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1 2014 3/4 15 3D-IC TSV

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3 : : tell me more airproducts.com/advancedthinking Air Products and Chemicals, Inc., 2013

4 ణ Contents 2014ᒪ3/4ᴾ ㅢӂᵕ ሷ䶘 Ӂ Cover Story 15 ᆆቸ 㲶 Ԅᇔ僂ᇚ ᐛসᓊ Moving atomic layer etch from lab to fab ሞ ઠ 10 Lj ቆट ᇨ ॽ ᇀ 50 ᇱጱኄᅃ LjԈઔ ௬ ሞ ڦ ༬ኙ ࠓሞ ฉ ڦ Վ ᄺॽ ᅜᇱጱप ઠ ଉăᇱጱ ᅝ ᅃ ፌᆶထ ઠ ࠃኄዖ Ⴔ ݛڦ ă ᅃዖႎ ڪڦ ጱሺഽ ALE ݛ ๑ᆩ ړ മᅙฆᄽ ڪڦ ጱ ݒ ᆌഗઠ ࠃᇱጱप ڦ ਗ਼ Ljժ ڦ ਗ਼ ୲ ፁ ڦ ٷ Ⴔ൱ă - KEREN J. KANARIK, SAMANTHA TAN, JOHN HOLLAND, AARON EPPLER, VAHID VAHEDI, JEFF MARKS, RICHARD A. GOTTSCHO, Lam Research Corporation, Fremont, CA USA. ᢶᵥᮽㄖ Technical Articles 20 3D-IC TSV 䙖ѣⲺ 㟒ቸѪ 䭤 A bilayer temporary bonding solution for 3D-IC TSV fabrication DŽ3DDžࡂཚ DŽTSVDžӷ ڞ रຍ ࠕॽᅜ ڦ ௬႙ ڦ ࠓՎ ؽ ႙ ڦ ࠓLj๑ ۉ ڥ ጱഗॲሞ Ă ፕ ټ त ࠀ ฉ ۼ ᆶକ၂ዸ ߀ں ăᄲ ၄ 3D-IC TSV ڦ ᅝण ॽ ᅃ ڦٷ LjႴᄲॽ ࡂ ᇶ ࢩڦ ३ԋ ت 50 ᅜ ă କ ӭሏ ኄዖ ג ԋ ᇶLjᄽহႴᄲᅃ ڦ ਦ ݛ ӄLjⴔᄲ ࠕᅜ० گ ڇ Ԩ ݛ ๕ॽ Ⴔ ࡂڦ ᇶᇑሜ ᇶ ኮक़ ၄ሡ Ⴀ ڦ ݴ Lj ࢫჄ ڦ ᇶ३ԋ TSV ፕ ᅝăԨ ถᅃዖႎ ڦ ᅝरຍLjփምႴᄲ ༬ ڦ ᅝยԢઠ ܔ ᇶ ᇨ ت ࢫ ت ă - ANDREW HO, Global Industry Director, Advanced Semiconductor Materials, Dow Corning, Hong Kong 25 ᕋ亼ᐸ൰ᢶᵥⲺཐ 䙊ሲ ᙝ㣥 䍪㻻㟒ਇኋ䗻䙕 $ OHDGLQJ WHFKQRORJ\ RI PXOWLSXUSRVH FRQGXFWLYH GLH DWWDFK OP LV GHYHORSLQJ UDSLGO\ ӷ ހ ڞ ጎփ ლቴ ԋă Ă ߛ ހ ጎ ڦ ਦ ݛ ӄLj ၄ ਦ ݛ ӄև ݴ ሞᇀ ࠃ ሰ ג ႙ӷ ڞ ጎዃ ๑ᆩ ڦ ଙăएӱ ހ ጎ ڦ ሰฆ ᅜઠ ᅈ ཌྷጎఈरຍઠ ၄ ހڦ ጎLjᅜඓԍঌ ڦ ᅃዂႠ ႠLj ൡၽă ڍ ሞ 2010 ߛ ۉڞ Ⴀ ཌྷጎఈമLj أ କ د ཥ ڦ ཌྷጎঌ Ljᆅ ॐ ሰฆबࢭ ᆶඪ ስă ၄ሞLjኄᅃൎ କ߀Վă ߛ ۉڞڦ Ⴀ ཌྷጎఈLj ڟڥ କӷ ހ ڞ ጎ ݘ ڦ ᆓă - Shashi Gupta, 儎 ᆆᶆᯏᴿ䲆 ޢ ਮ 26 䳼ᡆᆎ ಞ 㓺ԬⲺ 䜞㔉ᶺ Inside the Hybrid Memory Cube ጲ ໙ऐ پ ઠଣLj ئ ഗरຍ ᅃ ሞ౮ ฉ CPU ڦ മ օ ăሞ 20 ๘ 70 پ ዐ LjCPU ย ӷ ڞ ሰ ᅝरຍਸ๔ ں LjCPU ૧ᆩକኄၵरຍ ڦ ቛᆫ ઠሺ ዷ ዓ ୲ ڦ ຕଉăᇑ ݒ LjDRAM ሰኁዷᄲ ૧ ᆩሞ ᅝरຍฉ ߀ڦ ઠ Ⴤ ߛ ں DRAM ڦ ئ ඹଉă ڍ ᅺ ئ ഗဣཥ ཚࡗण ڦܠ ઠ Ⴀ Lj ئ ഗ ᄽᅙঢ়փ ฉ ኧ ኄၵႎ ࠓ ئ ഗဣཥย ڦ օ ăԨ ถ ڦ ण ئ ഗ૬ ݛ DŽHMCDž ᅃዖ ೦ Ⴀ ڦ ਦ ݛ ӄLj ਏᆶฉ ڦ Ⴀ Ⴀă - THOMAS KINSLEY, Memory Development Engineer; ARON LUNDE, Product Program Manager at Micron Technology, Inc., Boise, ID. 2

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6 ణ Contents 2014ᒪ3/4ᴾ ㅢӂᵕ 30 MEMS 䴶㾷ਥ рᐸⲻ㔲 ᙝ䀙ߩ Ṿ MEMS need market-ready comprehensive solutions - Shashi Gupta, 儎 ᆆᶆᯏᴿ䲆 ޢ ਮ 31 䚉ᐛ㢰 Ⲻ㠠 䈹 ᴓ ݿ ᢶᵥ The autofocus technology for IC back-end processed wafer - 䱾伔ᖠ, ઞ, 哺ṁặ ; р ᗤ ᆆ㻻 ᴿ䲆 ޢ ਮ 34 ঋ 3DIC ᢶᵥՐᡆѰะӄ TSV Ⲻ 3DIC ⲺжѠⵕ ㄔҿሯᢁ ϋ Will monolithic 3DIC technology become a real competitor to 3DIC with TSV? - Dr. Phil Garrou, Contributing Editor Management 35 ᰝ সⲺ 㖤 ӂᢁ䇴 Ⲻ Managing legacy fabs and the role of secondary equipment - Julian Gates, Tim Johnson, AG Semiconductor Services; Darrell McDaniel, NSTAR Global Services, M+W Group 㕌㘻䈓 Editorial ӝѐ 䰱 Wafer News 䟽䇵ᣛ䚉 Interview ӝ 人㿾 SEMICON China 2014 ᒵ ᕋ Advertisement Index ᇀჯ ࡔ ฆრ ჯ ࡔ ฆრ(ACT) ૬ᇀ1998 Lj ߛ ሺ ڦ ዐࡔ ዐ ߛٷ रຍ ᄽ ޜ ခăACTཚࡗ ڦ ᅃဣଚ ljԉઔሗኾ ฉ Ӳ ĂಢჟĂ ᅱ ऄ ۯ lj ࡔࠅ तዐࡔഓᄽॐยକྊቛዐࡔ ڦ ă ACT ڦ Ԉઔๆዖरຍሗኾ ڦ በLjᅜ त ዖ ᅱLj ޜ ခᇀӷ ڞ ሰĂ ӷ ڞ Ă ޚ / ᄞ Ăऐഗ ਥย Ă ۉ ጱ ሰĂল৫त ක੦ Ăघ / ۉ ጱĂ ཚ ႑ĂLEDरຍĂพ / հ ڪ ଶᇘ ڦ ๆ ܠ ጆᄽ ኁă ACTᅨ ߅๘হଶ रຍ Ӳมतቛ ڦ پ ă ACTጺևሞၑߗLjሞ ԛ Ăฉ ศᒰยᆶ ஏ ت ă About ACT International Media Group ACT International, established 1998, serves a wide range of high technology sectors in the high-growth China market. Through its range of products -- including magazines and online publishing, training, conferences and events -- ACT delivers proven access to the China market for international marketing companies and local enterprises. ACT's portfolio includes ten technical magazine titles and related websites plus a UDQJH RI FRQIHUHQFHV VHUYLQJ PRUH WKDQ SURIHVVLRQDO UHDGHUV LQ HOGV RI VHPLFRQGXFWRU PDQXIDFWXULQJ FRPSRXQG VHPLFRQGXFWRU 39 solar energy, vision system design, electronic manufacturing, contamination control, laser/photonics, optical communications, LED technology and RF/microwave. ACT International is also the sales representative for a number of world leading technical publishers and event organizers. $&7 LV KHDGTXDUWHUHG LQ +RQJ.RQJ DQG RSHUDWHV OLDLVRQ RI FHV LQ %HLMLQJ 6KDQJKDL DQG 6KHQ]KHQ ZZZ DFWLQWO FRP KN ᇀĖӷ ڞ रė ᆯჯ ࡔ ฆრACT InternationalዷӸ Ӳ ڦ Ėӷ ڞ रSST Chinaėሗኾ 2000 ظ ᅙঢ় Ӳᇈ13 ăėӷ ڞ रėइ ڥ ๘ হኪ ಈሗኾĖSolid State Technologyė ڦ Ӳ Ⴙ Lj ᅜ० ዐ ᅳ ඹժ Ӳ ăඇ Ӳ6 DŽມሆ Dž ሗ ኾᆇ Ӳ9,000 Ljཞ ஏӲ ۉ ጱሗኾ ሞ ሗኾ በLj ዐࡔӷ ڞ ᄽጆ Ă ײ रຍ ײ ঢ় ࠃፌႎरຍĂ ጨრतฆᄽ ࠔ႑တă About Solid State Technology China Established since 2000 for more than 13 years, Solid State Technology China(SST China) magazine -- published by ACT International. SST China has been granted an exclusive license by world-renowned titles Solid State Technology to translate and circulate editorial content LQ D VLPSOL HG &KLQHVH HGLWLRQ 3XEOLVKHG VL[ WLPHV EL PRQWKO\ HDFK \HDU HDFK LVVXH RI 667 &KLQD ZLOO KDYH D SULQW UXQ RI FRSLHV VXSSOHPHQWHG E\ WKH ZHE EDVHG H PDJD]LQH DQG RQOLQH RSHUDWLRQ SURYLGLQJ WKH ODWHVW JOREDO WHFKQLFDO DQG PDUNHW LQIRUPDWLRQ WR RXU TXDOL HG China-based readers. 4

7 㑃㔲䄊 Editorial Publisher Adonis Mak ዐࡔण ۉ ୟ ᄽ ႎᅃ ቛઙਸႾట 䮵 哜অ Editor in Chief Sunnie Zhao ѱ㕌 䎫䴠㣯 Editor Greta Lee ࡔण ۉ ୟ ᄽ ڦ ႎᅃ ޔ አ नॽ ă ႑ևৎන ๖Lj ᇀ ण ۉ ୟ ᄽ ቛ ߕڦ ᄲ ॲᅙঢ়इ Ljփ न ă ဒLjߕᄲ ᅜ አ ޔ ᇑ ཨጨए ݛ ๕Ljኛൽ ܠ ጨ ण ۉ ୟ ᄽLj ና ᄽ ቛă 12 ሆLjԛ አ ୲ ૬ 300 ᅢᇮण ۉ ୟ ཨጨए Lj ᄽহᇨ ฉ Ăॿ Ă Ăศᒰ ںڪ ᄺॽ ए Ljጨ ጺࡀఇ ᆶ ࡗג ഥᅢăഥᅢጨ ස ሏፕLjཨ న Lj ጀ ڦ ঋ ۅ ă ᄽহ ݴ ဆLj አ ডᅜ ჾLjາୟฉᆶ ၂ገՎLjጨ ዘཀྵॽ ݣ ሞ ཀྵഓᄽ ႐ၜణฉLjփም ݴ ๕ ޔ ăዷᄲ ޔ ሰĂย Ă ଙ ยԢ ڪ বLj ዐጨ ݴ ದዐ ሰሀ 50%Ljย ሀ 30%Lj ሀ 20% ݛ ௬ăᄽহණ Ljአ ཨ ፌ ڦٷ ሰLjኄ ᄽፌ ڦٷ 㕌䗇 ᶄ Managing Editor Katie Huang 㕌䗇 哺㧰 Editorial Director Simon Lian 㕌䗇ᙱⴇ 䘔㔛ӷ Publishing House ACT International 䳻 ള䱻 䇥 Unit B,13/F, Por Yen Building, No.478 Castle Peak Road, 俏⑥ғ嗏 䮵 䶈ኧ䚉478ਭ Cheung Sha Wan, Ⲵ⅙ཝড় Kowloon, Hong Kong 13ᾲBᇚ Tel: (852) Fax: (852) ৡLjฉᆴยԢ ଙࠃᆌฆ থ ᅮǗ Ljአ ޔ ጲዷཚᆩ ย Lj ڦ አ Ԉઔ ᄽए Ăჺ ցཌྷ ԍ ă ઠब አ ൽ ޔ Beijing Ӣ Tel/Fax: ዘ ۅ ഓᄽፔ ٷ ፔഽ ޔ ݛڦ ᄽ ቛLjժࠔĂዘፇॽ ઠब ᄽ ቛ Shanghai ڦ ዷ ୱă р Tel: ৎනLjዐ ࡔ ॿ ۉ ჇքLjॽॺ૬ਏᆶ 12 ᆈ ཫ DŽBumpingDž तದ༫ ڦ ጨࠅ Ljཞ Lj ۉ रॽ ৎॺ૬ದ༫ ހ ࢫڦ ጎ Ljࠌཞ ٶ ሰ IC ሰ ڦ Ԩ ᄽ Lj ኍ ܔ ዐࡔ ࡔڦ ย ਜ਼ Fax: Shenzhen ൩ Tel: Fax: ࠃᆫዊĂߛ ᇑՍ૧ ڦ ᅃཉ ޜ ခă ዐ ࡔ ዐࡔ ࡀں ఇፌ ٷ Ăरຍፌ ڦ ण ۉ ୟ ᇶ پ ഓᄽLj US OFFICE Extension Media ॿ ۉ ዐࡔ ں ፌ ހڦٷ ጎ ޜ ခࠃᆌฆLjມ ݛ ၻ ॺ૬ࡔ ཉ th Street San Francisco, CA ᇶཫ Ljᅜ ፕ ഐ ۅ Ljມ ॽ ݛ ᅃօࡀ 3D IC ހ ጎୟ ă President & Founder - Vince Ridley ٷ ბ ۉ ጱ ณਬ ჾLjཫ ࡗ ݣ ሞࢫ ڢ Lj၄ ጨࠅ ॽ ݣ ሞമ ڢ Lj ၄ኝ IC മࢫ ڦڢ Lj ܔ IC ᄽ ༀဣཥॽ ٷ ᆖၚă Tel: vridley@extensionmedia.com SolidState Technology Chief Editor - Pete Singer ཫ ڦ ӷ ڞ ሰമ ᅝଆ୲ ՂႴ ڦ, ᄺ ઠ ᇶ प ހ ጎरຍ ڦ ए إ ăໜጣᅎ ۯ ࡀ ఇ ڦ փ ક ٷ Ljᅜत 40 భ त 28 భ ڪ IC ሰ ᅝ ٷڦ ଉ ᆩLjዕ ڦ ཫܔ Ⴔ൱थਗሺ ă ॺ૬ཫ त ৎದ༫ ڦ ਏᆶ ڛ ጎ ڪ ހ ጎ ᅝ ڦ Ljም ዐ ࡔ ڦ മ 28 భ ᅝLjॽ ኝ ڦ 12 ᆈ IC ሰ ᄽ ă ሞࡔ ႎᅃ ޔ አ नॽ ኮ Ljዐ ۉ ഽഽ Ljॺ૬ ཉ ኝ ڦ 12 ᆈ IC ሰԨ ᄽ Lj ਜ਼ ࠃᅃበ๕ ޜ ခăኄ ܔ ᇀዐ ࡔ IC ሰ ᄽ քਆᅪᅭዘ ٷ Ljॽ ۯټ ዐࡔ IC ሰ ᄽኝ ৪ኛ ڦ ฉ ăዐࡔण ۉ ୟ ᄽႎᅃ ቛઙਸႾటă 䎫䴠㣯 psinger@extensionmedia.com Solid State Technology China, ISSN is published bi-monthly by ACT International. Unit B, 13/F, Por Yen Building, No.478 Castle Peak Road, Cheung Sha Wan, Kowloon, Hong Kong, under the license of Extension Media Inc., th Street, San Francisco, CA Copyright All rights reserved. This publication contains article run in Solid State Technology magazine. Solid State Technology is exclusively owned and published by Extension Media Inc. Extension Media Inc., is not responsible in any way for the editorial policy and expressly disclaims responsibility for, and makes no warranties, express or implied, with respect to the content of this publication or the performance or reliability of products described herein that are products described by independent vendors. ISSN: ᵹᡶᴿθ㘱দᗻガⱦ 5

8 ϔ 䬨 WaferNews 2014 ण ۉ ୟ ڪ ए إ ᄽᆶ ཨጨඤ ۅ ڱ ৎන քକė2014 ዐࡔ ۉ ጱ႑တ ᄽ ቛ ቛ ဣଚԒߢėăԒߢණ 2014 ࡔ ۉ ጱ႑တ ᄽ ቛ ॽ Ⴤ گ ሏ Lj և ᆶ ၂Վ Lj ڍ ධ ሞႴጀᅪ ڦ ዷᄲ ǖᅃ ႐रຍ ยԢ ᄽ ዊሺ ڦ ፌԋ ব Ǘ ࡔ ཀྵഓᄽ ᄽ ኝ ড Ǘ ࡔ ஹᅟՄ ᆶ ཀྵፆҹĐጽ đă ڱ ණ Lj2014 ࡔ ۉ ጱ႑တ ሰᄽ ቛዐᆶ ݛ ௬ඤ ۅ ǖᅃ ᅜण ۉ ୟĂ ӱ၂๖ پ ڦ ए إ ᄽᆶ ཨጨඤ ۅ Ǘ ᅎ ۯ ዕ ᆅଶ 4G ऐĂ ӱ ໙ऐ ڪ ኝऐ ሺ Ǘ ႑တरຍᇑ د ཥ ᄽ ڦ බ ᇑ ظڦ ႎ Ǘ ᄽ ཀྵഓᄽࡔ ৪ኛ ሺഽă 2014ฉ ቷ ቛႺ ځ 2014 ዐࡔDŽฉ Džࡔ ৶ ی ᇑॺዾቷ ቛॽᇀ ሆ 31 න 4 ሆ 3 නሞฉ ႎࡔ ձબዐ႐ ٷ ਉ ăፕ ᄽ ߛ Ă ฆஹ LjԨ ቛ ဌᆅକ ڨ Ă ڨ ਏĂ ۉ ഗ੦ ଶᇘ ڦ ཀྵഓᄽဒຕ ڟ Lj ܠ ᤋ ݵ ཞ ऄ ۯ Lj ॽᄇᅷᅃ ᥉᥎ ڨڦ Ⴏƽ ፕ ᆅଶ ᄽ ߛڦ ח ቛ Ljฉ ቷ ቛᅃ ጀժዺ LED ᄽ ڦ ቛLj LED ቷ ഓᄽփඹ ٱ ڦ Ⴏ ă Ԩ ቛ ฉLjሞႎ ᇸ ᄽ๔ዕᆅଶ๘হ ח ൵ ڦ Բჱ ڱ ਬቷ ᄽLjᅜरຍ ݛ ௬ ڦ ᆫ Lj ቷ ᄽ ࠃକ ܠ ᆫዊ ਦ ݛ ӄLjԨ ቛ ॽ Բჱ ڱ ቷ ୴ ቷ ਦ ݛ ӄ ڦ ଋႯ ă ዐࡔቷ ۉ ഗၹ ॽ ᄥ൩ᄽ ጆ ۷Lj ජ৶ ୴ی ቷ Ăቷ ব ߀ሰĂ৶ ڨی ย ڪ ᄽඤ ۅ Lj ਸჾஃLjߛ ॺᨊ ں ኸ ᄽ ቛ ڦ ൵ Ljժᇑ၄ ጆᄽདዚघ൧ಸጐLjࠌஃ ᄽ ቛLj ቷ ᄽ ڦ ᅃ ٷ ă ܠ ႑တ൩ ک ӷ ڞ ਬ ᇶप ހ ጎ ᄽ ӷ ڞ ᆶ ࠅ Ăषళ ߛႎ Ă ඖ र ݻ ᆶ ࠅ ࠌཞ ܔ ჇքLj ࠌॽݛ ཞዂ ᇀ WLP- ᇶप ހ ጎ ᄽ ظ ႎᇑ ቛă ᇶप ހ ጎDŽWafer Level PackageDž ހ ጎ ଶᇘ ߛڦ रຍLjཚࡗሞ ᇶ ௬ থք ኲ൰Lj ހ ጎLjॽ ๑ ओ ĂႠ ߛĂ Ԩ گ Lj ࢫఊ پ ण ۉ ୟ ቛ ڦ ዘᄲरຍ ೦ăWLP ઠब ዐࡔ IC ހ ጎ ᄽ ቛ ݛ Lj ࡔ ዘ ۅ ኧ ڦ ଶᇘă WLP ၜణጺࡀ 10 ᅢ ᇮLjణՔ ሞ 2020 ቛ ๘হ ڦ ण ۉ ୟ ހ ጎ ᄽए ں ă ዐLj ၜణᅃ ጺཨጨ 1.5 ᅢ ᇮLjཚࡗඖ र ࠃ ኝ ڦ WLP ᅝरຍ Ljॺย ኝ ހڦ ጎ ჺ ظ ႎยแLj IC ࠃਏᆶߛႠ Բ ڦ ހ ጎ ޜ ခăၜణ ၜമ ጚԢ ፕᅙঢ় ࡀٷ ఇቛਸLj ᇀ ሆ ݻ ยԢӭ Lj9 ሆ ݻ ăሞ ए إ ฉLjၜణॽ ᆅ PTPĂTSVĂ3D ڪ ހ ጎरຍLjԍ रຍ ᄽ৪ኛᆫ ă ARMᇑዐ ࡔ કቛ28భ ײ ᅝIP ፕ ARM ᇑዐ ࡔ ࠌཞჇքLjມ ݛ ኍ ܔ ARM Artisan IP ധ ፕၹᅱLj ዐ ࡔ ڦ 28 భ poly SiONDŽPSDž ײ ᅝ ࠃߛႠ Ăߛ Ă ڦ ࠀگ ဣཥप DŽSoCDžย ኧ ăएᇀኄၜ ፕLjዐ ࡔ ᇑ ARM ॽ ڦٷ ݯ ᆌᆩ ࠃඇ௬ ڦ IP ᇑ ײ ᅝरຍă ዐ ࡔ ย ޜ ခዐ႐ጨศ ጺ ཀฤձ๗ ๖ ǖ Đ ܔ ᇀ ࠕኧ ARM Artisan Քጚ ڇ ᇮᇑႎᅃ پ Պᅳ ഗLjߌ ڟ ๆ ߛݴ ႗ăኄ ᇑ ARM ڦ ᅃօ ፕॽᆶዺᇀ ڦ ਜ਼ ሞ Ԩᇑࠀ ฉ ၄ ᆫᅴ ڦ SoC ย ăđ ARM ኴ ጺ ग़ ย և ጺঢ় Dipesh Patel ձ๗ ๖ ǖ ĐARM Artisan Քጚ ڇ ᇮᇑ Պᅳഗ ਜ਼ ࠃߛዊଉᇑ ࡂ ޙ Քጚ ڦ ย Lj ඇ ፁਜ਼ ሞ ฉ क़ ڦ ᄲ൱ăཚࡗᇑዐ ࡔ ศሞ 28 భ PS ᅝฉ ڦ ፕLjARM ም ७ କ ڦ ᅃ Ċᇑᄽহଶ ڦ ᇶ پ ഓᄽഽഽ Lj ਜ਼ ࠃፌ ڦ SoC ย ၄ăđ 6

