclaims responsibility for, and makes no warranties, express or implied, with respect to the content of this publication or the performance or reliability of products described herein that are products described by independent vendors. ย ࠅ ڦ SiC ሰႴ൱LjᅜՍ ᅜლቴ༬ ڦ ፕअӵăሞ IDM ג ڦ ൧ Lj ፕ SiC ڼڦ ጨᇸă ሞჱዞLj እ၄ሞ ၂ ଶ ڦ ৪ኛኁLj ବ ۉ ऐᄺሞਸ SiC ఇ Lj ๗ ۉ ऐႎሏ ڦ SiC ၄ሞᅙঢ়ଚ නԨࡔ ăణമዐࡔ ᆶ ၄ SiC ഗॲ ሰฆLj ڍ Yole ݴ ဆ ණ Ljߵ ᅃၵ ڦٷ ჺ ཨጨ Lj ᆶႎ ڦ IDM ă ࡔ ڦ Global Power Device USCi ᄺᅙঢ় ඓ ๖ SiC ڦܮݻ ഽଜᅪ ă Yole ԒߢຫLj ݴ ૬ഗॲ ۉڟ ᇸఇ LjSiC ሞዘ໒ࠀ୲ ۉ ጱ ᄽăፌ Ljᆯ PowerexLjMicrosemiLjVincotech GeneSiC ਸ๔Ljᆩ Si SiC ٲ ದఇ Lj ࢫLj ବĂGPEĂஆఛ ڪ ฆ ၄କඇ SiC ఇ ฉ ăኄᅃ൵ ॽሞ ઠब ዷ ă ᄲ ၄ SiC ٷڦ ଉ ࠀ ᆌᆩLjႴᄲਸ ႎ ހڦ ጎ ਦ ݛ ӄLjཞ ᆶႹ ܠ ৡ Ⴔᄲ ਦLjԈઔ থĂ থ ة रຍĂౡঌག Ă ހ ଙ EMI ڪ ă SiC ᅜሞߛ ߛ ፕLj ຫ, ኄ ၄ᆶरຍ ඇ ਦ ڦ ă Yole ᇨ Lj ܔ एᇀ SiC ۉڦ ᇸఇ ڦ Ⴔ൱ሞ 2015 ࡗג 1 ᅢ ᇮLjሞ 2020 ॽ ڟٳ 8 ᅢ ᇮă ISSN: ᵢࡀ㕌䗇䜞 2013 ᵹᡶᴿθ㘱দᗻガⱦ Dec/2013 Jan

7 WaferNEWS ᄽႎ ዐࡔ ႎ ߛ ሰ ᇕ ࡔĖ ბėሗኾԒߢLjዐࡔჺ৯ටᇵሞण ۉ ୟ ڦ एԨ ڇ ᇮ ჺ৯ฉൽ ڥ ೦Lj କᅃዖ ӷ ޝ ቆ ڦ ႎ႙ए ۉ إ ጱഗॲLj ඟຕ ႀ ඹᅟĂტ ă ሴ ၜణ ٷڋ ڦ ბঞ ಶ ݧ ຫ ǖ Đ ࡔण ۉ ୟ ᄽዷᄲᅈ ᆅ ဌ ࡔ ຄ ڦ रຍLjሞ ۉ ጱ ႐ഗ ॲतण ᅝฉඍ ႐रຍăӷ ޝ ቆ ࠀ ڦ ჺ ॽᆶዺ ࡔቨ ण ۉ ୟ ڦ ႐रຍLj ሞ ย ᇑ ሰฉደॷइ ܠ ڥ ᇕ ăđ ߵ ಶ ݧ ঞ ถLj - ᄟ - ӷ ڞ ᆌ DŽMOSFETDž ణമण ۉ ୟዐ ڦ ዷ ഗॲLjࡗ ब ڦ ᅝ օLjඟ ڦ փ ڦ Ljሁઠሁথৎ ट Ljኄᄣ ೨ൎႴ൱ժ٣ ႎ ڦ ࠓ ᇱ ڦ Ljӷ ޝ ቆ ሞ MOSFET ዐ ഴᅃ ݘ ᆩᇀ ۉ ࠀگ ୟ ڦ ጎዃĊĊ ح ᆌ DŽTFETDž ă ڦ ᆫ ሞᇀ ओ Lj ࠓ ० ڇ Lj ႀ Lj ᅃ ኄᄣ ڦ ࠀڦ Բ ڥ ฉ ܠ MOSFET ă ᇶ FinFETଉ օ ᅃ ᇶ ኟ ݵݵ ᅜ ٲ 20 భ ݛڦײ ๕Lj 14 ई 16 భ Ề๕ ۉ DŽFinFETDžଉ গօăԈઔ IBM रຍንᆐዐ ۉ ڦ Ă ஆ ڤݛ DŽGLOBALFOUNDRIESDž ႓DŽSamsungDžLjদᇨ ሞ 2014 ᅜ 14 భ FinFET മ ቄट 20 భ ࢫ ڞ ݛڦײ ๕ ٳ ଉ ణՔ Ǘ ओ ۉ ራ భ FinFET ๘ پ Lj Ӳ ݛ ӄᅨ ᆩ ٲ ڦ रຍLjፁ९ ย ݛ ๕ᅙ ᇶ FinFET ๘ ࠌڦپ ཚ ăᆯ ९Ljᅃ ᇶ پ ᄽኁሞམ FinFET ଶᇘ ڦ क़ Ԩუ Lj ᆩ ٲ ࠓᅙ ᅃ ၂ბă ۉ ጱ تت ਖ਼ ๖LjFinFET ײ ᆶ ੦ ۉ ቄट ۉ Ljժ ߛ ۉ ጱᅎ ୲ۯ Ljᅺ ޗٷ ሏ໙ ཞ ই ࠀگ Lj၄ᅙ ඇ൰ ᇶ ႎ ڦ ঙ ă ऐLj ฆᄺ ႎ ڦ భ ݛٲ ײ ӄLj ཪࡗ 20 భ ᇶࢫ ڞ ײ रຍLj 14 ई 16 భ FinFET ݛ ӄ ڦ ଉ গօă ۉ ጱएᇀCadenceࠅ Encounter ຕጴरຍਸ 55భ ڦ ย ײ Cadence ย ဣཥࠅ ᇑฉ ۉ ጱᆶ ࠅ ࠌཞჇքLj ۉ ጱएᇀ Cadence Encounter ຕጴरຍ 55 భ ڦ ย ײ ă ၄ሞഐLj ۉ ጱ ሞ ᅙॺ૬ ڦ 55 భ ᅝ ฉ ၄କ RTL ڟ GDSII ڦ ኝ ײ Lj ᄺ Cadence ᇑฉ ፕ ڦ ࡕă ሞ ײ ዐ ๑ ᆩ ڦ Cadence ຕ ጴ ਏ Ԉ ઔ RTL CompilerĂEncounter Digital Implementation ဣ ཥĂConformal LECĂQRC ExtractionĂEncounter Timing ဣཥĂEncounter Power ဣཥ 4# 6 * ဣཥă أ କ Cadence ਏᅜ Lj ඇ ײ ብ၂ ۉ ጱ 55 భ Ă ئ ഗ IP IO ࠀ ༬ ă ዘ൪ዐ ۉ ጱᆅ IBM ፌ ण ۉ ୟरຍ ዘ൪ዐ ۉ ጱࠅ IBM ᆅ 0.18 ߛუ BCDDŽBiopolar-CMOS-DMOSDžरຍLjణമᅙঢ়ཨ ڟ ă BCD रຍ ᅃዖӝ ۉ ጱᇮॲ ք ᆶ ኝ ሞӷ ڞ ฉ ڦ रຍLjႎᆅ ڦ ኄၜरຍ د ཥ BCD रຍ ԲLj ই گ ࠀڦ Ă ԨĂ Lj ሰ ᅝ त ႠLj ᆩᇀ Ăഛ כ Ă ᄽĂᅅଐ ڪ ଶᇘ Ⴔ ڦ ă କ Lj रຍ ਦକ د ཥ ߛڦ ৡ ă മLjߛᇀ 125ņ Lj रຍ ၄ ሞ 150ņ ධ ኟ ሏ Lj ߛ ٷٷ କ ڦ ሏ Ⴀă Һ ڤ ႎᅃ پ SSDߛ ڑ Ⴀ ਦ ݛ ӄ Һ ڤ ࠀܠ NEO-SSD Lj ਬߛ PCI Express3.0 NVMe ഓᄽपᇑ ݯ Ⴀᆌᆩ ༀᆘಎDŽSSDDž ăһ ڤ ᅜ ए إ ਸ କᅃဣଚ ਦ ݛ ӄLjᇨ ᇀ 2013 ڼ 4 लਸ๔ ऋă NEO-SSD ໜႴย Ljኧ ܠ ዖཚრၹ LjਏԢ ዖ SSD ဣཥ ڪ प ࠀ LjԈઔ ײ ᄓኤĂย ᄓኤĂ Ⴀᄓኤᇑ ă 5

8 WaferNEWS ᄽႎ NEO-SSD ᆩҺ ڤ ڦ Tester-per-DUT ૬ॐࠓLj ඟਜ਼ ߵ Ԩว ڦ ༬ Ⴔ൱ Ԩᇑ ăһ ڤ ࡔጱࠅ Advantest America GTRI ጺ Colin Ritchie ๖LjNEO-SSD ඟҺ ڥ ڤ ᅜ୲ ਸ ᄽহ ڼ ᅃ༫ኈኟਏᆶჽቛႠĂᅜ ए ڦإ SSD ਦ ݛ ӄLj ਜ਼ ࠃ گ ԨĂߛ Ă ፕᄽ ᇑߛ რ ኝႠ ڪ ᅮă Lj ᆩ Tester-per-DUT ॐࠓ ڦ NEO-SSD ऐ փղᇑ ยԢࠌၛጨᇸLj ظ ሰ ೦Ⴀഓᄽ प ᇑዊଉLj փᆖၚ ዜ ई ݔ ă Synopsys քᆩᇀ ߌد ഗ ࠀگגڦ IPጱဣཥ ႎາ रࠅ DŽSynopsysDžჇք ࠃ DesignWare Sensor IP Subsystem ߌد ഗ IP ጱဣཥ, ᅃ ᆩᇀ ߌد ഗ ੦ ᆌᆩ ڦ ኝ ڦ Ăण ڦ ᆘॲ ॲ ਦ ݛ ӄăႎ ڦ IP ጱဣཥጆ ت ઠጲຕጴ ఇ ߌد ഗ ڦ ຕ କᆫ Lj ሜዷ ت ഗ څ ժ ࠕᅜ ߛ ࠀگג تں ߌد ഗຕ ă ඇ ದዃጱဣཥԈઔᅃ DesignWareARC EM4 32 ت ഗĂ ዖຕጴথ੨Ăఇ ڟ ຕጴຕ ገ ഗDŽADCDžĂᆘॲ ഗĂᅃ Ԉ କ ዖ DSP ࠀ I/O ॲൻ ײۯ Ⴞ ڦ ጹ ॲ ă DesignWare ߌد ഗ IP ጱဣཥ ย ටᇵ ࠃକᅃ ኝ ঢ়ࡗ ᇨ ᄓኤ ڦ ਦ ݛ ӄLj ፁକዮස ߌد ഗĂ ߌد ഗ ߌد ഗዐ ܠڪ ᄣ ᆌᆩ ڦ Ⴔ൱ă Đ ߌد ഗ ڇ ᇮ ڦ ጺଉᇨ ॽ 2012 گ ڦ ᇀ 100 ᅢ Ljሺ 2017 ڦ ৎ 300 ᅢ LjđSemico Research ڦ ဝरຍჺ৯ᇵ Tony Massimini ຫăĐໜጣሁઠሁ ڦܠ ӷ ࠃ ڞ ᆌฆॽ ߌد ഗথ੨ण ڟ ڦ SoC ኮዐLj ܔ ዮස Synopsys ڦ DesignWare ߌد ഗ IP ጱဣཥኄᄣ ߌدڦ ഗ IP ጱဣཥ ڦ ๑ᆩLjॽ ٷٷ ই گ ڦ ण ፕଉ Ԩă ౹ዞ ESiPፌ ڦٷ ဣཥप ހ ጎჺ৯ၜణ ESiPDŽߛ ࡂ ܠ ဣཥप ހ ጎण Džၜణ ፕअӵᅙჺ Ă ڦ ઠဣཥप ހ ጎ ਦ ݛ ӄăesip ၜణᆯ 9 ࡔ ࠌࠅڦ ऐࠓ ENIACDŽ౹ዞభ ᇵ Dž ഓᄽࠌཞ ጨă କཚࡗ ۯ ౹ዞ ፕࠈ ڤ ࡔፕ ۉ ጱए ںڦں Lj ࡔڤ ঞᇣ ჺ৯ևDŽBMBFDžፕ ࡔፌ ڦٷ ևप ጨ ݛ ኮᅃLj ܔ ኄ ԥଚ ࡔڤ አ ߛ र ڦ ၜణߴᇎକ ٷ ኧ ăሞᆈ ݧ ଲ ټڦ ଶ Ljઠጲ 9 ౹ዞࡔ ڦ 40 ፕअӵLjԈઔ ۉ ጱഓᄽ ჺ৯ऐ ࠓLj ᇑକ ፕჺ৯ă ဣཥप ހ ጎDŽSiPDž ኸLj ᆩփཞ ᅝ ሰLj փᅃ ڦ փཞ ႙ ԥժಇഴ ई ሞᅃ ހ ጎዐLj Ե ފ ၹཞ ፕă ESiP ၜణփ ਸ ॽ ण ሞ SiP ހ ጎዐत ሰ SiP ހ ጎ ڦ रຍLj ჺ৯ ଉ ײڦ Ⴞत ࠤቱ ݴ ဆ ᄓ ݛڦ ยԢă ၜణჺ ዚ ܠ ඟփཞ ႙ ԥण ڟ ओፌ ڦ SiP ހ ጎዐ ڦ ए إ रຍLjԲස ᆩ ፌႎ CMOS रຍ ڦ ਜ਼ ጆᆩ ت ഗĂ ट Ă - ገ ഗĂMEMS ߌد ഗևॲLjᅜत ႙ ۉ ඹഗ ߌ ᆌഗ ڪ ᇸፇॲăESiP ၜణ ॽࡕ ๑ ઠ ۉ ڦ ጱဣཥᆛᆶ ࠀܠ Ljཞ Վ ڥ Ă ă ESiP ၜణփ ਸ ॽଇ ᅜฉপ փཞ ڦ ण ሞᅃ ހ ጎዐ ڦ ඇႎ SiP ਦ ݛ ӄ ሰ ᅝLj ჺ ሰ SiP ڦ ႎ ଙăၜణ ፕअӵᅙঢ়ᆩ 20 ܠ ዖփཞ ڦ ᄓ כ ଈLjኤ କႎ ሰ ᅝ ڦ Ⴀ Ⴀă ሞჺ ৯ࡗ ײ ዐLj ፕअӵ ၄ణമ ᆩ ڦ ᄓ ݛ փ ᆩᇀ ઠ ڦ SiP ਦ ݛ ӄăኟᅺ ස Lj ၜణ ਸ ᆩᇀ SiP ڦ ႎ ᄓ ײ ႾĂ ದഗă ESiP ਦ ݛ ӄ ڦ ᆌᆩ ݔ Ԉઔ כۯۉ Ă ᄽยԢĂᅅଐยԢ ཚ႑ยԢ ڪ ă Altiumॽᇱ 3D PCB ڦ ECADᇑMCADण ڟ ႎߛ Altium ࠅ ᇑ Desktop EDA ࠅ Lj PCB ย ටᇵ ࠃኍ ܔ DassaultSolidWorksĂSiemens Solid Edge ᅜत Autodesk Inventor ڦ ഽ ECAD ᇑ MCAD ण Ljሺ କႎࠀ ڦ Desktop EDA Solidworks Modeler ᇑ IDF Modelers ᆌ ᆩణമᅙঢ় ᅜཚࡗ Altium Designer इൽ ๑ᆩă ኍ ܔ Altium Designer ࠃ ڦ ྊቛᆌᆩᅜत ದ༫ ॲ ECAD ᇑ MCAD ย ଶᇘॐഐକᅃፗ ăణքᆌᆩ 6

9 WaferNEWS ᄽႎ ײ Ⴞኮक़ ၄ ኝཞօࠀ Lj ୲ ߛ ٷٷ ăᇑ ० ںڇ أ ዘࠓ MCAD ፇॲ ڦ Ⴔ൱ ԲLjස ᅜሞ MCAD ဣཥዐ থ ၄ Altium Designer ༬ ࠀ ॺڦ ఇLjኄ रຍฉ ڦ ᅃ ݧٷ ሂă ཚࡗሞሏ ᇀཞᅃ PC ฉ ڦ Altium Designer Solidwork ײ Ⴞኮक़ থ ຕ د Ljย ටᇵ Ⴔ๑ᆩዐक़ ॲઠཞօย Վ Ljᅜत ײ Վ ସăኄዖ ݛ ๕ କຕ ᅳ বLjᅺ ব କ क़Ljժ ሞ SolidWorks ዐ ࠃ ਏ ڦ PCB ย ఇ႙ă Desktop EDA ኍ ܔ Altium Designer ࠃ ڦ ڦ IDF Modeler ᆌᆩ ײ ႾሎႹᇱ 3D PCB ย ဣཥᆩ ᅜᄽহՔ ጚ ڦ IDF ॲ ๕ ݿ ڞ ڞ ኝ ڦ 3D PCB ఇ႙ă ణՔ MCAD ย ਏದ༫ ࠃ ڦ Desktop EDA ॲLj ย ܓ ཞ ᆛᆶକ ኝ ڦ ཞօࠀ ᅜत PCB ཟ ย ᇮ Lj ݴ ব କ क़ă ᇑ DassaultSolidWorksĂAutodesk Inventor ᅜत Siemens Solid Edge ದ༫ ॲ ڦ ᄺᅙ௬๘ă ႑တ ဇҾ ႓ӷ ࠃ ڞ ᆌ Ս૧ ᆯฉ ण ۉ ୟ ᄽၹ ዷӸLjฉ ࠃᆌ ᆶ ࠅ Ă ဇ ᆶ ࠅ Ӹ ڦ Đ ႓DŽዐࡔDžӷ ڞ ᆶ ࠅ ยԢԢ Ԣॲ ჺ༪ đৎනሞฉ ቧॿण ߗۉ ฆခ৶ ی ૧ቻਸă ჺ༪ ජĐ႑တ ཚ Ս૧ đ ڦ ዷ ቛਸ ༪LjဇҾߛႎ ੨ ĂဇҾ Ă ဇ ॠॠᅧਆ ڪ አ և Ljᅜत ႓DŽዐࡔDžӷ ڞ ᆶ ࠅ त 20 ܠ ದ༫ࠃᆌฆ پ ဝକ ăฉ ۉ ጱฆခᆶ ࠅ Ăฉ ۉݛ ጱኧ Ă ઑ ႑တĂ ࡔ BIZENI ฉ ᆷ ॲĂฉ ဣཥ ڪ ဣཥਸ ण ฆ B2B ۉ ጱฆခ ፕ ၹӸ ݛ ሞ ᅱ ฉ ݴ ፔକጆ ᄇ Ljৎ 80 ण ۉ ୟ ᄽহ پ ဝକ ă ฉ ࠃᆌ ण ፕ ᅃ ᆛᆶๆ ӷ ڞ Ԣॲԍ ঢ়ᄓ ࠃڦ ᆌ ण Ljణമኟሞॺย ሞඇࡔ ڼڦ ৵ ӷ ڞ Ԣॲԍ Lj ॽ ဇҾ ႓ӷ ڞ ၜణದ༫ăჺ༪ ฉLj ࠃᆌ ण ᄽခጺ Ⴈ ӷ ڞ Ԣॲ ༬ ۅ Lj ݴ ၛକĐ đ ዐࡔण ۉ ୟ ᄽದ༫ ࠀ ڦ ঢ়ᄓLjཞ କ ဇҾ ႓ӷ ڞ ၜణ ࠃ प ஏ ࠃڦ ᆌ ႑တ ਦ ݛ ӄă Đ ڼ ๆ ল৫ ჺ༪ ቛ๖ đनॽਉӹ क़ ǖ ሆ 11 න -12 න ۅں ǖฉ ฆခ৶ ی Lj ڢٷ 3000 ߛܠ र ሰᇑჺ ᄽ ࠌڦ ཞ ۅ ኮᅃ փਸল৫, ஃ ᅅᄱLj ण ۉ ୟ ሰĂLED ቷ Ă ᅂ ӱ၂๖ഗdžfpdDžLjኄၵđๆ đࡀ ዐԢ ጀ ڦ Ⴀ ቛ ᄽዐLjᇑኮದ༫ ڦ ක੦ Ăল৫ रຍत ยแยԢLjᆮ Ԣ ዘ ժᆅ ฆऐă 2013 ჯ ࡔ ฆრतഌ ڦ Ėল৫ Cleanrooms ChinaėሗኾዷӸĐল৫ ჺ༪ ቛ๖ đ ڼڦ ๆ ཀྵLjԨ ଇཀ ڦ ᅱॽሞ ൭৵ሆᇀฉ ฆခ৶ ی ਉӸăፕ ল৫ ᄽ ፌዘᄲ ڦ ᅱኮᅃLjኄ ᅱᅙ ᄽ քፌႎ रຍ႑တ ڦ ዘᄲ Lj ᄽට๗କ ᆩӄ૩Ă ࠏཚĂ ݴ ၛ႑တĂ ༪ ዖയሞฆऐ ڦ వ ڥ ऐᇹă Đ ظ ႎᇑ ቛđ Ljᅃ Đল৫ ჺ༪ ቛ๖ đ ڦ ጕ൱ ሞLj ੩ዷ Ӹ ႎᅪ ᅱ ڦ ጸኼLjঢ় ݘ ኙ კᅪ९ ႐ Lj ॽᅜ ٷ ଋ ۅ ቛ၄ă ᅱ أ ጣዘ ጀӷ ۉ ڞ ጱत ᅅᄱ ᄽዐ ڦ ল৫रຍLj ॽጆ ኍ ܔ Ԩኙ ۉ ଙሞ ۉ ጱඇဣଚԈ ዐ ڦ ᆌᆩፔศ ڦ ༪Ljภत ڦ සโ ଉLjߛႠ ဣཥሞ ۉ ጱ ڦݝ ᆌᆩLjԨኙ ۉ ଙ ۉ ݞڦ ऐ ዘᄲ༬ႠLj ፌႎՔጚዐ ᇀ ۉ ጱԈጎ ଙ ڦ ࡀ LjԨኙ ۉ ଙሞ ۉ ጱԈጎ ଙ ڦ ዷᄲዖ ዐ ڦ ਏ ᆌᆩLj ޙ GxP ᄲ൱ ڦ / ᄓၒ โ ݴ ք ᄓ Ⴤ ဣཥLj ໓ᇸ ڦ ল৫ ᇘ ਦ ݛ ӄLj୴ ቷ ሞল৫ ڦ ᆌᆩ ଭ කল৫ Lj ڪڪ ă أ କᅜ ٷ ዷ ፁփཞᆌᆩ ௬ ڦ དዚႴ൱ Lj Ėল৫ ėሗኾ ڦ ጆ ᇵ ᇵᄺॽኝ ଋ Ljᅜጆ ਜ਼ཐ ڦ ๕ ٴ ᅑLjᇑདዚඤ൧ ۯ ăჺ༪ ॽ ᆶമቒႠ ڦ ᅱ ༪ஃLjᆯጆ ႎ ۅ ă ᄥᄽ ጆᄽට๗ ᇑኄ ƽ ᅱ በ ǖ 7