9 SEMICON CHINA 2014 N4-4269

10 ϔ 䬨 WaferNews ዐ ਗ਼ ऐइ ࡔ ڥ ئ ਜ਼ ዘ ڇ ዐ Ⴧքइ ࡔ ڥ ئ ฆࠔச Primo SSC AD-RIE DŽዐ ݒڇ ᆌ ڪ ጱ ਗ਼ ยԢDž ڦ ዘ ڇ ă ยԢԥਜ਼ ණ ᆩᇀ 16 భ ڦ ยԢDŽPTORDžLjॽᆩᇀ ٷ ଉ ă മLjዐ ڦ Primo SSC AD-RIE ཚࡗਜ਼ ฉჹ ڦ ᄓኤLjൽ ڥ କԲ ཞ ৪ኛ ᆫᅴ ڦ ࡕăዐ ၄ሞኟሞ ਜ਼ ፕჺ৯ਸ DRAM 3D NAND ᅝă Primo SSC AD-RIE ዐ Primo ဣଚ ڼ پ Ăᄺ ፌႎᅃ پ ਗ਼ ยԢ Lj ࠕ ፁ ߛג Ăᆫᅴ ڦ ዊଉ ਗ਼ रຍ ჽቛႠ ڪ ჹ ڦ रຍᄲ൱ăPrimo SSC AD-RIE ڦ ᇶ ڿد ದዃ ٳܠ 6 ڇ ᇶ ݒ ᆌഗLj ݒ ᆌഗ ᅜ ૬ ں ย ཉॲLj ଳऄ ں ၄ ጚ ڦ ᅝ੦ ă ݒ ᆌഗᆶटߛ ڦ Ljժᆶ ܠ ഘ ݴ քă ۯ ༀพ ࠀ୲ᅜत ܠ ੦ ڪ ૬ ব ڦ ᅝ ຕă ሞ ᅝ ڦ ഹ ย Ն௨କߛ ศ Բਗ਼ ᅝዐ ၄ ڦ ਗ਼ ཕኹ၄ၡᅜत ᅝ ᅎ၄ၡ ڦ Lj ߛਗ਼ ڦ ዘ Ⴀժ ඹᅟ ၄ ݒ ᆌഗኮक़ ڦ ଆ ದLj ࠕ ߛ ٷٷ ୲ă რӷ ڞ քᆩᇀlteएበ ڌڦ ᰆ հࠀ ݣ ࡔ ฆᆩ ڌ ᰆDŽGaNDž ۉ ጱഗॲ ഓᄽLj ዝ რߛ ӷ ڞ ᆶ ࠅ ৎන քକႎ႙ ڌ ᰆ հࠀ ݣ ăኄ ॽዺ ཚრဣཥยԢ ሰฆLjኍ ړܔ ඤ ڦ LTE ᅎ ۯ ཚრ Lj ࠃ ߛ Ă ਏႠ Բ ڦ ਦ ݛ ӄă რӷ ڞ ጺ ቧయഥձ๗ኸ ǖ Đࠅ ᅃ ዂ ᇀ GaN հࠀ ݣ ڦ ჺ ᇑ ሰLj ႑ GaN ࠀ ڦ ݣ ټ Ăߛ Ⴀ ߛ ୲ ڪ ᆫᅴ༬ႠLj ࠕ ਜ਼ ټ ઠ ኵă đ რӷ ڞ Ԩ ڦ ኄ DX1H F ದ հ Lj ፕ ୲ ݔ GHzLjࠃ ۉۉ უ 48VLjԏ ࠀ୲ 200Wăሞ WCDMADŽ ټ DPDDž ཉॲ Lj ٳ୲ࠀ 40WLjACLR ᇀ -50dBcLj ୲ߛ ٳ 33%ă ኍ ܔ 4G ᅎ ۯ ཚრ ڦ LTE एበᆌᆩ ଉว ٶ ሰ ڦ Ljᆛᆶম ڦ Ⴀ Ă ୲ ࠀ୲ Lj ᆩኄ ၄ ڦ Doherty ٷݣ ഗ ၄ କ ݥ ᆫᅴ ڦ Ⴀ ኸՔă ڥ ᅮᇀ რࠅ ڦ ย ᆫଆ ڦ ᅝLj ܠ ၜኸՔ ت ᇀᄽহଶ ں ăཞ Lj რࠅ ਜ਼ ࠃत ၚᆌĂศ ၹዺĂ ৪ኛ ޜڦ ခLj ਜ਼ ࠃ ኝ ຄ ڦ ਦ ݛ ӄ ڦݴ ᆌᆩरຍኧ ă ॽ ࠔ Molecular Imprints ӷ ڞ ᄽခ Molecular Imprints Inc.DŽMIIDžৎනჇքᅙധሀॽӷ ڞ უᆇ ਗ਼ยԢᄽခ ߴනԨ ڦ DŽCanon Inc.Džă ణമ ժ KrF ጚ ݴ ጱ i ቷ ბ ਗ਼ ă ٶ ݴߛ Ր୲ ӄ ਗ਼ยԢ Lj 2004 ਸ๔ჺ৯భ უᆇरຍăጲ 2009 ᅜઠLj ࠅ ᅃ ᇑ MII तᅃ ଉ ႙ӷ ڞ ሰฆၻ ᆩ MII ڦ Jet and Flash უᆇ ਗ਼DŽJ-FIL Džरຍઠ ਸ ă MII ဝኴ Mark Melliar-Smith ๖ ǖ Đ മ ᇑ ࠌ ฆᄽ ᅜ ӷ ڞ ᄽ ࠃरຍዷ ڞ ႙ گڦ Ԩభ ਗ਼ ਦ ݛ ӄLj ߛ႗ස ሞጕ൱ኄᅃణՔฉൽ ڥ କ ٷ օă ဝरຍ Toshiaki Ikoma ձ๗ຫ ǖ Đ ࠔ MII ॽ ഽ ڦ Ď ᄽत ďᄽခև ăᆯ ټ ઠ ظڦ ႎӷ ڞ ሰऐ ඟ ߌ ݥڟ ႗ ݺ Lj ځ ሞ ڥ ਖ਼ ຯዝӎຯནॺย ڦ रຍਸ ăđ ๗ཚӷ ڞ SoC ظ ႎย ݛ ๗ཚӷ ڞ DŽฉ Džᆶ ࠅ ჇքLj ࠀ ਸ କጆ ڦ 28 nm SoC ഗॲଉว ٶ ሰ ڦ ඇႎย ݛ Ljփ ၄ ߛ ۉڦ ୟ Ljཞ ᄺ ᆶ ਸ क़ă ᆩඇႎย ۉॽࠕ ݛ ୟ ڦ ߛ 33%Ljժ ॽፌዕ ڦ ୟքਆ क़ ᅃ ሆăኄዖย ॽ ݛ ኝ ๗ཚӷ ڦ ڞ ዖඇႎ SoC ย ݛ ӄዐLjၹዺਜ਼ ਸ RTL-Handoff SoC ഗॲă ๗ཚӷ ڞ ᇨ ጲ ሆഐॽਸ๔থ ᆩኄዖඇႎย ڦ ݛ SoC ڇ ă 8

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12 ϔ 䬨 WaferNews ዐࡔ ၄ ࡂ ୲ࠀٷ ഗॲଉ ᆶ ᇸ ऐ ཀ ӷ ڞ रDŽԛ Džᆶ ࠅ G2S06010 ࡂၰ༬ए ट ६ ႎ ႑တ ք 1 ሆ 20 න ሞԛ ਉ ă६ ᇵ ණ ࠅ ڦ ଉ ᅝ ݛ Ă Ⴀ ڟٳ କࡔ ཞ ڦ ăዐࡔ ၄ ࡂ ୲ࠀٷ ഗॲ ڦ ଉ Ljሞᅜ Ă౹Ăන ዷ ڦڞ ӷ ڞ ଶᇘ ೦ăጆ ኸ Ljኄᅃ ೦ᆶ ዐࡔ ڦ ᇸ ऐLj ܔ ᇀ Ă ᆳ ڪ ጨᇸ ඍ ڦ ዐࡔਏᆶ၄ ᅪᅭă ဒLjঢ়ࡗଇ Lj ཀ ჺ ڦ ࡂၰ༬ए ट ܠ ᅙ ࠀ ଉ Lj ߃ 600Ċ3300V ዐߛუ ݔ ă ዐLj600V/10AĂ1200V/20A ڪ ୲ ࡔڟٳ ă ཀ ጺঢ় ר འ ถLj૧ᆩ ࡂ ڇ ڹת ჽ ଙ ፕ ۉڦ ۉ ጱഗॲ ᅜሞߛ ۉ უĂ ۉٷ Ăߛ ୲ ፕLjᇑ د ཥ ࡂڦ ഗॲ ԲLj ࡂ ۉ ࠕ ޗٷ ३ณ ۉ ยԢ ओ ዘଉLj ޗٷ ই گ ၜยԢဣཥ ڦ ኝ Ԩժ ߛဣཥ ڦ Ⴀă ࡂሞই گ ጲวࠀ ڦ ཞ Lj ߛဣཥ ևॲ ࠀڦ Ljጺ ব 20% ᅜฉă AIXTRONҺາഽᇑManzण ٳ ፕ AIXTRON Һາഽᇑ Manz ण ৎනኟ๕ ٳ ፕăມ ॽݛ ၻ ჺ ߛ ڦ ᆶऐ ट DŽOLEDDž ਦ ݛ ӄLjࠌཞӝ OLED रຍ ڦ ઠ ऐᇜă ߵ ၜ ፕLjມ ॽݛ ፕჺ ᅃ༫૧ᆩ AIXTRON Һາഽ OVPD ጆ૧ ᅝरຍLj ၄ሞ ڼ 8 پ एӱDŽ 2300ġ2500 mm2Džฉߛ ק ओᆶऐ ଙ ڦ ๖ ݔ ဣཥă ༫ඇႎ ڦ ๖ ݔ ဣཥॽ ᄽহቛ๖ OVPD रຍሞᅜ ࡀٷ ఇĂߛ ୲ ᆩᇀ၂๖ೡ ቷ ᆌᆩ ڦ ᆶऐ ट ݛ ௬ ڦ ᆫ ă ႎဣཥॽᇀ ઠब ሆ ሞ AIXTRON Һາഽ ڦ ল৫ ጎದă أ କቛ๖ OVPD ጆᆶ ᅝ ࡀఇ ٷ एӱ ڦ Lj ፕᄺॽጣ ፁ ܔ ႎᇮഗॲ ڦ ᄲ൱ăই گ Ԩ ߛ ଉ ࠀ ક ٷ OLED रຍ าཪ୲ ڦ ՂԢཉॲLj ኄᄲ൱ՂႴ ߛ ڦ ᅝ ๑ᆩ ٷ ڦ ए ă IMECႎਸ 3DFinFETኝ III-Vፃᇑࡂ ଙ Բ૧ ۉ ጱჺ৯ዐ႐DŽIMECDžჇ ਸ ඇ൰ ሞ 300mm ᇶฉኝ III-V ፃᇑࡂ ଙ ڦ 3DFinFET ӷ ڞ ăimec ڦ ႎ ײ ణՔ ထ Ⴤ CMOS 7nm तᅜ Ljժ ၄ CMOS-RF ᇑ CMOS ۉ ፇॲ ڦ ă ໜጣ नॽথৎᇱጱप ڦ Ljᄽহዂ ᇀ ߛ Ⴀ ᇑই ڦ ࠀگ ዖ ݛ ደॷ௬ଣ ৡăཪࡗ ࡂ ኝ ߛႠ ڦ ଙLj૩ස ࠃ ߛሜጱ ᇑ ߛൻ ڦ ۉۯ III-V ፃ ۉ ཚ ڢ Ljኄዖႎ ڦ ӷ ڞ ג ሁࡂ ଙԨวႠ Lj Ⴤ ײ ă IMEC ำ ᅙঢ় ࠀ ၄ᅃዖ ᇶप ײ Ljཪࡗᗰൽ ඍ ڦ ԲĂࠏ ࠓᇑ ჽ ظڪײ ႎLj ࠕᅜร ᯇᰆᇑଡ ᯇ ڪ ଙሞ 3DFinFET ฉൽ ࡂپ ỀLjཞ ᆌ 8% ڦ փ ದăIMEC ڦ ፕअӵထ ኄၜरຍ ᅃ օਸ Ljᅜ ሞ 2016 ڟ 2018 क़ ၄ 7nm ব ڦۅ ևຈăIMEC ڦ CMOS ਸ ፕअӵॽᆶऐ ൽ ڥ ײ LjԈઔᆈ ༬ Ă ႓Ă ओ ۉ ĂGlobalfoundriesĂ Ă ๗Ă እĂ Ă ĂߛཚĂAlteraĂ ๗ཚĂnVidia ᇑ Xilinxă ཀ ٷ ቛߛ ዊ ዺव त ਏᆶዘଉ ĂऐႁႠ ڦ Ⴀ तೡԸႠLj༬ ዘ ૧ᆩ ڪ ᅃဣଚᆫ ۅ ă ਏᆶଆ ڦ უዽ ႙Ⴀ Lj უዽॲ ڦ ႠডߛLj ߛ ڦ ऐႁ ă ཀDŽChem-TrendDžࠅ ኍ ܔ փཞ ڦ ᆩ Lj ዖဣଚ ڦ ఇव უዽ ᆳ ᆩᇀ ࠓॲ ڦ უዽ Ljᅜत ԋմॲdžդ ԨĂ ऐ ڪ 3C Dž ڦ უዽ ă ࡂᆳ ఇवLj ݥ ܔ ௬ ت ᄲ൱ ߛ ڦ 3C ଭॲ ڦ უዽ ᅝLj ཀ ᆶ ڦ Lj ߛ ޗٷ ௬ࢫ ت ࡗ ײ ዐ ڦ ୲Ljই گ ဢ Ⴞ څ ڦ DŽ ဢव౪ Ă ဢ क़ ڪ Džᆶ ߛ ௬ ت ڦ ୲Lj३ณ ݥ ཕऐ क़Lj ਜ਼ ၂ዸই گ Ԩă 10

13 ϔ 䬨 WaferNews IRሞႎ ਸย ג ԋ ᇶ ࡔ ኝ ഗࠅ DŽIRDžჇք ᇀႎ ڦ ඇႎ ג ԋ ᇶ DŽIRSGDžᅙཨ ๔ ăႎ ں 60,000 ݛ ᆈ Lj IR ഌ ᇶ ᇶ پ ፕअӵ ڦ ᇶ Lj ၜణԈઔ ᇶ३ԋĂ Ă ڦ ܮ ጆ ૧ ᇶप ڪ ă ॽ ᆩሀ 135 ᇵ Ljժॽ IR ႎᅃ ୲ࠀپ MOSFET IGBT ܠڪ ዖ ă IR ጺ ग़ ဝኴ Oleg Khaykin ๖ ǖ ĐIRSG ॽᅜ ᅝ IR त ᇶ پ ፕअӵ ڦ ᇶ Lj ๑ IR ڦ Ҿಇ ਏଳऄႠժ߀ ዜ ă LjIR ॽཚࡗ IRSGLj ഌ ତৎ ڦ ዷᄲፇጎए ں ᇶ ڦ ፌࢫ Ⴞăđ ෭ ظ ࡔ ፌ ٷ 6ᆈ ᇶၜణᅃ ళ ෭ঢ়षरຍਸ ৎ ٷ ቛ ۉ ጱጨრ ᄽLjᆯ रຍ ܓ ዷ ڞ Ă ٷ ย ፌ ڦٷ 6 ᆈ ᇶၜ ణĊĊ ෭ ظ ओ ۉ ୟᆶ ࠅ ᅃ ᇶ ঢ়ࡗଇ ႗ॺLjᅙঢ় Ljॽਸ๔ 6 ᇶ Ǘ ڼ ᅃ ٳ ሆ ࡀఇ 3.5 Ljඇևၜణ ࢫ Ljሆ ࡀఇॽ ٳ 12 6 ᇶLj ࡗגॽܮ 10 ᅢᇮට Լă ෭ ظ ۉ ጱጺཨጨሀ 3 ᅢ ᇮLj ᇶ 1 ں ௬ओሀ 12 ݛ Lj2 ں ௬ओሀ 10 ݛ Ljၜణย ሆ ٳ 12 6 ᇶă ጆӄॽ ᅜण ۉ ୟ ሰᄽ ႐Lj ۉۯټ ୟย Ă ހ ጎĂ Ăᇱ ଙࠃᆌ ڪ ದ༫ ഓᄽ ڦ ቛLjઙ ۯ ᄽཨጨሀ 200 ᅢᇮLj ళ ۉ ጱӷ ڞ ᄽ ቛ ጚăāā BesiᇑImec ፕჺ ඤუरຍ భ ۉ ጱჺ৯ዐ႐ Imec ᇑӷ ڞ ग़ ۉ ጱ ൰ยԢࠃऋฆ Besi ၻ ፕLjਸ ਏߛ ඓ ت ڦ ਐ ڟ Ă ڟ ᇶ ڦ ඤუቕথ ਦ ݛ ӄăimec ᇑ Besi ॽࠌཞჺ ਏߛ ت Ljጲ ײ ۯ Ljডߛ ඓ Ljत ዜ क़ ڦ ඤუ থऐLjᆩᇀ ሰ 3DLj2.5D 2.5D/3D Lj ሰ ᄽ ᆩඤუቕ रຍ೬ୟă 3D IC रຍ ॽ ܠ ኝ ڟ ᅃ ڇ ᅃጎዃዐLj ᅃ پ ण ۉ ୟ ࠀڦ Ⴀ Ljժཞ ३ณ௬ओ ࠀ ă ሰ 3D IC ዐᅃ ٷ ਐߛ ඓ ڦ ڟ Ă ڟ ᇶ ڦ ቕ ਸ ਏߛ ت ڦ ጲ ײ ۯ ă ڛ ጎ থ ణമ ڦ ቕথ ݛ LjႴᄲ ગ ۅཫڦ क़ਐDŽሀ ཫ ۅ क़ਐDžतटߛ ڦ ቕথ ă ۅཫڍ क़ਐ Ⴔᄲ ᅃօ ڟ ᆶ ߛ ں Ⴀ ă Đ ߛ႗ ᇑዘ ۅ ჺ৯ዐ႐ස imec ፕLj ݴ ૧ᆩ ሞ ਐ থ ଙ Ⴞ ڦ ጆᄽኪ Ljᅜ ߛ ڦ ଉतยԢ Ⴀă đbesi አጺ Richard Blickman ๖ ǖ Đኄ ፕඟ ڦ Chameo ਏᆶऐ ፁӷ ڞ ᄽ ڦ Ⴔ൱Lj ڦ ਜ਼ ሰ 2.5D/3D IC ࠃᅃ ग़ᆶ ڦ ਦ ݛ ӄă đ 11

14 INTERVIEW Bumping :49 IC IC Flip-Chip IC 3D IC IC Bumping 12 IC IC 4G G 430 4G 4G 4G 3GPP 4G LTE-A /4

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16 INTERVIEW E6640A EXM EXM LTE-Advanced 32 EXM Keysight Technologies Spansion HyperBus Spansion Spansion HyperBus Spansion HyperFlash NOR Spansion Jackson Huang Spansion HyperBus 12 Spansion HyperBus 8 / 2 SoC Spansion HyperBus HyperBus instant-on GUI Spansion HyperBus / ADAS SoC Spansion HyperBus Spansion HyperFlash NOR 333 SPI 5 NOR Spansion HyperFlash NOR 3V 1.8V 128Mb 256Mb 512Mb Mb HyperFlash 8 6mm BGA Spansion HyperFlash NOR SPI SPI HyperFlash NOR OEM NOR 30 Spansion HyperBus Spansion HyperBus RAM /4

17 Ӷ ᄮ䲏 θ C OV E R S TO R Y 埗 ᇱጱ ਗ਼ ݛ ᄓ ڟ ᆌᆩ ᅃዖႎ ڪڦ ጱሺഽᇱጱ ਗ਼ ݛ ਏᆶᇱጱप ڦ ਗ਼ Ljժ ڦ ਗ਼ ୲ ፁ ڦ ٷ Ⴔ൱ă ᅃօჽჄఊ ୱॽ ሁઠ ᄲ ሁᅈડᇀߛ ڦ ᅝLj ᅜ ਏᆶߛ ዊԋఈ ௬ ڦ ഗॲ ࠓăሞჱ 14nm रຍব ۅ ዐLj Ⴀ ॽ ܔ ሞ ᅝฉ ڦ Վ ॽਏᆶߛ ߌ ڦ ႠLjᅺ ኄዖ ᅝՎ ၂ዸ ں ᆖၚ ڟ ഗॲ ڦ ۉ त ࠀ Ⴀ ăඟ ઠ ᅃ ௬ଣ ڦ ၄ Ⴀ Ljሞ ઠ 10 Lj ቆट ᇨ ॽ ᇀ 1. ᆩ ഘ ഘਗ਼ ࡂ ڪڦ ጱሺഽALEთ ዐ ڦ օየă 50 ᇱጱኄᅃ LjԈઔ ௬ ሞ ڦ ༬ኙ ࠓሞ ۼ ᅃഐԥᆅ ڟ ᅝ ݒ ᆌ ዐLj ॽཞ ᇑ ڦ ԋ ฉ ڦ Վ ᄺॽ ᅜᇱጱप ઠ ଉăᇱጱ ఈ ௬ Ⴤ ժ ڦ ݒ ᆌăፌዕLjఈ ࢩ ॽ ሞ ᅝ ᅃ ፌᆶထ ઠ ࠃኄዖ Ⴔ ݛڦ ăᇱ ײٷ ฉᅈડᇀగၵ ᅝ ຕLjස ݒ ᆌഘ ڦ ጀ ଉLj ጱ ק ओ ᅝDŽALDDžᆌᆩᇀӷ ڞ ሰᄽ ڦ ዐᅙঢ় ڍ ኄၵഘ ڦ ଉሞ ᇶ ڦ ਆև ᇘत ኝ ฉ ۼ ᆶๆ ܠ କLj Lj ܔڦ ᆌ ᅝ - ᇱጱ ਗ਼ DŽALEDž- ᆶ փཞă૩සሞఈ ڦ ሌႠ ݛ ௬Lj Ⴤ ඐవᅜᆛᆶፁࠕ ୲ ڦ ઠᆌᆩᇀႴ ୯ ᅮ ԨԲ ڦ ఇ๕ ڦ ᅝሞ ᆫ ࢫ ᅜइ ڥ ডߛ ڦ Lj ڍ ሰᄽዐLj ᆶ ฆᄽฉ ڦ ALE ဣཥăሞԨ వᅜ ܔ ᆶ ڦ ᅝᅺ ۼ ཞ ں ց ă ዐ ॽԒ ڢ ᅃዖ ڪ ጱሺഽ ڦ ALE ݛ Lj ๑ᆩକ ᇑฉ Ⴤఇ๕փཞLjᇱጱ ᅝ ᅜᅃဣଚ ړ മᅙฆᄽ ڪڦ ጱ ݒ ᆌഗઠ ࠃᇱጱप ڦ ਗ਼ ਏᆶጲ ኹ༬Ⴀ ڦ ዘ ഘ თ ઠॽ ݒ ᆌഘ ᅈ ᆅ Lj ڦ ਗ਼ ୲ᄺ ࠕ ᆌ ٷ ଉഗॲ ሰ ݒڟ ᆌ ዐăሞኄዖ൧ Lj ק ओई ڦأ ఈࢩଉ ڦ Ⴔ൱ă ཚࡗฉ ኄၵഘ თ ڦ ຕઠ ੦ ڦ ă ړ ᆶ ڦ ݒ ᆌഘ ᅃ ڋ ԹLjኄዖ ק ओई ݒڦأ ᆌ ዕ ᇱጱ ᅝ ڦ മৠ ኹLj ԋఈ ௬ሞ ഘ თ ኮࢫ ॽۼ Đ đ ڟ Ⴤఇ๕ קڦ ओ ਗ਼ ᅝሞӷ ڞ ᄽዐᅙ ঢ়ᆌᆩକॽৎ 40 Lj ڍ ᆯᇀ ᅝኴ ڦ ݛ Ԩዊਦ କ ڦ փ ߛăሞཚ ൧ Lj ᆶ ݒڦ ᆌ ᇱᆶ ڦ ༀLjኄᄣ ᅜइ ڥ ᅃ ਏᆶๆ ݴ ௬ ᆼๆ ݴ ሌ ڦ ఈ ă ሞ ٷ ଉӷ ڞ ഗॲ ڦ ሰዐઠ แᇱጱ KEREN J. KANARIK, SAMANTHA TAN, JOHN HOLLAND, AARON EPPLER, VAHID VAHEDI, JEFF MARKS, RICHARD A. GOTTSCHO, Lam Research Corporation, Fremont, CA USA. 15

18 ᄮ䲏 θ C OV E R S TO R Y Ӷ 埗 ๑ALE ALE ᅝᄲ ࢫᇀ ܔ ᆌ ڦ ALD ᅝLj ሞ ๆ ๘ ৵ๆ پ ራ ԥ ᆌᆩLjժ ఫᅜࢫᅃ ᅃ ᆶ ځ ᇀ Ⴤჺ৯߀ ڦ ዘᄲੜ [1]ăփ ڦ Lj ALE ᄲइ ڥ ፁᅜ ፁ ٷ ଉ ሰ Ⴔ൱ ୲ ڦ ධ ௬ଣ ڦٷ ă କߴ ᇀ ᅝ क़ኄᅃ߁ Lj ୯ᅃ ᅙঢ়ᆶጣፌ ศ ჺ৯ ڦ ਗ਼ ࡂDŽSiDžԋఈ ڦ ALE ᅝ൧ ăᅙᆶԓ ڦڢ ALE თ क़ཚ ሀሞ 1 ڟ 5 ݴ ዓኮक़Վ Lj ܔ ᆌ ڦ ਗ਼ ୲ሀ 0.1 ڟ 0.01 nm/ min ኮक़ăฉ ALE ᅝ क़ස ኮ ڦ ᇱᅺዷᄲ ᆩ ڦ ඤဌ ݛ Ljᅜत ᆩ ڦ ጱ ဣཥኄ ዖጆᆩยԢLj ڦ ٷ Ԩঙ ୯ฉ ኄၵ ٯ แ ۼ փ ăᅃ ਏᆶဌᆅ ݛپ ڦ ๑ᆩ ڦࡀ ਗ਼ ݒ ᆌഗLjժཚࡗ༬༬ ڪڦ ጱ ሺഽरຍઠ ߛ ALE 2. ሞ Բ ڦ ᅝཉॲ Lj ӣࡂ ჽ ݴ ᆩ Ⴤఇ๕ ALE ᅝઠ ਗ਼ أ ሀ400 ᇱጱ ࢫ ݴߛڦ Ր୲TEM ă ڦ ਗ਼ ୲ă କକ ڪ ጱሺഽरຍ ස ઠ ᅝዜ ڦ ᅝ ᇜ ڦڟ ڦ ୲ گ LjᄲԲ Ⴤఇ क़Lj Ⴔᄲ ୯ሞᅃ ALE თ ዐ ڦ ब ݴ ૬օየă ๕ ڦ ᅝ گ ब ຕଉपᅜฉăᇑᇱጱ ۏ ओDŽALDDž 1 ၂๖କ ᆩ ഘDŽCl2Dž ഘDŽArDžઠਗ਼ ࡂ ڦ ჺ ᅝሞ ᄓ ස ӱ၂๖ ڪ ᄽዐ ڦ ฆᄽ ᆌᆩ ৯ӄ૩ዐ ݴ ڦ ૬օየă Lj ݒ ᆌഘ lj ഘԥဌ ԲLj ሞӷ ڞ ᇶ ዐ ڦ ᆌᆩ ውࢫକॽৎӷ ๘ ă ሞࡂ ڦ ௬Lj ࢫࡗଉ ݒڦ ᆌ ഘॽ ԥ أ ಇ ăথ ၄ሞLjALD ᅙঢ় କᅃዖ ሞ ٷ ዐ ጣLjᆅ ጱժཚࡗ ጱ ऍ ݛ ઠ๑ࡂlj ݒڦ ۉ ଙ ק ओ ڦ ዷ ᅝरຍă קڦ ओ ୲ධԲᅃၵ ᆌ ሞࡂ ௬ Ljፌࢫምॽ أ ժಇ ࡗ ଉ Ⴤఇ๕ ڦ ბഘ ק ओDŽCVDDž ᅝᄲ Lj ڍ ALD ݒڦ ᆌഘ ăฉ ኄ თ ॽ ዘ ں Lj ڟٳ ਏᆶ ڦ ᆫ ਏᆶ ڦٷ ဌᆅ Ljᆮ ܔ ᇀटԋఈ Ⴔਗ਼ ࢩ ࡂڦأ ኹă ۏڦ ओLjई ړ ᅝ ٳ փ ڟ ᄲ൱ ස ăໜጣ ௬ဌ ኄᅃօየሞᅜ ᆩඤბ ݛ ઠ ၄Lj ALD ሞ ୲ฉ ڦ Ⴤ ߛLjᇨ ॽ ሞሁઠሁ ܠ ႎ ሞ ڦ ௬ဌ ፏთ Langmuir ဌ ۯ ბᇱ ጲ ᆗԋఈ ଙ ۏڦ ओ ᅝዐ ڟڥ ᆌᆩă ں ăᅙᆶԓ ڢ Ljሞᅃ ك ৫ ௬ฉ ڦ ဌ ڟٳ 3. AFMຕ ၂๖କ ӣࡂ ჽ ௬ሞਗ਼ ኮമĂ Ⴤఇ๕ਗ਼ ᅜतALEਗ਼ ኮࢫ ڦ ௬ ă 16

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20 ᄮ䲏 θ C OV E R S TO R Y Ӷ 埗 ໙ أ ᅃ ࡂ ݒ ᆌ ݴ ጱ Ⴔᄲᆶ 10 ૭ ጱ ऍ [2]ăኄᅃօየ ᅜཚࡗ ᆩߛ ૭ጱ ऍઠ Lj ኄዖߛ ૭ጱ ڪڦ ጱ ݒ ᆌഗᇑᆩᇀ ဌ օየዐ ᆩ ڦ ยԢ ඇ ཞăॽኄዖሞ ௬ဌ / օየฉ ߀ڦ ᅜत ܔ փཞഘ क़ ڦ ൎ ࠀ Lj ᅜ၂ዸ ں ALE ڦ თ क़ă ڪ ጱሺഽALE ڦ ᆌᆩ ሞ Բཉॲ ܔ ӣ ჽࡂ Ⴤ ڦ ALE ᅝਗ਼ ᄓLjᅜ ઠ ܔ रຍႠ ೠࠚLj ၄ ڪ ጱ ሺഽ ALE ᅝ ڦ ਗ਼ ୲ᄲ၂ዸ ᇀ ཚ ۆ ႙ ڦ ਗ਼ ୲ă କᄓኤ ALE ᅝժփ ॸพ ᆌ ጲ ௬ ბ ݒ ᆌ ڦ ० ڇ Lj ݴ ኄଇዖ ୲ 4. ሞঢ়ALE ᅝਗ਼ മࢫኝ ࡂ ᇶ ݔ ӣ ჽ ڦ ௬ ሌႠă ࢫժ ᆶ ၄ ሞኝ ਗ਼ ୲ ڦ ฉᆶ၂ዸ ࠋڦ ၅ăཞ ኤ କ ڪ ጱሺഽ ALE ᅝ ᅃ ጲ ኹႠ ײࡗڦ Lj ݒ ᆌऄႠ ኻ ڟٳ ब ᇱጱ ࢩ ڦ ጲ ࢩ ă Ⴔᄲጀᅪ ڦ ᇑ ALD LjALE ᅝ ڦ ᆫ ۅ փ თ ኻ ඓ ں أ ᅃ ᇱጱ Lj თ ۼ ਏᆶ ጲ ኹ ڦ Ⴀ ă କೠࠚਗ਼ ࢫఈ ڦ ௬ጒༀLj ᆩ Ⴤఇ๕ई ኁ ALE ݛ ሞ ӣ ჽ ᇶฉਗ਼ أ ሀ 400 ࡂᇱጱ DŽ~50nmDžLjժᆩߛ ݴ Րཪพ ۉ ጱ၂ DŽHRTEMDž ܔ ኙDŽ 2Džă Ⴤఇ๕ ᅝਗ਼ ᄣ ڦ ఈ ௬ Բড Lj ALE ᅝਗ਼ ࢫఈ ڦ ௬ඐ ă૧ ᆩᇱጱ ၂ DŽAFMDž ᅜ ଉ ݴ ဆఈ ௬ ڦ ߵݛ DŽRMSDž ăሞਗ਼ ኮമLjᄣ ௬ 2 ᇱጱ DŽ 3DžLj ଉຕ ၂๖ Ⴤఇ๕ਗ਼ 5. ሞ Բ ڦ ᅝཉॲ ਗ਼ ܠ ࡂࠏ ڦ SEM ă ᅝᆯᇀ ओ ᆌ ሺ କ 15 ᇱጱ ڦ Ljᇑ ඇԏ Ⴔ ڦ क़ሀ 30 ௱ă ኄᅃօየ ڦ ᆯ ݒ LjALE ᅝਗ਼ ኻሺ କ 1 ᇱጱ ڦ ăኄຫ ഘ ݴ ጱ Ⴔ ڦ क़ ڦ LjՂႷ ᄲ ഘ ALE ԍ କఈ ௬ᇱᆶ ڦ ᇱጱ Lj ᇱᅺ ݴ ጱ ڦ Lj ๑ ᇱጱᇑࡂ ௬ ڦ ݒ ᆌă ᆯᇀ ALE ਏᆶጲ ኹ༬ႠLj๑ ڥ თ ࢫఈ සࡕ ᆩକ ڪ ጱሺഽ ڦ ALE ݛ Lj ഘॽ घ ௬ ॽۼ ጲ ڟ ںۯ ᇱઠ ڦ ጒༀă ڪ ጱ Lj๑ ڥ ݴ ጱ नਗ਼ ጲᆯᇱጱए ALE ᅝሞࢢ ฉᄺਏᆶ ߛ ڦ ਗ਼ Lj Lj ტ ں ᇑࡂ ௬ ݒ ᆌăኵ ڥ ኸ ڦ ሞኝ 300mm ০ ᇶฉ ଉକ ALE ᅝ ڦࡂܔ Lj କ ݞ ኹ ࡗራ ईփ ੦ ڦ ਗ਼ ࡗ ײ LjႴᄲ੦ ਗ਼ أ ଉDŽ 4Džăन๑ ALE ᅝ ሞช ঢ়ࡗᆫ ڦ ڪ ጱ ڦ ፕጒༀLjन ጱ ጱ ڦ ଉ ᄲߛ ൧ Ljਗ਼ ᅝ ၄ ڦ ᆫᅴ ሌႠLjᄺᅙঢ় ਗ਼ ពኵLjᆼ ᄲ ᅃၵă ਗ਼ ᅝ ܔ ኝ ᇶ ݔ ዐႠ૭ጱ ጱຕଉ ڦ Վ ժ ܔ ᇀ ௬ օየઠຫLj ᆩ૭ጱ ऍ ݛ ๕ઠ ࠃ փๆ ߌ ݴ ăኄᅪ ጣ ALE ᅝᆶጣ ܔ ডߛ ڦ ᅝ ፁࠕ ڦ ଉLjᅜ ઠ ٶ ೦ᆯᇀ ဌ କ ڦ Si Si ă Ⴀ ዘ ႠLj ኄኟ ᅝ ၄ ٷ ଉ ᆌᆩ Ljᆩ૭ጱ ऍ ݛ ๕ઠ أ ௬ ዊ ڦ ୲ժփߛLj 18 ڦ ዘᄲཉॲă

21 Ӷ ᄮ䲏 θ C OV E R S TO R Y 埗 କ ኙ ܔ ༬ኙ ࠓ ڦ ਗ਼ Ⴀ Lj ॠ କ ܠ ᇀ ٷڦ ሰ ዐăཚࡗ ᆩ ཚฆᆩ ڪڦ ጱ ࡂࠏ ڦ ਗ਼ ખăස 5 ڦ ௮ ۉ ጱ၂ DŽSEMDž ݒ ᆌഗ ڪڦ ጱ ઠ ݒ ᆌഘ ሞࡂ ௬ ڦ ဌ ๖Lj Ⴤఇ๕ ڦ ਗ਼ ᅝሞ ਗ਼ ܠڦ ࡂࠏ ڹ ࡗ ײ Ljሞԍ କ ALE ਏᆶ ڦ ጲ Ⴀ ڦ ཞ և ࠏ ࠓLjኄ ሞ / ڪ ጱਗ਼ ᆼਖ਼ ޜ କ ਗ਼ ୲ گ ኄᅃ૦ ႠՄ ăale इ ڥ କ ბዐ ዚ ዜኪ ڦ ၄ၡă ኄዖ ᆌ ڦ ᇱᅺ พ ኄዖႎ ڦ Lj๑ ᆌᆩᇀ ٷ ᅝኟሞ ၄ Lj ጱ ሞࠏ ڦ Մฉ พLj ڞ ዂࠏ ڹڦ ևՉঙև ሞჽჄఊ ୱ ڦ ײ ዐኄॽ ᅃ ସටߌ ڟ ና ڦݺ Ăਏ [3] ᄲԲ ዐ႐և ਗ਼ ڥ ᅃၵ ăᇑ փཞ ڦ Ljᆯ ᆶዘ ٷ ᅪᅭ ڦ ײ Ԙă ALE ਗ਼ ܠڦ ࡂࠏ ࠏ ڹڦ ևඐ ڦ Ljኄ ᆯᇀ ᅝ ਏᆶ ڦ ጲ ༬Ⴀ ǖᅃ ڋ ᅙဌ ݒڦ ᆌ ၅ ԥ Lj ጱ ॸڦ พ ୲ ३ ڟ వᅜ ਥ ײڦ Lj 1. V. Donnelly and A. Kornblit,ĐPlasma etching: Yesterday, today, and tomorrow,đj. Vac. Sci. Technol. A, Vol. 31(5) (2013). ፌዕ ڦ ࡕ ࠕሞࠏ ڹ ௬ฉइ ڥ ထ ڦ ᅜत ᇱጱप ڦ Ljժሞኝ ᇶ ݔ ਏᆶ ڦ ሌ 2. D. Athavale and D. J. economou,đmolecular dynamics simulation of atomic layer etching of silicon,đj. Vac. Sci. Technol. A, Vol. 13 Ⴀ ዘ Ⴀă (1995). 3. ஃ Ԩ କᅃዖ ڪ ጱሺഽ ڦ ALE ݛ Lj ਏᆶᇱ ጱप ڦ ਗ਼ ড ڦ ᅝ ت क़Ljᅙঢ় ᅜᆌᆩ S. A. Vitale, H. chae, and H. H. Sawin,ĐSilicon etching yields in F, cl, br, and Hbr high density plasmas,đj. Vac. Sci. Technol. A, Vol. 19 (2001). NE W The Perfect Balance... TM O-rings & Seals Engineered to reduce cost not performance A new range of elastomer materials for semiconductor applications. Minimize risk of contamination Optimize maintenance cycles Reduce cost of consumables Visit: cn.prepol.com/genius prepol.sales@idexcorp.com 19

22 ឭᱜ TECHNICAL ARTICLE د Ћ 3D-IC TSV ሰዐ ڦ ມఈ ଣ ݛ ႎ ڦ ᅝरຍփምႴᄲ༬ ڦ ᅝยԢઠ ܔ ᇶ ᇨ ت ࢫ ت ă DŽ3DDž ࡂ ཚ DŽTSVDžӷ ڞ रຍ ࠕॽᅜ ڦ ௬႙ ڦ ࠓՎ ؽ ႙ ڦ ࠓLj๑ ۉ ڥ ጱഗॲሞ Ă ፕ ټ त ࠀ ฉ ۼ ᆶକ၂ዸ ߀ں ăᄲ ၄ 3D-IC TSV ڦ ᅝण ॽ ᅃ ڦٷ Ljሞლቴ ਦ ݛ ӄ ײࡗڦ ዐᅙঢ় କ ܠ ዖरຍ ୟ Ljኄၵरຍୟ ཚ ᅈ 3D TSV ᅝ ڦ แ ԥ ݴ ཚ DŽYLD UVWDžĂ ዐ ཚ DŽvia-middleDž ࢫཚ DŽvia-lastDž ዖ ႙ă ሞ ཚ ڦ ण ݛ ӄዐLjtsv ሞ ፕമ ڢ ႾDŽFEOLDž ᅝ 1. IMEC ᆩକDow Corningࠅ ᆶऐࡂ ኬए ڦ ଣ ݛ Ljॽԋࡂഗॲ ᇶᇑࡂሜ ᇶ ںࠀ ၄କ ݴ Ljժॽ ሞᆩᇀ ൎߪ ڦ ॐฉDŽᆯIMEC ࠃቷ ժᆛᆶӳ Džă ኮമ ᅙঢ় Ljኄᄣ ᅜᆶߛ ڦ 50ȝm ᅜ DŽ 1DžDŽኄ փ ܠ ᅃቧ रຍ ᅜ ݴ बዖ ႙ ǖԉઔᆶ ඤᇨ໙ኵઠ TSV ڦ ਨᇹ ག Քጚ ٶ ᆇኽࢩ ڦ ᅃӷDž LjTSV ڦ থ Ăᄞट ඤ - უቕ ᅝăሞዐཚ ݛ ӄዐLj ሞമ ڢ ፕ ၄ Ljኄॽ ᅃ ڦٷ ݛڪ ă Lj ܔ ᇀ 3D-IC ᅝण ႾDŽFEOLDž ࢫ ڢ ႾDŽBEOLDž ă କ ӭሏ ኄዖ ג ԋ ઠຫLjჺ৯ፌ ݛڦܠ ૧ᆩᅃዖ ڦ ᅝ ኮक़ઠ TSV ᇶLjᄽহႴᄲᅃ ڦ ਦ ݛ ӄLj ए ڦ ሡ ቕথ ઠॽԋഗॲ ࠓLjᅜ ฉ ኮक़ ڦ ཟ Ⴔᄲ ࠕᅜ० گ ڇ Ԩ ݛ ๕ॽ Ⴔ ᇶথ ڟ ᅃ ሜ ᇶฉᅜ ܔ ࠃ ăሞࢫཚ ݛ ӄዐLj ሞമ ڢ ࡂڦ ᇶᇑሜ ᇶ ኮक़ ၄ሡ ኧ ă 2 ๖ ڦ ᅃዖ ᆩኄዖଣ ႾDŽFEOLDž ࢫ ڢ ႾDŽBEOLDž Ⴀ ڦ ݴ Lj ࢫჄ ڦ ݛ ӄ ۆڦ ႙ ᅝ ײ Lj ᅝ ۼ ኮࢫLj ᇶ ڦ ኟ௬ईኁ ᇶ३ԋ TSV ፕ ᅝă Ⴔᄲሞഗॲ ᇶईኁሞሜ ᇶ ฉ ݴ ԝ௬ઠ ፕ TSV ࠓLjኄዖ ݛ ཚ ᆩᇀ 3D ড ڦگ քᅃ ݣ ᅃ ቕথ ăሞ ଣ ݛ ถ ᇶ३ԋ ᅝᅙঢ় ݘ ᆌᆩᇀ ൧ ዐă ڍ ሞ ᆶ ኄ ዖ ݛ ዐLj ස ࡕփॽ ࡂ ᇶࢩ ३ԋ ت ኮࢫLjॽഗॲ ᇶ ሜ ᇶ ቕ ᅃ ăথ ઠ ڦ օየ ᅈ ICĂࠀ୲ഗॲ ߌد ഗ ڦ ሰዐă ܔ ഗॲ ᇶ ڦ ३ԋĂTSV ڦ ਸ ߵ ᅝ ڦ Ⴔ൱ ᆌᆩ ڦ փཞLj ᇶ ፕĂ ዘք և ڦ ፕLj ANDREW HO, Global Industry Director, Advanced Semiconductor Materials, Dow Corning, Hong Kong 20