10 Interview ݡ Ԓ ڢ ၂๖ೡ߃ǖઢԐ ᆑೡॽ پ ի LED ᄽ ሞ փ پ ӆࡍLj ᆑట೦ଛ ই گ ย ቛLjᅺ ߛܔ ዊଉઢԐ Ԣ ڦ ᆩ ᄓLj ᇱ๔ยԢ ଙ ڦ Ⴔ൱ᇨ ॽ Ⴤሺ ሰฆ ڦ ಈă၄ሞLjઢԐ ၂๖ ăփ ස LjઢԐ ᆌᆩ ೡ ଙ ڦ ๘Ljඟի ௬ LED ᄽ ཌ Lj ଣ ڦ ኄዖᖿᖾໟೡ൧ ᆶ ڟڥ ࡕ iphone 5 ཀྵLjᅜतႎ ਦă ᆩ ฅ ೦ଛ ڦ ႎ႙ ๘ پ iwatchdž ၂๖ೡ ଙ ट ߀ںٷ ᆩ د ჾ ࡕ iwatch ॽ ᆩ ઢ Ԑ ᄓLjԍ ݯ ኁ ڦ ཨጨă ፔ OGS ة ੦߃ӱDž Ljᆌᆩ GT ASF ઢԐ ԍ ߃ ة ደօક ٷ ă ჺࠅ ೡ ଙ ړ ݯ ฉ๑ᆩ YoleDeveloppement ݴ ဆ ڦ ի ईኁߛ ݴ ጱᆑటԍ ߃ ү ਖ਼ ~ DŽEric VireyDž ଙ ࠃߛ ఱᆩĂ ݞ ฅ پ ڦ ཪ Lj ᆶ ڦ ऐ ሰฆ ۼ ሞ ୯๑ᆩ GT ࠅ ڦ ASF 115 ઢ Ԑ ăሞ౮ ᆘ ฉLjASF ઢԐ ڦ ऐ ઢԐ ઠ پ ի ă ຫ ǖ Đ ႑և Lj Ⴔᄲፌߛ ڪ प ଙ ڦ ႁႠ փ ܠ Բ ܠٷ ຕ ბߒ ୩ࡂի ݻ ฆ ሞ ਸ๔ Lj ๑ᆩઢ ߛዊଉ ٷ ௬ओઢԐ ڦڹת ߛ 3 Ԡăཞ LjGT ASF ઢԐ Ԑ ᆑట ߛڦ ऐăđ ăasf115 एᇀ 40 ܠ ઠ୭ঢ়ॠᄓ ڦ ਏᆶ ฅႠ Lj ᅜ ڸ ᇟยԢሞኟ ፕ ᅃ ඇ൰ ᄞ ĂLED ઢԐ रຍLjण କߛ ጲ ๑ᆩ ಸ ڟ ෪ጱĂ ᅜत ᆘ ۉ ጱ ᄽ ࠃ ظ ႎ ยԢ ਦ ݛ ӄ ޅگڦ ۯ ၃ Lj ਏᆶጝ ă ܠڦ ᇮ रຍࠅ Ljट༬ रᆶ ሁ ଙዊଉ ߛڦ ઢԐ Lj ༬ GT ࠅ ཚ რ և ዷ ඪ Jeff ࠅ DŽGT Advanced Technologies Inc.Dž ኙԈઔ گ ඍ ౪ ሌ ڦ ăኄዖ Nestel-Patt ถ ຫLjGT ASF ઢ Ԑ മᅃဣଚዘ ۅ ቛઢԐ ଙ ۯ ፕ ઢԐ گ Ԩ ߛዊଉઢԐ ᆩ ASF ăasf ઢԐ ኮࢫLjৎනᆼ ASF 115 ઢԐ ڦ ՂԢ ଙă૧ᆩ ASF115 ဣཥ ڦ ཪ Ă ഘಟ ڇڦ ઢԐ ยԢLjጆ ᆩᇀઢԐ ၂๖ೡ ڦ ઢԐ ଙሞ گ ඤ༱ Ă گ ᆌ ڦ ஃ Ԩ ຕ रຍࠀ ۼ ट ଙ ሰă ዐ Ljᆫዊ ڦ ઢԐ ଙ ਜ਼ ᅎ ۯ ยԢ၂๖ೡԍ ߃ăASF Ⴤ ټ ઠߛཨጨ Ԓ୲ă ڦ ዊଉ Ă ଉߛĂ ዘ ૧ ᆩ ASF115 ణ മ 85kgĂ100kg 115kg ڦ ă Lj ই گ ઢԐ ሰ ԨLj ߛཨ ጨ Ԓ୲ă ໜጣփ ቛ ڦ LED ᄽනࢫ ܔ Jeff ๖Lj ݯ ڦ ঙ Lj ড ٷ ০ ԀႴ൱ ڦ ሺ Ljਜ਼ ઢԐ ڦ Ԩ ڦ ඓԲի ᄲߛă ڍ Lj ࠕॽ၄ᆶยԢ पᅜ ٷ ৎ ઠLjໜጣ Ⴔ൱ ߛ ڦ Lj ᅝर ڦ Lj ԍ ཨጨ ຍ ڦ փ օLjgt ࠅ ස ઢԐ ই گ ሏᆐ Ԩă ଙ ڦ Ԩ Բࡗ ᅙঢ় ٷٷ ই گ Lj ႑ ࢫ ᆶ ᅃօ ظڦ ႎ ೦ă 8 GT ASF ઢԐ ԍ ߃ ة ೡ ଙ ܔ ᇀዐߛ ڦ ऐᆩ ઠຫLjࠔச๑ ᆯᇀ၄ሞ ऐᆑట ዊ ի ฎߛLj ڍ ఱᆩLj ᆶࢫჄ ย Ljሰ ڗߛ ऐም Ljᆑట Ԣ ཨ ڦ ᆆᆭăGT ࠅ ႑ઢԐ ၄ࠨ ໟଛ ڦ ൧ ăჺ ଙ ݘ ڦ ๑ᆩ ܔ ऐ ሰฆĂ ৯ Lj ऐ၂๖ೡሞ ڼ ᅃ ಈ ᆶኁतዕ ᆩ ٷۼ ᆶᅮ ت ăփ ᆩ क़ గ ۅ ೦ଛ ୲߁ڦ ڍ ঢ় ఱᆩLj ዘᄲ ڦ ᇺઠ Lj ሀ 12%ă ᅎ ۯ ยԢ၂๖ೡ ᅜই گ ጺ ԨLj ಈ ኵă ᆩઢԐ ଙ ڦ ᅎ ۯ ยԢ ཨ

11 Interview 9

12 Interview ݡ Ԓ ڢ ڥ ᄞ ᇑᆈ૧ण ၻ ظޚ ႎ ڥ ᄞ ᇑᆈ૧ण एᇀ Apollo ኄᄣยԢ ڦ ᇀ 8 ሆ 9 නሞᆈ૧ጺև ԛ रຍᆩ ڟ ႎ႙ ᄞ ۉ ԍ ਉ ፕധሀᅏ๕LjჇ ڦ ჺ Lj ᅃօ ߛ քॽॺ૬ ჺ৯ዐ႐Ljᅜ ዊଉLjই گ ڦ Ԩă ࠌཞ ޚ ᄽ ڦ र ظ ڥ ᄞ ဝरຍ ႎतට ಢᇣăߵ ፕၹ ר ձ๗ຫLj ڥ ᅃ ᅱLj ڥ ᄞ ॽ ᆈ૧ ಈ ڦ ᆇ ऐഓᄽLj ᅃ ޚ ଙᇑरຍࡔ ዘ ۅ ᄓ ထ ᆶኄ ऐ ࠕᇑ๘ ࠃᅃ༫ፌ ڦ ᄞ হฉፌ ޚ ڦٷ ሰฆ ۉ ჺ৯ဣཥLjມ ݛ ፕLjኄ ฉᄺ ቛ๖ ॽ ፕਸቛ ᄞ ۉ ᆫଆरຍ ڦ ऐ ă रຍ ڦ ჺ৯ਸ ă ሞ PV ᆇ ݛ ௬Lj ڥ ᄞ ᇑ ᅝኧ ጺ Brian Lau ๖ ǖ Đ ڥ ᄞ ݥ ಢᄢLj ߛჺ৯ Lj ޚ ۯ ᄽ ໙ ࢫ ഐ ኮ ႯLj ڍ PV1200Lj ڦ रຍ օă Eclipse ڟ ၄ ሞ ፌ ႎ ڦ ApolloLj ኄ ब ߛ႗ ࠕᇑᆈ૧ण ၻ ፕă ڥ ݥ Apollo ဦቆ ᆇ ยԢ ᅃ پ փ ר ں ႎLj ፁ ޚ ᄽহփ ዘ ሞ ڦ ቛLjժॽ Ⴤ ٷ ཨ ᅃ ۉ ሰ ยԢăApollo ቛ ڦ Ⴔ൱ă ڦ ᄲӝჺ ᆌ ಢᇣዐࡔ ă ႑ 2014 ڦ ጲ ۯ रຍ๑ ๕ᆇ DŽPrint- ᆩ ڦ ዐ႐ገ ڟ ዐࡔăമփ ॺ૬କ ڥ ॽ ᆓઠ Lj Lj ॽ Ⴤ on-printDž ስႠ พट ᅝ ڦ ٳ ዝरຍዐ႐Lj ܠ և ڦ ჺ ই گ ԨĂᆫ ۉ ୲ ڦ ਦ ݛ ڟ ፌᆫLjժ ਜ਼ ࠃକߛዘ Ⴀत ᄓ ۼ ገ ڟ ዝఫՉ ፔLj ڍ ዷ ӄă ᇑᆈ૧ ޚ ଙᇑरຍዘ ۅ ߛႠ ڦ ᆇ ᄓLj ᆶኄၵ ۼ ሞ ᄲ ڦ रຍ ݔ ă ᆈ૧ ڦ ࡔ ᄓ ڦ ჺ ፕॽ ᆶ૧ᇀ ᄽଶ ڦ ں ௬ओLj ڇ ದዃ ፕ ᅜ ᄽ ኝ ڦ ঙ ჺ ၄ኄᅃဣଚణՔă ᇑᆈ૧ኄᄣ ڦ ඇ ዐ ăapollo ࠃ ڦ Ġ10 Ljኄ ዝरຍዐ႐փ ፔ ڦڟ ă ൰ଶ ޚ ഓᄽ ፕLj ศߌጲ ăđ 2 Cpk Ⴀ Lj ᅜ ڟ ٳ ཚࡗᇑᆈ૧ ڦ ፕLj ࠕइ ڼڥ ᅃ ᆈ૧ण ௭ ๖ ǖ 1450PM/ Lj ፁ କ ڥ ᄞ ܔ ڦ ጨଙLj ࠕ ڦ Lj ںؤ ኪ ڢ ٷ ਜ਼ ڦ ă ਜ਼ Ăᆌᆩ ᆶ ᄣ ڦ Ⴔ൱Lj ݒ ઍ Đ ڥ ᄞ ᆈ૧ ڦ ፕअ ӵăມ ݛ ሞ ޚ ଙᇑरຍࡔ ዘ ۅ ᆈ૧ण ဝरຍ ग़ࡔ ዘ ۅ ڟ ڥ ևLjᄺԈઔ ዝ ڦ रຍዐ ᄓ ڦ ፕᆶ૧ᇀ ኝ ޚ ᄽ ᄓ ዷඪໄ ک ᇮձ๗ ถLj ڥ ᆈ ႐Lj ࠕӝႴ൱ ں ገ ჺ৯ ڦ ቛă ۼ ዂ ᇀ ۯ ጽ ૧ሞࡗ ब ᅃ ᆶ ݥ ൎ ڦ ჺ ࡕăኄ ଇ ዐ႐ ց ڦ ă Ljժ ႑ኻᆶփ रຍ ظ ፕLj ፕ ۼ एᇀᅃၵၜణă ૬ ໄձ๗ፌࢫഽ ຫLj၄ሞᆈ૧ሞ ႎĂ ܔٷ र ට ڦ ཨ ჺ ዐ႐ኮࢫLjߴ ມ ݛ ፕ ࠃ ᅃ ገ႙ प ٷڦ ਦ Lj௭ጺ ၄ኄᅃణՔă ޚ ᄽनॽᆓઠ Lj କ ڦݘ Lj ᅜ ݥ ᆶ Đᅃ າ Ljଇ đ ڦ ኸ ڞ າ ă ኄ ڦ रຍ ظ ႎ ፕ ࠕ ڦ Ljᆶဣཥ ڦ ჺ ፕ ට ಢ Đᅃ າ đ ခ ڦ ፕፕ ޅ Lj ڦ ዘႎᛒഐăđ ᄢă கฉ ᄲ ڦ ᅃၵჺ ၜణLj Đଇ đԉઔǖ ޚ ሰ ᅃ Lj ᆈ૧ ޚ ଙᇑरຍࡔ ዘ ۅ Բස एᇀဦቆ ۉ ጱႎ႙ᆇ र ଷ ᅃ Վ ۉ በ ଉࠃᆌăኄᄣ ᄓ ኼሞ ዐࡔ ޚ ᄽ ڦ ኝ ჺ ຍ ڦ ჺ Ljࠚ ᆶႎ ڦ ჺ ᆈ૧ ޚ ڦكڇ ሰฆLj ቛ ᅃ Lj ٶ ሰरຍჺ Ă ᅝᆫ ႎ ࡕ ၄ă ᇸ ࠃ ڦ ฆăኄ ܔ ᇀణമጽ ޚ گ Lj༬ ዐࡔ ڦ ਸྊ ݥ ዘᄲă ଙਸ ڦ ኝ ă ᆈ૧ ࡔڦ ໄձ๗ຫLj ॽ Ⴤ ڦ Ⴈ ዘ ۅ ᄓ ᆅ ڥ ᄞ ፌ ڦ மߛ ۉ ᄜ ܠ ࡂߛ ᄞ ᆈ૧ᅃ ڦ ጸኼ ᄲඟ ۉޚ Lj୴ Apollo ჺ৯ยԢLjມ ݛ ኍ ޚ ܔ ڦ ۉ ჺ Ljኄၵ ۼ ᆩ ڟ ᆇ र ۉ ጽ ഥ ă2017 ᆈ૧ᄲ ᄽ ႐रຍ ᆌᆩरຍቛਸࡔ ፕჺ ຍăᆈ૧ ڥ रຍჺ৯ዐ႐ ڦ ॺ૬ 15GW ۉޚ ڦ በLjኈኟ ᅃ ৯Ljॽዺᇀ ഽ ᄓ ࡔڦ ፕĂට ૬Ljᄺ ထ ӝፌ ڦ रຍLj ޚ ሰฆ ᇸ ሰฆገ႙ă 10

13 COVER STORY ၂ ๖ र ຍ ހ ௬ࠤ ලႠ၂๖ഗ ሰǖ໒ଙԋ ڹת ฉ ڦ ලႠߛ ݴ Ր၂๖ഗ ॽ ڦ ૧ᆩሞ၄ᆶԋఈ ሰยแฉჺ ڦ ଙ रຍă ࡗๆ ڦ ܠ ቛLjᇨ ሞ ڦ ၵ ࢪᄽহॽ ڹתڦ रຍă ঢ় ԋ Lj ՂႷਸ ႎ ڦ ᅝ ݛ ઠ ܔ ت Lj ၵ၂๖ഗ ሞ ბฉኻਏᆶᆶ ڦ ලඩႠă ڟ ణ ཞᄣᄺႴᄲ ኝగၵ ᅝօየᅜՆ௨ ࡗג ԋ ଙ മ ኹLj ٷ և ڦݴ ჺ ౮ ᅃ ۼ णዐሞᇑලႠ၂๖௬ӱ ڦ ट ăങ ኹLjᅙঢ়ਸ କଇዖփཞ ݛڦ ઠ ڦ ฉLj ܔ ᇀኄዖ၂๖ഗ ဣཥዐ ڦ ت ኄၵ ԋ LjኄଇኁሞԨዊฉ ۼ ॽ ԋ ලႠ၂๖ഗ ڦ ฆᄽ ă քኄၵ ࠅߢ ܔ ࠅڦ रຍဦবධԍ फ़ఐLj ڍ ኄ କ ૧ᆩ د ཥԋఈ ڦ ઠ ࠓ ፇॲሞ ბฉ ڦ ٤ Ⴀ ݛ ௬ ጀฯณăփࡗLj ቕ ߑڟ Ⴀ ڦ ሜ ӱฉLj ࢫሞԋఈ ፕ ලႠ၂๖ഗ ॽ ڐڦ ཚ ኈኟලႠ ۉ ጱ ࢫምॽ ԋ ሜ ӱฉ ݴ ăᄺᆶට ܠ ༪ஃ ڢ ୟฉ ڦ ᅃ ዘᄲ ײ Ԙă ܠ փლ ڦ ᅝ ݛ LjසĐ ਝ - ਝđDŽroll-to-rollDž๕ ලႠ၂๖ഗ ڦ ሰ௬ଣጣଇ Ⴀ ڦ ă ڼ ᅃLj ԋ ݛ ڦڹת Lj ڍ ړ ԋ ڹת ᅜኄ ᅜ ᆶ ڦ ӱ၂๖ഗ ۼ ፕሞի ڹת ฉLj د ཥ၂๖ ዖ ݛ ๕ Ljሞ ᆩ د ཥ קڦ ओ ਗ਼ ᅝ ഗ ڦ ի ۼڹת ߑႠ ᅟໟ ڦ Lj ړ മᅙঢ়ਸ କፕ क़ ڦ ዘ DŽlayer-to-layer registrationDžॽ ܠڦپ ዖලႠ၂๖ഗă ڼ Lj ᆶߛ ݴ Ր୲၂๖ഗ ۼ ᅃ ჹਮ ڦ ă ᆩକԋఈ ۉ ୟንଚ ࠃ ۉ უई ۉ ઠ੦ ၂๖ഗฉ ๆ ܠ മLj ન ݧڦ ૧ ۉ ጱࠅ ୲ ๑ᆩକᅃዖ ڦ ၂๖ăኄዖԋఈഗॲ ᆩኈ ק ओ ਗ਼ ঢ় ԋ ݛ ڦ Lj ݛ ሞᅃ ߑႠሜ ᅝઠ ڦ Ljኄዖ ᅝरຍ ૧ᆩକի ת ӱฉᆩᅃዖමᅂ ઠ ᅃ ԋ ă ٷ և ݴ ჺ ڹ ਏᆶ ߛڦ ኝ ఱߛ ڦ ༬Ⴀă କ ਸ ڦ ܓ ሞ ၄ रຍ ۼ ๑ᆩକ ḅჱӄ ଙLjኄ ᅺ क़ዜ Lj Ⴔᄲ ૧ᆩ၄ᆶ ڦ ए إ ยแLjᅺ Ljፕ ḅჱӄԋ ᅜፔ ڥ ԋdžཚ ኻᆶबๆ Dž Ljኄ ڦپ ලႠ ڦڹת ଙႠ ᄲ ଉথৎի ڦڹת ฉ ᄣ ሞ ბႠ ฉ ᅜᇑሜ ଙLjनཚ ၂๖ഗի ת ଙ༬Ⴀă ሞࡗ ڦ ๆ ዐLj ჺ৯ ڦ ዷᄲ ڹתپ ԋ ԋ ăፌৎLj ࠅ त ի ሰฆᅙঢ়ਸ କ ᆩᇀ၂๖ഗ ڦ ලႠի ଙ ڹת ăሞࡗ ڦ ᅃ ઠLj Ⴙ ۼ ࠅܠ ᅙঢ়ਏᆶ ኄዖᇑ ԋ ڦ ලႠի ਝ ڦ Lj ڍ ኄၜरຍ၄ ت ᇀᅃ ჺ ăሞৎ ܠڦڦ ஹᅟቛબ ฉLjසሞනԨ ࡔڦ ௬၂๖ഗDŽFPDDžቛईሞ ࡔઙຯ ຯ ڦ ۉݯ ጱ DŽCEDžቛฉLj ቛ๖ ڦ ፌ ڦ ᇱ႙ ۼ एᇀ NickColaneri, Flexible Display Center, ArizonaStateUniversity, Phoenix, AZ 1. ቕ ᆶPEN ڦڹת 370mmġ470mmሜ ӱLjໜࢫ ፕ12 320ġ240 ڦ ԋ ఈ ۉ ୟንଚLjᆶᇸӷ ڞ ഗॲ IGZO ࠓă 11