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24 ឭᱜ TECHNICAL ARTICLE د Ћ 3D-IC TSV ᅝण ڦ ଉ ײ Lj ፌዕ ڞ ዂକ ߛ ڦ ጺ ᆛᆶ Ԩă ጺ ᆛᆶ Ԩ ڦ ፌ ܔ ᇀ ᆶ ڦ ӷ ڞ ഗॲ ሰઠຫ ۼ Ղᄲ ڦ Lj ڍ ܔ ᇀႎᅃ ڦپ रຍLj૩ස 3DIC TSV ᅝण ڦ ᆩ ॽ ዘᄲăDow Corning ࠅ त ᄽহ ፕअӵ ڦ ፌႎ ظ ႎቛ၄କᅃዖ ᆶ ቛമ ݛڦ Lj एᇀᆶऐࡂ ኬ ڦ ቕথ ݣ ઠ ၄ᅃዖ ० ڦڇ Ăਏᆶ ߛ ᅮ ԨԲ ڦ ሡ Ⴀ ᇶ ݛ ӄă ዘᄲ ڦ Ljኄ 2. ଇ ᇶ ଣ ݴ ݛ ӄ ۆڦ ႙ ᅝ ײ ă ႎ ݛ ӄ ᅜ থ૧ᆩ ཚ ٷڦ ଉ ምॽᅙ ᅃ ڦ ኄଇ ᇶ ݴ ഐኧ ፕᆩ ڦ ఈ ټ ă ሰ Ljઠ ၄ഗॲ ᇶ ሜ ᇶ ए TB/D ݛ ӄ ၂๖ ڦ യ ሞ ڦ Ljᅜतሞ ܔ ᅙঢ় ۯ କ ܠ ዖ ଙरຍᅜतᇑኮ ᅙ ᅃ ڦ ଇ ᇶᅜ ბ ݛ ๕ ᄲ๑ኄዖ ݛ इ ڦࠀ ڥ ሞ ܠ ዖยԢ ᇶ ت ڦ ݛ ၄ ݴ ă ᇀ ቕথ Lj ՂႷሞ ᇶ३ԋ ჺ৯ă ڍ ᆯᇀኄ TB/D ݛ ӄධ ت ᇀ 3D-IC ሰ ᅝዐ Ⴀ ਸ Lj ሞ Ԩࡗߛᅜतස ᅃዖႎ ڦ ມఈ ଣ / ݴ ࠓ ბමᅂ ඤᆌ ڦ ᆖၚLj ࠃ ܔ ܔ ኄዖ ג ԋ ᇶ ڦ ጎሜĂӭሏ ت ڪ ኄዖႎ ڦ ݛ ႐ ᅃ ० ڦڇ ԋഗॲ ᇶ ڦ ଆ ԍ ă༬ ں Ljଣ Lj ๑ ڥ 3D-IC TSV ᅝ ण ມఈ ࠓLj ᆩକଇዖᆶऐࡂ / ݴ DŽTB/DDž ଙՂႷᄲਏ ᅃዖᄽহ ڦ ዷ रຍăኄၵ ኬ ଙLjሞ 3D-IC TSV ण ڦ ԋ ᇶ ᆶম ڦ ඤბ ბฉ ႠLjᅜ ڸ ࡗߛ ڦ Ԩփ ઠጲᇀ ๑ᆩ ଙ ڦ ሰዐઠ ړ ଣ ଙăኄዖ 3D-IC TSV ᅝ ዐ ڪ ጱ ᅜ त ම ሗႠLj ઠጲᇀଣ ݴ ᅝ ٷٷײ ڦ ० କଣ / ݴ वĂ Ă໗මᅂ ܔ ڦ ă أ କᄲ ᅝཚ Ⴔ ܠڦ ᇨ ت օየăኄၵ ࡗ ײ Ljժ ३ณକᇑኮ ڦ Ⴔᄲ ਏᆶᆫႯ ڦ ቕ Ⴀ ઠ ڸ ᇶ३ԋ ݯ ੮႐ ڦ ᇨ ت օየԍኤକ ഗॲ ᇶᇨ ت ࢫ ت ሞ༬ ย ࡗ ײ ዐ ڦ ऐႁᆌ ኮ Ljሡ Ⴀቕ ᅝ ਏᆶߛ ڦ ଆ ୲Ljժ ᅜ ܔ ӆ Ԣฉ ڦ ԨLj૩ස ڪ ጱ Ăጭ Ă ࢩ ՂႷᄲሞኝ ᇶ ݔ ਏᆶ ࡍ ڦ Ăᅙਏඇևࠀ ڦ ഗॲ ᇶ ࠃ ᆫ DŽpreferential zoneDž ت ڪ ย ߛ ڦ ᅃႠăन ሞঢ়ࡗ ᆶ ᅝ ڦ ԍ Lj ڍ ᄺཞ ፆҹକ Ԣฉ ڦ Ԩă ժ ܔ ԋഗॲ ᇶ ဢ ڪ ႾLjፌ ࢫ ܔ ԋഗॲ ᇶ 3D ڦ ă օየࢫኝ ᇶ ݔ ᄲᆶᅃ ڦگ ጺࢩ Վ ଉDŽTTVDž LjनႴᄲԋഗ ॲ ᇶฉ ڦ TTV ኵ ڟٳ ኻᆶ 2ȝm ኄᅃణՔDŽ 3Džăଷ Ljኄၵ TB/D ଙ ՂႷᄲ ࠕሞ گ ᇶ ࢫ ݴڦ ᅝLjժ ᇑփཞ ڦ ᅝरຍ ग़ඹLjԈઔ ग़ ඹ ଙཫ ۅ ईཟዹཫ ۅ ᅝLjժ ᅜ ᆩᅃ ० ڦڇ ᇶ ဢ ᅝLj փ ฅഗॲ ᇶ և ڦ ዖԋ ࠓLjᄺփ ݴ ࢫ ܔ ԋഗॲ ᇶ ܔ ଣ ڦ ഗॲ ᇶDŽ३ԋࢫDž ڦ ၂๖Lj ኝ ࢩ Վ ଉDŽTTVDž ٷ ሀ 4ȝmă

25 ឭᱜ TECHNICAL ARTICLE د Ћ ت ă ၄ሞ ᅜ ᇶԝ௬ఉၥᅜ त ӵ ڦ ᅝࡗ ײ ੦ ăሞঢ়ࡗ ࢫ ت ኮࢫLjഗॲ ᇶ ሜ ᇶ ኄ ᅃ ᇶ ॽܔ ሞ ᄂጣ ݣ ቕ ኮक़হ௬ᆯऐႁ ݴ ă ࢫॽ३ԋഗॲ ᇶ ݣ ዃሞኧ ॐ ڦ ԋ ټ ฉLjᅜ ࢫჄ ܔڦ ڦ ݣ ဢ أ Ă ڦ ൎߪĂ ڦ ൽ ݣ ዃᅜत ڪ օየLj ᅈ ߃ᆶቕ ڦ ሜ ᇶ ॽ ᅜ ბ ت ă ڦ ᅝཉॲ 4. ᇶฉ ሡ Ⴀቕ ժ Ljኮࢫॽ ݴ ଡ໗Ă ໗Ăᆶऐමᅂᅜत ሞ TSV ሰዐႴᆩ ڦڟ ბමᅂዐઠ ڦ ბ Ⴀ Ljሞ ᆶኄၵ ბමᅂዐሡ Ⴀቕ ଙ ब ࢭ ۼ ᆶ ዊଉ ईሺ ڦ ၄ၡă ฉ ኄዖࢪ ڦ TB/D ଙՂႷ ਏᆶᆫႯ ڦ ඤ ႠLjᅜԍኤሞփཞ ڦ ᅝօየዐLjԲසሞཟ ڦ ਗ਼ ၂ ᅝ ڼڦײ ᅃօ ᆩ ገ ሞ ኄ ଇ ኮ ࢫLj ॽ ഗ ഗॲ ᇶฉዘք ڪ օየ ք ݛ ଣ ଙ Ljኄᅃօ ॲ ᇶ ሜ ᇶ ᅃ ᇶ ዐᅈ ԍ ᇶ ڦ Ⴀă የ ܔ ᇀ ሰ ᅝ क़ ݥ ܔ ăሜ ᇶ ᅜ ࡂ ᇶᄺ ᅜ ᆶ ݥ ዘᄲ ڦ ᅃ ۅ Ljኄዖࢪ ଙ ڦ ăᆯᇀ ଙ ڦ TTV ᆖၚ ڟ ի ᇶ Lj ۼ փⴔᄲ ඪ փ ሞ ࢫ تڦ ࡗ ړײ ዐ ݣ ഘ ᇶ ڦܔ TTVLjժໜࢫ ሞഗॲ ༬ ڦ ᇨ ت ࡗ ײ ăሞ օየ Ljᅺ ኄᄣ ۴ ݴ ඍ Lj ᇶ ڦ ३ԋࡗ ײ ᅜत ᇶ ࢫڦܔ ኮമLjኈ ڦ ፕ ᅜԍኤሞቕ ፌዕॽ ڞ ዂഗॲ ڦ ă ت ࡗ ײ ዐॽฉ TTV ڟڿد ԋഗॲ ውႠቕথ ዐփ ᆶഘಟLjሞ ܔ ሞኄዖႎ ݛ ዐ๑ᆩ ڦ ݣ ᇶฉăᅺ Ljᅃਸ๔ ڦ ԋ ቕথ أ ഘࢫLjምॽሜ ᇶ ݣ ዃ ቕ ଙ ڦ ඤ ࡗ ײ ස ᄲ ԍ ᅃ ڦگ TTV ट ዘᄲ ڟ ഗॲ ᇶฉă ǖ ॽ३ԋࢫ ڦ ᇶ ݣܔ ዃሞ ڦ ăⴔᄲഽ ڦ Ljኄ ௮ ڦ ๆ ݴ ዘᄲ ڦ ᄲ ሞ ܔ ഗ ඤӱฉLjሞ ഘዐ ඤ ڟ 200ņժԍ ᅝణՔ ᄲॽഗॲ ᇶฉ ॲ ᇶ ሜ ᇶ Ljኄᄣፔ 20 ݴ ዓLjኮࢫሞ 200ņ ڦ ഘዐ ଙఈ ڦ TTV ݔ ሞ 1% ᅜ ă ᅜट ںٷ ଉ ڦ ăᆯᇀᆶ ݣ ዃ 3 Ljምঢ়ࡗ ଙཫ ۅ օየ ሞഗॲ ᇶኟ௬ ऐࡂ ኬए ڦ ቕথ ଙሞ ධ 260ņ ت 10 ݴ ዓLjፌࢫሞኈ ዐ ᅃ Ⴤ ڦ ݣ ఈ Ljᄲԍኤ ࠕ ԍ ጒༀLj ᅜ փⴔᄲ ዺ 200ņ ݣ ዃ 3 ă ܔ ᅃඤ ඇև ߃ ᇶฉ ᆶ ࠓăথ ઠLj ॽഗॲ ᇶ ሜ ᇶ ၄ ᄓᄣ ௮ ג ำ၂ ݴڦ ဆ ሞ ݣ ฉም ᅃ ᆶऐࡂ ኬए ăᅺ Ljኄၜरຍॽਏᆶᆌᆩᇀ Lj ۼ ᆶ ۴ईኁ ݴ ڦ ቕথ Lj ࢩ ᅈഗॲ ᇶ ڦ ௬ ๆ ݴ ٤ ۉ گגڦ ຕ ଙฉ ڦ യ ඍ ă ஸ Lj ٷ ዂ ຕๆ ăጆ Ljሞ ڦ ཟ ዐ๑ᆩኄዖ گג ኄၵ ࡕ ݴ ຫ ኄዖႎ ၜ ᅝ ਸ ڦ ቕথ ଙन๑ሞ ۉ ຕ ଙ Lj ܔ ᇀ แ ڦ ᅝ ݛ ਸ ڦ TB/D ଙփ ঢ় ഗॲ ᇶਏᆶ ߛ ڦ ӈཫഐ ޚ ஸ ॽ ߌ ݥ ăኄᅃ ᅝօየጺࠌ ዿ د ཥ ᇶԝ௬ఉၥ ڦ ഽ ᄺᆶ ዚ ڦ ሌႠ ኝႠLjኻႴ ኻႴᄲब ݴ ዓ ڦ क़Ljথ ઠ ሞඤ ऍLj ਏᆶ ڦ ඤ Ⴀ ࠕঢ় ᆩ 10 ڟ 110ȝm ࢩ ڇڦ ᅃቕথఈ ӱฉ ब ݴ ዓ ࢫڦ Ljཚ ሞ ዿ 3D-IC TSV ࠓ ዐแ ሞ ๑ኝ ᅝ ڟڥ କ० ă 150ņ ઠ ܔ ᆶऐቕথ ଙ ᇶ ܔ ฉ ڪڦ ጱ ت ࡗ ײ ă থ ڼ 44ᄻ 23

26 All New 10 Advanced Features! FLIP CHIP BONDER- A110 SECTION FLIP CHIP BONDER-A110 PRODUCTIVITY UPH 15,000 (Based on Dry Run) X-Y PLACEMENT ACCURACY CHIP ROTATION BONDING HEAD BONDING FORCE 1N~20N ( ) DIMENSION (Lx WxH) 1,600(L) x 2,200(W) x 2,000(H) FOOTPRINT WEIGHT 2,600kg

27 ឭᱜ TECHNICAL ARTICLE د Ћ ᆅଶ रຍ ܠڦ ᆩ ۉڞ Ⴀ ཌྷጎఈ ቛტ ݯ ኁփ ᄲ൱ሞሁઠሁ ڦ ฉ ၄ ڦܠ ࠀ Lj ๑ӷ ހ ڞ ጎጆ ლቴ ԋă Ă ߛ ހ ጎ ڦ ਦ ݛ ӄă ၄ ਦ ݛ ӄև ݴ ሞᇀ ࠃ ሰ ג ႙ӷ ڞ ጎዃ ๑ᆩ ڦ ଙăኄփ ᆩᇀएӱ ڦ DŽ ۉڞݥ ႠDž ހ ጎLj ᄺ ᆩᇀᆅ ॐDŽ ڞ ۉ ႠDžᆌᆩĊ ႙ ൵ ᅙકቛ ܠڟ ዖ ހ ጎ ႙ăएӱ ހ ጎ ڦ ሰฆ ᅜઠᅈ ཌྷጎఈरຍઠ ၄ ڦ ހ ጎLjᅜඓԍঌ ڦ ᅃዂႠ ႠLj ൡၽă ڍ ሞ 2010 ۉڞ Ⴀ ཌྷጎఈമLj أ କ د ཥ ڦ ᅃᄣ๕LjLOCTITE ABLESTIK CDF 200P କԋ႙ ཌྷጎঌ Ljᆅ ॐ ሰฆबࢭ ᆶඪ ስă ג ԋ ڦ ሞ ײ DŽԝ௬ჺఉ ཌྷఈDž Lj० କ ሰ ၄ሞLjኄᅃൎ କ߀Վă ࡗ ײ Ljॽ ڦ ڇ ཌྷఈ ײ ժ ڟ ᅃ ፇ օየ ă ߛ ௬ฉ ۉڞ Ⴀ ཌྷጎఈ Lj ڟڥ କӷ ၄ሞLj ߛॽ ᅃĂᇨൎߪ႙ ۉڞ ఈरຍ ᅃօ ހ ڞ ጎ ݘ ڦ ᆓăLOCTITE ABLESTIK C100 ᄙ ٷ Ljჺ କ LOCTITE ABLESTIK CDF 800P ࢫ इ ڥ କ ݘ ᄓኤLj ٷ ႙ӷ ڞ ยԢ ሰฆࠅ LOCTITE ABLESTIK CDF 500P ဣ ଚ ཌྷ ጎ ఈ ଙă ਸჇ ኄዖ ଙ ࠕ ټ ઠ ހ ጎ ڦ કቛႠă૧ᆩኄዖ LOCTITE ABLESTIK CDF 800P ದ ݛ ਏᆶԋఈ ڦ ᆶᆫ دپ ཥঌቕव ڦ ཌྷጎ ଙLjᆅ ॐยԢጆ ၄ሞ ۅ Ljཞ ࠃ ߛ ڞۉڞ ඤႠ ᆩᇀࠀ୲ഗॲᆌᆩ ڦ ࠕ૧ᆩԋఈ ހ ጎ ଙ ڦ ᆶᆫ ۅ ĊĊनण ԋ ڦ ཚࡗ MSL 1 प Ⴀ ۉڞڦ ঌఈăႎ႙ ۉڞ ఈ ڦ ĊĊ ၄ ڦ ঌ ࢩ Ljժ ሞ ހ ጎഗॲዐण ܠ ۉ ඤႠ Բራ ڦ ߛକ 50%LjժਏԢᇑ ۥ प ڦ Ljᅺ ԋఈ ࠃକ ڦ - ಎक़ਐăኄዖ ཌྷጎঌ ଙᅃዂ ڦ ࡕăLOCTITE ABLESTIK CDF ፌ ᅜਝጎ ڦ ๕ ၄Lj ཌྷጎఈ ൎߪঌ ټ ሞଇ 800P ԋఈ ڦ ඤፆኸՔएᇀࠅණᆫᇀ ओඤ ݴ୲ڞ ဆ ހڦ փཞཌྷఈࡗ ײ ዐԥཌྷ ڟ ᇶฉLj ߛტ ں કቛକ ဣ ጎ ഗ ॲ ඤ ፆ ăloctite ABLESTIK CDF 800P ଚLjሺ କ ᆩᇀ ג ԋ ڦ ೦Ⴀᇨൎߪ႙ ۉڞ ఈरຍă QFNĂSFNĂSOTĂSODĂSOIC ႙ QFP ยԢ ሞ LOCTITE ABLESTIK C100 इ ڥ ࢫࠀ Lj ስLj߀ କࠀ୲ഗॲ ހ ጎย ڦ क़ Ⴀ ăloctite ߛ ױ ጕऍLj କ ᅃ ۉڞپ Ⴀ ཌྷጎఈ LOCTITE ABLESTIK CDF 500P ဣଚሺ କ ๑ᆩ ݔ Lj ABLESTIK CDF 200PăLOCTITE ABLESTIK CDF 200P ࠕᆌᆩժ ߛ 10.0mmġ10.0 mm ٷڦ ڦ ᅃĂᇨൎߪ႙ ۉڞ ཌྷጎఈLjॽൎߪঌ ټ ႠLjཞ ԍ କᇑ LOCTITE ABLESTIK CDF 200P ԋఈ ཌྷጎ ଙण ڟ ᅃ ᇨൎߪ 6 ᆈ ई 8 ᆈ ԋఈ ཞ ۉڦ ඤႠ ă Lj๑ᆩ ݛ ՍăLOCTITE ABLESTIK CDF 200P ኍ ܔ ଳऄႠ ࠀڦݐݥ Ⴀ ߛኝ ཌྷጎఈဣଚ ยԢ ᆌႠ ጆ ย Lj ᇑ ଶᇘ ڦ ᆩཌྷఈยԢग़ඹLj ڦ ए ăඇဣଚ ణമ ࠃକ ܔ ᇀ ܠ ዖ DŽ ႴዷᄲยԢཨጨă ۉڞ ఈ ڦ ཌྷఈ ᄲ൱ 65ņLj ޙ 0.2mmġ0.2 mm ڟ 10.0 mmġ10.0 mmDžăፌ گ 50μm ࢩ ܠٷ ຕཌྷఈ ԝ௬ჺఉยԣ ᅝᄲ൱ăᆯᇀ ᆶ ڦ ڦ ᇶĂԈ ࡂĂTiNiAg Au ܠڪ ዖԝ ᅝLjᅜत থ ڼ 28ᄻ Shashi Gupta, ߛ ۉ ጱ ଙᆶ ࠅ 25

28 ឭᱜ TECHNICAL ARTICLE د Ћ ण ئ ഗ ૬ ݛ ፇॲ ڦ և ࠓ ण ئ ഗ૬ ݛ DŽHMCDž ᅃዖ ೦Ⴀ ڦ ਦ ݛ ӄLj ਏᆶฉ ڦ Ⴀ Ⴀă ໙ऐ ڦپ ઠଣLj ئ ഗरຍ ᅃ ሞ౮ ጲ ฉ CPU ڦ മ օ ăሞ 20 ๘ 70 پ ዐ LjCPU ย ӷ ڞ ሰ ᅝरຍਸ๔ ں LjCPU ૧ᆩକኄၵरຍ ڦ ቛᆫ ઠሺ ዷ ዓ ୲ ڦ ຕଉăᇑ ݒ LjDRAM ሰኁዷᄲ ૧ᆩሞ ᅝ रຍฉ ߀ڦ ઠ Ⴤ ߛ ں DRAM ڦ ئ ඹଉă ڍ ᅺ ئ ഗဣཥ ཚࡗण ڦܠ ઠ Ⴀ Lj ئ ഗ ᄽᅙঢ়փ ฉ ኧ ኄၵႎ ࠓ ئ ഗဣཥย ڦ օ ă ฉLj ᅃ ႐DŽCoreDžዐ ئ ੦ ഗ ڦ ຕଉᅙໜጣ ᅃ پ रຍ ڦ ႎ ሞ ইLjኄ ሺ କ ئ ဣཥ ڦ ፕ ă କᆌ ܔ ኄ Ljሞ 2006 Micron ࠅ ڦ ᅃ 1 HMCԈ ᆶᅃ இडഗॲ Lj ᇀ ؽ DRAM ݛ ڦ Ljኄၵ 1. HMCԈ ᆶᅃ இडഗॲ ഗ ᇀ ؽ DRAM ݛ ڦ ኄၵ ཚࡗTSV ၄ ă և ܔܓ ئ ഗႠ କമቒႠჺ৯ă ڦ ణՔ ڦ இड ሴ DRAM ڦ ႾĂ ႎĂຕ ୟ ܔ ئ ഗሞဣཥ ௬ ڦ Ⴔ൱ ඇਆ ڦ ୯Ljᅜሞ ࠓ ᆯĂ ٱ ဃၯኟᅜतᇑዷऐ ߛڦ থăHMC ڦ ၡ ئ ฉ ظ ሰᅃ ሞਏᆶ ߛဣཥपႠ ഽ ࠀٷ ئ ഗDŽabstracted memoryDžॐࠓ๑ ئ ഗথ੨ᇑ ئ ഗरຍ ഗत I/O ဣཥኮक़ ڟٳ ᅃ ă ౮ ڦ ࡕՍ ݴ LjሎႹփཞ༬Ⴀ ڦ ئ ഗဣཥ ᅜࠌᆩᅃ থ੨ă ሰ କᅃዖ ण ڦ ئ ഗ૬ ݛ DŽHybrid Memory ئ ഗ ڦ ၡ ๑ย ኁփՂም ୯ ئ ഗ੦ ዐডઓవ Cube,HMCDžፇॲLj ॽஇडഗॲ DRAM ጲ ڦ ፌ ڦ և ݴ Lj૩ස ٱ ဃၯኟĂ DŽresiliencyDž ႎ ڪ Ljժ ᅝ Ljઠ ᅃዖਏᆶᅴዊण ࠓ ڦ 3D ހ ጎ ă ሎႹย ኁ ᅜ૧ᆩ ئ ഗ ڦ ༬Ⴀᆫ LjԲස ߛڦ Ⴀ ස 1 ๖Lj ڦ ए إ ᅃ இडഗॲ Ljሞ ฉ ݛ ݥ ᅟ Ⴀăᅺ HMC ᅜኧ ٳߛ 160GB/s ڦ ئ ᆯࡂཚ DŽTSVDž ڦ DRAM ጻ ăᅃ ഗ Ⴤ ټ Lj๑ ڥ ၄ሞፌ ڦٷ Վ କ ǖ Đ ထ ᄲᅜ ঢ় ᆫ ڦ DRAM ንଚཚࡗፇॲ և ڦ இडഗॲ ڦ ܠ ઠሏ ئ ഗথ੨đǛ TSV ઠ ݡ ئ ഗ ڦ ႑ ཚୟLjኄᄣ ڟڥ କᅃ ᆫ କ ፕႠ ڦ ႙ ئ ഗፇॲă HMCरຍ ॽ ႙ ئ ഗፇጎሞᅃߪ ཚ ڦ एӱฉፕ ፕ ण ئ ഗ૬ ݛ DŽHMCDžፇॲኄዖඇႎ ڦ ڇ ᇮLjኝ ဣཥ ᅜԲ മ ڦ रຍ ᆶ ں ᇨ रຍႴᄲᅃ ڦݘ ༀဣཥ ڦ ኧ ᄽহ ڦ ᆌ ڦ ඪခă ༬ ኮ ت ሞᇀLj ت ഗ ᅜ ݴ ૧ᆩ ᆩዷ ă କᆌ ܔ ኄၜ LjMicronĂSamsungĂAlteraĂ ໙ փ ڟ ئ ཚ ڢ Ⴀ ڦ ă ᆩߛႠ Open-Silicon Xilinx ࠅڪ ፇॺକ HMC रຍ THOMAS KINSLEY, Memory Development Engineer; ARON LUNDE, Product Program Manager at Micron Technology, Inc., Boise, ID. 26

29 ឭᱜ TECHNICAL ARTICLE د Ћ (HMC Consortium, HMCC)Ljժᇀ ሆਸ๔ኟ๕ ݛ ๕ሏ ڦ ئ ഗॲ ԲLjHCM ဣཥ ڦ ኝ Ⴀ इ ڥ ሏፕă ૬ ڦ ణՔ ॽዚ ڦܠ ᇱ๔ยԢ ڦ ሰฆ କ၂ዸ ڦ Lj ၄ ਏᆶড ڦ ಇ ܓ ჽ ڦ DŽOEMDžĂ ۯ ฆ ࠃᆌฆፇ ሞᅃഐLjཚࡗࠌཞ ፕઠ ຕ ၚᆌႠ ăhmc փ ᅜ ࡀٷ ఇ ڦ ຕ ժ ت HMC ᅃ ԥᄽহࠌཞথ زڦ থ੨ࡀ ݔ ă Lj ਏᆶኧ Đߛपཚტ ᇑ ႑တ णဣཥ କኄ ణՔᅙঢ় ፕକ 17 ሆLjժᇀ ሆ DŽATOMICSDžđ ڦ Lj३ณକ ت ഗ ևຕ دڦ ଉ քକඇ൰ ڼ ᅃ HMC থ੨त ၹᅱࡀ ݔ ă ժ ሜց৸DŽRIÀRDG UHPHGLDODž ፕă ኄ༫ࡀ ࠃ ݔ କᅃዖ ਐ DŽSRDžĂฯ ਐ DŽVSRDž ኟසኮമ ڦڟ Lj ၡ ئ ഗDŽabstracted memoryDž ג ਐ DŽUSRDž ڦ ሁ๕ (PHY) ࠓLj থ੨ᇑ ئ ഗԨว Lj ᆩକएᇀ HMCC ၹᅱ ᆩᇀႴᄲ ईट ତৎ ڦ ئ ഗဣཥઠኧ FPGALjASIC ASSP ڦڪ ᆌᆩLj૩සሞߛႠ ஏᅜत Քጚ ߛڦ ز ጺ ăሞኄ ժփ ሗ ڦ ၹᅱՔጚዐLj૩ ස 128 ጴবႀ ኸସDŽWR128DžĂ64 ጴব ൽኸସ DŽRD64Džईມ 8 ጴবन ኸସDŽ2ADD8Dž ۼ ᅜໜऐ ଉዐ ڦ ໙Ⴔ൱ ݛڪ ௬ ڦ ᆌᆩă ڦ ᅃ ణՔ ਸ ᆩᇀ ຕ د ୲ ፇ ăኄዖথ੨ ᅜ ڦ୲ࠀ ټ ኝ ༬ ᆩ ڼڦ ༫ย Քጚăኄ ย ࡀ ݔ ᇨ ॽ ሞ 2014 ڼ ᇀ ዖփཞ ڦ ย ዐLjස ᇀৎତ CPU ዃ ڦ Đৎ ᅃल इ ڥ ڦ ණཞLj ॽ ਐ DŽSRDž ڦ ຕ ئ ഗđ ڟ Đᇺ ئ ഗđ ڦ ย LjHMC ፇॲ ᆩਏᆶ د ୲ 15Gb/s ߛ ڟ 28Gb/sLj ժ ॽ ฯ ਐ ג മย ๕ ڦ ஏ থሞᅃഐăৎ ئ ഗ ڦ ದዃ DŽVSRDž ג ਐ DŽUSRDž دڦ ୲ 10Gb/s ස 2 ๖Ljᇺ ئ ഗ ڦ ದዃස 3 ๖ăཞ ᄺ ኧ JTAG I2C Չ ټ DŽsidebandDžཚ ڢ Ljᆩᅜᆫ ഗ ߛ ڟ 15-28Gb/să ॲ ڦ ದዃĂ ੦ ڪ Ⴀ ă HMC ፇॲ ۉڦ ୟӱք ๑ ᆩକ ڦ ĂՔጚ ߛڦ HMCॐࠓत Ⴀ ण ئ ഗ ૬ ݛ DŽHMCDž ፇ ॲ ᇀ ඹଉ रຍăք Ⴔ ୯ᇑ ႑ क़ ሗ ڦ Ⴞ د ཥ ئ ഗ ڦ ༬ኙԈઔᆶ ǖഗॲ ڦ ᇱ๔Ⴀ Ă०ሀ ڦ ဣLjժ ၂ዸ ں ३ณକ႑ ڦ ຕଉă ฉLjኻᄲ๑ᆩ ۉ ୟӱք ᅜत Բ ڦ ᇺ ݡײ ޜ ခDŽRASDžႠ 262 ᆶᇸ႑ ࠕ ڟٳ 160 GB/s ڦ Ⴤ ټئ DŽ ڇ ڪ ăሞ HMC ഗॲዐႠ ༬ ڦ DRAM ഗॲԥย ཚୟ ڦ ႑ ຕଉ 66 Lj ټئ ٳ 60 GB/sDžă ᅜኧ ๆ ૬ ڦ Ă ጲ ኧ ڦ ئ DŽvaultDžă ᅃ ڇ ᅃ ࠀ ഽ ڦٷ HMC ፇॲԈઔᆶ ئ ഗĂ ᅃ ئ ᅜ ࠃ 10 GB/s ڦ Ⴤ ټئ Lj๑ ڥ ئ ഗ੦ ഗ ၡথ੨ ڪ ࠓLj ၄ᇑ ئ ഗ੦ ഗ HMC ፇॲ ڦ ጺ ټ ٳ 160 GB/săሞᅃ ئ ዐ ڦ ኮक़ ڦ Lj ܔ ᆩ ਥփ ڦڟ ຕ أ ECC DRAM ഗॲ ᆶଇ ئ ཉDŽbankDžLjኄᄣᅃ ၯኟLj ܔ ئ ഗဣཥਏᆶዕวጲ Ⴊ ڦ Lj ܔ 2GB ڦ ئ ഗॲ Ԉ ᆶ 128 ئ Lj4GB ڦ ഗॲ ഗॲ ፕႠ ժ ࠃ ڦ ጒༀԒߢăHMC Ԉ ᆶ 256 ئ ăᇑ ཚ ڦ ᅜ փվdžlock-stepDž ਏᆶᅃ ๆ ݴ ڦ և ز ഗNj ز ഗDŽSERDESDžথ 2. HMC CPUኮक़ᆯHMC ڦ ၹᅱ ཚ႑Lj ዐ ๖ ڦ ᅃ ৎ ئ ഗ ࠓă 3. ᅃ ᇺ ئ ഗཚ႑ ڦ ࠓ ᅃ ᇺ ئ ئ ഗཚ႑ ഗཚ ڦ ࠓ 27

30 ឭᱜ TECHNICAL ARTICLE د Ћ ሀ ඇ൰ ڦ 10ǁă କ ۯ ኄᅃሺ Lj ᄽॽ Ⴔᄲᅈ HMC ኄዖ ڦ रຍ ڦ ӻዺă Micron ࠅ ኟሞᇑब ਜ਼ ၹፕॽ HMC փཞ ڦ ᆌᆩLjᇨ ሞ ฎ ࢪ ڦ ᆶ 4 DŽ4 linkDž 31X31X4mm ހ ጎ ڦ HMC ײ ᄣ ଋ Lj ڦ ଉ ࠚ ॽ 2014 ฉӷ ਸ๔ăMicron ࠅ ڦ 4GB HMC ᄺॽ क़ ሞ 2014 ă 4. HMC ײ ڦ ᄣ ᇨ ሞ2013 ଋ Lj ڦ 4GB ڦ ሶᄲ ڟڪ 2014 ă ઠ ܠ ئ ഗ ڦ ๕ ቛ ઠLj ॽ ڟ ण ئ ഗ ૬ ݛ ੨Lj ਏᆶट ڦگ ဃஓ୲DŽBERDžLj ኧ ዜ රᇆၯ DŽHMCDžፇॲरຍᄇ ڟ ଉ ᅃօই گ TSV ڦ ԨLj HMC ॽ ደօൽ دپ ཥ ڦ DDR ᄓDŽCRCDž ຕ ٶ Ԉዘ ࠀڪ ă ᇑᅃ ሏ ୲ GB/s ڦ DDR ཚ ႙ ئ ഗăሞൽ پ DDR4 ኮࢫLj ᅜᇨ ኄዖႎ႙ ئ ഗఇ ԲLjHMC ࠃ 160 GB/s ټڦ ईኁຫ 15 ڦ ئ ഗरຍॽ ዷ Ljփ ᅺ ਏᆶट ᆫ Ԡ د ୲ ڦ ሺ ăໜጣ ئ ᄲ ຕ ᅜ ঋ ᅴ ڦ Ⴀ Lj ᅺ ਖ਼ ޜ ሞ NAND ᄽᅙঢ়ᇜ ڦڟ ᆯ ઠ ଉLjHMC ڦ ፕ ڦ ణՔኵ ሞ 20 pj/b ፑᆸLj ᇀ ᅝӀԲ૩ ڦ ᆖၚă Lj ڼ پ HMC रຍ DDR ཚఇ ڦ ፕ ሶሀ 60 pj/bLjኄ ᅙঢ় ၄Lj Ⴀ ణՔ 320 GB/s دڦ ୲ 8GB ڦ HMC ሞ ڇ ฉᆶକ 70ǁ ߀ڦ ăhmc ڦ ଷᅃၜ༬ ئ ă 4 ๖ ᅃ ހ ጎ ڦ HMC ఇ ă ኙ I/O ᆅগຕ३ณକॽৎ 90ǁLjHMC ፇॲ ڦ ᆅগຕ ሞኄዖ HMC ፇॲॐࠓ ڦ ዚ ܠ ᆫ ۅ ዐLjፌਏ ೦Ⴀ ڦ ኻᆶ 66 Lj ᅃ ཚ 4 ཚ ڦڢ DDR3 ఇ ڦ ᆅগຕሶ ᅃ ۅ ઠ ᅜॽ ܠ ئ ഗ ण ሞ ڇ ᅃ ٳܠ 600 ă ฉ ኄၵԲডዐ ᅜඹᅟ ں LjHMC ዐă ፇॲሞႠ ฉइ ڥ ၂ዸ ڦ ཞ ᆼट ںٷ ব କഗॲ ڦ ฉথ ڼ 25ᄻ ௬ओत ă ዮස CuĂAgĂAu NiPdAu ܠڪ ዖᆅ ॐ ڦ ᆌᆩă ኄၵႎ႙ ଙփ ڍ ਏᆶ ڦ ᅝႠLj ࠃକԋఈ യ ण ئ ഗ૬ ݛ DŽHMCDžፇॲॽ ܠ ዖഗॲႠ रຍ ڦ ᆶᆫ ۅ ăᆯᇀ أ କ Չ ঌLj ߛ ۉڞڦ Ⴀ ڟ କᅃ ႎ ڦ ጚLj ᆌᆩ ݔ Ԉઔᆶ ǖ ࡀٷ ఇ ཌྷጎఈ ဣଚཚࡗ३ ಎኮक़ ڦ क़ਐLj ႐ፇॲĂ ஏဣཥĂߛႠ ໙ยԢᅜत ᄽጲ ۯ ࠃକ ڦ ย ߘ߇ፕᆩăኄᅪ ጣ ހ ጎย ॽ ڪ ଶᇘLjፌዕॽ ߃ ڟ ۉݯ ጱ ଶᇘă ڦܠ / ई ࠀڦܠ భ ᅃ ހ ጎഗॲዐăᆯᇀ ഴ ๕ᆌᆩॽ ट ںٷ ᅮᇀ HMC ፇॲ ਏᆶ ڦ ব أ କ Չ ঌᅜत ย ߛ ڦ Lj ڇ ހ ጎ Ⴔ त ߛ ټ ᆫ ۅ Lj૩ස ሞగၵ༬ ڦ Ă ଉ ڦ Ăएӱ ఇ໒ଙᆩଉ ڟڥ କ၂ዸ३ณLj ހ ጎጆ ᆯ ஏยԢᆌᆩዐLjසࡕ๑ᆩ HMC रຍ ਸ ᇵ Xilinx ᅜই گ Ԩă Altera ኄଇ ࠅ ڦ ASICĂASSP FPGA ഗॲሶ ߛ ۉ ڞ ڦ Ⴀ ཌྷ ጎ ఈ ဣ ଚDŽLOCTITE ᅮ ٷ ăሞ ሆLjAltera ࠅ Ⴧք ᅙঢ় ABLESTIKC100ĂLOCTITE ABLESTIK CDF200PĂLOCTITE କ Stratix FPGA ᇑ HMC ኮक़ ཚ ፕDŽinteroperabilityDž ABLESTIK CDF 500P LOCTITE ABLESTIK CDF 800PDžኼሞ ߛ ႙ Ă ܠ ጎዃย ڦ ᆶ แLj ኄ ๑ᆩঌ ڦ Ⴀ ᄓኤLjኄॽᆶᅮᇀ ᅃ پ ئ ഗ ڦ ย ă Yole Développement ण ڦ ჺ৯ ݴ ဆ ኸ Ljᇨ ڟ ቕवईᅂ ڦ ঞ ၄ ڦ ăᆶ ߛ ۉڞ Ⴀ ཌྷጎఈ 2017 Lj ᆩ TSV ࠓഗॲ ڦ ࡀ ఇ ٳ ৎ 400 ᅢ ᇮLj ଙဣଚ ܠ ڦ ႑တLj൩ ک 28

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32 ឭᱜ TECHNICAL ARTICLE د Ћ MEMSႴᄲ থฉ ڦ ጹ Ⴀ ਦ ݛ ӄ ऐ ۉ ဣཥDŽཚ MEMSDž ڦ ᆌᆩනᅮ ݘ ă MEMS Application Overview Microphone, Pressure Sensors ฉLjMEMS ኟᅜଇԠ ڦ גߋ ኝ IC ڦ ሺ Ljᇨ 2017 ॽ ڟٳ 200 ᅢ ᇮă Diaphragm MEMS ၄ස ტ ڦ ሺ Ǜ ۉݯ ጱDŽዷᄲ ยԢDž MEMS ASIC ഛ כ ణമ ڦ ዷᄲ ۯ ᅺ Lj ڍ ዮසᅅᄱ ڪ Lid/Cap Attach և ᄺᅙਸ๔ ᆩ MEMS ยԢă ASIC Attach Glod Top MEMS Attach Accelerometers, Gyroscope, Magnetometers ణമLj ཚ ऐዐԈ କ ٷ ሀ 8 ڟ 10 MEMS Source: Yole Developpemert SARL DŽᇨ ຕጴॽሞ ઠ ڦ ब ዐ Ⴤሺ DžLjኄ ܠ ณຫ କ Package Sensor MEMS ᆌᆩ ݘ ڦ Ⴀă ऐ ة ೡฉ ࡐڦ ೡ Ăጎ ASIC Cap ዃገ ڦ ۯ ೡట ገĂਏԢሯᅼ ڦ ࠀأ ਖ਼ ޅ Ăฝ ASIC Attach ཀྵ ݞ ۶ࠀ ڪ Lj ᆶኄᅃൎ ࡃࠀᇀ MEMSă ܔ ᇀഛ Mold Compound MEMS Attach כ MEMS ᆌᆩLj ࠀ ཞᄣຕփ ຕLjԈઔ ഘუ MEMS ݴ ब Ljፌ ९ ڦ Ԉઔ Ă அᅏĂ ߌد ഗĂҾඇഘశቛਸ ߌد ഗĂGPS ဣཥĂ ࠕ ୟ௬ ى Ă ਖ਼ ޅ უ ߌد ഗă ࠀ ᆩ փ ཞLj ڨٷڦ Ăࢫ ৎਐ ߌد ഗ ڪ ă ڍ MEMS ۼ ਏᆶଇၜࠌཞᄲ൱ ǖ DŽ1Džฉ ਦ ӨLj ړ LjMEMS ሺ ڦ ᅃ ዷᄲ ۯ ᅺ ઠጲᇀኄၵ DŽ2DžMEMS ፇጎ ڦ ᆌ ३ Ⴀ ዘᄲă ย Ă ฆ ႎ ႙ MEMS ጎ ዃ ܔ ᇀ ण ހ ጎഗॲ ࠃ ڦ ዖࠀ ă ڍ ዘᄲᅺ Ԉઔ३ Ljᅜतႎ႙ण ڦ ࠀܠ MEMS ཨ ݣ ă MEMS ሰฆ ڦ ৪ኛ ᆮ ዘᄲă କ ፁ SOLUTIONS PORTFOLIO ሆ ڦ ዜ क़Lj MEMS ࠅ Ⴔᄲ ᆩ ጚԢĂ ASIC Attach or MEMS Attach Lid/Cap Attach Non-Conductive Paste/Liquid Dispensed LOCTITE ABLESTIK OMI 536NB LOCTITE ABLESTIK OMI 538NB LOCTITE ABLESTIK 2025D LOCTITE ABLESTIK 3220 LOCTITE ABLESTIK 3128 LOCTITE ABLESTIK MC723 Non-ConductivePrint Film LOCTITE ABLESTIK 8006NS LOCTITE ABLESTIK 6202CX LOCTITE ABLESTIK ATB-120US LOCTITE ABLESTIK ATB-125E NA Conductive Paste LOCTITE ABLESTIK 8290 LOCTITE ABLESTIK 2100A SOLUTIONS PORTFOLIO Non-Conductive Paste/Liquid Dispensed ᄓኤLjਏᆶඇ൰ኧ ڦ ຄ ଙ ਦ ݛ ӄઠ ںܠۯ ย ሰă ኄኟ ߛ ڦ ᆫ ăೞ ཌྷጎ ڹڟ ևག Ă ߃ ۥ ހ ևԈ ހ व ܠڪ ዖ ᅝ ڦ ඇဣଚ Lj ڦ ݿ ฆ ڦ ຄ ଙᅜतඇ௬ ڦ ඇ൰ኧ ॐࠓLj ߛ ࠕ LOCTITE ABLESTIK ce3920/ ICP3920 LOCTITE ABLESTIK SR4 LOCTITE ABLESTIK 2030SC Glob Top ሞඇ൰ ݔ ᆩᇀबࢭඪ MEMS ᆌᆩ ڦ ၄ऋ ଙă ߛ ࠕ ࠃ ܠ ዖ ଙLj ೠࠚ Ljሞ Underfill/ Ncp LOCTITE ECCOBOND EO1058 LOCTITE ECCOBOND UF 8828 LOCTITE LOCTITE LOCTITE LOCTITE ECCOBOND ECCOBOND ECCOBOND ECCOBOND Mold Compound FP4549 (CUF) FP4530 (CUF) FP5201 (NCP) NCP5208 (NCP) LOCTITE HYSOL GR98101P (75um filler) & LOCTITE HYSOL GR98101PF (45um filler) থ ڼ 33ᄻ Shashi Gupta, ߛ ۉ ጱ ଙᆶ ࠅ 30

33 ឭᱜ TECHNICAL ARTICLE د Ћ ࢫ ڢ ᅝࡂ ڦ ጲ ۯ ঋ रຍ ࢫ ڢ ᅝࡂ ڦ ༬ኙԲড ݘ Ljኄߴ ހ ጎ ਗ਼ऐዐ ڦ ጲ ۯ ጎዃ ڦ ᅝ ᆌႠ ټ ઠକट ڦٷ ăཚࡗ੦ ۉ ๕ ٷ พঙ ঋ ଉဣཥ ڦ Ă൰ Ă ናLj ࠕ ڦ ڟٳ ঋ ଉ ăཞ Ljཚࡗ ڦ Mapping Lj ᅜ ᆶ ں Ն௨ ᅝࡂ ฉ ࠏڦ Վ ਗଜ ڦ ஸ ܔ ଉ ࡕ ڦ ᆖၚă 1 മჾ Բড० ڇ ă ڍ ᆯᇀഘუ๕ ঋ ଉरຍ ڦ ଉ ୲ড گ Lj ໜጣӷ ڞ ᄽ ݧڦ ቛLj ۉ ጱ ሞ ටĂᅅଐĂ ᆌᆩᇀߛ ୲ߛ ݴ Ր୲ ڦ ደ ঋ Ǘഘუ๕ བྷĂഛ כ Ă Ҿ ڪݞ ଶᇘइ ڥ ሁઠሁ ڦܠ ႎᆌᆩLj ঋ ଉဣཥ ڦ ଉ ۅ քዃሞཨᆖ ڦ ኟ ݛ Ljփ ܔ ӷ ހ ڞ ጎഗॲ ڦ Ⴀ Ă Ăࠀ Ԩ ڦ ᄲ൱ থߌᆌ ڦ ஸഐ ޚ Ljփ ᆩᇀ ٷ ᅝ ᄺሁઠሁߛă ړ മዷ ڦ ހ ጎ ᅝԈઔ BGAĂCSPĂ ڪ ஸഐ ޚ ড ڦٷ ᅝǗ أ ኮ Lj କൽ ڥ ডߛ ڦ Lj FCPĂWLPĂSIPĂ3D TSV ڪ Ljໜጣᅃၵമ پڦڢ ഘუ ঋ ଉ ཀྵ ڦ ፕਐᄺ ݥ Lj Փሞ 100ȝm ᅜ Lj ހڢࢫڟ ጎଶᇘLj ހ ጎ ހ ጎॽ װ ၄ጣ ܠ ᄣ Ă ኄߴࡂ ڦ ฉ ሰ ড ڦٷ ጐ ޅ ၃ă ස 1 ๖Lj ۉ ๕ ঋ ଉरຍ ᆩ ঙ ଉरຍLj ሁ๕ ڦ ቛă ਗ਼ऐ ހ ጎ ᄽ ڦ ႐ยԢLj Ⴀ থᆖၚ ཚࡗ ݴ ኧߌኪ ڦڟ ᅎŗ L ઠइ ړڥ മࡂ ڦ ঋ႑ ጣ ዊă ጲ ۯ ঋरຍ ਗ਼ऐ ڦ ႐ࠀ ఇ Lj ዷᄲࠀ ଉ ړ മ ᅝࡂ ڦ ஸഐ ޚ Ljժߵ ႑ တᆩᇀ੦ ᅝࡂ ؽڦ ዃLj๑ ڥ ᅝࡂ ᇀཨᆖ ڦ ᆶ ঋศ Lj ԍኤ ዊଉă ࢫ ڢ ਗ਼र ຍ മ ڢ ժ Ԩዊ ڦ Lj ڍ ᆯᇀࢫ ڦڢ ᅝ ݘ ڦ ႠLj ኄߴ ހ ጎ ਗ਼ऐ ڦ ਸ ټ ઠକփณవ Lj ዐ ᅝࡂ ܔ ঋ ଉ ڦ ዐᅃ ড ٷ వ ăසࢫ ڢ ਗ਼ঌ ڦ Վ ড ٷ Lj ٷ Lj3D TSV ڦ ศࠏ ۼڪ ঋ ଉ ڦ ă 1. ۉ ๕ ঋ ଉᇱ ๖ᅪă 2 ঋ ଉरຍत ᅝ ᆌႠ ݴ ဆ ሞ ހ ጎ ਗ਼ऐዐLj ঋ ଉरຍዷᄲᆶଇዖरຍ ୟ Ljᅃ ഘუ๕ ڦ ঋ ଉरຍLj ۉ ๕ ڦ ঋ ଉरຍăኄଇ ঋ ଉဣཥLj ᆶᆫඍ ۅ ăഘუ๕ ڦ ঋ ଉरຍཚࡗߌኪ ᅝࡂ ཀྵኮक़ ଉ უ ڦ Վ ઠ ଉ ړ മ ᅝࡂ ڦ ௬ ஸLj ଉरຍ থߌኪ ᅝࡂ ௬ گߛڦ ഐ ޚ Ljᇑ ᅝࡂ ௬ ڦ ଙ Lj କൽ ڥ ড ڦ ᅝ ᆌႠLj ঋ ଉ ڦ ໙ ܔ 2. ఈဣ ࠓ ܔ ঋ ଉဣཥ ڦ ᆖၚ๖ᅪă ݧר ՕLjዜ Lj ۰ Ǘฉ ۉ ጱጎԢᆶ ࠅ 31