14 COVER STORY ၂ ๖ र ຍ ހ ௬ࠤ ጒăᅺ Lj କᆌ ܔ ኄᅃ Lj ՂႷ ႐ ں ย ࢫڦ Ⴤ ت ᅝઠਖ਼ ޜ ኄᅃᆌ ă ሞฉ ኄၵ Lj ڍ ᅃၵჺ ܓ ᅜ Ն௨ ኄၵ Ljժᅙঢ় ᆩኄዖ ᅝઠ ሰ ସ ටᆇၡศਗ਼ ڦ ᇱ႙ ăբසLje-ink holdings ࠅ ᅙঢ় ሞᅃཉᆅ ڞ ฉLj ᆩኄዖ ᅝ ፕ ݴࠀ Ր୲ሀ 150dpi ڦ 9 ᆈ ۉ ᆤ၂๖ഗ ڦ ᇱ႙ ă ۉ ᆤԋ ਏᆶፁࠕ ߑڦ Ⴀઠਖ਼ ޜ ᆯԝӱ ڹת ᆅഐ ڦ ਝ ၄ၡLj ኝ ၂๖ ࠓ ᅜ ႑ᆩਸ਼ᅃᄣ ă ࡔჱ૧ ఫዝ૬ ٷ ბDŽASUDž ڦ ලႠ၂๖ഗዐ႐ 2. ሞԋఈ ۉ ୟ ፕ ࢫ Lj ᄓยԢॽPENԋ ሜ ฉ Ԋ Lj ยԢ ڦ แ ሞ0.1~0.2Nኮक़ă DŽFDCDžᅙঢ়ਸ ڼ ዖලႠ ݛ ڦڹת Lj ᆩᅃዖ ײ ቕ वॽ ቕ ߑڟ Ⴀሜ ฉ ᅃ ዖ ڹת ăኟසฉ௬ ༪ஃ ڦ ᅝरຍLj ॽኄዖ ڹת ᆩ د ཥ ڦ ԋఈ ሰยԢઠ Lj ࢫ๑ ᆩᅃዖ० ڦڇ ბ ݛ ၄ ڦ Ԋ ăሞԨ ڦ ᅜ և ݴ Ljॽ ܔ ኄዖ ᅝ ڦ ᅃၵဦব ຫ ă ኄዖ ڹת ᅝᅙঢ়ሏᆩ ڟ ԈઔփႮߒյĂ ḅჱ Ӄ ג ԋի ڪ ዖලႠ ଙ ڦ ዐă Ljፌ ຄ ڥ ڦ ຕ Dupont-Teijin Films ࠅ ڦ Teonex PEN ԋ रຍLj ᅃዖਏᆶඤ Ⴀ ߛڦ ḇ ଙLj ᅃ ዖ༬ᅪ ბᆌᆩ ย ڦ ଙLj ሞ ࡗ ײ ዐ၂၄ 3.ሞᆩԋ ቕ -Ԋ ݛ ڦ IGZOԋఈ ንଚฉ ፕ ڦ ඇ ᆶᇸਈንOLED၂๖ഗă କᆫᅴ ڦ ཪ Ⴀ Ⴀă ᄺ इ ڥ ࢩ ڦ ԋ Lj ڍ ᅃӯ ๑ᆩ ڦ ԋ ࢩ 125 ă ڹ ଙ ڦ ბႠ ݠ ă ԋ ڦ ඤ ቯई ॽ ሰ ᅝ ڦ ဦব ຕॽ ߵ ԋ ࢩڦ ઠ বLjᅺ ڟ ሜ ڦ ሀLjᅺ ܔ ᅝዐ ڦ ሞ ᅝࡗ ײ ዐԋ ܔ ࢩڦ ᆌ ڦ ᄇՎᆶጣᅃ ڦ ᆖၚă ਸ๔ই ڦ Ljन ߛᇀ 250ņDŽൽਦᇀ ḅჱӄ༬ PEN ḇdžई ڦ Dž ଙԋ ቕ ڟ ᅃዖᆯߛ ڦ ბፇ Džăሞ ௬ ፕ ԋఈ ንଚ ༩ ڦ ሜ ฉLjኄዖሜ Բ ڦࡀ ၂๖ഗի ࢫLjሞሜ ԝ௬ᆩघ ቆ๕ ௮ቷพઠԊ ਏߑႠLj ᆶጣᇑ ḇ ଙ থৎ ڦ ඤ ቯဣຕă ԋ ă ๑ᆩ ڦ घ հ ᄲᇑ ڦ ഽဌ ټ ܔ پ ڼ ኄዖ ଙ ڦ 370mmġ470mmDŽ 1DžLj ᆩ ᆌLjኄᄣ ဌ घ ଉॽ ฏ ԋ ᇑሜ ཚ ݛڦ Ljሜ ๑ᆩ Թࢫཚࡗฏጤઠ ௬ থ ة হ௬ฉटԋ ڦ ᅃ Lj ॽڟٳ Ԋ ڦ ࡕă ဢLj ࢫም ዘႎ๑ᆩă घ Ԋ ᅝሞԨዊฉ ᅃ ᅟ ໟ ኄዖଣ Ⴀ ڦ ቕ वՂႷ ፁᅃဣଚ ڦ ᄲ൱ă փ ଛ ڦ ᅝ ݛ Lj ᅜႴᄲ ڦ ੦ Ljփࡗᆶᅃၵჺ ᆅഐԈ ᆶሜ Ăቕ व ලႠ ڹת ԋ ڦ ႙ ת ܓ ᅙঢ় ںࠀ ቨ କኄၜ ᅝरຍăሞ ݛ ௬ ڦ ڹ ሞࢩ ฉ փ ੦ ڦ Վ Ǘ ᄺփ ݣ ඪ ස ઠ ਦऐႁᆌ Ljሞ ࡗ ײ ዐ ሞ Ⴀᆶऐ ഘ DŽVOCDžǗ ՂႷ ස ק ओट ንଚ ڦ ଙ ዐ ओLjሞघ Ԋ ࡗ ײ ዐई၂๖ ኄᄣߛ ڦ Վ Lj ړ ت ᇀߛኈ Ljᅜतโ ഗ ڟ ბ ऍ ڞ ዂ ࠓ ݴڦ ăଷ ߅ ਗ਼ ධ ԍ ბ ڦ ኝႠ Ǘፌ ዘᄲ ڦ Ljᆯᇀ ԋLj ᅜ ጲ ኧ Ljසࡕኻ Ljᅃ ڋ ԋఈ ፕ Lj ԥԋ փ ܔ ० ॽںڇ ሜ ฉԊ Lj ዐ ڦ ᆌ ڦ Ⴀ ඪ ڦ փଆᆖၚă 2 ๖ ڦ ॽ PEN ԋ ॽ ๑ ਝ Lj ᅃ ୲ӷ০ ब mm ڦ ᇶ ሜ ฉ Ԋ ڦ ᄓยԢă 3 ๖ ڦ ᆩԋ ቕ - 12

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16 COVER STORY ၂ ๖ र ຍ ހ ௬ࠤ Ԋ ݛ ፕ ڦ IGZO ԋఈ ንଚ ڦ ቷ ă ፌߛՔ ᅝ ٷ ሀ 180ņă ܔ ᅜ ᆩড گ ᅝ ලႠ၂๖ഗჺ ዐ႐DŽFDCDž ڦ ጆ ܔ ຕӥዖ ბ ڦ ࡂ ઠຫLj ሞ ۉ ൻ ۯ ఇ๕ ᆶጣ ቕ व କ ڦ ݔٷ Lj ᆩକ ߛ ۉ ጱ ଙ ዚ ዜኪ ڦ ពኵ ۉ უ ᅎඍ ۅ Lj ڍ װ ၄ ڦ ፕ༬Ⴀ ײ ڦܓ ਦ ݛ ӄă ܓ ጆᆶ ݴߛڦ ጱଉቕ व ፁ ᇑఫၵ ፕሞի एӱฉ دڦ ཥ၂๖ഗ बăฉ ༬ ᆶฉ ᄲ൱ă ਏᆶଷ ᅃ ᆫ ۅ Lj ሞ ԋ Ⴀᅙԥኤ ᅙፁᅜሞ ۉ უൻ ۯ ఇ๕ ۉڦ - ᆌ၂๖௬ ڦ Ԋ ᅝዐLjኄዖቕ व ᆫ ጣሞሜ ӱฉ փ ӱdžස ۉ ᆤ၂๖ഗDžዐइ ڥ ᆌᆩăIGZO ᆩ ԋ ฉLjኄᄣ ௨ أ କࢫჄ ܔڦ ԋ ڦ ᇀ ۉ ൻ ۯ ఇ๕ ڦ ၂๖ഗዐLjසᆶऐ ट OLED ዐă ဢ Ⴞă ᆩ گ ᅝ ፕ ڦ ഗॲ ڦ ሜ ጱദᅎ୲ ሺ ሀ ᆯ ټ ᆶቕ व ڦ ሜ ቕ ڦ ԋ ፇ 25 ԠLj ពኵ ۉ უ ڦ Ⴀᄺ ߛକሀ 10 Ԡă ڦ ࠓ Ljሞԋఈ ንଚ ڦ ፕࡗ ײ ዐ װ ၄ ሞᅎ ۯ ၂๖ᆌᆩዐᅃ ภत၂๖ ݴ Ր୲ ڦ ዘᄲ ๆ ݴ ሗ ڦ ሞ ฉ ڦ Վ ă ᅜሞኄၵ ፕօየዐLj ᅜཚࡗฉ ڦ ሜ ԋ रຍઠ ڥ ᅜ ਦăᅙঢ় ୲ ק ओ ୲ ۼ ՂႷ ႐ย ᅜ੦ ᆌ ڦ ओ କ ܠ ዖලႠ OLED ၂๖ഗ ڦ ᇱ႙Ljࠚ ۼ ሞ Ljժ ଉ३ณԋ ڦ Վ ă କ ኄၵՎ ի ሜ ฉ ք ԋ Ljໜࢫ ᆩघ Ԋ Ljᅙঢ়ਸ କᅃኝ༫ ڦ ॠ ยԢăAzores ࠅ پ ڦ ઠ ፕ ڦ ă ᇀኄၵලႠ၂๖ഗ ۉ ბႠ ࠅڦ ਗ਼ऐᅙሞ ბဣཥዐದԢକ ኈց ॲ Ljሞᅃ ਸ႑တ ณLj ڍ ڦ ၂๖ ݴ Ր୲DŽඇ Dž ۼ ᅙ ڟٳ ༬ ڦ ᅝօየዐLj ࠕ ᅺ Վ ڦ 200dpi ଉपăලႠ၂๖ჺ ዐ႐DŽFDCDž ܔ ᆩቕ वথ փ ದႠăཞᄣዘᄲ ڦ Ljᄲ ࠕ ܔ ᆯᇀሞ ԋ रຍ ݴڦڟٳ Ր୲ट ኄᅃੜ ቛਸჺ ሜ ӱኮक़ ڦ ᆌ փ ದ ڦ ௬Đ đ ৯Lj ሞ ኝ ༬ ፕ ᅝዐ ڦ ኈຕ ᅙ ᆌ ॠ ăසࡕኄዖ ௬Đ đ ג ඹႹኵLjఫ 200dpi तᅜฉ ݴڦ Ր୲ᆌ ᅜ ၄ ڦ ă ሞ ਗ਼ ኈLjժ ยԢዐ ڦ ऐႁ ሞሏ ໃ ت ᄺ ٱ ă ጹฉ Lj ලႠߛ ݴ Ր၂๖ഗनॽ ሞ ฉ௬ ๘ă ॽ ᆩฉ ᅙঢ়ਸ ڦࠀ ଙ रຍઠ ኄዖ ݛ ڹת ᅙঢ়ᆩᇀ پ ڼ ၂๖௬ӱ ڦ Lj Lj ᅜ๑ᆩ၄ᆶԋఈ ڦ ሰยแăణമኄၵर ᆩକ ࡂईᯇ - ᰆ - - ᄟ DŽIGZODžᆶᇸӷ ڞ ຍධ ت ᇀ ᅃօ ڦ ቛዐLjԈઔ ܔ փཞย ፇ ڦ ᆫඍ ۅ ഗॲ ፕ ܠڦ ንଚ ၂๖ ۉ ୟLjሞኄଇዖ൧ ڦ ೠࠚ ڪ ă ᆌᆩ ଙࠅ քߛⴀ ظ ႎ ჽरຍ ᆌᆩ ଙࠅ ሞ Applied Centura ڦ ፕᆩLj ࠕሺഽጺ ڦ Ⴀ ټ ઠᆫႯ ڦ ఈႠ RP Epi ဣ ཥ ย Ԣ ฉ ႎ ਸ କ ᅃ ༫ ăཚࡗॽኄዖरຍᆩᇀኄଇ Lj Ă ሌႠ ट NMOS ᆌᆩरຍLj Ⴤԍ ᆌᆩ ଙࠅ ۯ କ ᄽ ቛLjᅜ ፁන گ ඍ ୲ăኄၵ ሞ ჽरຍ ݛ ௬ๆ ઠ ڦ ଶ ں ă ᅮሺ ࠀܠڦ ᅎ ۯ ߛ ༬Ⴀ ਦକዮ ܠ ᆌᆩरຍ ڦ ਸ ޙ ᄽሞ 20 భ ໙ ڦ Ⴔ൱ăኄዖႠ ڦ ᆶዺᇀਜ਼ Ⴀ LjԈઔ ব ॽ ۅ ჽ ק ओ PMOSDŽP ႙ ၄ ࠀڦ Ljස ܠ ඪခ ۉڦ ۉ ᄟ ӷ ڞ Dž NMOSDŽN ႙ ߛ ዊ ڦ ᅜतᆖ ت ڪ ă ፆ୲ ă ᄟ ӷ ڞ Dž ჽฦ ڦ ൵ Lj Centura RP Epi ဣཥยԢ ঢ়ࡗ ܔ CenturaRPEpi ဣཥยԢ ڦ ۯ ሰฆ ٶ ሰ ڦ ዕ Lj ७ኤ ڦ PMOS ჽᆌᆩଶᇘ ڦ ଶ ںڞ ႐ፕᆩ ڦ ण ڦ ࠃ ᅃ پ ᅎ ۯ ໙ ă ଶ ڞ ኁăໜጣኄၜႎरຍ ڦ Lj ဣ گ ᇨ ল Siconi रຍăሞཞᅃ ኈ ጲ 90 భ ዕ ব ۅ ᅜઠLjਏᆶन ཥ ڦ ᆌᆩ ݔ ස ᅙ ߃କ NMOS ण ᇨ ল ჽ ᅝLj ࠕ ሗႠ ڦ ᆌՎ ስႠ ჽఈᅙঢ়߀ ኸ ᇘԋఈ ڦ ስႠ ק ओăᆌᆩ أ ಇ ܓ क़Lj ড ڇ ऐ ૬ဣཥย କ PMOS ڦ ദᅎ୲Ljই گ କ ଙࠅ ଶ ڦ ጆᆶ ჽरຍ Ԣ ࠕ३ณহ௬ ක ࡗג ᅃ ຕଉपLj ۉ ፆLj ߛକ ڦ ăሞ ࠕ ၄ߛዊଉᆌՎఈሞ ק ओ ٶ ሰ ك ল ࡂڦ ௬Lj ၄ ඍ NMOS ዐ ᆩ ስႠ ჽLjਏᆶ ጚ ڦ ᇱጱ ሗăჹ ڦ ሰ ᅝ੦ ჽ ă 14

17 N F N TECHNICAL ARTICLE T र ຍ ቤ CMEMS रຍ: ᆩ ଉCMOS ሰ ᅝ एᇀMEMS ڦ ୲੦ ഗॲ ࡗ ڦ Lj ऐ ۉ ဣ ཥ ሞ DŽMEMSDž ਦ ݛ ӄ ᅙ ঢ় օ ᅺ ဣཥႠ Ԩ ڦ ঙ ઠ փ ڦ ăcmems ᅜሞ ڦ RF/ ፌ ስă ႑ CMOSरຍDŽ &P% Džฉ ӵໜጣcmems रຍ ڦ ᆩLj থ ߛዊଉMEMS ࢫ ت ڦ र ฉӥ ڦ ୲੦ ă Silicon Labsሞᅃ ୲੦ ຍ [1]Lj ݴ ૧ᆩঢ় ۆ CMOS ሰ ᅝ MEMS रຍፌ ᇸᇀ ܔ ฉइ ڥ ٷ ೦Ljཚࡗሞ ڦ ڦ કቛႠLjፕ ఇ ࢫڦ ײ ڦ ጕ൱Ljణമᅙ װ ၄ ၂ጣ ڦ ᆫ ႑ ICኮฉ থ ၿናഗLjઠइ ڥ ၜ ڟ ᅜമᆩᇀ ሰ CMOS LjԈઔ क़Ăࠃᆌ ႠĂ ኝ ڇڦ ਦ ݛ ӄLjኄ ኈኟ ڦ ڦ DŽස 3 ๖Džă ႠĂഗॲ Ⴀ Բ ڪ Ljኄ MEMS+CMOSၹཞย ăcmemsर CMEMSरຍཚࡗ๑ᆩ ܠ ࡂ- ၵᆫ ๑एᇀ MEMS ڦ ና ږ ഗ ᆶ ຍ ୲੦ ᄽ ټ ઠ၂ጣ ڦ ᆫ Lj ኂDŽpoly-SiGeDžፕ MEMSࠓॺ և ݴ एᇀ ᆈ ڦ ୲੦ ă Ԉઔ Ă ߛႠ Ă گ Ԩ ଙ [2]ăᆯᇀ ඤ༬Ⴀग़ඹCMOSࢫ ڦ કቛႠă ت ᅝLjᅺ ኄዖ ଙԥණ ᆯ ᆈ ਦ ݛ ӄ ᅈડ د ཥरຍLjएᇀ ᆈ ڦ ୲ ܔ CMOSᆶᅮ ڦ ăpoly-sige ࠕሞ ੦ ย ᆶ ܠ Lj૩සႴᄲ ߛ ጆᄽ ሗ ײ Ljएᇀ༩ ڦ CMEMSǖCMOS MEMS ڇڦ &&ņፑᆸ ק ओă ਔ ຫLj ړ থ ༬ ԈጎDŽස 1 ๖DžLjႴᄲ Կ ण ሞዷ CMOSरຍฉ ק ओ Lj ڦ ഹ Ljᅜत ದ ۉ ඹLj ܔ ຍᇕCMEMS CMOS MEMS փ භ ၄ᆶ ڦ CMOS ࢫ ଙLj ᅺ ߌLjᆮ ඤ Ă ऍ ڦ ጴజ ႀăCMEMSरຍ ᅜሞ ᄺሎႹ๑ᆩ ك ኂDŽGeDžLjGeම ሞ ና ۯ Lj ڞ ዂ၄ ࠤ ቱă CMOS ۉ ୟฉ থ MEMSഗॲ ࡗᄟ ൠDŽH 2 O 2 DžዐLj ዐH 2 O 2 ፕ ᅜฉ ၄ሞᅙঢ়ཚࡗMEMS ڦ ఇ ࢫ ت Ljᇑඪ ण ਗ਼वăH2O2 ᆩᇀCMOSࢫ ت रຍ ٷٷ Lj ᅜइ ڥ MEMS ݛڦ ԲLjኄ ᅃ Lj Բൠ ޘ ໗ई ᆩᇀMEMS ഗॲ Ljժ ᆩՔጚӷ ڞ ሰर SMD Crystal ᅝ ڦ ਗ਼व ăኄଇዖዷᄲ༬ⴀ ๑MEMS ௬ ऐႁ ᅝᅃ ग़ඹ ຍă Lj ୲੦ ዓ ڦ ण BVD Pad ᅈ৹ ᆩᇑएᇀ ᆈ ڦ Crystal Solder Pad ڦ CMOSरຍă ᅝग़ඹႠ ڦ ᅃև ݴ ă MEMS ཞ ݛڦ ǖሞ ܠ ఇ Test Contact ፇዐጎದMEMSၹ ഗ ݴ ૬IC Ceramic Package (HTCC) Chip DŽස 2 ๖Džă ኄዖ ࠕ ݛ ๑ᆩԲएᇀ ᆈ ڦ ና ږ ഗ Քጚ ڦ Wire Bonding %P एᇀ ᆈ ڦ ༩ ހ ጎና ږ ഗ ࠓ ă ଙዊଉᄺ ዘᄲăᅃӯઠຫLj ଙ ڦ ዊଉ ק ओ ܔ ᇀMEMSᆌᆩ װ ၄ ݛݒ ă ୩ ཟ ԈጎरຍLj ڍ ධ ᅈડዷ ଉ ᅃᄣ ڦ ଙग़ඹCMOS ᅝLj ڍ CMOS ኮ ڦ ጆᄽMEMS ă ݛ Ⴀ๑ ڥ փ ፕ ࠓ Ljມ MEMS ਦ ݛ ӄ پ ଙă SiGeሞኄ ݛڦ Ⴀฉ CMOS-MEMSᅃ ዐ ڦ ዐक़օየLj ඐ ݥ ăሞ &&ņᅜฉ ༬ ཉ ܔ MEMSၿናഗ༬Ⴀ ߌLj ॲLjSiGe ᆩᇀ ק ओ ܠڦ ଙă ᆶᇑ ܠ ࡂ ڦ ႠLj ݘ ᆩᇀ MEMS ଙăኄၵ ႠԈઔߛ ଛഽ Emmanuel Quevy, Silicon Laboratories P एᇀMEMS ܠڦ ና ږ ഗ၂ ă گ ඤ ڑ Ⴀઅ DŽनߛQኵDžLjժ 15