34 ឭᱜ TECHNICAL ARTICLE د Ћ ଉཞᅃ ᅝࡂ ڦ ௬ ஸLj ዐ 3a ۉ ڦ ঋ ଉဣཥ ᆩ ڦ พঙLjཞ Ă൰ Ă ና ჹ ڦ ੦ Lj ଉ ڟ ௬ ஸᇑ ᅝࡂ ڦ ௬ ӄᆶᅃ ڦ ႠLj ଉ ڦ ඇ ஸ ٳ 31ȝm Ǘ 3b ዐLj ᆩ ٷ พঙLj Ă൰ Ă ናঢ়ࡗჹ ੦ ۉ ڦ ঋ ଉဣཥ ଉLj 3. ۉ ๕ ঋ ଉ ᅝ ᆌႠย ࡕ๖ᅪă ଉ ڦڟ ඇ ஸඐኻᆶ 11ȝmLj ଉ ࡕԲড ă တă ۉ ๕ ঋ ਏԢස ब ᆫ ۅ ǖ ᄣ ୲ߛLj ᆩᇀ ঋ ଉ ॲ ڦ Կ ੦ Lj ᆩᇀደ ঋ ڦ ৠLjժइ ڥ ডߛ ୲ă ଉ ۅ থ ᇀཨᆖ ڦ ኟ ݛ Ljքਆᇀ ړ മ 3 ጲ ᆌ ڦ ጲ ۯ ঋ ᅝ ᆌႠ ڦ ଆ ঋ ଉጎዃժփ ඇ ਦ Lj ᅜइ ڥ ডߛ ڦ ঋ ă ᅝࡂ ጲ ۯ ঋ ڦ ᅝ ᆌႠ LjසLjසࡕ ঋ ଉጎ इ ڥ ড ٷ ଉ ڦײ ཞ Lj ग़ ড ٷ ଉ ፕਐLjሞ ዃ ڦ ଉ ۅ ኟ ڟڟ ᅃ ศࠏ ฉ௬Lj ঋ ଉဣཥ ހ ጎ ਗ਼ऐዐLjᅃӯ ٳ 10mm ፑᆸ ڦ ፕਐLj इൽ ኝ ڦ ஸ႑တLj ߴ ኟඓ ڦ ଉ ࡕLj ࡂ ڦ ฉ ড ٷ Ҿጎ ፕਐă ኄॽ ڞ ዂጲ ۯ ঋኴ ጎዃ ၄ဃಒă أ କࠏ Lj أ କฉ ڦ ᆫ ኮ Lj ۉ ๕ ঋ ଉဣཥLjᄺᆶᅃ ᆶ ᅃၵ ᄺඹᅟ ၄ဃಒăᆼස ஸഐ ޚ ਗଜ ڦ ၵඍ ۅ Ljස ࠓ ሗLj ᆶ ᅝࡂ ڦ ᅝ ᆌ ᅝࡂ Ljᆯᇀ ঋ ଉጎዃ ཚࡗ ߅ ᇘ ڦ [8] Ⴀ ݛ ӄ ܔ ሗ ăਏ ჾLj ۉ ঋ ଉဣཥਏᆶස ᄣઠ ໙ ړ മ ڦ ጺ ഐ ޚ Ljසࡕ ᅝࡂ ڦ ഐ ޚ ब ᅝ ᆌႠ ڦ ǖ ሗ ڦ ఈဣ ࠓ ڞ ዂ ଉဣཥ ڦ ሞᅃ ၄Ⴀဃ Lj ฉ ස 2 ๖ăनLj ঋ ଉဣཥ ڦ ଭ ௬ ਗ਼ঌࢩ ਗ਼ঌ ڹ ዊ ڦ ᆖၚă କ३ณ ଉဃ Lj ࡔ ۉ ڦ ๕ ঋ ଉ ۼ ᆩ ٷ พঙ հ ઠ ඇਆ ३ ဃ Ljස ړ พঙ 82ŃĂ ਗ਼ঌࢩ 5ȝm Lj ଉဃ փ ࡗג 100nmă PDSDŽPolarization-Dependent ShiftsDž ဃ Lj ဃ ܔ ጚ ᆯփཞ ናༀĂփཞհ ڦ พ ঢ়ࡗ ბᇮॲࢫLj ሞ ௬ ڦ ᅎሰ ڦ ă କ३ ଉ ဃ Ljሞ ঋ ଉဣཥ ڦ ୟย ჹ ڦ Mapping ௮ǖഔ ࡂۯ ඇ ௮Ljኸ ܠ ঋ ଉ ۅ ժ ଉLj ໙ ॲ ሞ ڦ ፌ ጩă ੦ ă ბဣཥ ڦ ቷ ሌႠĂ Ă൰ ᇑ ᅝࡂ ௬ ደ ǖ ӀMapping ௮ ڦ ࡕLj ൻ ॲ ڦ 6 ጲᆯ Lj ॲ ڟ ࢫLj থ ă ڦ ӄ ڦ ڦ ܮ ၄Ⴀဃ Lj କ३ ଉဃ LjՂႷჹ ੦ ঋဣཥ ბဣཥጲว ڦ ൰ ă ස 3 ๖Ljଇ༫ ۉ ๕ ঋ ଉဣཥ ݴ ᆩᇀ एᇀMapping ڦ ጲ ۯ ঋ ײ ă

35 ឭᱜ TECHNICAL ARTICLE د Ћ 4 ஃ ࢫ ڢ ᅝࡂ ڦ ᅝ༬Ⴀ ݘ ݥ Lj କ ݴ ᆌ ᅝࡂ ڦ ጲ ۯ ঋ ࠀ LjՂႷሞଇ ݛ ௬ມ ഋ Lj ᅃ ᄲኍ ܔ ᅝࡂ ڦ ᅝ༬ኙย ጲ ۯ ঋ ଉጎዃLj ߛ ଉဣཥጲว ڦ ᅝ ᆌႠ Ǘ ᄲย ڦ ጲ ۯ ঋ Lj ߛጲ ۯ ঋरຍ ڦ ඹ Lj ᆌ ܠ ႙ ڦ ᅝࡂ ă ړ മࡔ ਗ਼ऐ ࠃڦ ᆌฆᅙঢ় ຄቨ ኄ ݛ ௬रຍLjසฉ ۉ ጱጎԢᆶ ࠅ ڦ SSB500 ဣଚ ڦ ਗ਼ऐᅙঢ়ದዃକ रຍLj ࡔ ᇑ ހ ጎ ਗ਼ऐ 5. Mapping ࡕ๖ᅪă ࡔڦ ৪ኛ ࠃକሾ ڦ रຍԍቱă ࡗਗଜLj ঋ ଉጎዃᆶ ڦ ᄣ ܔۅ ኝ ጺ ഐ ڦޚ ኙॽ ሞড ڦٷ ဃ ă ၅ ௬ ܔ ኄၵ LjᆶՂᄲਸ ڦ ጲ ۯ ঋ 1. ဦ रຍ. 2006, 3: Ljᆩᇀಇ ܔ ࠏأ ঋ ଉ ڦ ᆖၚLjཞ ᅜ ᆌ ஸ ഐ ޚ Բডਗଜ ڦ ᅝࡂ ă ዐᅃዖԲডᆶ ݛڦ ๕ 2. Mapping रຍLjස 4 ๖Ljሞ ኟ ڦ ඇਆ ܔ ጚኮࢫLj ഔ ړۯ മࡂ ڦ ඇ Mapping ௮Lj ௮ࡗ, ݧר Օ. ཨᆖ ਗ਼ऐࡂ ঋ ଉఇ႙[J]. ბბԒ, 2007, 27(11): 1987~ ዜ, ඵ. ཨᆖ ਗ਼ऐሞ ހ ጎዐ ڦ ᆌᆩ[J]. ۉ ጱ ᄽጆᆩ ยԢ ײ ዐLjߵ ٷ ௬ओ ߃Ⴀ ڦ ঋ ଉ ࡕLj ໙ ॲ ሞ ڦ ፌ ጩăMapping ௮ ኮࢫLjሶߵ ݧר Օ,. ᆩᇀࡂ ঋ ଉ ࡂڦ ௬ ஸఇ႙[J]. 4. ዜ, ඵ. ᅃዖߛ ୲ ڦ ހ ጎཨᆖ ਗ਼ऐ[J]. ۉ ጱ ᄽጆ ᆩยԢ ᅙঢ় ॲ ڦڟڥ ሞ ڦ ፌ ጩLjൻ ॲ ۯ ڟ থ ă ړ LjMapping रຍ ڦ ժփ 5. ዜ. ހ ጎཨᆖ ਗ਼ऐ[J]. ዐࡔण ۉ ୟ ᆖၚᇱᆶ ڦ ඇਆ रຍ ၜLj ײ ዐᇑደ ঋर 6. Mayer H E, Loebach E W. An advanced waferstepper for sub-micron fabrication. Proc. SPIE. 1987,811: ຍ ၜ ᅃ ဣă ස 5 ๖Ljॽᅃቧ 8 ڦ ᅝࡂ ݴ 60 Lj 7. Daniel G. Smith. Wafer Thin Film Effects in Lithographic Focus ሞ mapping ݥ mapping ݛڦ ๕ ఇ Lj Detection. Proc. of SPIE Vol L-1 ᅝࡂ ᅜ 3D TSV ᅝ ዷLj ௬ ݴ քକড ࠏڦܠ ă 8. Yasuhiro Hidaka, Kiyoshi Uchikawa, Daniel G. Smith. Error analysis ܔ Բଇዖ Ljሞ Mapping ݛڦ ๕Ljጲ ۯ ঋ ڦ ጚඓႠ၂ and compensation method of focus detection in exposure apparatus. ዸ ߛLj ኮമਏᆶড ڦ ჄႠă Vol. 26, No. 1/January 2009 ฉথ ڼ 30ᄻ ๘হ ں ᆛᆶ ڦڲ ए إ ยแLjඓԍକඇ൰ ݔ ᇺ گ ᇀ ăසࡕ ހ ጎ ڦ ௬Ⴀ ၄ဦ Վ Lj ڦ ጆᄽरຍኧ ă Lj ܠ ዖ MEMS ଙ ݿڦ ဣ MEMS ጎዃ ڦ Ⴀ ڟ ᆖၚă ܔ ᇀҾඇഘశቛਸई ଚDŽ ९ፑ Džᆶዺᇀ० ࠃᆌ Lj ࠃ ० ݛڦ ӄă ۯ ဣཥ ڪ ᆌᆩLjၯጚփଆ ڞ ዂሚవႠࢫࡕă ړ Lj أ ڦ ฉ क़ Lj ՂႷ ࠃ ڦ Ⴀ Lj ඓԍߛႠ ଙ ڦ Ⴀ ዘᄲLj ኄኟ ߛ ຄ ܔ ᇀ MEMS ჾLjኄᅪ ጣ گ ᆌ ߛ ႠăMEMS ยԢ ڦ ၯጚਦ କ ኟ ፕ Ⴔᄲ ڦ ă ڍ ଙ ڦ থฉ ڦ ଙ ਏᆶ ڦ ᆫ ă සࡕლ൱ ຄ ڦ MEMS ଙLjጹ Ⴀ ਦ ݛ ӄLj ڦ ဦ ߀ՎDŽ ݴ Ă Dž ᆖၚยԢ ڦ ದዃ ၄ য ڦ Ⴔᄲ ڦ ଙ Ăࠃᆌ ० ժ߀վ Ⴀ ă૩සLjగ ሰฆ ย ᅃዖਏᆶ Ăඇ൰ኧ रຍ Ljᅜतጆᄽձ ܓ ڦ Lj ߛ ༬ ߌ ڦ უ ߌد ഗăසࡕ ଙ Ⴀໜ क़ କ ڦ փ ኮ ăᆶ ߛ ڦ ඇ௬ MEMS ଙ ܠ ڦ ႑ Վ Lj କ Ljၯጚॽ ߀ՎLj უ တLj൩ ک ă 33

36 ឭᱜ TECHNICAL ARTICLE د Ћ ڇ 3DICरຍ एᇀTSV ڦ 3DIC ڦ ᅃ ኈኟ৪ኛ ܔ Ǜ ᇀ3DIC ߁ڦ ణമ ᆶ ۅ Lj༬ ܔ ᇀएᇀTSV ڦ 3DICઠຫ ස Ljఫ ᄣ ڦ ࠓ ᅜԥ ڇ 3DICǛ ᇀ 3DIC ߁ڦ ణമ ᆶ ۅ Lj༬ ܔ ᇀ एᇀ TSV ڦ 3DIC ઠຫ ස Ljఫ ᄣ ڦ ස 1 ๖ă ఫ ሞኄၵरຍฉ ڦ ቛ ޏ ๑ ڇڥ 3DIC ᇑ ࠓ ᅜԥ ڇ 3DIC Ǜ एᇀ TSV ࠓ 3DIC ᅃዖࢫ DŽBEDž ᅝLj ᅃዖ ײࡗ ڦ Lj ዐ ᅃԋ ᇑ TSV ࠓ ݴ Ljໜࢫምॽ ፇ ሞᅃഐă ڇ 3DIC ᅃዖമ DŽFEDž ᅝLj ᅃዖ Ⴤ ײࡗ ڦ Lj ሞᅙ ڦ ࠓ ฉ קڦ ࡂ ڼ ओई Ljໜኮዘ ڦ ᅝă ኄዖ Ⴤ ᅝ ڦ వ ۅ ሞ IC ࠓ ฉ ݛ ק ओई ڇࡂ ڼ Ⴔ ڦ ăᆯᇀሞ ፕ ڼ ࡂ ڇ ᅜत ܔ ኄ ڼ ጱጀ आ Ⴔডߛ ڦ Lj ॽ ڟ മ௬๑ᆩ୩ ཟ IC ଙ ڦ 1. ॺᅱ ᆩ ൎߪ ݛ ઠ ڇ 3DICॐࠓLj Ԉ ᆶᅃ ೡԸ ڼڦ ࡂ ࠓ Ljᅜ ڼܔ ᅃࡂ ࠓ ၄ԍ ă एᇀ TSV ڦ 3DIC ৪ኛǛ Lj๑ ڥ ໜࢫ ڦ ᅝ ت ՂႷᄲ گ ᇀ 400ņ ă ᆶටຫ ᆩ Ⴤ ᅝ ڦ 3DIC रຍ ᅜ ٷٷ ३ณ නԨ ବ ۉ ऐࠅ LSI ჺ ᄓ Akasaka ሞ ራ ᅝ ڦ ሗႠժই گ ԨLjᄺႹ ڟ ኄᅃ ࡕă ஃ ዐሼ௮ କ ڇ 3DIC ڦ एԨ߁ DŽAkasaka, Y., CEA Leti ࠅ ፌৎჇքକᅃ ᇑ Qualcomm ࠅ ڦ Nishimura, T., Concept and Basic Technologies for 3DICđ, ፕၹᅱLjઠ ܔ ᆩ Ⴤ ᅝ ڦ 3DIC रຍ IEEE Proceed., IEDM, vol. 32, 1986, p. 488DžLjሞኄ Ⴀत ঢ়ष ኵ ڦ ೠࠚăLeti Qualcomm क़ ڦ ፕၜణ ᇀৎ 30 ᅜമ ڦ ஃ ዐ ຫ ڢ ǖ Đᄲ ںࠀ ፕ 3-D ICLj Đॽ ܔ रຍ ᆌᆩঙ ჹ ڦ ೠࠚLjժॽ ᅃ ሞ ࡗ ײ ዐ ᇶᄲ ሞፁࠕ ڦگ Lj փ օೠࠚኄዖ ᆩ Ⴤ ᅝ ڦ 3DIC रຍሞ ઠ ᄽ ฅᅙঢ় ፕ ڦ ഗॲईփ ߀Վ Ⴀ đ ăakasaka ฉ ڦ യሞᆖၚđă ॺᅱ ڢ Lj ᄲĐ੦ ܠ ࡂ ም ඤ ᇀዐࡔ ࡔڦ ૬ᆌᆩჺ৯ᇾDŽࡔჺᇾDž മᄺำ ڦ ጒđLj Đ... ᆩघ ई ۉ ጱ ઠ ၄ࡂ ڦ ም ॽ ڢ Lj ᅜ ᆩ ڇ 3DIC रຍઠ ፕᅃዖĐ ג प đ ă ᅃዖ ݛڦ Ljᅺ ਏᆶড ڦگ ᆶ ᅝ đ ă ڦ ԒߢຫLj Đ ᆩକኻ ଇ دڦ ཥरຍLjઠॽ ጲ Aksaka ڦ ఫ ᇨჾഐLjघ आरຍᅙঢ়ጽ ࡗକ ڦ ቛୟ ײ ă 150 ण ሞᅃഐLj أ କ ኮ Lj ᆶ ૧ᇀ ߛ႑ دڦ Ljժਏᆶ ߛ ڦ प ڦ Ⴀ đ ă Zvi Or-Bach ၄ሞॺᅱ ᆩ ൎߪ ݛ ઠ ሰ ڇ ሞ ৎ න ਉ ڦ IEEE IEDM ᅱ ฉLj ࡔ ڦ ૬ భ 3DICLjਏᆶᅃ ټ ೡԸ ڼڦ ࠓDŽ փ ݥܔ ഗॲ ᄓ DŽNNDLDž௮ କჱ 50nm ব ڇۅ 3DIC ࡂ ም DžLjᅜ ڼܔ ᅃ ዐ ڦ ࠓ ၄ԍ Lj ڦ ፕ൧ Lj ण ᆶߛ இडĂ ݥ ᅟ Ⴀ ገ ڼ 37ᄻ Dr. Phil Garrou, Contributing Editor 34

37 ノ M A N AG E M E N T и۴ગ ו ৹ ᇶ تڦ ዃ त ยԢ ڦ ፕᆩ ስ OEMฆࠔசႎ ڦ ᅝยԢLj ڦ ยԢࠃᆌฆࠔச ඇ ᆩ ڦ ႎยԢLjԨ ܔ କ ჺă 00mm ई ᇶ ڦ ᅝย ૦କ ᄽ ݔٷ ປ ڞ ዂ ڦ ইኮ IDM ࠅ Ă پ OEM ฆ Ԣ Ⴤሞӷ ڞ ᄽዐ ᆶ ࢫLj ړ മ ยԢ ڇ ڦ ຕଉᆼ ڦ ፕअӵă ܮݻڦړ Lj ړ മኄၵยԢ ሏ ၄ ၂ ڦ ሺ ऄሂLjሞ 2012 ڦ ᅝԈ ᆶఇ Ă ႑ Ăࠀ୲ ӷ ڞ ڦ ܮ ሺ ڟ 30 2 IC, ᅜत ዖ ຄ ڦ IC ഗॲ ႙ă ܠ ᅢ ᇮDŽ९ 3Dž ăሞኄ ᄽთ ߛዊଉ گ Ԩ د ཥ ڦ ᇶሏᆐฆ௬ଣጣᅃ ස 1 2 ๖Lj Smico ڦڟڥ ዜ ዐLjጆ ఫၵຕᅜबഥ ፌႎຕ ၂๖Lj ጺଉ 39% ࡂڦ ᅝยԢ ࠔĂ߀ሰĂዘፇĂ ႎĂ ߛ ڦ ᅮ ݛڦ ๕ઠ ܔ ڦ ᅝ ଙ ᆩᇀ 200mm ᇶ ሰLjଷ 9% ҾጎĂዊଉᄓኤ ࠃ ԍⴊᅜतኧ ײ ยԢ पई ᅃօક ٷ ࡂڦ ଙ ᆩᇀ ᇀ 200mm ᇶ ڦ ޜ ခ ࠅڦ Lj ۼ ᅙঢ় କස Texas ڦ ă ॽ௬ଣᅃዖ ስLj ሰLj ᆩ 130nm त रຍব InstrumentsĂGLOBALFOUNDRIESĂ OEM ࠔت சፌႎ ڦ ยԢဣཥLj ڦۅ ᇶሀ ࡂڟ ଙጺଉ ڦ 50%ă ON Semiconductor, STMicroelectronics, ڦ ยԢࠃᆌฆ ࠔت ச ኄၵড৹ ᇶ ڦ ኁՂႷᄲ Fairchild, Maxim, Tower ڪ ӷ ࠅ ڞ ඇ ᆩ ڦ ႎยԢǛ ௬ଣጣ Ⴀ ڦ వ Ljनස ᅜᅃ त ሞᆶ ڦ ጨ ঢ়ᆐᇨ໙ Ljઠ ڦ ሰᄽခ ޏ ᄲႴᄲ ڦ ᅝࡗ ײ 150mm ᇶ प ڟ 200mm ᇶLjई क़ᄲ൱ኮक़ ڦ ဣLjᅜԍኤ ሞ گ ኁ ޏ Ⴔᄲ प ڟ रຍব ۅ Ԩ ዐԍ ৪ኛ ăᆯᇀዷᄲ ڦ ᇱ ኄᄣ ڦ ስă ܔ සօ ਗ਼ऐ ௮ ๔ยԢ ሰฆDŽOEMDžᅙሞ 300mm ਗ਼ऐኄዖ ٷ ႙ ᅝยԢઠຫLj DŽฯ 450mmDž ᇶยԢฉཨ କ ยԢ ڦ ݔ बๆ ᇮ ڟ ڦܠ ᇨ໙ጨ Lj ሞ 200mm ᇶฉ बӥ ᇮփ ڪ ă ยԢߵ ཨጨডณLj ᅜড ৹ ڦ ӷ ڞ Ⴔᄲ ߛዊଉ ڦ ยԢࠃᆌฆఫ 1. ጺଉ39% ࡂڦ ଙᆩᇀ200mm ᇶ ڦ ሰLjଷ 9% ࡂڦ ଙ ᆩᇀ ᇀ200mm ᇶ ڦ ሰă ݻ Ăጒ Ă ᆩႠ ဣཥᇱ ฆ ڦ փཞLj Ք ݔ ཚ ႎ ઠइ ڥ ยԢĂଭևॲᅜतᇑኮ ยԢ ڦ 20%-30% ڟ 70%-80% ኮ ದ༫ ڦ ᅝኪ ă ܔ 300mm क़ăሞగၵ൧ Lj ኁ ᇶ ยԢ ႎኄᅃႎ ڦ ԥ೨ ስডߛ ڦ ยԢLjᅺ ၄त ॽۼ ௬ଣ ߛ ڦ OEM ฆᆶ ڦ ᅙփም ኄၵ ሗႠ Ⴀă ༬ ڦ 200mm ᇶยԢLjईኁᆶ ڦ OEM ฆᅙփምঢ়ᆐ ၜᄽခକă ሞฉ๘ ዐࢫ Ljຕᅜबഥ ୯ ٷڟ և ݴ ᇶ ײ ਏᆶ ڦ ৹ ᅝยԢ ڦ ᆥ ๑ ڥ ӷ ڞ ยԢ ڟڥ ڦ ሺ Ljໜኮሞঢ় 2. ๑ᆩ130nmत रຍব ڦۅ ᇶሀ ࡂڟ ଙጺଉ ڦ 50%ă ࡀՆ ޅ ၃ ڦ ႠLj ՂႷԍኤ Julian Gates, Tim Johnson, AG Semiconductor Services; Darrell McDaniel, NSTAR Global Services, M+W Group. 35