18 TECHNICAL ARTICLE N F N T र ຍ ቤ DŽ %&&&Q Dž ăሞ ฉ CMOSĂMEMSĂኈ ހ ጎĂ ૭ᄓ Ljժ ਏᆶ ક ቛႠLjժ ࠃዊଉԍኤăCMEMSఇ रຍLj ሰ ሞ&P% &P% ዐঢ়ࡗᄓኤăଷ LjCMEMS ᄺ ᅜණ ᅃዖ रຍLjփཞ ႙ ڦ ഗॲDŽၿናഗLj Ⴀ ߌد ഗ ڪ Dž P > K ሰएԨ ײ ădžaDžഐ๔ ଙᅜ ܛ ௬ CMOS ๕ ሞLjDŽbDž ܠ SiGe ᆩ ௬ ऐႁ ๕ ण ڦ MEMSഗॲLjDŽcDž ሞኈ ዐཚࡗ ᇶपӿ ăኝ ڦ ᇶ Ⴤ Lj DŽdDž ႙ Քጚ ٶ ԈጎದLj ᅃ Քጚ ڦ CMOS ă ᅜሞཞᅃ ײ ዐ ăᅺ ړ ዜ Ⴀཚࡗუ LjSiGeփ ຫ ڇ ຕଉपppm/ņ CTELjཚ ฦ ᅃዖMEMSđ ࡀڦ ୱ ܔ ᇀCMEMSઠ ၄ውࢫăኄၵ Ⴀ ܔ ᇀ ሰߛႠ ቛLjCTEሞ%& & ;ņ ݔ ăᅺ ຫժփട ړ Ljཞ Lj ܔ ᇀ ୲੦ MEMSഗॲ ਨ ܔ ڦ Lj༬ Ljኄዖ ሰरຍ ڦ ၄ Ⴔᄲକ ᄽઠຫLjCMEMSरຍ ڦ કቛႠ ୲੦ Ⴔ ڦ Ⴀă ײ ዐ ภत ଙ ڦ ጆᄽኪ ย CMEMS پ ڦ ఇ๕ገ Ⴀ ڦ ă أ କSiGe ଙᆫ ኮ Lj ਏᆶኄଇዖ ႠLjĐᅃዖ ᅝ ሰ ܔ ᇀ ୲੦ ઠຫ ڇ ण ࠌ ڦ रຍă ዘᄲǛሞ ᄽዐස ᆌ ܔ փ CMEMSरຍ ࠃᅜ ब ༬ एӱ ݣ ഘ ᄺ ᅃ ă ႠLjᅺ ܔ ᇀဣཥण ઠຫ ፌ MEMSၿናഗႴᄲሞ߅৫Ă ڦ ኈ ፌᆫ ስǖ ዐ ፕă Ljඤთ Lj Ⴔᄲ ڇ ण ăໜ ~ ག ၐഴ Ljᅜत༬ ൡ ݣ एӱዐ ڦ ݴ ጱ ڟ ഹ ጣ ݯ ഴ ๕ဣཥՎ ڥ ሁઠሁ ՓLj Ljժ߀Վၿናഗ ڦ Ⴀ ă ᅙঢ়ण ڟ ࠀڦܠ ฉဣཥ ڦ ఇ Ljඓԍሞ ۥ SiGe MEMS ኮक़ਏᆶ گ ᅺ Ljሞ ק ओࡗ ײ ዐՂႷ ႐ᆌ DŽSoCDžഗॲăਉ ૩ጱઠຫLjᅃ ڦ থ ة ፆ ăኄዖरຍፌ ٷ ࢫܔ ଙ ڦ ბႠዊLj ၄ਨ ऐ ڦ ዷӱă ᄓኤ Ljඪ ڦ ३ณথ ة स ă ܔ ኈ ހ ጎLjኄዖਨ ڪܔ प Ⴀ ~ क़ ఇ ሎႹ ᆩߛጻ Բ ۉڦ टक़ဤLj ߛ ڦ ᅭ ௬ ߌدۉ ഗă ፁࠕ ፁഗॲ ڦ DŽ ዊᅺ ຕDž ႠDŽ Džă ፌࢫLj ړ ඪ ߴ ڦײ ~ ࠓࢩ ਏᆶଳऄႠDŽ DžLj ሗ ሺ Lj ओᄺ ሎႹ ᆩԋ ڦ ௬ ऐႁ ă ሏ ڦ LjCMOS ਏ ࠓLj ၄ ௬ ڦ ፕఇ๕ă Ԣ๘হฉፌߛ ੦Ⴀ ڦ ሰ ă ~ ഴ ڟ ࠓዐ ڦ ᄟ ࡂ ފ ఇ ኟᅺ CMEMS ᅝण ഗॲย Lj ၄ඤ ᅎ ڦ ऐႁց ߛڦ ႠLj ୲ ڦ ኝ ᆖၚ ݥ ۉ ഘ ă Ljժ ፌዕ ୲ ᇀCMOSLj ۼ ~ ࠌභ ڦހ ᇶ ڟ ᇶӿ ሎႹ P ټ ᆶ ሺᅮDŽgmcritDžĂस ሜ(p) ۉ უ ޗ ኵ(Vo) ײݛ ๕ ڦ एᇀၿናഗ ڦ pierceና ږ ഗए Ԩ ۉ ୟ ă ࡗג Y& ă MEMSഗॲ ג ল৫ኈ ހ ጎă ణമCMEMS ሰሎႹ&P ڦ ሞ၄ᆶ ڦ CMOS ᇶฉࠓॺ क़ण ǖ&p ༬ኙ ڦ MEMS ࠓ௬ଣब ă Ljඤ MEMSഗॲሞ &ڦ P% ग़ඹႠժփᅪ ጣ ړ ཚࡗ ڦײ RF/MS CMOSኮฉăᅃ ኝ ඤთ Lj ଙ ഗॲ ၄ ཞăუ ຄ ڦ / ᅝย ༫ॲDŽPDKDž ඤ ቯဣຕDŽCTEDž ڦ փ ದ ݥ ᅜཚࡗኄዖरຍ ย ᅜत ၂ăSiGe ܔ ᇀ ڹ ևઠ ሰăCMEMS ړ മሞ ۥ पCMOS 16 ገ ڦ ႎࠀ रຍǛ P > K ۆ ႙ ڦ ၿናഗ ୲ ڦ ᇶ ݴܮݻ քă

19 N F N TECHNICAL ARTICLE T र ຍ ቤ ࠕ ᆩCMOS ڦ ഗॲ ۼ ण ण ڦ ፌ ۯٷ ăcmemsरຍሎ ڇڟ ഗॲLj ڦ ഗॲ ۼ փ Ⴙ ᆩ ᇶ ఇ๕Ljཚࡗ૧ CMOSፇॲLj૩ස ᆈና ږ ഗईኁ ᆩ ڦ MEMS ย ਏLj ᆩᇀࠀ୲ ٷݣ ഗईມ ഗฉ ڦ ጆᆩर ᇑ बӥዖ ࠌၛăፌዕLj ຍăCMOSण ړ ݘ Ljब Ԩব ઠጲᆫ ᅝĂߛण ࢭ ٳڟ ਦ ݛ ӄ ڦ Ljժ ฉ क़Ljኄࡃࠀᇀ ܠ ዖย ኮ ו ጣ2D 3Dण ቛăሞԨ ዐLj CMEMSཚࡗሞCMOSฉ থഴ MEMSഗॲ इ ڥ ೦ăኄዖ ೦ P > KՊ ײ ና ږ ഗ๖૩ă ඹᅟ ࠀگ ᆫ ă क़ ڦ IP ᆩăӝMEMS CMOS Lj๑ ሰฆ ࠕ ݴ ૧ᆩ ᅙᆶ ڦ ăᆯ ᅜ ߛܔ Ⴀ ย ߌد ഗ ଷᅃ ཚࡗMEMSߛण Ԣ ڦ Ԩ ݴ Lj૩ස ڦ ਗ਼ ᆫ Ⴀ ڦ ๖૩ăሞ د ק ओ ਗ਼ ਏăፌዕӷ ڞ ᄽॽ ᄺ CMEMSरຍ ڦ ഽ ߌഗຕ ൽ ۉ ୟዐLj Վ ۉ ඹ ᆩ ߛ ٷ ᇶ DŽ % ᆈ ڦٷ ൻ ۯ ă ஃና ږ ഗĂ Ⴀഗॲ ݛݴ ๕ LjMEMSᆯᇀ ᆅഐ Dž ڦ ൵ ቛă ई ᆈഗॲLj ۼ ᆩ ܔ ԩዘ ڦ ڦ ᅎ๑ࠅࠌব ۅ ฉ ႑ ă ߌد ࠌཞण ཚࡗӝ ᆶጱဣཥև Ԉጎ ހ ጎ ᇸ ᆶᇸഗॲăᅺ փ ഗ ۉ ୟኮक़ ڦ स ۉ ඹ੦ ॲण ሞཞᅃएӱฉLj๑ ሰ ײ ཥ ၂ጣሺ Ԩᆼ ण ࢩ ᇀ1mm ᆩ႑ Ljॽই گ V/G ڦ ᆶ ଳ ă ᅃ ڇڟ ᅃ ăᆯ ᇶप ڦ ڦ ഗॲ ݥ ઓవLjፌዕ ڞ ዂ ᆩ ܔ ሞԨ ዐLj๑ᆩ ڦ स ᆌ Ԉጎ ࡗ ᆩփग़ඹरຍ ڦٷ PCB क़ăཞᄣLjᅺ ኄၵፇॲ ੦ ڦ ದĂ ڇ CMOS ሰ ڦ ጱဣཥব ԨLj૩සና ږ ݣ ሞ LjሞPCBฉԍ ૬Ljᆯ + MEMSၹ ย ॽᆫ ࠀ /ଳ ഗ ߌد ഗ ڦ ሰă ዘᄲ ڦ Ljࠌ ॽሺ ဣཥย ڦ ሗ Ljժ ᆯ Ljཞ ๑ᆩ ഗॲă ഗ ཞण ٷٷ ই گ ԨăCMEMS ᇀ ႑ ԓ ሞ ߅ىۉ ඡ ዐ ॲᅪ ጣ ܠ ഗॲ ᅜण ሞᅃഐLj ࠃӝMEMSፕ ᅃ ኝဣཥ ই گ Ⴀ ă ๑ᆩ ڦ ঙ ઠ Ljᅃ ᅃօ ଳ ඓ ăසࡕഗ Lj د ཥፔ փཞ ᆯCMEMSरຍ ၄ ڦ ጲԈ ڇ ॲ LjॽਏԢ ڦ ण ओLj ଭ ڦ ፇॲ Ljժ ሞ ਦ ݛ ӄ ᅜ ݥ ඹᅟ Ҿඇ ڦ ण ڟ ᅺ ᆶ ሺ ऍ ና ۯ ă ᇶप ဣཥၯጚ ց ă ܔ ᇀ ኝ ဣཥ ਦ ݛ ӄă Ljཚࡗ ณ ଙLj থ੨ MEMSና ږ ഗ ߌد ഗઠຫLjࡗ ࡀఇLj ڇ ण ă ௬ଣ ڦ ፌ ٷ ଇ ߛ Ԩ ڦ ᇀब മCMOS ᄽ ण ԥ ۯ ഗ ॲ ᅃ ၜ ڦ ൧ ă ᇀႠ LjሞMEMSဣཥย ই گ Ԩ ᆩCMOS-MEMS ڇ ᆫ ዐLj ڇ ण ཀ ਏᆶ ܠ ଳऄ ሰօየǖԈጎ Ljᅺ ᅈ Ⴀă૩සLjሞና ږ ഗDŽස 4 ๖Dž ๖૩ዐLj ݒ ઍ ٷݣ ഗ Ⴔ ڦ ሺᅮ ڟ ዷ ۯ ևॲ ၿናഗኮक़ ڦ स ۉ ඹ ڦ ट ٷ ᆖၚăኄᆯ ຕp ๖Ljp ຕሁߛLjႴᄲ ና ڦږ ሺᅮ DŽgmcritDžሁ گ Lj ڦگ ሺᅮ ڞ ዂ ཞ ڪ पDŽVoDž ࠀ DŽI oDž گ ă ࠀ ײٷ ฉᄺൽਦᇀၿናፇॲ ڦ ă ܔ ᇀ ഗॲLj DŽᆯ ۯ ༀ ۉ ፆRx ๖Džཚ ߛ Lj SNRཚ گ Ljኄॽ ۉܔ ᇸ փ૧ ᆖၚLj Lj ඍ ۅ ᇺ ࡗג և گ स Ⴀ ټ ઠ ت ڦ Lj ࡕLjဣཥՎ ڥ P ۉ ၿናഗ ۥڦ প௬ Ljऐႁց Ⴀă 17

20 TECHNICAL ARTICLE N F N T र ຍ ቤ ડᇀଇ փग़ඹ ڦ ૬ഗॲLjनऐ ߌLj ڞ ዂႠ ইăᅺ ᆩ ᆈ ڟ MEMS DŽස 6 ๖Džă੦ ႁMEMSഗॲ CMOS ۉ ୟă ၿናഗ ڦ ဣཥण Ⴀ گ ᇀ๑ᆩ ୟሞMEMSና ږ ഗ VCOኮक़ᆶᇨ CMEMSण ዓ ڦ ဣཥLjཞ ॽሰ ᅭ ڦ Բ૩ ဣLjᅺ न๑ᆶඪ փ ฉ ࢫᅃဣଚ ڦ ă ኟඓ ڦ MEMS LjVCO ڦ ୲ ୲੦ ௬ଣ ڦ CMEMS ڦ ᆫ ۅ ३ ᆈၿናഗ ڦ ణՔᄺኟ ᄺ ኟඓ ڦ ă ዖ ݛ ᄺሎႹ Պ ײ CMEMSरຍ ᆌᆩ ܠڟ ዖ ሞথৎ ำLjᅺ ᅃօ ᆈ ୲Ljኄၵ ᆈና ږ ഗ ඍ ႙ ڦ MEMS Lj ڍ ௯ጚᅙ Ⴔ ڦ Ԩथਗሺ Lj ᆶटณຕ ڦ Ljᅺ ك ୲ DŽ ݥأ ཁ ᆶӥ ૦ ڦ ᆩᇀ ୲੦ ڦ ࠃᆌฆ ࠕ ሰट ڦ ᆈഗॲă ۉ ܮ ୟDžăཚࡗཁ ߌد ഗ ᆈरຍ ႎă ڦ ᆈൎ ਸ ᆯ ઠLj ႙ ण ᅙঢ় ڟٳ ڟ ဣཥLjMEMS ڟ VCO ୲Բ૩ ڦ ๔Lj ሰฆփ ߀ ᅝLjᆯ ए ᅮ ڿ ३ ۅ Ljኄॽ ઠ ڦ ቛă Վ ࠕ ۯ ሞ ݔ Վ Ljᅜց ᇀ ᆈ ڦ ና ږ ഗ Lj ጚඓLj Բኮ Lj MEMSၿናഗर MEMSና ږ ഗ ᅎă ཞ߁ ڦ ฯ ਏᆶ ڦ Ԉጎă ᆈና ږ ഗᅙ ຍᅙঢ় ਦ ᆈ ڦ एԨ Lj ڍ փཞ ၄ ሺ ईই گ ሗ Lj ڍ ঢ়ঢ়ࡗ ߀ ܠ Lj Ⴀ ߑߑ ৪ኛघଜ ڦ ୲੦ Lj ፌዕLjMEMS փվ ڦ Ljइൽ ڦ ت ᇀppbप Lj ᆶ ڦ ᄺ ሞᅃၵඍ ۅ ă LjMEMSഗ ዓ႑ Ljᆯᇀց Վ ڥ ඓ ႠLj๑ ୲੦ ڦ Քጚă ॲ ᇀ ᆈ Lj ᅜ ࠃ ܠ ă ᆈഗॲᆶႹ ܠ ă ଉ ڟ ና ږ ዜ ăኄᅪ ጣLjሞ ཞ ᆯᇀMEMSၿናഗ ᆶ ڦ ড ٷ ߛ ڦ ሰ ײ DŽबዜ ڟ ब ڦ ୲ Ljገ ୲ گ Ljሰ ႑ሯԲ ᅎLj ᆈ ᄽሞራ MEMS ਦ ሆ ڦ क़Džփ ሺ ࠃᆌ ڦ ড ă ڼ Lj د ཥ ڦ MEMS ଙLj૩ ݛ ӄዐन ၄၂ጣ ڦ ඍ ǖ వ Ljཞ ና ږ ഗ ස ڇ ࡂĂ ܠ ࡂĂฯ ࡂኂLjໜ ߌد ഗ ڟ ୲ ڦ ਸ ڿد ຕ ڦ ୲ ݔ ăໜጣ ໙Ăཚ႑ ஏ ڦ ᅎ၂ጣă ໜጣഘ ڦ ݥ ۸ [ ڦ 3]ăኄᅪ ጣLjᆯᇀ ጎዃ ڦ ຕ ୲ ڦ ሺ Ljኄዖ ܔ ߛ Վ ڥ ᅟ ᆖၚLj ୲ ဣຕ ࠃߛዊଉߛ ዓ႑ ዓ ڦ Վ & ;ņăኄ ڦٷ ဣຕᆖၚ ॽ ܠ უ ăएᇀmems ڦ ਦ ኝ Ⴀăᅺ MEMSഗॲट Lj ݛ ӄLj༬ ᆌᆩ Պ ײ ና ږ ഗ փ ᆈఫᄣඹᅟ ൎߪLj ڦ CMEMSरຍLj ٷٷ क़ ॽᆖၚ ๔ Ⴀăፌ ڦ MEMSၿ DŽ ᇀ2ዜDž khz ڟ GHz ୲ ናഗჺ৯ዷᄲᆯ ٷ ბ ۯ Ljᇑঢ়ࡗ ڦ Պ ײ Ⴀă बๆ ჺ৯ ڦ ᆈ ԲLj ᆈഗॲᄺ ڟ Ⴀ ၄ Ⴀຕ ᆶঢ়ࡗ ᄓኤă ࠤቱ ڦ ઓඡă Ҿጎದዃ ዐ ڪ एᇀMEMS ߌدڦ ഗᅙᆶᅃ क़Lj ٷ ሰ ܔ ና ۯ ऍ ߌă ڍ MEMS ڦ ᅎࡀ ጺ MEMSഗॲ ժ LjਏԢ ݥ ሞ ݔ Lj փ ppmईኁppb ڪ पă ڦߛ უ ڪ पăᆯᇀᅜฉ༬ ۅ Lj ۆڦ ႙ዐ एᇀMEMS ڦ ና ږ ഗ ཚࡗ Ⴀᄓ ႐ ୲ ݴ քă6-sigma ܔ ݔ ᆌ ٷ ሀ ኤLjᄓኤ ײ ᇀएᇀCMOS ڦ Ġ&P ǁLj ٳ փ ڟ ୲੦ ཚ Ⴔᄲ Lj ڍ ᅃӯઠຫLjCMOSዊଉ ڦ ڦ %& & ă Ă ଙႠ ᅜ ჹ ײ ᇺᇺ ٷ ᇀएᇀ ᆈ ڦ ă त ᅺ DŽ Ԉጎუ Dž ࠅڦ ᆖ Lj ᆈၿናഗ ܔ ᇀ ۉ ၚኝ ݴ քă ୟӱपย EMI ߌă ᄺ କ ਦൎߪ ๔ ᆯᇀस ࠌናĂഗॲ ڟ ഗॲ ڦ ඹႠ Lj ዃĐMEMS ڦ VCOđLj ሜ Ăᅜत ܔ ᇀ ཉॲ ᅺ ૬ ڦ ና ږ ഗཚࡗց ۉ ୟ 18 P ሞ 7ዐ၂๖ ۉڦ ၿናഗ ڦ ᇱ๔ ୲- ༬ Ⴀă YP ඇၯጚ ց ڦࢫ CMEMSና ږ ഗ ڦ ༬ Ⴀत থ ᅎDŽᄣ ຕଉ %&&Džă