38 ノ M A N AG E M E N T и۴ગ ו IC ሰฆ ت ࠔକ ࡗ ڦ ᅝย ฆᆶ Ljᅺ ڦ Ԣॲ ሞ ࡗג ੦ ԢLj ࢫॽ ยԢஜߴକᅃ Ⴔᄲક ଉ ڦ ᆌ ڦ ጨ ă ڦ ٷ 200mm ᇶ ăኄၵยԣ Lj ړ മ ሞ ᅝยԢ ሰฆ ܓ ᇱ๔ࡀ Ք Lj ፌߛ ᅜ ڦ र ڦ ኝ ൵ Ljᅜत ዐᅃၵࠅ ࡗ ຍব ۅ 180nmLj ڍ ยԢ ڦ മᄽ ራ ں 200mm ᇶ ڦ ยԢ ڦ ਸ ዷᅙঢ় ॽںࠀ Ⴀ प ڟ 130nm ሰ ڦ ൧ Ljኄၵ ۼ ਗକଭ ব ۅ ᅜ ăசዷ ײ ڦ پ ሞঢ় ևॲ ࠃڦ ᆌవ ăᅃ ঢ ᇶ ᄽ ࡗᅃ क़ ԍ ༀ ኮࢫLjߵ ዷ ၹ DŽFOADž ڦ ᄽ ᅙ ঢ় ᆅ ڦ ඪ ยԢĂփ ႎ ڦ इ ڦڥ ସට႑ ڦޜ Ⴀ ຕ DŽසਗ਼ ᅃዖӸ ઠ Ԣ ևॲ ڦ ඍ ยԢ ڦ ۼ ፁ ཚ ศ ڦ ࡕDž Ljᅜतᆯ Lj ཚࡗሞ ᄽዷኮक़ ॺڦ ૬ ڦ Ⴔ൱Lj ሞߛഗॲଆ ୲Ă گ ยԢࠃᆌฆ ࠃ ڦ ጆᄽኪ ጧ ᅃ ዺ ஏLj๑ ڥ ࠕࠌၛଭ ยԢᆛᆶ Ԩᅜतଆ ڦ ದዃฉ კLj๑ ڥ ඓ႑ኄᅃ ႎยԢሞ ևॲጨᇸLj ڦ ړ గ ᇵथႴ इ ڥ ᅮă ထ ย Ⴀ ฉ इ ڦڥ ă ยԢ ڦ గዖႎ ڦ ଭևॲ Lj ዺ ஏॽၹዺ Ԣ ĂҾጎᅜतႠ ᄓኤฉ ڦ ࠀ प ਜ਼ বሀକຕӥ ᇮࠔச ଭևॲ ڦ ሰ ದă क़ዜ ăኄ ᅪ ጣ ยԢࠃᆌ ႎยԢ ڦ ཨጨኧ ă 3. ยԢ ܮ 2012 ሺ 30 ܠ ᅢ ᇮ ă ቛ ๆ ݴ ტ ă ሞ 2009 ڤ ዝ ᅏ ഗ ฆՂႷᄲ ܔ ᆶ ڦ ยԢ ဦ ඇ௬ ڦ ೠࠚLj യሞਜ਼ ኝ ଭևॲࠃᆌ ڦ వ DŽTIDžࠅ ᆩକ ړ ᇀႎยԢๆ Semico ࠅ କ ਦ د ཥ৹ ݴ ኮᅃ ڦ ࠔசକ Qimonda ࠅ ڦ त ຕ ă କ ፁ ڦ Ⴔ൱Lj ᇶ ڦ ย Ԣ DŽISMIDžLj ᅙ ঢ় ܔ 300mm ᇶ ยԢăໜࢫ ܔ ኄᅃ ยԢࠃᆌฆ ՂႷሞ ᇀඇ൰ዘ 200mm ᇶยԢ רڦ ৹ ቛਸ ᇱԨย ᆩᇀ ئ ഗ ڦ ยԢ ںۅ ڦ ল৫ ዐԍ ড ٷ ຕଉ ڦ କჺ৯ăස 1 ๖Lj ܔ ሰฆĂ ߀ᆩሞ DŽTIDžጲम ڦ ఇ RFAB ยԢ Lj๑ ᅜሞबዜ փ ब OEM ยԢࠅ ઠຫLj ዷ ฉLjժཚࡗକ ᅝႠ ڦ ᄓ ሆ ڦ क़ ਜ਼ ࠃႠ ඇ ᄲ ጀ ڦ Ԉઔᆶ ǖ ᅜᅃ ኤLj๑ ڥ ৪ኛ ܔ ᄽ ڦ ࠅ ڦ ኝ༫ ᅝยԢDŽ९ 4Dž ă Đ ९ ڦ इ ڥ Ⴔᄲ ڦ ଭևॲ Ǘᄲ ᄺՂႷ ණኈᅜ ጲว ݛڦ ๕ न ڥ đ Lj ܔ ഔ ހ Ԉጎ ت ᇀ ኪ൧ इ ڥ Ԉઔଭևॲࡀ ᅜतยԢ ኽሞ ઠ 200mm ᇶ ڟ 300mm ᇶ ڦ ยԢ ᆩ پ ڦ ৹ఇ๕Lj ڦ रຍ ॲ ᇜ ܠ ڟ ઓవ Ǘᆯᇀ ڦ पăDuke ࠅ ණ 200mm ᅙঢ়ԥሺኵ ፕ ݛ ๕ پ Ljኄዖႎ ଭևॲຕଉ ٷ వᅜඇ௬ तLjᆶ ᇶ ڦ ਏᆶ ᇀĐႎ ڦ ڦ ݛ ๕ॽႎยԢ ڦ ዊଉ ڞ ዂగᅃևॲ ڦ ඍ 150mm ᇶđኄዖ༬ኙLjᅺ ኄዖ Ⴀᄲ൱ᆅ ڟ କ ยԢ Ljཞ ਦਜ਼ ڦ ڪ ă أ କևॲႠ ႙ ڦ ႎยԢ ڦ ଉᅙঢ় ณLj๑ ݛ ๕ ॽ ࠃᅃኧ ܔ ৹ยԢ ኄዖᅃӯႠ ᅜ Ljሰ ଭևॲవ ڥ ᄲԍኤ৹ยԢ ڦ ଭևॲ ࠔ ᅝᆶጣศ କ ڦ ጆᄽኧ ܓ ă ڦ ڦ യሞᅺ ᇑ OEM Ԉ Վ ڥ ڦړ ઓవă ยԢ ڦ ဦದዃ ຕLjएԨጒༀ ႎ৹ยԢ ڦ ᆌᆩत ದLjĐ ג ג ሁยԢ ڦ ᇱᆶႠ ሁఊ ୱđ ڪ ยԢत ޜ ခ ڦ ௬ଣጣሞยԢ ଭևॲ ڦ ዊଉᅙঢ় ڟڥ କ Lj ڍ ሞగၵ൧ Lj ᅝ ײ ධ ሞᅑ୯Lj ࠃᆌ Ԓ ڪݭ ዮ ܠ Lj ڍ ᅃၵᄽ ՂႷᄲᆶ ๑ ඓ႑ ᆩ ย ጆ ᅈ ᅃዂ ยԢሞᆌᆩᇀ Ԣኄᅃ ਦ ݛ ӄ ᅜ ፁई ג रຍব ۅ ฉ ڦ മৠLj ยԢሞ ॽ 130nm ڦ LSI ഗ ॲ ڦ ᄲ൱ăፌৎ ڦ ᅃ ૩ጱ ᆶ ᅃ ยԢࠅ ᅃ ᄽহଶ ڦ 36 ӷ ڞ ยԢ ᄽৎ ઠ 4. ሞ નAG Semiconductor ServicesďNijmegen ࠅ ႎ כ क़ ڦ ӷ ڞ ยԢă 60nm ฯ 45nm ᅝ ዐ ॽ ഐ ڟ

39 ノ M A N AG E M E N T и۴ગ ו 1ǖ د ཥ৹ ᇶ ڦ ยԢ DŽઠᇸǖSemico ResearchLj ܔ 200mm ᇶ ยԢ ר ৹ ጒ ڦ ჺ৯Džă IDM/ Foundry OEM Cannot get replacement parts Cannot get replacement parts in a timely manner Cannot get replacement parts at a reasonable price Cannot get parts because suppliers of components and board manufacturers are discontinuing parts ਦ ݛ ӄLj ኮ Đ ג प ሃ đ ײ ă Used Equipment Vendor ᅃ ঢ়ᄓ ڦ ݿ ยԢࠅ ॽ ሞ ฉ ၜణዐഐ ڟ ๆ ݴ ዘᄲ ڦ ፕᆩLjᅺ ᅜ ݴ ૧ᆩ ٷ ଉ 200mm ย Ԣ ڦ Ă߀ሰ ࠔർ ڢ Lj Current suppliers cannot afford to maintain parts and services for all technologies. Older parts are dropped more frequently &DQQRW JHW HTXLSPHQW GRFXPHQWDWLRQ ZKLFK LQFOXGHV SDUW VSHFL FDWLRQV DQG equipment schematics ᅜ૧ᆩ ڦ ፕअӵઠย ॺሰ ᅃ ႎ ڦ ई߀ሰ၄ᆶ ڦ ย Cannot notify customers when a part is being discontinued because there are too many parts to keep track of The industry continues to move quickly to new technologies. Parts are becoming obsolete faster. แLj ᅜ૧ᆩ ߛ ዊ ڦ ยԢ ᅝ ײ ܓ ઠ ܔ ॺ ڦ ยแ Some parts that were also used in other industries, such as aerospace and other industrial, are also moving on to new technologies. Government regulations have changed, restricting the use of certain materials, making it impossible to manufacture exact replacement parts. Cannot get software support &DQQRW QG VNLOOHG ODERU WR SURYLGH WHFKQLFDO VHUYLFHV License fees to operate equipment are too expensive Equipment vendors can no longer support the tool maintenance, yet will not release licensing rights or tool schematics for others to utilize. ݛ ௬ ࠃरຍኧ ă ஃ ໜጣ ยԢ ڦ Ⴔ൱ ᆌᆩ ᅙ 200mm ᇶჽฦࡗ 300mm ᇶLjࡗ ब ዐ ओ ڦ ঢ়ᄓॽᆶ Ⴀ ڦ ፕᆩăKato କ ڦ Đ ᆩᇀĐ ג ሁఊ ୱđ ڦ ย ದđ Lj ኸ Lj ዐኝ ዐăሞగၵ ᅝօየ ڦ ൧ Lj ३ณ ײ ڦ ᆭ୯ ײ Ljժ ฉ ڦ 180 ৹ยԢLjᄺन ኝ ၄ᆶ ڦ ยԢඖፇ ᅜ ൽ থ ยԢፇ ዐ ڦ 67% ۼ ᆩઠ ๑ᆩĂ ኝई ၄ प ڪ Lj ڦ ઠჽ ӷ ڞ त ڦ Ⴔ ᄲ 29 ᄄ ఇ 60nm ഗ ॲ ዐ ڦ ᅃ ૩ ॽ৹ ڦ ӷ ڞ โ ዜ ă ڦ Lj ᆶๆब ยԢႴᄲ ฉ ت ߀ጎ ᅃ ႎ ڦ ᅝ ბ ฉথ ڼ 34ᄻ ዺᇀ๑ኄዖࡗ Վ ڥ ඹᅟᅃၵLj ࠃᅃ ߛ ᅮ ڦ Ăᅜ ᅝ ዐ႐ ڦ प߀ሰLjᆶ 82 ยԢDŽ 30%Dž ጎዃă ت ገᅎࡗઠ ڦ ย SRAM ئ ഗă କࠓॺഗॲ Ljჺ ᆯᇀႴᄲ ᆩፌႎ ڦ ᅝरຍLj Ԣ ۼ ᅙঢ়ᆩᇀ߀Վ ᇱᆶᆩ ڦ ৯ටᇵ ק ओକᅃ ݥ ࡂ ժᆩघ ኻ ཚࡗࠔዃႎยԢઠ ၄ă ኸ Lj ዐLj૩සᆶᅃ ᅙঢ় ݭ ച ڦ മዃ๕ ஞ ॽ ă ࢫ ࡂܔ ᇶ గၵ ۏڦ ओᅜत N ႙ P ႙ PVD ဣཥԥገՎᆩᇀԝ௬ ३ԋ ت Ljઠ ሰ ᑝ ڦ ጱጀ ۼ ᅜᆩ ยԢઠ ڦ ӄ૩ă أ କ ኝ ᆫ ڦ ք ᅃዖ ג ԋ ڦ Ăट ኝ ڦ 3DIC ഗॲă Lj Ⴔᄲ ဦ ԋ ਆ ยแᅜ Ljኻᄲᆶ Lj ᄲ ኄ ڇ 3DIC ॐࠓዐ ᆶ 3 ps ࠓ ڦ ሶႴᄲႎยԢ ࠔں ዃ 200mm 300mm ڦ ڦ இड ۉ ୟLj1-T500ns ݥڦ ᅟ Ⴀ ă Ljగၵ ᅝօየሶ ᅜᆯ ยԢLjཞ ཁዃਏᆶፌႎࠀ ڦ ႎย ئ ഗ 6T ڦ SRAMLjժਏᆶ ڦگ ሯ ႎยԢĂ ยԢ ႎยԢፇ ԢLjኄ ኁ ڦ ॽᅈ ഗॲ ሰ ำ ڦ ă ഐઠࠌཞ ăሞ ڦ 60nm ഗॲ૩ ฆჽ ዜ ڦ ႐ ጱዐLjႹ ܠ ᅝօየ ᅜᆩᅟᇀइ ᇱሶă ᄽহණ Lj ڇ 3DIC ኄዖႎ႗ ڦ ण रຍLjॽ၂ዸ३ณ ڦ ڥ CMPĂCVDĂਗ਼ ยԢ ยԢ ઠ ڦ ሺ ଶᇘॽ ჽ ኮक़ ڦ ਐLjჽቛӷ ڞ ୟ โ ᅝ ઠፇ ă Lj3-D ઠጲᇀႎ ڦ ਜ਼ Ⴔ൱Lj๘হฉႹ ںܠ ג ሁఊ ୱ ᇨ ڦ 2D ڪ Բ૩ ހ ጎ ᄺॽ ߀ Վ ᆶईኻᆶณଉ ڦ Ԩ ӷ ڞ ࡆगăሞ 28nm तᅜ ব ۅ Lj3D ᆩ ࢫ ᇶ ᅝยԢ ࠃକଷᅃ ሰए ں Lj ۼ ထ ณ ॺ૬ᅃ ӷ ڞ ڪ Բ૩ ժփ ም๑ Ԩই ଶᇘă ჺ ዐ႐Ă ᄓ ईኁ ت گ ăleti ሞ 2013 IEDM ᅱ ฉ ڦ Ԓ Bignell ༪ ஃ କ STMicro ࠅ ᇀഐ๔ ቛ ڦ Ljईኁ ߢዐ ڇॽ 3DIC ፕ 3D ڪ Բ ස ᆩᅃዖĐᄆ रຍđ ݛ ๕ઠ߀ ॺยᅃ ኝ ڦ ᇶ ă แኄၵၜ ૩ ڦ ݛپ ӄLjᄺⴙኄ ڇ Վ৹ ยԢ ڦ ᆩ Ljॽ ߀ሰ ణॽႴᄲᅃ ཀྵ ڟ ኝ ڦ ण 3DIC ڦ ቛऐ ă 37

40 ϔ৮䶱㻵 SEMICON China 2014 ጚᆶ ڢ ĊĊ ڤ ၻႎ႙ਨ ܔ ๕ ଉ ዘ ݓ SEMICON China ڤ ሞኄ ዐ SEMICON China ॽቛ ଇ ਸ๕ ሞߛ ଉ ࡗ ײ ዐ ԍ Ⴤ ߛڦ ዊଉ ߛ ߛ ڦ ă Lj ٷࠃ ڤ ଉਏᆶߛዊଉ႑ ਨ ܔ ๕ ቆ ǖ LIC 2100 ࡍᮔᔶᕅ 㓵 ݿ ḻተθ㔓ሯᕅփ㖤 䠅 ڦ ቆ ঙ Պஓഗ ڦ ስLjඓԍ ጚඓă ڥ ᅮᇀ ௬ ᆌᆩ ڦ ऐႁ ࠓLj ᆩႠ ߛڦ ъᆿ㻻ㆶঋⱦ ᅭ ڦ ༬ႠLj๑ ڤ ቆ ई ঙ Պஓ ഗ ඓԍ ፁփཞ ଉඪခ Ҿጎཉॲᄲ൱ă ਨ ܔ ๕ߒ ټ ቆ Ǘ ݴ Ր୲ 0.1 μm (100 nm) Ǘ ڪ प ǖġ15 μm Ǘ ڇ ႑ ዜ ዃဃ DŽ ۆ ႙ኵDž< 0.4 μm (RMS) Ǘ ټ ࠅ ڤ ᆶਨ ܔ ዃ႑ ڦ ቆ Պஓ ଉ 3 mdžසਜ਼ Ⴔᄲ ٷ Lj ࠃDžǗ ഗሞ ߛ ࡗ ڦײ ୲ Ⴀ ݛ ௬ ጣዘ ٷ ሏ ۯ 10 m/s Ǘ ፕᆩLjӻዺᆩ ሞԍ ዊଉ ڦ ཞ ߛ ଉ ǖ থ੨ ǖendat 2.2Ă ఫ Ă ବ Ҿ ج ڪ ݞ प ǖip 67 ڤ ቆ Պஓഗ ක ഽ ႠߛLjᅺ ඓԍ क़ ࠤቱ ፕLj ࠓዾߛ ڦ ए إ ă ཞ Ljႎऐഗ ႎဣཥ ܔ ᇀ ߛ ڦ ဣཥҾඇႠĂ ଉ ڦٱ ፕ ᅝᆶጣሁઠሁഽଜ ڦ Ⴔ൱ă ߛ ݴ Ր୲ ڦ ༬ ۅ ๑ኄၵՊஓഗ ጚඓ੦ Ljᅺ LIC 4000 ࡍ㔓ሯᕅᮔᔶᕅ 㓵 ݿ ḻተθ䘸 儎 ߛ Ⴀ ߛ ༬Ⴀă Պஓഗཚ ۉ ईਸऐࢫ૬न ࠃ ዃኵăඓԍໜ ᓜ ཝ 䠅䮵ᓜѣⲺᓊ Ⱦ ݓ ༬ ዃLj༬ ᆩᇀ ܠ ऐ ڦ ဣཥई ܠ ዡऐഗă Ն௨ ܠ ዡഔ ۯ क़ಸጐă ᆶਨ ܔ ਗ਼ࡆ ڦ METALLUR ߒ ټ ቆ Ǘ ० ڇ ዡ ڦۅܠ ኝă ݴ Ր୲ μmdž1 nmDžǘ EnDat 2.2 থ੨ زڦ ك ຕጴ د ݛ ๕ժᆶთ රᇆၯ ڪ प Ġ 5 μm Ǘ ᄓDŽCRCDžࠀ ඓԍକ႑ د ă ۆ ႙ ዃဃ ǖ ڇ ႑ ዜ Ġ0.08 μm Ǘ ၄Ҿඇ႙ऐഗย ă ଉ 27 m Ǘ ሞ ኑ ࠀ ၂๖ ٱ ႑တ ๖႑တLjᅺ ߛኝ ሏ ۯ ୲ 8 m/s Ǘ ဣཥ Ⴀߛă ݛ Սᆩ Ҿಇऐഗ ă থ੨ ǖendat 2.2 ਨ ܔ ዃ႑တઠጲᅃဣଚਨ ܔ ஓࠓ ڦ ቆă କ ٳ ޢ ਮ LOGO φ ڟ భ प ݴڦ ݔ Ր୲Lj ૬ሺଉ႑ ਗ਼ࡆದ ਨ ܔ ዃ ޢ ਮ㖇 φ ႑ Lj ၄ ᅃօဦ ݴ ă ᴪཐ ᚥ䈭㦻Ѫ ᗭ ኋਦ φn ৸㿸έ ཀሄ ଙᆶ ࠅ ࠅ logo ǖ ࠅ ǖ ཀሄ ଙᆶ ࠅ ᅜჺ Ă Ă ӷ ڞ ࡂ ଙ ዷᄽ ߛڦ ႎरຍഓᄽLj ࡔ र ࡕ ገ ၜణ ڇڅ Ăࡔ रևĐ863đၜణ ڇڅ Đዐࡔ ୲ࠀټ ӷ ڞ ᄽ đ ڇ ă ࡂ ڇ ଙ ڼ پ ӷ ڞ ଙ پڦ Lj ݘ ᆌ 38

41 ϔ৮䶱㻵 SEMICON China 2014 ᆩᇀࠀ୲ഗॲĂ հഗॲă ӷਨᇹ႙ ࡂ ڇ ڹת Lj ࡔ ฉณຕ ࠕ ࠃߛዊଉ ۉ ጱഗॲ ڪ ଶᇘLj ܔ ᄽ प ࡂ ڇ ଙ ࠅڦ ኮᅃLj ڦ ඍ ٳ ব ३ಇਏᆶዘᄲᅪᅭLjణ ᇀ 1 /cm2Ljӷਨᇹ႙ ۉڹת ፆ୲ ٷ ᇀ 1E8ˮFPLj മኟ ႎᅃ ߛپ ӷ ڞ ௬ ᇀ 0.3nmLjरຍ ࡔڟٳ ă ཀሄࠅ ᆛᆶᅃ ڦ ჺ ܓ ഽ ڦٷ र ഗॲ ڦ ዷ ă ཀሄࠅ ߃ 2 ຍ Lj ᆴ ჽ ഗ ॲ ਜ਼ ࠃ ᆫ ዊ ڦ ᆈ Ă3 ᆈ Ă4 ᆈ N ႙ ޜ ခă ӎଠәຯࠅ ፌႎ քlext OLS4500 భ ॠ ၂ ბ၂ ӎଠәຯࠅ ᇀ ሆ 3 නሞනԨĂ बๆԠ ڟ ฉӥ Ԡă 2. ߛ ݴ Ր୲ ߛڦ ݔٷ ጚඓႠ ଉ Ǘ घ ၂ 3. ᆩႎ ڦ ௮ఇ๕Ljᆩ ᅃ ڇ ऍन इ ዐࡔĂ ࡔ ࡔ ք କ LEXT OLS4500 భ ኍ၂ ॠ ၂ ălext OLS4500 ᅃዖ ᄽᆩ ൽ 3D Ǘ 4. 3D इൽ ڦ ٷ ሀ ၄ᆶघ ၂ ڦ ଇԠă ⅘䘄㦻Ѫ SEMICON CHINA 2013 ᐪᯥኋփ ႎ႙၂ Lj କ د ཥ ბ၂ Ăघ ኋփਭ φn ௮၂ DŽLSMDžᅜत ኍ၂ DŽSPMDžࠀ ڦ ᅃ ऐă ᐪᯥδѣളεᴿ䲆 ޢ ਮ ѱ㾷 ᙝ 1. ጲᆯൎ ܠ ዖ၂ ఇ๕Ljփ ܔ ၡă ᅜ ၄ ڟ భ ڦ ଉLj ٷݣ Ԡ୲ᆯ ޢ ਮ LOGO φ SÜSS MicroTecࠅ ፌႎᅃ پ ጚ ݴ ጱघ օ ๕ ਗ਼ऐ ELP300 Gen2ཨ ݣ SÜSS MicroTec ࠅ କፌႎᅃ ڦپ ጚ ݴ ጱ ᆫ ڦ ᆶऐ ଙ ᅜ ڟڥ ᆌᆩă ই گ Lj ३ घ օ ๕ ਗ਼ऐ ณକඤ ቯ ၄ ڦ ब୲DŽඤ ቯဣຕ = CTEDžă Lj ELP300ă ኄ ႎ ᅃ ELP300 پ ဣཥ ፕ ڦ ཚ ժই گ ހ ጎ پ ਸ ظ କ থ ᆌᆩዐ ڦ ཚ ڦ क़ਐă ELP300 پ Ӏቷ ت 200mm 300mm ᇶ ದ ཚ DŽ ݴ Ր ୲ 5μmDž ࠓ ڦ ዃ ڦ Lj ਦକ၄ پ ހ ጎᆌᆩ ण ڦ रຍ ă ă ኄ ዖ ݛ ೦ Đ ਸ ࠕ ਖ਼ دޜ ཥ ۉ ଙ ࡀ କ د ཥ ۉ ଙ ਗ਼օ ऐ ڦ ࠓ໒ሰरຍ ᅝăđLjSÜSS MicroTec ࡀ ਗ਼օ ऐ ڦ Lj থኍ ړܔ മ ހ ጎ AG ࠅ ဝኴ Frank P. Averdung ຫLj Đ ፌႎᅃ پ ण ᆌᆩଶᇘ ڦ ᄲ൱ă ڦ ጚ ݴ ጱघ օ ऐ ڦ ਜ਼ ٶ ਸକᅃข ਦ ړ മर ᇶप ހ ጎᄽᅃ ሞლቴ ፕཚ پ ڦ रຍLjᅜ Ս Ⴀ ഽ ހڦٷ ጎăᆩጚ ݴ ጱघ أ ᆶऐ Lj๑ ڥ ሞऐႁĂ Ăඤ ბ ბႠዊ ݛ ௬ ᆶ ຍ ཞ ၄ Ԩ ᅮ ٷڦ ăđ ႎ ڦ घ ᅝဣཥॽᇀ ሆ නሞฉ ਉ ڦ SEMICON ChinaLj2109 ቛ ኟ๕ଋ ă 39