21 N F N TECHNICAL ARTICLE T र ຍ ቤ ߌد ഗዐඪ Վ ڦ Վ ዐ ᆩ ڦ ଙኮᅃLjժ ሞᅃ ݴ քLjཚ ሞĠ1ppm/ņኮक़ă र ईኁ० ڦڇ ଉ ሯำLj ߌد ݔ Ljໜጣ ߛ ڦ Վ ڥ ຍਏᆶ ݥ ၂ጣ ڦ ᆫ Ljᇑ ᆈൎߪ ഗዐ ڦ ඪ ဦ Վ ۼ থገ ᆘă SiGe Վ ڥ Ljᅺ ଇኁ ईඪ ݛڦ ԲLj ᅜᆌᆩ ڟ ई ڟٷݣ ୲Lj ڞ ዂ၂ጣ ڦ ڸ ăਏ ઠຫLjCMEMS ݛ ภत ڟ ඪ ఇ๕ ڦ ጒĊĊ ሞ ௬ Ⴀ ă ॽց ଙ ݣ ሞፌዘᄲ ݛںڦ - ᅜ ई ௬ ڦ ඪ ୲Ljժ ᅃӯઠ ཚࡗᆫ ߌد ഗ ሯำ ފ ᄟ ڦ ๕ ݣ ሞፌ ٷ ᆌ ۅ ă ܔ ඪ ऐႁยԢ ۼ ᆶ ă ༬Ⴀᄺ ट ڦٷ ႠLj ڍ 7၂๖କᅃ Laméఇ๕ ڦ ၿናഗLj ཚࡗᄄఇ ݛ ๕ ᅭ ڦ ᄟ ፌዕCMEMSरຍ ߵԨฉਖ਼ ޜ ኄ ܔ ᇀ ۉ ट ᆶ કቧఇ๕ăሞ ڦފ ० ڇ Վ Lj ᅜ أ ඤ ᅎă వ LjनMEMSၿናഗ ڦ ऐႁ ኄዖྊ೫ዐLjᄟ ዐ ڦ ӄ ފ ԥ ኄ ༬ႠLj ฉ ߌد ഗ ڦ ړ ႠLjժ ཚࡗऐႁ ڦ ց ഗॲइ ڥ ഴ ሞ ࠓ Ljᅜց ༬ ڦ ኄዖఇ ย DŽย ڟٳ ፌ ڦ ሯำ/ࠀ୲ ᆈၿናഗ ڦ ඇ ڦ ݔ ๕ ڦ ᆌ ቧଉă DžLj๑एᇀCMEMS ڦ ና ږ ഗ װ ၄ [4] Ⴀ ă MEMS ࠓ ଙLj૩ස ڇ ኟස ዐ ๖Ljፌዕ ࡕ ब ppb ڦ ݔ ႠLjԲ ڼ ࡂDŽ & ;ņ & ;ņDžLj ᅃ ݥ থৎ&DŽ ܔ ᇀᇱ๔SiGe ٷ ᅃ پ MEMSና ږ ഗ گ ब ຕଉपă ཞ Ⴞ ڦ SiGeDŽᄘ ఇଉ ڦ ဣ ሀ & ;ņDž ڦ ᅃ ဣຕց ڟ ࢫ ၯጚ ᅃօሞဣཥपฉց ഗ ຕDžዐ ڦ TCELj ਦ ݛ ӄ ሗᇑ ဣຕLjኄ ୲ ඇ ڦ ݔ ॲ ڦ ႠLjፌዕ ኝ ᅝ ଷᅃዖໜ ॺࠓڦݒ ଙă ሏ ႠLj থৎAT-cut ᆈ ڦ ༬ DŽස 9 ๖Džă ڦ Lj ᄟ ࡂDŽSiO 2Dž CMOS Ⴀă ړ Lj ሰဃ ॽᆖၚᅃ ຕ Բ ଇዖ د ཥ ڦ MEMS 19

22 TECHNICAL ARTICLE N F N T र ຍ ቤ ਦ ݛ ӄLjཚࡗฉ ༬Ⴀᅜत ڇ ण ڦ ඤՎ ăཚࡗሞ ཞཉ ᆖၚ ᅎՎ Lj ᆖၚ ڟ ୲ LjCMEMSरຍሞඤገ ݛ ௬ ၂ ॲ የૐ የඤ LjԲড ă ړ ဣຕԲড ٷ ᆖၚᄺ ጣ Ⴀ Lj༬ ג ሁएᇀ ᆈ ڦ ዖ ࠓDŽCMEMSĂມ MEMS ၂Ljස 12၂๖ມ MEMSഗॲᆖ ਦ ݛ ӄă ฉLj ړ Ⴀ੦ ဣཥ ᆈDž ڦ ࡕLj ᅜ ඹᅟ ڦ ၚăሞ &ņ ڦ ၂๖ %&&& ᅈડᇀ ߌد ഗ Ljဣཥण ඤ CMEMS ڦ ᆫ ăස %& ๖Lj ڦ ൧ Ljሞፌ ڦ बๆ د ਏᆶ Ⴀăඟ ๑ᆩມ CMEMSና ږ ഗሞড ڦٷ ඤՎ ᅈ ሏ ዐ ၄ ۆ ႙ ڦ ऐႁ Lj൧ ڦ ጎದఇ႙๖૩ઠ ᅃ Lj ৹ԍ Lj ݛ ӄ၂๖ ܔ Ⴤ ᅃ ڟ ײࡗڦ ኹLjᇑ CMOS ۉ ୟሞ ڹ ևLjMEMS ᇀ Վ ߌ ڦ Ljฯ ຕ ᆶ ג ߌد ഗ ڦ ᅎՎ Ljփ ฉ௬ăᅃ ० ڦڇ ඤ د ఇ႙Ⴔᄲ ݔࡀ ăԉጎఱუଳ ᄺ ቛ๖ ၄ሞ ݛڦ LjᄺԈઔሺ ޗڦ ୯CMOS Ljӿ ᄟ ኬ ݛ ӄ ڦ ᆫଝăፌዕLj ᄓ ڦؤ ăཚࡗሞ ߛ ڦ DŽ% ņDž ڦ ĂMEMS ኝ Ԉጎă ၂๖CMEMSरຍᆫ ă ړ ਏᆶߛࠀ ኴ ཞ ڦ Lj ߌد ഗ ኄᅪ ጣඤ ג മईඤው ሞၿና ୲/ گ Բዜ ڦ SoCဣཥᆩᇀ ᅎ Ljߵ ໙ ഗॲኈኟ ഗ ߌد ഗኮक़Ljᆩᇀց ඤ ण ڦ ഴ ๕ጎዃ Ljኄᄣ ڦ ڦ ༬Ⴀă ᅎă ܔ ᇀ & ;ņ ڦ ၽ୲Ljन๑ Ⴀ ዘᄲă ሞ ٷ ଉCMEMSና ږ ഗዐ &P%ņሺଉ ۼ ๆ ݴ ၂ጣLjժ ၄ ऐႁ๕ ց ԲएԨ ཞ ڦ ᄓLj ڦ ၄ ݥ Lj Ⴀ ă ړ ഗॲԓ ሞ ඤՎ ୲ Ⴀ ዘᄲă ฉLjए ස 13 ๖Ljሞ থഗॲࢫ &&& ዐ Ljኄዖ ॽ ᅃօ ٷݣ ă ᇀMEMS ڦ ဣཥᆶ ੦ ǖ װ ၄ ۆ ႙ ڦ CMEMS ࡕă ኄዖ ݴ ဆLjཞᄣ ᆩᇀएᇀ ୲ DŽMEMSና ږ ഗDžĂ ᅜฉ ࡕ Lj ڦ ऐ MEMS ڦ ና ږ ഗᅜत ᆈና ږ ഗLjᅺ DŽ ߌد ഗDž ۉ უ DŽ ټ ဤ/ ݥ ዘᄲLjՍᇀॺ૬ਏᆶࠤቱ୲ ሞ༩ Ԉጎ ฯ ᆶ ڦٷ ඤ LDODžăᅺ LjԲ૩ᅺጱ ڦ ଳ Ⴀई DŽFITDž ڪ प ڦ ఇ႙ă၂ Lj ܔ ውă ᆈና ږ ഗᅺ ਏᆶ ڦ ၿና ܔ և घ ڦ ᅎଉଳ Ljॽ থ ᇀኄ ઠຫLj ņ ڦ ഗ ଳ Ljᅺ ඤው ᆶఫ ၂ ገ ୲ ڦ ୲ ඓ ă څ ԍLjईኁ ሏ %&&& ժփ ጣăሞएᇀCMEMS ڦ ਦ ݛ ӄዐLj ᆖၚLj૩සཚࡗ แ ڟ Ԉጎ ڦ ዜ ڦ ፌ ኸ๖ă ຕ ภत ڟ ਏᆶ ג ඤ ჽୟ০ گڦ ଳ ऐႁ უ ईև ݴ ୟ Lj ᆖၚ د ܠ বLj ჽ Ⴤ क़ ց ഗॲ ट ڦ ඤ क़ ຕLj๑ ߌഗ ڦ ᅎଉă ܔ ᆌ ڦ ٱ ဃॽገ ܔ ᇀ ዜ ઠຫ ਸ๔ă ڥ ཚࡗ ڇ ण ڦ ና ږ ഗย ਏᆶ ᇑ ၯጚ ୲ ᅎ ܔ ᆌ ڦ ୲ ࡕ Lj ߛ DŽ %&&&ņDž ٱ ဃă LjሞCMEMSዐLjၿናഗ MEMS ၿናഗ ܔހ ᇀߛ گڦ ଳ ॽ أ ኄዖᆖၚăଷ Ⴀ Ⴀઠຫ ĐፁࠕđLjኄ Ljኍ ܔ Ԉጎጎದ ᆌՎᅞ د ཥ փ ٱ ဃLj ᄺॽᆯ ڦ ऐႁॐࠓ ڦ ړ ย Ljፌዕ ߀ٷٷ CMEMSरຍൽ پ ăcmemsरຍLj থ ߌႠLjස 11 ๖ă ਏᆶ߅৫Ă ბ گڦܔ %&P ዖና ږ ഗ ਦ ݛ ӄ ܔ Վ ڦ ୲ ၚᆌ ܔ ԲLj ዐYዡ ߵۼ ጲ ڦ ୲ ዃ ݔ ݣ ă 20 ݔ ᅎ ڦ Ⴀ ܔ ᅝLj ࠕइ ڥ Ⴀ ă লኈ ᇀ ᄺਏᆶዘᄲᅪᅭă د ཥMEMS ހ ጎरຍ ᅃ ՂᄲཉॲLj ܔڍ ᇀइ ഗॲᆶড ڦٷ ᅈડႠLj ୲ ڥ ና ږ ഗ ڦ ፌ ༬Ⴀ փࠕ ༬Ⴀփ ᆯၿናഗਦ Ljᄺ ڟ ڦ ă ฉLjᇑ ݛپ ӄ ԲDŽසມ ᆩᇀ੦ ና ږ ഗ ڦ ᆶഗॲᆖ ݛ ईუ ۉ ଙLjඹᅟ ඤᆅഐ ၚă૩සLjԈጎუ Վ ᆖၚ د වՎDžLjCMEMSཚࡗ๑ᆩ ܠ ଙ ߌഗ ڦ ᅎLjժ ᆯᇀԈጎ ᅜतᆫ ဣཥࠌཞย ሰLj أ ڦ უ Վ ईኁᅺ ሗव ڞ ዂ ᅎՎ ܔۯ ဣཥႠ ڦ ᆖၚLj ߌد ഗ ۉڦ უ Վ LjኄၵՎ ۼ इ ڥ ट ڦ Ⴀă

23 N F N TECHNICAL ARTICLE T र ຍ ቤ %%P ਏᆶ% CMEMSևॲ ڦ থ ᅎ ۆڦ ႙ ݴ ք ă ݛ ӄ ܠڦ ዖፌ ༬ႠLjCMEMSरຍ ᅺ MEMS ᄽ ण ܠ ਏᆶߛ ᆶ ሞ ୲੦ ᄽൽ ڥ ओट ೦ă Ⴀ Ă ໙ ཚ႑ ڦ ฉ ኄၵᆫ Ԉઔǖ ࠀ ăೞ ၄ᆶ ڦ CMEMS ~ ሞ ڦ CMOS ฉ CMOSरຍLjย ටᇵ ࠕ૧ᆩຕጴ ႙ ᇶप ሰ ۉ ୟᆫ ዖ ႑ ย Ljժ ~ ႙ՔጚԈጎ ๑ᆩኄၵย ፕ ए إ रຍLjᅜ ~ Պ ײ Ⴀ ऋ क़ ࠃ ܔ ዜ ਏᆶጲ ߌኪĂ ݴ ဆ ~ ፁIC ᄽՔጚ ڦ Ⴀ ཚ႑ ڦ ব ۅ ă ~ टߛ ڦ ༬Ⴀ ፌ ኄዖ रຍዷᄲᆌᆩᇀ ~ گ ఱუଳ DŽ ࢫ ڦ ๔ Dž % P ມ MEMSና ږ ഗ ༬Ⴀ ڦ ૩ă LjSilicon Labsॽ ᅃဣଚᅜ K & > Kና ږ ഗ ਸ ڦ ~ ଆ ڦ ႠDŽऐႁց Dž एᇀCMEMS ڦ ୲੦ ă ~ ඤ Վ ߅ඡႠ ڦ CMEMS ॽ ፁփཞဦ ݴ ଶ ~ ኍ گܔ ሯำ ڦ કቛ ୲ ᇘ ۉ ጱ - گ ߛڟ Lj ഴ ~ X ߅ඡႠ ๕ ݯ ߛڟ Ⴀ ཚ႑ ஏᆌ ᆯᇀဣཥࠓॺሞ ᇶपฉ Lj ᆩLjፌዕLjॽ ᆩԲ ᆈ ਦ ݛ ӄ ᇶप ڦ ހ ጎ ג ሁՔጚና ږ Ă ঢ়षĂ Ă ඹᅟ ሰ ഗ ހ ጎLjᅺ ቛԈጎ ٷ ण ဣཥย ڦ ኝ ୲੦ 2 ᆶထ Lj ஃ ᆩ௬ओDŽ<1mm Dž ࢩ DŽ &P ኝ ޜࠃ ခă DžઠຫLj ۼ इ ڥ മ ᆶ ڦ ă ມ ၅ एᇀ ᆈ ڦ ਦ ݛ ӄփਏԣኄዖയ %P Lj ณփ ᆩĂ पLjᆼ ਏᆶ Ԩ৪ኛ ă Ljཚࡗփ % P ሞ% ņ CMEMSና ږ ഗ ༬Ⴀ၂๖ ᆫႯ ڦ Ⴀă P 4P $ X> K P PKP 4 % & < &&YP P <P V P Q "P P G ߛCMEMSഗॲย Ăॺఇ Ԉጎर 4 ຍLjፌዕ ࠕᅜ ᇶ ٷ ăኄॽਸഔႎ ڦ ฆᄽఇ๕ǖ ဣཥ 4 %& K && P ण ࠃ ঢ়ࡗၯጚ ڦ ᇶ प ڦ P >P # P PKP < $ Q # $ एᇀᅜฉ ݴ ဆLjCMEMSरຍ ୲ ă ਔ ຫLjCMEMSरຍ K # ኍ ܔ Ⴀ থ ᅎ ਏ ዓ ڦ ࠃࡀ ԍኤă #? ᆶ ڦ ੦ ႠLjᆯ ᇺઠ Ljኄዖႎఇ๕ ᅪ ጣ ݴ 4 P && X X CMEMS ਦ ݛ ӄሞഗॲኝ ዜ ૬ ڦ ୲੦ ॽ ဣཥӱฉ K && P ਏᆶኸ ڦ ୲ Ⴀ ༬ Ljᅺ ॽ ፕ ၹ ت ႠLj ጺ ඓ Lj ᆈई ഗ ण ڟ SoCLjईሞగၵ൧ temperature compensation in MEMS resonators एᇀMEMS ڦ ና ږ ഗઠຫժփਏ Lj থፕ ࠀ تࢫڦ ഗă Q # P أ କ ᆌᆩLjCMEMSरຍᄺ Ԣኄᅃጺ ඓ ă װ ၄ रຍ ڦ ༬ ۅ ă ఇ P 4P $ H # P PKP 4 Y %& Y &&YP P P <P 6 N P P Q KP H N ࠓॺᅈડᇀߛዊଉ ڦ ࠓ # ཚࡗण ᆶएᇀMEMS ਦ ݛ ᅝ๑ย ටᇵ ࠕ ॺظ "# X P K K ӄ ڦ ᆫ ۅ Ljᅜतԍ ई ᆈ ਦ ഗॲኮ ߌدڦ ഗ घ ഗ ڪ Lj > $ P P P %Y P ୲੦ ᄽ ቛዐ ݔڦ ૩! 21

24 TECHNICAL ARTICLE ג ำ ॠ र ຍ ቤ ܔ 2.5D ހ ጎ ڦ ג ำ ג ำ रຍ ᅜ ހܔ ጎ Ă ݥ ೦ Ⴀ ڦ ॠ Lj ଙ ኮक़ ڦ ޏ ଆ ă 2.5D ހ ጎ ᅭ ڦ ዐ DŽinterposersDžॽ ሞᅃ ങ ኹLjሞ ᆶໃ ڟ Sonoscanࠅ ࡂڦ एዐ ᄣ ଇ ཨ ࡀٷ ఇ Lj ᅜ ܔ ড ڦ گ Ԩ ዐLjሞ ڛ ጎ DŽईኟጎ Džᇑዐ ኮक़Ljᅜतዐ ޙ ๑ ހ ጎ ߛ ࠀܠڟٳ Ⴀ ڦ Ⴔ൱ă Lj ᇑएӱኮक़ ۼ ᆩକ ག ଙLjස 1 ๖DŽ Ӏ 2.5D ዐ ణമ ت ᇀሞย ჺ ೦മ ॻڦ Lj Բ૩ ڦ ๖ᅪ Džă ᆶ ڦ ᄣ ۼ ঢ়ጀ໒ ఇ ኄᄺኟ Sonoscan ࠅ ඇ ਸ ג ำ ت Lj ࢩ ໜᄣ ڦ փཞ Վ ٷ Lj ڛ ጎ रຍ ڦ ᇱᅺă ፌࢩ ٳ 500μmLjཚ ๑ᆩ ڦ ᄲԲ ኵ ᅃၵăࡂएዐ ۆ ႙ ڦ 2.5D ހ ጎ ࠓሞ ۥ ևԈ ᆶᅃ ई ڛ ܠ ጎ ࢩڦ ᄲԋᅃၵLjᅃӯᇑ ᇀ ڦݛ ଙཫ ۅ Ljᆩ ཫ ॽۅ ᇑዐ ۉ ăዐ ዐ ڦ ړ Ljሀ 100μmă ހ ጎ ۥ և ࠓ ᅜ ٷ ڇ ڛڦ ࡂཚ DŽTSVDž ᆩፕ ᅃ ሗ ڦ ዘք Ljժ ᆩড ጎ Ljᄺ ᅜ ܠ ժಇ ڦ ڛ ጎ DŽ ᆶ ڦٷ ଙཫ ۅ ᇑ ᇀ ڦݛ एӱ ۉ ă ཫ ڦۅ ࢪ ഐઠ ٷ ڇ ڛڦ ጎ Džăጺ ڦ ຫઠLj ܔ ᅃ ০ཚ 20-30μmLj ଙཫ ڦۅ ০ཚ 100μmă 2.5D ހ ጎᄣ גڦ ำ ሞగዖ ײ ฉ ᇀ ܔ ᅃ ڛ ሞኄ ๆ ݴ ऄሂ ڦ ਸ ࡗ ײ ዐLj ᅜ ၡሞໃ ڟ Sonoscanࠅ ڦ ዚ ܠ 2.5D ހ ጎᄣ ዐLj ᆶ ٷ ଉ ጎ גڦ ำ Lj ڍ և ڦ ଙহ௬ ຕଉ ܠ Lj ๑ ג ำ ࡗ ײ ᄺ ਏᆶ Ⴀă ਏᆶ ዖփཞ൧ ڦ ᄣ ă ހ ጎ ڦ ሰኁ ထ ሞ ڟ גڦ ำ ዐ ၄ဦ ཫ ۅ ড ٷ ଙཫ ۅ ࠓ ڦ ኝႠLjᅜत ᇑዐ ኮक़ ڦ ൧ Ljᅜतଇ ག ଙ ڦ ኝႠă ג ำ ހܔ ጎ Ă ݥ ೦ ॠ ڦ ፌ रຍ ስLjᅺ ᅜ ڟ ଙ ኮक़ ޏ ଆ ڦ ăxพ ᅜ ހ ጎዐփཞ ڦ ଙ ࠓLj ڍ ߴ ଙ क़ ޏ ڦ ႑ 1. ࡂएዐ ፇጎ ڦ ๖ᅪ ă တă ג ำ ᄺ ᅜᆩઠൽ دپ ཥ ڦ ೪௬ ݛ Ljሞ ܔ ᆶ ࡂڦ एዐ ᄣ גڦ ำ ᆩ ݛ ൎߪ ࠓ೪௬ ت ᇀᅃ փ ඇ इ ڥ କ ࠀ ăໃᄣऐࠓ ᄲ ڟ 20μm ཫ ۅ 100μm ኟඓ ڦ ዃLj ᆶ ܔ ඍ ٱ ಒ ၡă ଙཫ גڦۅ ำ Ljᅜඓ ڦ ሞ ዃĂ ኝႠत ሞ ג ำ ဣཥ ړ ዐ ๑ᆩ גڦ ำ ୲ԥ༬ᅪ ݴ ܔ ฉ ௬ ڦ Ⴀăሞ փଆ ڦ ଙཫ ۅ ዐన କଇ ǖฯߛ ୲ DŽVHFLj 5MHz ڟ 75MHzDž ሞ ؽ ฉ ሞᆶ0.01μm ފ ဤLj ᄺ ݒ พबࢭඇ टߛ ୲ DŽUHFLj 100MHz ڟ 400MHzDžă ࡂܔ ए և ڦ พ ג ำհLjኄᄣ ሞ ג ำ ዐ ᅃ ଋ ڦ ዐ גڦ ำ ᄲ൱ਏᆶߛ ݴڦ Ր୲Lj ᅜሞཚ ൧ ༬ኙ Ljሞగၵӄ૩ዐLjኄॽ থ ሞ ዃ ሞᆶ ๑ᆩ ڦ UHF גڦ ำ ഗLj ܔ ܔ ড Սᅓ ڦ ᅃ ଙཫ ڦۅ ඍ ă ի एዐ ᄺ ස ă ٷ ᆌ ᅜ Ljణമ ᆶ ڦ ໃ 2.5D ހ ጎᄣ ڦ ऐࠓཞ ᄺ ጀ ག ଙ 2.5D ހ ጎᄣ ۼ ਏᆶߛ ڦ ฆᄽऐ ႠLj ᅜԨ ቤ ዐ ޏ ሞ ۴ ᅴ ၄ၡă ᇀ ڛ ጎ ࡂएዐ ፕ ጴ௮ Lj ᆶߴ ᄣ גڦ ำ ă ڦݛ ག ዐසࡕ ሞ ۴ॽ ۼ ԥ ג ำ װ ၄ă ۴ גڦ ำ ړ ၂ ڦ Ljᆮ ړ ت ᇀ ଙཫ ۅ Tom Adams, Sonoscan, Inc., Elk Grove Village, IL 22 ಖՉ Ljኄ ᅺ ག ଙ ڦ ਆևඍ ༬ ܔ ത ଙઠ

25 TECHNICAL ARTICLE 23

26 TECHNICAL ARTICLE ג ำ ॠ र ຍ ቤ ᅃဣଚ גڦ ำ Lj ړ ᇀ ݣۯ ڦ ڨ ᆙᅃ ᄣăසࡕሞ ଙཫ ۅ ई ག ଙዐ ሞᅃ ᅴ ۅ Ljኄၵ Flip chip ג ำ ࠕ ࠃኄၵᅴ ڦۅ ਏ ဦবă PI layer Interposer ཚ ኄၵ ཚ ሞศ ฉԥยዃ থ ๕Lj ڍ ཞᄣᄺ ᅜยዃ ๕ă ཚ ศ ڦ ᅜሺ ڦ ຕଉLjժ ࠃ ڦܠ ႑တă Substrate Ljසࡕ ڛ ጎ ሞ Ljኄዖ ڦ ݛ ᆫ ۅ ڟ ਆ Lj ዐ ڦ և ݴ ᇘ ܔ ᆌ ڦ ศ ג ᇨ ย ཚ ڦ ศ ݔ Ljኄᄣ ڦ ኈă 2. ހܔ ጎᄣ ڦ ࠓ༬ኙ ศ ג ำ ă ຫ ๑ ദᅎ ڟ ۴ዐLj๑ ۅཫڥ Վ ժ ๑ ܔ ዐ एӱक़ ڦ ଙཫ ۅ ဦব ᅃၜ ࠀ ۉ ă ڼ ዖऐ ତৎ ۴ ڦ ଙཫ ڦ ۅ ໟ ਏᆶ Ⴀ ڦ ፕLjᅺ גڦ ำհՂႷᄲ ح ሁ ܠ ଛ၄ၡLjኄዖ ႙ཚ ሞࡂएዐ ࠓዐ๑ᆩ ത হ௬ăཚ ཚࡗӝ ᆩ ڦ ᇘ ఇ๕ገ ᇘ ଙ ሶ ९ă DŽFrequency Domain Imaging, FDIDžఇ๕ઠሺഽ इ ڦڥ ଷᅃ ጀ ۅ ሞૐ থ ۅ ᅜतཫ ۅ ᇑཫ ۅ ኄၵဦব႑တăFDIఇ๕ ӝߴ ศ גڦ ݔ ำ հ ݴ DŽUBMDžኮक़ ޏ ၄ ݴ Lj౾ ᄺ ڟ ڦ ڇ ୲ăኄၵศ ݔ ཚ ᇀ ଙཫ ۅ ዖ ڦ ඍ Lj ڟڍ ణമ ኹLj ᆶ ڟ ག ዐ ག ሞ ؽ ݛ ڦ કቛ ăߵ ݴ ࢫ ג ำ հ႑ ሞᆶག ଙ ૭ ڦ ౡ ၄ၡă ᅜइ ڥ గᅃ ୲ גڦ ำ Ljᅺ ג ڇ ำ ௮ ሞ ڛܔ ጎ ଙཫ ۅ হ௬ ଙཫ ۅ ג ำ Lj ᆩ גڦ ำ ୲ॽ ڟ ਏ ހ ጎ ࠓ ڦ ᅜ ڟڥ 20 ڟ 30 ג ำ Ljኄၵ ઠጲᇀਏᆶ ཞ ڦ ג ำհ ঋศ ă ă૩සLjగၵ ڛ ጎ ዐ ᆶగዖ ܠ ଙ ፕ گڦ ሞॠ ኄၵ Lj ג ำ၂ ڦ ፕኁ ᅜ ጀ ۉ ຕDŽlow-kDž ዊ Lj גܔ ำհ ປ३ăሞ గ ࠓሞగᅃ ୲ ᇑ ᅃ ୲ ޏ ᆶ၂ጣ ڦ ڛ ጎ ڦ ᆶᇸ ฉᄺ ޑ ᅃ DŽpolyimide, փཞăኄᄣLjཚ ሞ ג ำ ᇘ ఇ๕ ᅜవᅜ ڦڟ ᅃ PIDž Ljᆯᇀ ᅃዖߛ ݴ ጱ ଙLjPI ཞᄣ ᆅഐߛ ၵ ڦ ईኁփ ၂ ڦ ᅴ ۅ Ljස ଙཫ ۅ ฅई ۴ ڪ ג ำ႑ ڦ ă ᅴ ॽ ሞᅃ ई ܠ FDI ג ำ ዐՎ ڥ ည ९ă ణമ ܔ ᆶࡂएዐ ހڦ ጎᄣ ۼ ᆯՔጚ ڦ Sonoscan ഗ ג ำ ڦ Lj ڍ ᅙঢ়ᆶኤ Lj ᆩኍ ࡂܔ एዐ ڦ ब ጒ ଙ ጆ ဦ גڦ ำ ഗ इ ڥ ਏᆶ ߛዊଉ גڦ ำ ă ܔ గၵᄣ ჾLjཚࡗᆌᆩᅃዖ ॲ ᅜ ܔ ଙཫ ۅ इ גڦ ڥ ำຕ Lj ॲ ڦ ፕኁ Alchimer ڦ โ๕ ק ओ ᅝ ࠃ20:1ศ ԲTSV Alchimer Ⴧքᇑ ࡔჺ৯ऐࠓCEA-Leti ٳ ၹፕ ሀLjᅜೠࠚ แAlchimer 300mm ٷ ଉ ჺ ڦ โ๕ ק ओ ᅝă ጆӄॽ Ăፆ ڔ ዖ ೠࠚAlchimer ڦ ElectrograftingDŽeG:trademark:Dž ChemicalgraftingDŽcG:trademark:Dž ײ ă Alchimer ڦ โ๕ ᅜॽኝ ߌ႗ ڦ ศ ᇘ ݴ ᅃဣଚ ૬ ཚ ק ओ ᅝᅙঢ়ኤ Ljᅺ ஃཚࡗ ஸĂ ০ ศ DŽgatesDž ڦ ศ Ljሞᅃ ג ำ ௮ዐLj ܔ ᅃ ཚศ ᅜԍ ݛ ๕ Lj ᅜ ᅜ ၄20:1 ศ Բ ڦ TSVă 3D ኝ ኟ ו ጣዐ ፈ ڦ ፔ ቛLjनሞമ ᅝ ᅃ ג ำ ă ॲፌ ڦٷ ศ ཚ ຕଉ ٳ 200 ăሞࡂएዐ ᄣ ዐLjට ႐ ଇ ག ڦت ศ ᇘLj ዐᆶጣ ଙཫ ۅ ᅜतሞ ག ฉ ݛ ݛ হ௬ăኄଇ ศ ᇘ ؽڦ ศ ݴ ሀ 25μm ኮࢫLj ڍ ඐሞ ኮമ TSVăᅃၵᆌᆩኟ ت ᇀჺ Lj ڞ ዂTSVरຍ ڦ փཞࡀ ă Alchimer ڦ रຍ၂ ๖ ೦၄ᆶቱҹLj ၄ߛศ ԲTSV ڦ യ ăeg रຍ ॺ૬ሞ ௬ ბದ ݛ ᇑ ᅝए إ ኮฉă ᆌᆩᇀ ڞ तӷ ڞ ௬Ljሞ༬ മ ݴ ጱᇑ ௬ኮक़ ڦ ᇱ ბ ݒ ᆌ ڦ 100μmLj ᅜยዃඪᅪຕଉ ڦ ཚ ઠሞగᅃศ ฉ ܔ ፕᆩ Lj๑ ዖ ଙ ڦ ԋ ࠕጲ ă ᅝ ג ำ ă ཚ ᅃ ૬ גڦ ำ Lj ࠕ ၄ԍ Ă ༱ ߃ᇑ ڦ ك Ljኄ ߅๕ ײ ᅜሞᅃ ԋ ዐໜጣ ג ำ ศ ڦ Ⴤ ᅎ ۯ Lj ڦڲ ă 24

27 TECHNICAL ARTICLE ଙ र ຍ ቤ ᆀ Ăဏ ᆀ Ăᆀ ኮ၂ ፇኯ༬ႠᇑઙฦႠዊჺ৯ ᆀ ਏᆶߛ ୲ڞۉ ᆫᅴჽቛႠLjᅺ ৎଇ ۉڟ ጱ ހ ጎ ᄽዘ ओटೠࠚᆀ ൽ پ ڦ Ⴀăਲ਼ஓ रण ষዺ ဦཟ ᇑჺ ए إ Lj ศ ༪ᆀ ဣཥሞ၂ ፇኯ ٶ ൰ ऐႁ Ⴀዊ ڦ ăణമᅙኍ ܔ ০ 18 m كڦ ᆀ Ăဏ ᆀ ᆀ ቛਸ ଙႠዊჺ༪ăཪࡗඤ ت ײ DŽ225ņ~275ņLj30minDžॠ༪ᆀ ڦ ൰മࢫ ڦ ઙฦऐႁႠዊLj ൰DŽ Džև ڦ ౡ ऐ ᄺ ԥ ဆ༪ஃă Lj ܔ և ݻ ᆀ ᇑဏ ᆀ DŽཁ! && < Džሞፇኯᇑઙฦऐႁ༬Ⴀฉᄺ ԲডLj ൰ ༬ኙ ၄ဏ ᆀ ਏᆶ ߛഽ ൰և ࠀڦ Lj ᆶ Ն௨ ٶ ୟLjᅨ ޗٷ ᄟ ༬Ⴀăሞփ ཞඤ आ ᆌ Ljঢ় > ت ڦ ဏ ᆀ ਏᆶᆫᅴᆘ ኵ ઙฦႠዊăምኁLjᆀ DŽ4wt.% PdDžঢ় आࢫ ๑ ᇮ ዊ ݴ քLj أ ᆶ ሺ ഽ ჽቛႠ Ljᅨ ই گ হ ၄ၡă മჾ ຕย ࠌၛă Ljᆀ ߛ ৎ Lj ߛቩLjඇ๘হ ހ ጎ % ᇀ ك ཟ Lj ᇑ ཟ ړ Lj ڍ Ljኵ ڥ ᅃ Բഐᅃ ቩ ڦ ᅈ৹ԍᆶ ฉ ڦ Ljᅺ קۈ ओᇑ ย ڦ ᆫ ăምኁLjᆶ ၅ኸ % Lj ᅴLjཟ ײ ժ ඇൽ پ ײ ă ሞ ۉ უ ᅜत ח โ ڦ Ljᆀ ጱ ᆶ६ᇀཟ ײ ධᆶ౮ ڦ क़Lj૩ ਏ ۉ ბദᅎ၄ၡLjᅟሰ සᄟ Ăᆘ ĂX > ڪ Lj ᅜ ă၄ ᅙ ᆩ گ ୲resinઠದ ހ ጎ ߀ᅜᆶ ཟ DŽ> Q ᆀ ײ Lj Ԩण በሞణമᅙᆶ ڦ 4! Ԩሀࡍ2ԠLj ডᇀ ك ཟ ཟ ए إ ฉምਸ ᆀ ဣཥ ড ڞݵݵ ཟ ײ Lj ڍ ධ ഓᄽਏᆶড ܠ ঢ়ᄓLjժষዺԨण ሞ ᆶଇ ٷ ǖ ڼ ᅃ ሀ20%~30% ߛ ݴ ጱଶᇘ ڦ ଶ ںڞ ޗٷ ই گ ײ ԥཟ ײ ൽLj ڼ resinᇑ ௬ ݒڦ ᆌ ă Džઠᅺᆌ ײ ཟ ฏ ڦ ཟ ൰ <ܔ ᇑ ݥ < ߌ ڦ ᅴ ٷ Ljᄺሰ ཟ 1. փཞ आ 18 mᆀ ፇኯ༬ኙǖ Q Lj ņLj &ņLj ņă ߵ ణമ ᆀ ײ ຕ ǖ ඓණᆀ ཟ ײ ڦ ڞ ൰ᆶ ስႠኮᆌᆩ ৡăएᇀฉ Lj ሞยԢᇑ ײ ཉॲฉᇑ ᆯLjԨण ਸ ᆀ ײ Ljᅃ ݛ ᇱԨ ײ बࢭᅃዂă ୯ ڞ ௬ ڞ ༬ 20%~30% ײ Ljଷ ሞ ހ ጎ ՂႷ ଆ ൰ৡഽ त ᅃ ݛ ௬ ௨ ܮأ ยԢႴ൱Lj र Ljঢ়ࡗศ ኮᆀ ഽ ຍᅨ ڞ ײ ă ฉLjᆀ ᇑᆘ گ ᇀ ཟ Lj ڍ ںܔ ඹ ۉڞ Ⴀᇑ ڞ ඤႠᆫଆժ ᆩ ăᅺ Ljศ ᆀ ڦ आඤ ت ၂ ০ᇑ ܠ থ ײ Lj ᆘ ഽ Ⴀ ڥ ट ዘᄲLj༬ Ԩဣཥᆶ आມ ዊᇑ ړ ăᅺ ײ ยԢᇑ ሞLj ऐ ᇑઙฦऐႁႠ ዊᆶ ൎ ဣ % ăምኁLj ڦ ዃबࢭ ሞ ᇑ൰ኮक़ ڦ ৡևLj၂ ਲ਼ஓ रण Lj ࡔ पߛႎरຍഓᄽ 2. փཞ आ ᆀ ᆘ ଉ ݴ ဆă ۅ ᆌणዐ၄ၡ ৡև၂ ፇኯᇑ 25

28 TECHNICAL ARTICLE ଙ र ຍ ቤ ࡕᇑ༪ஃ ᆘᆀ आᆀ ڦ প௬ፇ ኯස 1 ๖Lj ၄ဦ ศ ૭ ሞLj ૭ ዡ ݛ DŽ % Džă 1b 225ņ आ ፇኯLj ၄և ڪݴ ዡ ሞए ں ă 1c 1d ݴ 250ņᇑ 275ņ आ ፇኯLj ए ں ዐ ၄ ඇ आ ڪ ዡ Lj ૭ໜጣ आ ሺ ᆶ ൵ ăምኁLjᅴ ڪڦ ዡ ሞ 275ņ आ ፇኯ ڟ Lj၂๖ए 3. փཞ आ ᆀ ኮઙฦऐႁႠዊ ݴ ဆDŽ Q ņ~275ņDžă ዃኮ ဣ % % Lj ኄၵऐ ᇑ ڦ ኯࠓ༬Ⴀᄺਏᆶ Ⴀ % % ă ڦ ኈ आ ت इ ڥ փཞ ཉॲ ඓණLj ሞ ۉݣ ൰ࢫDŽ ༪ᆀ आऐ ൰༬Ⴀăଷ Lj && ԥཁ ᆀए ں इ ڥ ဏ ᆀ Ljဏ ڦ आཉॲ ስ <HDž ڦ ౡ ፇኯ༬Ⴀᇑৡևඤ ሞ >Ă >ᇑ > ኈ ᆖၚ DŽ# Džᇑ आ30 ݴ ዓLj ᅜ < پ Ă< থ হ௬Ԋ ၄ၡ Ljহ௬ഽ Lj Lj< ๖ăᆀ ڦ Բ૩ ߛ DŽ# # ੦ ଉሞ4wt.%Lj आཉॲ % % % %Y Lj & && >ኈ आ ت & ݴ ዓă ཁ ဏ ᇮ ਏᆶ ᄟ ᆶ ፇኯĂઙฦ ᄓĂᆘ ԥჺ ༬ႠLjཁ ᇮ ᆶ ᅞ হ௬ ༪ԲডLjઙฦऐ DŽ H@ " % ڪ ᆶ ဣ ăएᇀ LjԨण ᄓ ઙฦ ୲ 5ġ10 s % Lj ষዺ മ ܔ ڦ ቨ Lj Ԣ 5cmLj ຕ 18 mᆀ Ăဏ ᆀ DŽ! && Dž ൽ5ፇ ኵă Ljኍ ܔ ჽฦ୲DŽ ᆀ DŽ4 wt.% PdDž Ljষᆯ आऐ DžĂই ޚ ഽ DŽ ༪ም ༬Ⴀ Ljժཪࡗ KDž त ઙഽ DŽ ײ ॠ༪ և ᄹ ၄ၡ ઙฦ "KDž ڪ ຕ Բডă ऐႁ༬Ⴀत <Hౡ ࠓ ܔ ፇኯ ᅜඤᅼհ ٶ ऐDŽK# ऐႁഽ ኮᆖၚLjᅜ૧Ԩण K4H "K Dž ۉݣ ൰ ݴ ڞ ᆌᆩ ă ဆă ۉݣ ൰ࡗ ײ ዐཚ Y 2 ᇑ क़ & ๑ᆩ ᆘ ऐଉ ڦ ᆘ Lj ڦ ᆀए ں ăኄև ॽݻ ᅜऐႁႠዊઠॠ ణമ ٶ ڦײ ए ں ऐ DžLj൰և DŽ ں आཉॲᅙਏ ඇም ༬ኙă 4. ᆘᆀ ฏ൰ࢫ၂ ፇኯǖ <H ᇑ 0~100 m क़Lj %&& && m क़Lj && && m क़Lj && && m क़ăଉ ਐ ጲ 2 ڦ ഘ DŽ ଉ 1L/minDž रຍ ײ 4Nᆀ ݴ ದ ဏ ᇮ ᇮ ࢫঢ়ኈ ዽऐ ሰజ ࢫժᅜ ᅜՆ௨ᄟ Lj ۉ % <Lj Ⴤ क़ 1.2 msă ᆘ ݛ ௬ሶ๑ᆩ K# 6 &&& ᆘ ᅏLj๑ᆩ ऐॽ ০18 m इ ڥ ዘ Lj ሜԍ क़ 10௱ă ᅃ ك ᆀ Ăဏ ᆀ ᆀ ăᆘᆀ ڦ ᆘ ଉ ኵ 5ፇຕ ᅜ225ņĂ250ņLj275ņ 30 ݴ ዓ ኵLj უ ڦ क़ਐ ٷ ᇀ40 μmă आ ᆀ ฏ ൰ ࢫ ၂ ፇ ኯ ǖ < H ᇑ 0~100 m क़Lj %&& && m क़Lj 300~500 m क़Lj && && m क़ăଉ ਐ ጲ ă

29 TECHNICAL ARTICLE ଙ र ຍ ቤ ၂๖ᆘ 250ņ आ ঢ়ԍ ഘ ݳ DŽY 2Dž ۉݣ ൰ࢫ ڦ ፇ ኯ༬ႠLjଇኁ൰և ਏኈᇶ ൰և ௬ ൰০ ٷ ړ ă ඓණԍ ഘ Ն௨ߛ ᄟ ᆌ ၹዺ ٶ ฏ൰ ײ ă Ljฏ൰ࢫ և ڦݻ ೪௬ፇኯᅨ װ ၄ሞ 4ᇑ 5Lj൰ևፇኯԈ ڪ ዹጒ Lj ৡ և ૭ᅺ ඤ ᆶ ൵ ă أ କዹ ጒ Ljৡևᄺᅺฏ൰ࡗ ײ ም ᆌLj ۴ ڦ Ⴤፇኯ ሞ൰ P ᆀ ၂ ፇኯ ǖ < Lj < Lj < Lj < ă և ඤᆖၚ ኮक़Ljౡ ݛ ᆯ ම և ו භ ڦ ൰ևă 4ዐ ষዺም ๑ ڥ ዐ ڦ ૭ᆯᇱԨ ڦ ဦ ૭ገՎ ڪ ዡ ăฏ൰മLj 250ņ आ DŽ 5Džᅙਏᆶ ڪ ዡ ૭Ǘฏ൰ࢫLj ڪ ዡ ᆶ ăᇀඤᆖ ၚ Lj ڪٷ ዡ ૭ ԥ ڟ Ljᆯ ൰և ڟ 150 m ዃᅨ ၄ᅃ ၵ ڪ ০ ሞLjኄၵ ٷ ૭ ᆖ ၚ ڦ ऐႁႠዊ ඤᆖၚ ă आᆀ ဏ ᆀ ڦ ၂ ፇ 7. ᆀ ᇑဏ ᆀ ઙฦଉ ݴ ဆă ኯ װ ၄ሞ Ljཥ ڥ ኪLj आᆀ ࡕස 2 ๖ă ᆘ ໜጣ आ DŽ# Dž Dž ፇኯԈ Ⴙ ڪܠ ዡ Lj ڍ ૭০ ݴ ք ݔ ሺ ᆶ ই൵ Lj ᆘ ݴ քሞ ᆶ ڪ ዡ ڦ आ ă 4ᇑ 5 ݴ ݘ DŽ Džă ၂๖ဏ & &Ljᇑ د ཥ ᆘ ኵ ৎă ڦ ፇኯ༬ኙLjႹ ܠ ጒፇ 3၂๖ᆀ आᆀ ኮઙฦऐ ኯ ݴ քሞ և ᇘLjዷᄲ ᆯ ႁႠዊLjᆘᆀ ڦ ጺჽฦ୲ ড ڦگ आཉॲփࠕ ڞ ዂศ ධ DŽሀ10%DžLj250ņ ኮ ઙഽ ሞए ں ዐ ዂă ݴ ၂๖ ই ޚ ഽ ই گ Lj ჽฦ୲ሶ ဏ < ᇑဏ < ~17%ă ๑ ߛ आ 275ņLj ڦ ၂ ༬ኙLj ඓණᆶ ၂ ૭ ሞઙฦऐႁႠዊฉ ᇑ250ņ ၄ၡLjዷᄲऐ ᆯᇀ आཉॲ Lj ඓණ आ ᅙ ٳ ፁጒༀă ଉ ᇧ ᆻ ૭ ٷ ăଷ Ljᄺ ኵ ڥ ጀᅪ ڦ Lj250ņ ਏᆶ ඇም ၄ᆶႹ ܠ ဦ ૭ णሞ आᆀ ፇኯ ჽฦ୲ਏፌߛኵLjᅺ ဏ < Lj ᅪ ጣଇዖ ඓණ250ņ Ԩဣཥᆀ ም ă ධᆶড ܠ ૭ ڦ യ ă ሞ DŽ Dž आᆀ ဏ ᆀ ڦڦ ઙฦऐ ࢫLjᆀ ڦ ൰ ࠓ ݴ և ݻ ǖ ႁႠዊ ๖ሞ 7Lj 8ሶ၂๖ 1Dž ᆶዹጒ ڦ ൰ևDŽ ڦ ᆘ ኵăߵ ჺ༪ ࡕ၂๖Ljဏ <HDž Dž ᆶ ڪ ዡ ڦ ඤᆖၚ 8. ᆀ ᇑဏ ᆀ ᆘ ଉ ă < ᅺਏᆶ ጒፇኯ ᅜ 27

30 TECHNICAL ARTICLE ଙ र ຍ ቤ (a) (b) YP ᆀ ᇑဏ ᆀ ۉݣ ൰ ǖ < Lj < Lj < Lj < ă (c) 11. आ18 mᆀ ᆀ ઙฦऐႁႠዊ Ljᄺ ٶ ᆌᆩăໜጣ आ ሺ Lj ၄ဏ ᆀ ڦ ᆘ Ⴤ Lj ዐᅜဏ < ਏᆶ ፌ گ ᆘ ኵă ሞ ײ ዐLj ԥභ ժౡ ൰ ăౡ ტ Lj ᅺ ൰ևबࢭ ۼ ዹጒ ፇኯLjժ භ ඤ DŽᇺ ൰ևDž د 10. आ18 mᆀ ᆀ ೪௬ፇኯ ݴ ဆă ᆶፌ گ ჽฦ୲ ፌߛഽ ăምኁLjໜ ڞ Lj ᅜ ሞৡևࢫ ඤ ଇኁ ਏᆶ ৎ ڦ ፇኯ༬Ⴀă ᆖၚ ă ᆀ ڦ ฏ൰և༬ኙස Y ጣ आ ሺ Ljই ޚ ഽ ઙഽ ᅃӯ ჾLj ڦ ᆘ ሀሞ ๖Lj ᆶ ဣཥ ۉݣ ฏ൰ ইă आᆀ ڦ ઙฦഽ & ݥ ٶ থ ൰ጒăኵ ڥ ጀᅪ ڦ Lj आᆀ ฦ୲ ᇀဏ < Ljᅺ ײ ăᆯ 8 ڥ ኪLj आᆀ ڦ ᆘ ሞ ڦ ൰և ০ড ٷ Lj ဏ ᆀ ڦ ൰ 28

31 TECHNICAL ARTICLE ଙ र ຍ ቤ և ٷ ড ٶ ײ Lj ሀሞ تײ ඟ ሞए ں ዐ ዊ ݴ Lj " Q # mLj ൰և ሀ 10 ዹጒ ഽ ই گ হ ă # $ > ;< ăᅺ ඓණဏ ᆀ ࠃড V ൰ౡ ༬ႠLj๑ ڥ ൰ևፇኯ ၅ Բᆀ ਏᆶড ᆌᆩႠă %P # P ># P KP ᆀ ঢ়փཞ आ ت ڦ ၂ ፇ Q # # Q ኯස 10 ๖Lj କᇑ ك ᆀ Բ ܔ ፇ % &%% % % % P ኯ ᅴLjᆀ ڦ आཉॲᇑᆀ P ># KP P # KP P V P && % P %&P P P P # KP P "P K $ V # Q ཞLjᅨᅃժ װ ၄ሞ 10ăԨဣཥᇑമ # X $ % &%% P ᆀ ዷᄲ ᅴ आ क़ᆯ30 ݴ ዓ # Q %%P P # P > N ሺ & ݴ ዓă ܔ Բࢫ ၄Ljᆀ ፇ % &%% % % &P ኯඹᅟໜጣ आ ሺ ᆶ ૭ # $ Q # # # Lj ᆀ ၄ၡሶփ၂ጣă $ Q $ > Q # ምኁLjᆀ ፇኯᆶໜጣ आ ሺ Q P হఇ ༬ႠLj ऐ ዷᄲ ᇮ ඤક ሞए ں ዷ ڞ ă ړ "P H # % P XP P "P KP ># % &%% % % P P KP G % &%& YY & P "P V <P N # < K # " ߛ आ Ljᆀ ए ں ዐ ڦ ݴ ք H # ዊ ߛ Ljᅨᆶ ᄟ ༬Ⴀ <" X< K % % P 4 P "P P P KP ># % &%% YP DŽই گ হ ײ Džă P 11 ઙฦ ᄓ ࡕLj G ၄ᆀ ڦ ഽ ᆫᇀᆀ Lj య ᇮ ਏᆶ මഽ ༬Ⴀăም Q H # # > KP K V # 4P # $ ># P 6 # XXX P H G > P P P % P % 4 ኁLjᅃӯ ਏߛഽ ኁ ٤Ⴀ ᆌ K# ၂ጣ๑ ڥ ჽቛႠই گ Lj ᆀ ሶ X " > H > P P && Y% Y P % P P K V # KP P P ၂ጣჽႠ Lj ໜጣ आ ሺ > 4 V < ># P 6 # XXX > K LjઙฦႠዊ ၄ ߛ ഽ ߛ ჽႠႠ " # 4 < 6 P% "# > H H "# ዊLj ೠࠚᆌᆩሞ ڞ ހ ጎ ײ ă P K %YY P K && Y P P ஃ 4P P 4P K 4P # 4 V % P KP P K V # ># P 6 # XXX K 1. ᆀ ဣཥ ڦ ም ཉॲ ሞ < " đ X K H $ "# Ԩჺ৯ዐԥඓණLj ඇ आ ਏᆶ " > H H P ># P & ڪ ዡ ए ں Lj आऐ ই گ ഽ < && Y &P ᆘ Ljჽฦ୲ሶ ޗٷ ሺ ă ># P %Y P 2. ဏ ᆀ ሞডߛ आ ཉ > " # 6 P % P "P P P KP ># P # P N P KP 4P 4P P P KP 4 P P ># "# ॲ ၄ ڪٷ ዡ ૭Lj ܔ ჽฦ୲ᆶ # P < # ኟ௬ ᆌăဏ ᆀ ۉݣ ฏ൰ࢫ൰০ ># # Q ٷ Lj൰և ௬ ፇኯ ᆶ ># $ X " # ړ ຕଉዹጒ Lj< ဏ ᆀ $ 6 PY && ᆘ ᇑ आᆀ ৎă P K &&Y P &P 3. ᆀ ዐ ᇮ ষዺ आ P YP >P >P P P P #? # % P P P P # KP ገ ڼ 31ᄻ 29

32 TECHNICAL ARTICLE ཟ ײ र ຍ ቤ ཟ ײ ጒඍ ڦ ჺ৯ ཟ ײ ᅙঢ় ݘ ᆌᆩᇀ ࡀٷ ఇण ۉ ୟ ڦ ײ ዐă ਏᆶ ႠߛĂዊ ĂჽቛႠ ڪ ᆫ ۅ Lj ཟ ۉگڦ ፆ୲Lj ᅜᆶ ই گ RC ពăԨ ዷᄲ ถକཟ ײ ዐ ք ዷᄲඍ ጒඍ ڦ ᇱ Lj༪ஃକ बዖᅺ ܔ ඍ ڦ ᆖၚLjժቴ ᅃዖ ਦඍ ڦ ᆶ Ӹ ă 1. ० ໜጣӷ ڞ रຍ ڦ ቛLjཟ ᆯ Mirra-mesa ბऐႁჺఉ أ inspection ऐ 2351 ᆩઠॠ ბऐ ܠ ᇆ ڦ ཟԋఈăKLA-Tencorࠅ ڦ ႁჺఉኮࢫ ڦ ඍ ă ᇀ ড ۉڦگ ፆ୲ደॷൽ پ କ୩ ፕ [1][2] Ԩ ᄓዷᄲჺ৯ሞ ბ ۉ ă ӷ ࢫ Lj ᆩփཞ ڦ ᇨ ဢ क़ ڦ ڞ Lj३ณඍ ӷ ڞ ᇨ ဢ ܔ ጒඍ ڦ ᆖၚLjᅜ रຍ ڦ ቛ ݛ ă ጒඍ ཟࢫ त ბ ۉ ڟ ბऐႁჺఉਸ ײ ᆶ ڦ ᅃዖඍ ăኄዖ ๔ኮक़ ځڪڦ क़ ܔ ඍ ڦ ᆖ ඍ ཚ ሰ Ӛ Ljჹዘ ں ၚăཚࡗᆫ ܔ Բ ڥ ३ณඍ ᆖၚ ڦ ଆ୲ă ጒඍ ڦ ऐ ፌᆫ ڦ ᅝ ຕă ڦ ଙ ᆶबዖǖ(1)ཟጯ ڟ হ ዐᆶऐ ڦ කLj ڞ ዂ Ⴀই گ Lj 1. ጒඍ ௮ ۉ ஸă 3. ࡕᇑ༪ஃ ᆶऐ ݣ ሶሞ ฉ ᅃ 3.1 㕰䲭ᖘᡆᵰ ガ ă(2)ሞ ۉ ࢫ ڦ ဢՉࡗ ײ ዐLj 3ዐ ᅜ Ljཚ ዐჿ ሞ ௬ ڦ ბवई໗ ፌศ ڦ և ݴ ፆ ڔ Ljԍ ڦ त Lj ڦ क़ࡗ ኝăჿ ডറ ڦ ཟLjཚ ዐक़ ڦ ཟఈ ڦ ă(3) ბჺఉࡗ ײ ዐLj 2. ᄓ Ԩ ᄓ ᆩ ഘ ק ओ ሞ ٷ க๗ ࠓ ฉLj ק ओ ဢጎዃă 1 Crater defect count ბჺఉवփ ሌሰ ཟఈԥ ă 2 3 Å ᮳Ă ڌ ᮳ມ ԋఈፕ ཟፆ ڔ ଙăথጣሞፆ ڔ ኮฉLj-20ņ DI wafer flow rate Lj ק ओᅃ 1200 Å Cu ԋఈፕ ཟ 4. փཞ ڦ ᇨ ဢ ଉ ܔ ጒඍ ڦ ᆖၚă ጯ ă ഘ ק ओ ᆩAMATࠅ A ኮฉLjཚࡗLamࠅ ڦ Sabre ऐ ᆩ ბ ~ ۉ 7000Å ڦ ཟԋఈ ଙăথጣᆩAMATࠅ ڦ CMP ऐ ॵᆨLj ؾ Lj න Ǘዐ ࡔ ण ۉ ୟ ሰ(ฉ )ᆶ ࠅ 30 B C Crater defect count ڦ Endura 5500ยԢLjሞཟጯ DI wafer clean time 3. ጒඍ ڦ ཪพ ۉ প௬ ă 5. փཞ ڦ ᇨ ဢ क़ ܔ ጒඍ ڦ ᆖၚă

33 ཟ TECHNICAL ARTICLE ײ र ຍ ቤ क़ क़ ڪ ᅺ ܔ ጒඍ ڦ ᆖ ၚLj ڥ କස ஃǖ ጒඍ ڦ Post CMP Crater-damage vs Q-time ሞ ײࡗ ۉ ዐ ڦ ă ཟ ۉ Crater+damage 6 ڟ ბऐႁჺఉኮक़ ڦ क़ क़ B C ሁ Ljཟ ڦࢫ ۉ ᇨ ဢ क़ሁ sample2 Ljᇨ ဢ ጱ ଉሁ ٷ Ljሁփ sample3 ඹᅟ ጒඍ ăཚࡗᆫ sample4 ስକᇨ ဢ ଉ 650ml/min, ဢ Type ECP-CMP Q-time A 0-12 B C D A sample1 D ECP-CMP Q-time क़ 13sLjक़ क़ ᇀ12 ፌᆫ ᅝཉॲă ၅ ڟ ۉ ბऐႁჺఉኮक़ ڦ क़ क़ ܔ ጒඍ ڦ ᆖၚă Terry Chena, Jian Kang, and Adrian Hu, et al. Copper seed process optimization ᇘ ڦ ཟ ۉ ԥӛ Lj ۴ă ᅺ Lj ስ650ml/min ፕ ፌᆫ for pits defect improvement. The ᆯ ᅜ ڥ ጒඍ ሞ ײࡗ ۉ ᅝ ຕă Electrochemical Society, 2010, 27(1):625- ዐईጣ ײࡗ ۉ ኮࢫ ڦ ă 630 ස 5 ๖Lj ᆩփཞ ڦ ᇨ ဢ 2. Richard L. Guldi, Judy B. Shaw, Jeffrey ߵ ጒඍ ڦ ᇱᅺLj क़Lj ݴ ت ڦ ۉ ăཉ ڦࢫ ۉ ဢĂ ڟ ۉ ბऐ ॲA,B,C ݴ پ 13sĂ9sĂ5sLj ဢ Ritchison, et al. Characterization of Copper ႁჺఉक़ क़ ܔ ጒඍ ڦ ᆖၚ ڪ क़ሁ Lj ڦ ጒඍ ሁณăሞ Voids in Damascene Processes. Proc. IEEE ݛ ௬ ჺ৯ă ཞ ဢ Lj ဢ ڦ क़ሁ ሁ Int. Semiconductor Manufacturing, 2004, ඹᅟ ۉ ڦ ბवăᅺ 17(4): 䭶ᇂᡆ Ⲻ ሯඇ 㕰 ስ क़Aፕ ፌ ڦ ဢ क़ă 䲭Ⲻᖧ ཟ ײࡗ ۉ ࢫLjᆯᇀ ฉ ᆶ໗Ⴀ ᅂ Ljᅺ Lj ॽ 3.3 䭶 䰪䳊 䰪ሯඇ 㕰䲭Ⲻᖧ ฉথ ڼ 29ᄻ Iterative optimization of tail breaking force of ڟد ဢഹ ዐ ဢăස ཟ ۉ ఈ ڟ ཟ ბऐႁჺ 1 mil wire thermosonic ball bonding processes ࡕ ဢփ ඇLj ڦ ໗Ⴀ ᅂ ఉਸ๔ኮक़ ڦ क़ क़ ܔ ጒඍ and the influence of plasma cleaning, ఈ ௬Ljሰ ඍ ăཚࡗᆫ ۉ ڦ ᆖၚස 6 ๖Ljໜጣक़ क़ Microelectronics, 38 (2007) ࢫ ဢࡗ ײ ዐ ڦ ጱ ڦ ଉLj ڦ ሺ Lj ጒඍ ၄ ڦ ຕሺ ă 18. C. L. Chuang, J. N. Aoh, R. F. Din, Oxidation ३ณ ጒඍ ڦ ăස 4 ๖Lj ኄ ᆯᇀཟ ۉ ኮࢫLjሞሜ ഹ of copper pads and its influence on the ᆩփཞ ڦ ᇨ ဢ ጱ ڦ ଉLj ڟ ක ඍ ă ԋఈሞ quality of Au/Cu bonds during thermosonic ཉॲ1Lj2Lj3 ݴ پ ଉ 450ml/ ბჺఉዐ ඹᅟᇑჺఉᅂ ݒ ᆌ wire bonding process, Microelectronics min, 550ml/min, 650ml/min, ݴ ᇨ ඍ ăໜጣ क़ሺ Ljኄዖ Reliability 46 (2006) ت ڦ ۉ ă ዐ ᅜ ٷ ײ ăཚࡗᆫ ስक़ Ljໜጣᇨ ဢ ጱ ڦ ଉ ڦ ሺ क़ ALjन क़ ᇀ12 ă Lj ጒඍ ຕ३ณăኄ ᆯᇀᆩ ᇀ ဢ ڦ ጱ Lj ଉሁ ٷ Lj 19. V. V. Prisedsky, V. M. Vinogradov, Fragmentation of diffusion zone in hightemperature oxidation of copper, Journal of Solid State Chemistry 177 (2004) ஃ ሞ ฉ ڦ ბवሁณLjኄᄣ ܔ ᅙঢ় Ԩ ཚࡗ ᄓ ༪କ ጒඍ 20. S. B. Castor and J. B. Hedrick, "Rare Earth ڦ ԋఈ ڦ ሁ ă ڦ ऐ Lj ݴ ဆକ ࢫ ۉ ᇨ ဢ Elements", Industrial Minerals volume, ଉ 650ml/min ጒඍ ၂३ Lj क़Ă ଉLjᅜत ڟ ۉ ჺఉ ڦ 7th edition,

34 PROCESS WATCH ඍ ॠ ᅝด բ ઢԐ एӱඍ ॠ ଋ LED ሰස ޏ ᆌ ዘ ᅝ੦ Ǜස Ⴀ ăሞⴙ ܠ ൧ Ljबࢭ ᆶՉᇹ ڇ ᇮ ۼ Ԓ ݭ ă ࡕ ٴ ӄ ڦ Ljఫ د ཥ ࡂڦ एण ۉ ༬ ᆩᇀഛ כ ई ༀቷ ยԢ ߛڦ LEDLjਨ ܔ փඹⴙ ୟ ሰዐბ ڟ ঢ়ᄓǛ ၄ඍ Ljᄺ ຫ ยԢ ڦ ႠՂႷ ߛ ݥ ă ߛ ڼ ᅃ ٴڦ ӄ ඓǖኻႴ ᅝ੦ ڦ ᅮ Lj ჽࢫॠ ၄ ڦ ඍ ժ ݥ ඇևᇹᇀ ت Ⴔᄲ ڦ ยԢᇑට Ԩन ă ᅝ੦ ڦ ᅮ ت Ԉ MOCVD ᅝăᆶ ࢪLj ᄲࡃ ᇀઢԐ एӱăසࡕ ઔ߀ ୲ᇑ ႠĂ ዜ Ăᅜत ႎ LED ሰฆထ ߀ ୲ई ႠLjఫ କ ڦ ڦ ฉ ăසࡕॽ ᅝ੦ ڦ Ԩ ୯ሞ Ljኄၵᅮ ت ઠᇸሶ ݥ ዘᄲă ᅃժገ ڦ ᆕ૧ Lj ९Lj ഽ ܔ ᅝ੦ ઢԐ एӱԨว ᆶ ܠ ዖඍ ႙LjԈઔሞൎ ߪ ಙ ၂ ઠ ڦ ઢԐ ӈ Ǘ ௬ಙ ሰ ڦ ዘ ᆶᅪᅭă ඟ LED एӱ ჽ ڦ ඍ ୲ਸ๔༪ஃăፌ ڦ ฅǗಙ ߜई ল ᅝ ڦ ቀǗᅜतཚࡗ ဢ ڦ LED ഗॲ ᆩઢԐ DŽAl2O3DžएӱǗሞಙ ڦ ઢ ᅜ أ ईփ ڦأ ૭ă ړ एӱฉ ሞኄၵඍ Lj Ԑ एӱ ڦ ฉ ௬Lj ڌ ᰆDŽGaNDž ڦ ჽ ᅜ ᆶ ሞ ڌ ᰆ ჽ क़ ԥક ٷ Lj ڞ ዂ ჽ ၄ ऐ ბഘ ק ओDŽMOCVDDž ڦ ă ඍ Ljժፌዕᆖၚഗॲ ڦ ୲ई Ⴀă ჽ ሞᅃዖ ଙ ۥ ฉ ଷᅃዖ ଙԋ ӄ ઢԐ एӱDŽPSSDž ጆ ሞߛଋ LED ย ఈ ڦ रຍLjኄᄣ Ե ದLj ณ ݥ ăස Ԣዐ ߛ ୲ ย ڦ एӱLjᅺ ሞ ჽኮമ ᆩକ ࡕ ჽԋఈ ڦ ຕᇑ ڹ ଙփཞLjኄዖփ ದ Քጚ ڦ ਗ਼ᇑ ਗ਼ ᅝLj ሞएӱ ௬ କࡀሶ ڦ ሞԋఈዐ ᆌ ă ڌ ᰆᇑઢԐ ኮक़ ሞጣ ٷ ଉ ڦ Ԉንଚă ๑ᆩ PSS ݛ ᅜ३ณ ٱ ඍ Lj ڍ ඍ փ ದDŽ13.8%DžLjᅺ Lj ڌ ᰆĐ ჽ đ ᅃዖߛ ڦ Ԉई Ԉኮक़ ڦ থሞ ڌ ᰆ ק ओኮࢫ Վ ᆌ ԋఈă ჽԋఈ ڦ ᆌ ࠕሺ ۉ ጱNj გ ڦ ദᅎ ঙ ሆც ඍ Ljኄၵඍ ᅃӯ ୲ ڦ ዂ ၾă ୲Lj ߛഗॲႠ Ǘ ڍ ଷᅃ ݛ ௬Lj ت ሞᆌ ڦ ԋఈ କ߀ ୲ᇑ ႠLjLED ሰฆႴᄲӀቷ ሞ ٷ ଉඍ ă ႙ ٷ ጚඓຫ एӱ ڦ ፌ ٷ ඍ ୲Ċമ ᅜӀቷ ჽ ק ओኮࢫ ڦ ९ඍ ԈઔᆆӈĂᆆଛĂ ঙ ఫၵࡀ ሰएӱLjժ փ ସ ࡗߛ ڸ ߀ ཫഐĂሆცĂᇶ Ă ರཀྵ ڰ ਆև ௬ ăӈ ୲ ڦ ᅮ ت ăled ሰฆ න ڦ ઠଙ ዊ ੦ ঢ় ၄ሞ MOCVD ᅝ क़Lj ᇑᅺ ᆯዐ႐ Չ DŽIQCDžඍ ॠ ዐ ᅮLj ඓԍएӱ ࠕ ޙ ࡀ ᇹ ڞ ዂ ڦ ༱ ă ڦٷ ӈ ڞ ዂ P-N ĊԈઔඍ ڦ ႙ ٷ ă ୟLjሰ ഗॲࠤቱăჱ ӈ ฯ ᆆ Lj ሎႹ ړ एӱ ٷ ߀Վ Lj૩ස ړ മ 4ᆈ LED एӱገՎ ഗॲፌ ࠕ ཚࡗ ۉ Ⴀ Lj ڍ ሞഗॲ ኮࢫඐ ڞ ዂ 6ᆈ LED एӱ Ljሶᆌ ڹן ॠ एӱඍ ୲ă ૦ Ⴀ ă Ⴀ ၄ሞ ᆌᆩ Ljᇑཚ ઠ Ljन๑ ሞࡂ ᄽLj ړ एӱ ሰฆ௬ ٷ ܔ Ă ዘ ሞ ॠ ڦڟ ୲ ԲLj ሰ ٷ ڦ ټ ઠ ڦ ऐႁĂඤ त ᅝ Ljᅺ ڦٷ ए ăଷᅃዖඍ ઠጲᅺԋఈᆌ ᆅഐ ڦ ᆆଛLjኄᄺॽ ӱ ᆅഐ ڦ ඍ ሺ ᄺ ፌ ڦ ઓඡă ሞ LED एӱᇑ ჽ ሰ क़Lj ᆶ ඍ ੦ ڦ ڞ ዂ ᆌᆩ ڦ ჹዘ ă ߛ LED ሰฆཚ ॠ ჽࢫ ڦ Lj ᆶ ᅃօ ڦ ୯ ඍ ݴڦ ăକ ඍ ӈ ૭Lj ٷ ࡗג ሀ 0.5μm ڦ ඍ ăᅃ Ⴕ ڦ ഗॲ ڇ ᇮԥ ሞ Բ ኪ ڢ ඍ ڦ ຕଉᄲ ᆶዺᇀ ਦ ădžएӱฉ ڦ ฉLjඪ ᆶჹዘඍ ڦ Ⴕ ڇ ᇮ ॽۼ ԥ أ ăኄၵ ڇ ฅĂଛ ቀ ඹᅟߵ क़༬ኙ ԥ ăDž ᇮዐසࡕᆶӈ ሶ Ljසࡕᆶଛ Ljሶ௬ଣডߛ ޅ ၃ ڦ ڦ ඍ ॠ ဣཥLj૩ස KLA-Tencor ڦ Candela Lj ย Rebecca Howland ձ๗Ljkla-tencorण ߛڦ पዷ ǗTom PiersonisLjKLA-Tencorࠅ Candela ᄽևߛप ᆐ ঢ় 32 Ԉ ܠ พঙDŽ ؽ ĂൡၽDž ܠ ॠ ཚ ڢ DŽ ௬Ă Đ ஸđĂ DžLjᆶዺᇀጲ ॽۯ ඍ ݴ ዖ ႙ă

35 NEW PRODUCTS ႎ ش сжԙ㕰䲭߃ỷ ㊱ᢶᵥ ᆌᆩ ଙࠅ ଶ ڦ SEMVision ፃᆅ ᅃ༫ඇႎ ڦ ඍ ምॠ ݴ रຍLjᅜ 1X- భ तᅜ ሰ ڦ क़ăApplied SEMVision G6 ඍ ݴ ဆဣཥኝ କമ ᆶ ݴߛڦ Ր୲Ă ܠ ࠀ ᇑ Purity ጲ ۯ ඍ ݴ DŽ< > * LjADCDžဣཥ ڦ Ⴀऐഗბသ ăpurity ADC ဣ ཥ ૬କႎ ڦ Ⴀ एጚLjժ ӷ ڞ ᄽᆅ ਏᆶ ࠀ ڦ DR SEMDŽ ۉ ጱ၂ ඍ ምॠ ဣཥDžă ၄ᆶඍ ምॠ ݴ ဆ ਏ ڦ Ⴀ ኟ ڟ ઠጲႎ႗ 1X భ ย ࡀሶ 3D ॐࠓᄲ ൱ ڦ ăsemvision G6 Purity ADC ཚࡗ ᇑ Բ ڦ रຍ ഽ ݴڦٷ ဆ ਏLj ၄ Ă ඓ ݴڦ Lj ਦକ ᄽፌਏ Ⴀ ڦ ඍ ॠ ࡗ ײ ੦ ă SEMVision G6 ဣཥ ݴڦ Ր୲Բฉᅃ پ 30%Lj ᄽፌߛăኄዖႠ ༬ ۉڦ ጱ ൡঙ๑ SEMVision G6 ᄽଶ Ǘ ঢ়ࡗ ७ᄓኤ ڦ DR SEMLj ࠕሞ 1X nm ব ۅ ᅜ ڦ 3D FinFET ߛศ Բ ࠓ ၄Ă ݴ ဆඍ ă ဣཥದዃ ڦ ॠ ፇॲ ت ᅝ ࠕᅜߛ ዊ ڦ װ ၄ဦ റ ڦ ඍ ăߛ ۯ ༀ ݔ ॠ Ăԝ พ ۉ ጱ ण ଉࡗ୳ ߛ ߛ Բ ă Purity ADC ۯڦ ༀऐഗბသ໙ ݴ ဆժ ݴ ඍ Ljඓԍ ඓႠĂ ዊ ᅃዂႠLj ၄ ײ ڦ ੦ ڦ ॠ ă ऐഗბသ໙ ࠕॽᆶ ඍ ᇑ ٷ ଉ ڦ ඍ ई ඍ য়Ԓ ݴ ਸLj ኄኟ ᆌ ഗॲ ሗႠ ڦ ሺ ټ ઠ ڦ නᅮሺ ڦٷ ă ᓊ ᶆᯏ ޢ ਮ, KLA-TencorⲺ㕰䲭Ỷ фỷḛ ࡍ䇴 ໔ ⅴӝ KLA-Tencor ᆩ NanoPoint रຍ ڦ 2910 ဣଚ ბ ᇶඍ ॠ ႎ႙ edrtm-7100 ۉ ጱ ᇶඍ ॠ ဣཥă କ ፁण ۉ ୟ ሰฆሞ ยԢฉ ጕጷඍ ڦ ႴᄲLjኄଇ ဣཥग़ਏ ފ থࡆ ڦ ᆫ Lj ࠕ ტ ၄ ᆖၚ ୲ Ⴀ ڦ ඍ ă2910 ဣଚ ཚࡗ߀ ඍ վइ୲Lj edr-7100 ဣཥཚࡗ ߛॠ ݴ Ր୲Lj ժ ᇀ 3D ई ؽ ࠓDŽස FinFETDž ڹ և ڦ ༬ᆶඍ ă 2910 ဣଚሞ NanoPoint ጆ૧रຍ ᆶඍ ၄ ए إ ฉLj ᆩକႎ ڦ ᇑॠ ఇ๕ăঢ়ኤ Lj ࠕ ޗٷ ܔ ୲ ዘᄲ ڦ ߅ඍ ႙ ڦ վइ୲Lj૩ස Ă ୟ ڹ ୟă Lj ยԢᇑฉᅃ ڦپ 2900 ဣଚ ԲLj ޗٷ Ljඟ ײ ࠕ ᄣॠ ܠ ᇶLjईॠ ᅝ Lj ୲ ᅎ ă edr-7100 ᆩ ۉپ ڼ ጱ ๕ ბᇮॲLjփ ݴ Ր୲ ߛ ޗٷ Lj ሺ କॠ ఇ๕Lj ܠܔ ዖփཞඍ ႙ ă ยԢ ਏᆶ ࠕሞ ሗ ӄ༬ኙईߛጻ Բ ࠓ ڹڦ և ቴ ඍ ڦ ༬ ࠀ ăᇑ edr-7000 ԲLj ኄၵरຍᆫ ၄ ߛ Ljඟ ײ ࠕ ᄣॠ ܠ ඍ Lj ጚඓ ں କ ᇶฉ ڦ ඍ ጺ ൧ ăᆯᇀ ण ۉ ୟ ᇶ ሁઠሁ ںܠ ᄲ൱ ܔ ዮස Surfscan SP3 ڪ ॠ ᅏ ॠ ڦ ӄ ᇶඍ ۉ ጱ ॠ Ljᅺ edr7100 ದԢକႎ႙ ბ၂ x พ ᅏDŽEDXDž ݴݴ ဆጱဣཥLj ᇶඍ ݴڦ ᇑ ኙ ࠃӻዺă KLA-Tencor, GT Advanced Technologies ӝ 㓵 ႎ႙ SiCloneTM100 ࡂDŽSiCDž ᆩ रຍLj ߛ ዊ ڦ ӷ ڞ SiC Lj ፌዕ ፌ ٷ ০ 100 ڦ ăሞ օ LjSiClone100 ዷᄲኍ ܔ Ԩวᅙঢ়ᆛᆶඤ Ă ڦ ದ ݛ तኟጚ Ԣਸ๔ଉ ڦ ਜ਼ ă GT ڦ ጺ ग़ ဝኴ Tom Gutierrez ๖ ǖ ĐGT ႎ ڦ SiClone100 ॽ ਦ ۉ ۉ ጱ ᄽ ߛ ܔ ዊ SiC ଙ ڦ Ⴔ൱Ljኄၵ ଙॽᆩᇀ ୲ࠀߛڦ तߛ ยԢă SiClone100 ڦ SiC ઢ ێ ए إ Ljߵ ઢ 33

36 NEW PRODUCTS ႎ ش ᇨ ሞ ઠ ਜ਼ ࠃ ӗᆈ SiC ڦ ኝ LjԈઔದ ݛ Ăඤ त ăđ GT ૧ᆩ ሞ रຍଶᇘศ ڦ ጆᄽኪ Lj ኟሞლ൱Đ ᄓ ገ đ ڦ ਜ਼ ࠃߛ तঢ় ᄓኤ ڦ Ljӻዺਜ਼ ਸ๔ଉ SiC ă SiClone100 ጎԢᆶፌ ڦ ੦ ဣཥLjཚࡗॽ ۉ ጱᇑටऐহ௬DŽHMIDž Lj ၄ ڦײࡗ ጲ ۯ ă SiClone100 ᆩ ڹ և ጎย Lj ସඤ ጎՎ ڥ ० ڇ ă੦ ဣཥ ᆩ ټ ઠ ڦٷ ଳऄႠLjᆩ ߵ Ⴔᄲ ࡗ ײ ದ ݛ त੦ ຕLj૩ස Ă೪௬Ăၽ तഘ Lj ߀ Ⴤሏ ڦ ੦ ዘ ႠLjፌዕই گ ሰ Ԩă GT Advanced Technologies, 䶘 ᕅ㲶 ᐛ㢰Ⲻ ශSALIXᴿᇩ 䲚 㔕 SALIX ᆶ ഘ أ ဣཥLjዷᄲኍ ܔ โ๕ ਗ਼ ဢ ᆌᆩăDAS Environmental Expert ࠅ ጀዘᅜ ሴ ڦ ༀ ๑ᆩ ጨᇸLjᆯᇀ ሰฆ ዘ ୲Ljᅺ โ๕ ਗ਼ ဢ ದԢ๑ᆩ أ ᅝ ଇඇ ڦ ਦ ݛ ӄă ᅃևโ๕ ਗ਼ ဢ ܠ ᆶ 12 ഹ ăణമLj ഹ ݭڦ ഘධႴ ዺ ݭ ܠ ഘဣཥ أ Lj Ⴔᄲ૧ᆩ ሗ ڦ ገ ఇ ᅜ௨ ڢ և ၄ ק ओă โ๕ ਗ਼ ဢ ဌ ݭڦ ഘ ᆶᅃ Բ૩ ڦ ဢवĊĊփஃ ᅜഘ ๕Lj ᅜᅂ ڰ ๕ăᅜമLjኄၵ ဢव ᅈ ट ሗ ڦ ൽဣཥ णă SALIX ڦ ၄ ඟ փምⴔᄲኄၵ ओಕ ڦٷ ጎዃLjኻႴ ևโ๕ ਗ਼ ဢ ದԢᅃ༫ SALIX ဣཥLj ᅜतᅃߵᆩᇀ ໃ߅৫ ݭ ഘ ڢ ڦ ă LjSALIX Բኮമ ڦ रຍ ں ௬ओᆶକ ڦ ޗٷ ই گ ă أ रຍ ᆩᇀ ڇ ᇶโ๕ ਗ਼ ဢ ă SALIX ૧ᆩ ბ ဌ ڦ ଇ ဢ ײ ڵ Ljሞ ᇸཀྵ ഘ ዐ থ أ ᆶ ዊă ዺ ݴ ๕ ޅ ੨Ljᆶ ഘ โ๕ ਗ਼ ဢ ڦ ഹ ᇨဢ ڵ ഗLjࢫኁཚࡗ๑ᆩ ፊ ܔ ഘ ᇨ লă ኄ ਸ๔Lj ݭ ഘ ဢ ڵ Ljໜࢫ ڼ Ljժ ᆩ ඇփཞ ڦ ဢ ڵ ᅂăᆯᇀ ᆶඪ रຍई ၾLj ߅ڦ ৫ ഘ ᅜ থ ಇ ഘዐă ዺ๑ᆩ أ रຍLjSALIX ࠕᆶ ݞ ኹ ಇഘ ă ဣཥփႴᄲඪ ဏ ഘLjᅺ ႐ Ԣ ߅ڦ ৫ ഘ ᅈ ሞ৫ ኮዐLjᅜ ᅃօই گ Ԩă DAS Environmental Expert, Nordson ASYMTEK ޢ ਮ 䘔㔣䐥ᖺ䘆 䖥Ԭ Nordson ASYMTEK ᇀৎ କ Ⴤୟ০ሏ ۯ ੦ ॲLjᆌᆩ ᇀ ၄ ڛ ጎ ڹ ևག ڦ พ ۅ ঌăኄ ॲ ᆫ ۅ ঌཀྵ ڦ ሏ ࡆۯ गLjᆶ বሀ ۅ ঌ क़ ڦ ཞ ၂ዸሺ ڇ ଉ (UPH)ă๑ᆩ ኄ ॲࢫLj ۅ ঌཀྵ Ⴔཕኹࢫምᅎ ڟۯ 2 ኮक़Ăᇱୟ ໓Ă Ă ۅ ঌ ३ Ljൽ پ ኮ ڦ ۅ ঌཀྵ ᅜ Ⴤ ڦ ݛ ኝ ۅ ঌ ᅝࡗ ײ ă ᅜԈ 70 ڦ 20 ཉएӱ ዜ ሏ ۯ ຕ Ljೠࠚ๑ᆩ Ⴤୟ০ሏ ۯ ੦ ॲ ᇑ ࡀ ཚࡗᇱୟ ໓ ၄ ڹ ևག ݛڦ ԲLj๑ᆩ Ⴤୟ০੦ ॲ ݛڦ ᆶ ሺ UPH ሀ 27%ăኄ ࡕᇸጲᇀ๑ᆩ੦ ॲࢫLjೞ 15mg/ ௱ ڦ ঌ 95mm/ ௱ ۅڦ ঌ ᆶ বሀକ 40% ۅڦ ঌዜ क़ ( ၜೠ ࠚփԈ ฉĂ ሜ )ă ړ ᇑփԈઔᇱୟ ໓ ڹڦ ևག ݛ Բড Lj Ⴤୟ০ሏ ۯ ੦ ॲሺ UPH ڦ ࡕॽ ၂ዸLj ᅺ କ ۅ ঌཀྵሞ क़ཕኹࢫምᅎ ײࡗڦۯ ă Ⴤୟ০ሏ ۯ ੦ ॲ ᆶ বሀ 23% ۅڦ ঌዜ क़Lj ڟٳޏ 9mg/ ௱ ڦ ঌ Lj Ⴔᅈ ڦ քਆă ۅ ঌཉॲĂঌ ᅜत ᅺ ઠጹ ಒ ă Nordson ASYMTEK, 34

37 NEW PRODUCTS 35

38 Ad Index Advertiser Air Products Asia Inc. IFC Chem-Trend (Shanghai) Trading Co., Ltd. ( ) 2 China Green Lighting Expo & IBC Dr. Johannes Heidenhain (China) Co., Ltd. ( ) 9 Hanmi Semiconductor 13 Hiwin Mikrosystem Corp KYKY Technology Development Ltd Niche-Tech (Hong Kong) Ltd. 1 WSI Ltd Administration ) ACT International ( ) Unit B, 13/F, Por Yen Buiding, No. 478 Castle Peak Road, Cheung Sha Wan, Kowloon, Hong Kong Tel: Publisher ( ) Adonis Mak ( ) adonism@actintl.com.hk VP - Sales & Marketing ( - ) Mark Mak ( ) markm@actintl.com.hk General Manager-China ( ) Michael Tsui ( ) michaelt@actintl.com.hk Editor-in-Chief ( ) Sunnie Zhao ( ) sunniez@actintl.com.hk Editor ( ) Greta Lee ( ) gretal@actintl.com.hk Extension Media th Street San Francisco, CA President & Founder Vince Ridley vridley@extensionmedia.com Chief Editor Pete Singer psinger@extensionmedia.com China ( ) Shenzhen ( ) Sky Chen ( ) skyc@actintl.com.hk Tel: Shanghai ( ) Sales Director-China ( ) Judy Huang ( ) judyh@actintl.com.hk Hatter Yao ( ) hattery@actintl.com.hk Linda Li ( ) lindal@actintl.com.hk Tel: Beijing ( ) Oasis Guo ( ) oasisg@actintl.com.hk Tel: Hong Kong ( ) Mark Mak ( ) markm@actintl.com.hk Tel: Taiwan ( ) Monica Liu ( ) monica@arco.com.tw Tel: x 204 North America Kerry Hoffman khoffman@extensionmedia.com Asia ( ) Japan ( ) Masaki Mori masaki.mori@ex-press.jp Tel: Korea ( ) Lucky Kim semieri@semieri.co.kr Tel: Singapore ( ) Peggy Thay peggy.thay@publicitas.com Tel: A /S

39 China Green Lighting Expo & Convergence of LED Lighting Innovations LED November 14~16, 2013 Shanghai Exhibition Center ~16 Organizer

40 emagazine P P P P P P.33-37