42 ϔ৮䶱㻵 SEMICON China 2014 EdwardsॽሞSEMICON Chinaቛ ኍ ܔ ӷ ڞ Ă ᄞ ĂLEDĂ ӱ၂๖ ഗ ሰ ڦ ኈ ਦ ݛ ӄ Ҿጎă Lj Edwards Edwards ᆶ ࠅ DŽEdwards LimitedDž ॽሞ SEMICON China 2014 DŽฉ Dž ቛ DŽN1 ᆶ ޝ ى ڦ ๕ ԭ ᅃ ᄣLjSTP- ቛཐLj1014 ቛ Džႎ ڦ STP-iXA4506 ixa4506 Ⴔऐႁዡ ڦ ༬Ⴀब ٷ ඹଉ ݴ ጱԭDŽTMPDžᅜत ih600 ߅ ࢭ௨ أ କ ڦ Ԩă ԭLjSTP ixa3306 ޝى ݴ ጱኈ ԭLj ኄ ԭ ߛڦ ixh645 ኈ ԭLjiXL120 ߅ԭ ڪ ኈ DŽ4300 l/s N2Dž ߛ ଉDŽ ߛ ٳ ਦ ݛ ӄLj ӷ ڞ Ă ӱ၂๖ഗăled 4300 sccm N2Dž ᆶ ᄞ ۉ ӱ ሰฆ ࠃ ߛႠ ኈ ဌ ഘ ዘ ഘ ڦ Lj ๑ ਦ ݛ ӄLjժব ܠ Ԩă STP-iXA4506 ݥ ᆩᇀႹ ܠ փ ႎ႙ STP-iXA4506 ԭ ᆛᆶ߀ ཞ ٷڦ ଉĂߛ ۯ ႠᆌᆩLjԈ ଆ ഘႠ ڦ ᅃ ਦ ݛ ӄă ᆩକ ઔ ӷ ڞ ਗ਼ĂLCD ਗ਼Ă ի Edwards ፌႎ ڦ ገጱย ຄ ߛ ڦ ixa ဣଚऐ ఈĂ ᄞ PVD PVD ఈă ߛ ण ڦ ย Ԉ ሜ੦ ഗLj๑ඹႹཚࡗ ڦ ഘଉፌ ٷ Lj ๑ߛ ଉ ᅝ ઔᅃ ඇ ۉڦހ ጱఇፇLjᅜሞፌჹ ڦ ዐ ࡗ ײ Ⴔ ڦ ԭຕଉ३ ፌ Ljᆮ ᇀ ᄞ ၄ ॳĂ ڦ ፕăႴᄲ ሺ ᅃ༫ ඤဣཥLjᅜ ӱᆌᆩăԭण ڦ ੦ ഗ௨ କ ܔ મ ૬੦ ഗऐॐ ३ณઠጲ ᅝࡗ ײ ዐ קڦ ओ ૭ ڦ ओă ڦ Ⴔ൱Ljᅺ ᄺব କ ԨLj ओ ᅟᇀሞ ዖᆌᆩዐ Ԩ ዂ ᇀ ۉ ጱपቕ व ਦ ݛ ӄ Ԩ ጆᄽ ࠃ ۉ ጱपቕ व ਦ ݛ ӄ ڦ ฆLj ݘ ᆌᆩᇀ ۉ ጱፇጎ ӷ ހ ڞ ጎଶᇘă ڦ ਆ௬Ljᅙঢ় ۉ ࡔ ጱपቕ व ڦ ኪ ಈă 2011 ࢫԨ ࠅ ࡀఇනᅮક ٷ Lj ޗٷ ሺ Lj 2009 ਸ๔Ԩ ࠅ ჺ ڦ ExBond ቕཌྷঌ ਸ କႎဣଚ ǖexsilica ࡂঌဣଚLjExSeal ހ ۉ ጱፇጎঌᅙঢ় ڦݘ ᆌᆩᇀ ۉ ጱ ހ ጎ ă ஃ ঌဣଚăԨ ࠅ ॽ Ⴤ ฉ ᆴ ฆ ݘ ፕLjዂ Ⴀ ႠLj ᆶฉ ၄ăೞ ਏᆶጲዷኪ ᇀᆌᆩᇀ ዖ ހ ጎ ๕ ڦ ჺ ă ࡔڦ ڦ रຍ LjԨ ࠅ ᆶ ڦ ਦକቕ Ⴀ ᆌᆩႠ ڦ ல ܜ Lj ٶ ೦ മᅃ ԥࡔ ಈ ઠLjԨ ॽ Ⴤዂ ᇀ ਸ Lj ᆫ Lj ᅝ੦ Ljዊଉ੦ Ljरຍ ޜ ခLj ਦ ݛ ӄ ظڦ ႎᇑ߀ ă փཞ ڦ ᄽ ࠃ ڦ ဣཥ ਦ ݛ ӄă ኈ ځ ᇑ ࠌཞ ፕLj ਢႎ ڦ ऐ Ljቘइ ᆫ ڦ ᄽजă TM TM ޢ ਮ LOGO φ Make Bond Excellent 㖇 φ SEMICON China ኋփਭ φ

43 ϔ৮䶱㻵 SEMICON China 2014 Spectrum II S2-900 ဣଚ ۅ ঌဣཥ MEMS ހ ߜᆌᆩ ܔ ঌ ߜঌ ă ۅ ঌऐሞ Z ዡ - क़ဤ੦ ൡၽ พ ۅ ঌࠀ Ljཚࡗ ඓ ڹ ևག ۅ ঌ ٳ ঌ ୟ০ጚඓ ݛ ௬ ڦ Ⴀ ᅃ ڟ వᅜ ڦ ኸ ᇘLj ᇑ ܠٷ ຕ ۅ ঌ ण ၄ ዖ ănordson ASYMTEK ࠅ ፌߛ ٳ 30 ڦ ൡၽă ڹ ևག ۅ ঌሞ ݥڦ ڦ Spectrum II ဣଚ ፁକኄ ཌྷৎ Չᇹă Ⴔ൱Ljཚࡗ߀ ऐႁยԢ ጲ ۯ ၯጚມ ཞօࠀ ሺ କ Spectrum II ဣଚ ڦ ᆩ ॲ ࠀڦ Lj ڥ ᅜሞԍ ڦ ൧ ᆷ Ă Ⴀ ᅟᆩႠLj ၄କፌ ཕऐ ၄ߛ ۅ ঌăSpectrum II क़ ට ߅ᇨLj ॲൡၽ ጲ ۯ ၯጚ ۅ ঌ ዃLj ဣଚ ں ௬ओ 600 ມ ཞօ ۅ ঌ ᆶ ই گ UPH Ԩă ġ1321 Ljሞፌ ڇڦ ں ߛଋ ڦ ਥቷ ဣཥLjሞ ሗ ڦ ᆌᆩዐᆶ ߀ क़ ፌ ڦٷ ଉă ڦ ፌ ܔ Բत ࡕLj ၄ ඓ Ⴤ ڦ ఇ๕Ր ߛ ۅ ঌ ٳ 30,000 ۅ / Lj Lj ܔ ፕኁ ჾ ޙ ට ბă ࡗג ओ ۅڦٷ ঌ ăएᇀ Spectrum I ဣଚൽ ڥ ڦ ණ ႠLjSpectrum II ဣଚ ڦ ย ၄କण ߛጚඓႠ ݥ থ ة घ ߛ ഗLjᆶ ߀ ௬ߛ ߌڦ Lj ၄ဦ ঌ ܔ ۅ ঌ ဤ ۅڦ ঌă ڇ ມ ದዃ ߛ ۯڦ ༀ Ljཞ ԍ କ د ཥದ ዃ ڦ ଳऄႠă ޢ ਮ LOGO φ रຍ ظ ႎǖ 㖇 : Z ዡࠀ ၄ Ⴤ ڦ ঌ ۅ ᇀ 200μm ۅڦ SemiconChina Booth: N3 #3239 SÜSS MicroTec ࠅ ፌႎᅃ ڦپ ހ ጎཨᆖ ௮ ਗ਼ऐ DSC300 پ ཨ ݣ SÜSS MicroTec ࠅ ཨᆖ ௮ ਗ਼ऐ DSC300 ਸ ă đLjsüss MicroTec AG ࠅ ဝኴ Frank پ ăsuss MicroTec Photonic Systems ࠅ DŽ ᇱ Tamarack P. Averdung ຫLj Đ پ ڼ ཨ ᆖ ௮ ഗ DSC300 ๑ SUSS 6FLHQWL F ࠅ Dž ڦ ཨᆖ ௮रຍ DSC300 ڦ ए إ Lj MicroTec Photonic Systems ࠅ ሞྊቛ ፇ ฉᆼ ᅜ ت ፌ ٳٷ 300 mm ڦ ᇶă णඇ ᇑ د ཥ ڦ ཨᆖ ਗ਼ଇዖरຍ ڦ ᆫ ۅ ᇀᅃวăጎԢକᅃ ඇ ᄄఇ ᅃ ټ ཨᆖ ཀྵ ڦ ௮ഗሞᅃ օየዐ ܔ ᇶ କᅃ ٷ օăđ ႎ ڦ घ ᅝဣཥॽᇀ ሆ නሞฉ ਉ ڦ SEMICON ChinaLj2109 ቛ ኟ๕ଋ ă ăሞᄄఇքਆย ࢪ ڦ Ljᅙঢ়ण କ ࠀڦ ܮ Lj ԲසՉᇹ ኄ ኴ ࢫჄ ᅝօየമዘᄲ ڦ ᅃօă پ ڼ ཨᆖ ௮ഗ କᅃၵ߀ ظ ႎLjᅜ ፁ ހ ጎरຍLjසཟዹཫ ۅ ᇶप ހ ጎ (WLCSP)Ljሞ༫ ਗ਼ Ă ݴ Ր୲ ጲ ݛ ۯ ௬ ڦ ᄲ൱ăSÜSS MicroTec ࠅ ࠃ DSC300 پ থৎথ ة ๕ ਗ਼ऐ MA300 پ ଇ ዖ ց ڦ ਗ਼ ਦ ݛ ӄLj๑ਜ਼ ࠕ ၄ፌߛႠ Բă Đ2012 ࠔ 7DPDUDFN 6FLHQWL F ࢫLj ܔ ፇ କᆫ Ljጆጀᇀፌᆶമ ڦ ยԢժဣཥ ں 41

44 ϔ৮䶱㻵 SEMICON China 2014 ߛ Ăߛ - ڛ ጎ ཌྷ ሞ Die Attach Flip Chip ᅝዐLjSIPLACE CA ᅜ থ ᇶฉ ൽժཌྷ ݣ Lj ၄ ĂSMD ᇮॲ त SMD ᇮॲ ߛڦ Ăߛ ڇ ई ཌྷጎă ѱ㾷 φ Ŕ Filp Chip ཌྷ ݣ ǖ36000 / Ŕ ཌྷ ݣ ǖ24000 / Ŕ ᆩ ᅝ ǖfilp ChipLjDie attachLjsmd ᇮॲཌྷ ݣ Ŕ ǖ0.8x0.8mm ~ 18.7x18.7mm Ŕ ᇶ ǖ4 ᆈ ~ 12 ᆈ Ŕ SMD ᇮॲ ǖፌ SIPLACE Wafer 㔕 φ SIPLACE 㓵ᙝ 㱮㻻㖤 φ SIPLACE Ֆ䗉ᑜ φ ጚඓ ڦ ቜߛ ጲᆯՊ ײ ዺ व ք Պ ڦײ ԍ क़ ኧ ڛ ጎ Ă থ ᅝ ᇶࡀ ǖ4" to 12" ᇶ ݣ ዃ ጲ ۯ ᇶ ऐ ᅴօఇ๕ ཞօ ଇ փཞ ܠ ዖ ᇶኧ PCB ኟ௬ ݒ ௬ཞօ ఇ๕ р ᑂᯥ㗄 ᵰ ᴿ䲆 ޢ ਮ ޢ ਮ LOGO φ SEMICON China ኋփਭ φ

45 ϔ৮䶱㻵 SEMICON China 2014 ۉكߛ ܠޘܠ ጱपൠ ޘ ໗DŽ002407Dž ݻ ܠޘܠ ᆶ ࠅ ዂ ᇀߛႠ ऐ ޘ Ă ۉޘ ጱ ბ Ăᯜ ጱ ۉ ଙ భ ଙჺ Ă ഓᄽኸՔ 丵ణ ঢ়ᆐLj ඇ൰ ࡀఇፌ ٷ Ăरຍ ظ ႎଶ ڦ ዷ ᆶଉ ऐ ޘ ଶਬഓᄽ Ǘࠅ ૬ᇀ ሆLj2010 H 2SiF6 5 ሆ 18 නሞศ ಈ ฉ Lj پ ஓ ǖ002407Lj ࡔ ऐ ޘ ᄽ ڼ ᅃ ฉ ࠅ Lj ࡔ % UP-SS प प 49±0.5 49±0.5 49± ໗ ڰ Բ ᅏ UP प 49± ppm ॠ ݛ UP-S EL प SO42- ppb NO3- ppb ppb Cl - ppb ᄞ ጱ ppb PO4 ૭ ParticDO. ȝm ૭ आਖ ዘ ۅ ഓ ParticDO. ȝm ᄽĂࡔ ߛႎरຍഓᄽLjࡔ ظ ႎ႙ ۅ ഓᄽLjࡔ रຍ ParticDO. ȝm ظ ႎ๖ ݔ ഓᄽă ڇ ૭ Hazen ૭ /ml 25 ૭ /ml ૭ /ml ๗ ཚ 915 ጲ ۯ ۉ ڰ ᅏ ٻ Ҿ 3000 ጱ ᅏ ICP-MSPE300S නԨႽӆ ૭ ຕഗ ݻ ܠޘܠ ᆶ ࠅ ཚࡗକ ISO9001 ዊଉ ĂISO/TS 16949:2009 ዊଉ ĂISO14001 ĂOHSAS18001 ኰᄽॳ Ҿඇ ࠅ LOGO ǖ ڪ ဣණኤă ǖ Ԩࠅ ߛ ك ൠ ޘ ໗ ኸՔස ǖ ቛ ǖ4385 ऊ ӷ ހ ڞ ጎႎ ଙ ऊ एᇀऊ ጆ૧रຍ ڦ ႎ႙ RadLo ሞट ڦگ ૭ጱ ݣ พ पዐLjᆯᇀሗዊतᇔዦพ گ ૭ጱ ۉ ᄞट Ljӻዺই گ ᆯᇀ ૭ጱ ݣ พ ᆅ ڪ ԝৠ ݣ พ ڦ ᆖၚLj ଉ พ ཚଉ ݥ ઓవă ഐ ڦ ӷ ڞ ຕ ٱ ဃ ୲ă ਦኄᅃ Ljऊ ൽକჹ ڦ ଉ ײ Ⴞ੦ ă ႎ ۉ ᄞट RadLo ဣଚ ڦ ક Lj ᆩକऊ ໜጣӷ ڞ ᄽ ڛ ጎ ހ ጎ ڦ ቛLj๑ᆩ ڦ ۉ ጆ૧ ڦ ଉ रຍLjᆩᇀӷ ހ ڞ ጎ ᇶ ᅝă ᇶཫ ᅝՎ ڥ නᅮ Փăऊ ೞ ጲว ڦ ༬ᆫ Lj Đ ᅙঢ়ཚࡗᅃၵዷᄲ ݴڦ Ԉฆਸ๔ ଉ ႎ႙ ᇶ ᅝ ࠃߛ ڪ ك प ۉڦ ᄞटDŽ>99.99%Dž Lj گ ૭ጱ ۉ ᄞट Ljཞ ᄺᅙሞ OEM ยԢ ฆ Ԉઔ گ തDŽPbDž Ă گ ဍDŽSnDžᅜत گ ཟDŽCuDž ڪ ă କණኤ ײ Ⴞăđऊ ۉ ጱ ଙ ᄽ ࠃ ܠ ዖ ૭ጱ ݣ พ ڪ पLjԈઔ ݛ ခ ጺ ਖ਼ ຯ DŽChris LeeDž ๖LjĐႎ ࠕ ᇀ ڦ ဍᄞटӜ ă ტ इ ڥ ණኤ ᆩ ڦ ፁਜ਼ ڦ Ⴔ ᇡକ ܠ ᇀऊ RadLo گ ૭ጱ ଙ ڦ ႑ တLj൩ ݡ ᄲLjӻዺ ਦ ௬ଣ ڦ रຍ వ ăđ ӷ ހ ڞ ጎ ଙዐ ڦ ૭ጱ ݣ พ ᆅഐ ڇئ ᇮዐ گأ ૭ጱ ଙ Ljऊ ڦ ӷ ڞ ሰ ڦ ຕ ٱ ဃժሰ ٱ ဃLjፌዕ ڞ ዂ ऐĂ ӱă ޜ ခഗĂ Ԉઔ ۉ ጱ Ă ۉ ጱ ბ ᅜत ڦ ଙăཞ ᆴဥऐᅜत ዕ ยԢ ڦ ሏ ࠤቱăໜጣӷ ڞ ڦ Ljऊ ଙᄽခԈઔᅃဣଚ ݘ Lj૩ස փ ३ ᅜतࠀ Ⴔ൱ ڦ փ ሺ Lj ٱ ܔ ဃ ߌ ڦ ഘ ק ओӜ DŽPVDDž ፇĂࡍ ඤ ۉ ౾ᅜतඤ փ ߛă କᆶ ਦኄ Ljӷ ހ ڞ ጎ ଙ ڦ ۉ ጱ ଙ ڪڪ ă ย ටᇵႴᄲ ዺ گ ૭ጱ ݣ พ ڦ ଙLj૩සऊ ܠ ႑ တ ई ጧ კ ऊ پ Lj ൩ ݡ www. honeywell-pmt.com/sm/em/ă RadLo ဣଚ ă 43

46 ߢ ᆅ Ad Index ৮ ᾞNewProducts Advertiser ߢฆ! Air Products Asia Inc. Chem-Trend (Shanghai) Trading Co., Ltd.! ᄻஓ airproducts.com/advancedthinking 㛥ཟ (р ) 䍮᱉ᴿ䲆 ޢ ਮ Computex Taipei ཐ ཐ ᐛ㛗Գᴿ䲆 ޢ ਮ Dr. Johannes Heidenhain (China) Co., Ltd. 㓜㘦 ᯥ ᗭ ঐ༡ (ѣള) ᴿ䲆 ޢ ਮ (9 *URXS (XURSH $VLD 3DFL F *PE+ ZZZ (9*URXS FRP %& 24 儎δѣളεᣋ䍺ᴿ䲆 ޢ ਮ H.K. Wentworth Group 㤧 ᯥ ( Ӣ) 〇ᢶᴿ䲆 ޢ ਮ ZZZ HOHFWUROXEH FQ Kunshan Scienscope Technologies Co., Ltd. ኧ ᙓ ݿ 〇ᢶᴿ䲆 ޢ ਮ 䈰 -Asymtek ѣള 3 Henkel (China) Investment Co., Ltd. Nordson-Asymtek China 2 Do-Fluoride Chemicals Co., Ltd. Hanmi Semiconductor O\PSXV &KLQD &R /WG 6KDQJKDL %UDQFK ᐪᯥ (ѣള) ᴿ䲆 ޢ ਮ р ޢ ਮ Precision Polymer Engineering cn.prepol.com/genius Shanghai MacroArt Technologies Co., Ltd. ᢶ㗄ᇔѐᴿ䲆 ޢ ਮ SNEC ള䱻འ䱩㜳ӝѐ ݿ Յᐛぁ(р )ኋ㿾Ր 䇰එ ZZZ VQHF RUJ FQ IFC,%& ฉথ ڼ 23ᄻ ਏᆶഽ ڦ ბ ڸ ܔ ᇀ D ࠓ ᅜሞ ܔ ᇶ ܔ ୲ईጺ ᆛᆶ Ԩฉ ၄߀ ă TB/D ଙ ዘᄲ ڦ Ljኄᄣ ԍ ݴ Ljժ ᅙঢ়ሞब ᄽহ Dow Corning ࠅ ኄዖ० ڦڇ ມ ኤ ሞໜࢫ ᇶ३ԋ ܠڦ ଶ ยԢ ሰฆ ڦ ཚĂฆᆩ ڦ TB/D ݛ ӄ ڦ ၄Ljᆯᇀ փ โ ᅝዐփ ݴ ቯă ᇶ ݴ ᅝยԢ ฉ ڟڥ କᄓኤă ምႴᄲ༬ ڦ ጆᆩยԢઠ ܔ ݣ ቕ ଙ օ ᇶ ڦ ᇨ ت ࢫ ت օየLj๑ ڥ ฉ ᅝ ॽ३ԋࢫ ڦ ഗॲ የස ǖ ሞᅃ ᇶฉ ሡ ᇶҾ ݣ ሞ ॐ ڦ ኧ ఈ ټ ฉLj ݛ ӄ ࠕཞ ၄ฉ ኄၵ߀ Ⴀቕথ LjӀቷฉ ཉॲย ܔ ժᆩኈ ဌಎॽ ሞย ڦ ت Ljኮࢫॽ ᅈ ዃLjምॽডࢩ ڦ ሜ ᇶ Ԋ ă ଡ໗Ă ໗Ăᆶऐමवᅜत ᅺ ሞԋഗॲ ᇶฉ ޑ ᆶ මႠ ڦ ڦ ႎरຍᅙ၂๖ ଆ ڦ ሞ TSV ሰዐႴᆩ ڦڟ ბමᅂ ݣ Ljժ ኧ ఈ ت ټ ᇀ Ⴀ Ljฯ ሞ ٳߛ ࢩޑ ዐLjሞ ᆶኄၵ ბමᅂዐଣ ԓ ጒༀLj ᅜ Ⴔ๑ᆩਏᆶ Ⴀ 110 ڦ टࢩఈ ᄺ ਏᆶ گ ଙबࢭ ۼ ᆶ ዊଉ ई ڦ ᆶऐࡂ ኬ أ वई ዖ ڦ ഽ ڦ TTVă रຍ ڦ Ⴀ ᅙঢ়ሞฆᆩ ሺ ڦ ၄ၡDŽ 4Džă ໗ăԈઔഗॲ ᇶ ဢሞ ڦ ኝ ݴ ٷ ଉ ยԢฉ ڟڥ କᄓኤLj ࡗ ײ LjሀኻႴփ ڟ ݴ ዓă ܔ ᇀଡ໗Ă ໗Ăᆶऐමवᅜत TB/D ݛ ӄ ࠕԥ ںݘ ᆩ 44 ኄၜᆯቕথ ݣ ፇ ሞ TSV ሰዐႴᆩ ڦڟ ბම ڦ ᅃ Ⴀ ۯ ᅺ Ljሞॽ ३ԋࢫ ڦ ഗॲ ᇶ ሜ ᇶ ฉ ణՔă ஃ ᅂ ۼ ਏᆶᆫႯ ڦ ბ Ⴀăଷ Lj ݴ ᅜतሞ ဢ أ ഗॲ ໜጣ TB/D ଙ ยԢ ڦ փ ߀ ܔ ᇀሞ ᇶ ࢫ 3D TSV ᅝঢ় ᇶ ฉ ዖ ᇆ ײࡗڦ ዐLjփ ຄLjኄၜरຍԨวत ሞ 3D- ᆩ 300ņኄᅃডߛ Lj ܔ ഗॲ ᇶଆ ୲ሰ փଆ ڦ ᆖ IC TSV ᅝण ฉ ڦݘ ᆌᆩ ଙ ࢫ ڦ ᇶ ܔ ᄺ ۼ ၚăฉ௬ ڦڟ ኄዖႎ႙ມ TB/ ժփ ሞ كڇ ᅝ ԨĂഗॲଆ ਏᆶଆ ඤბ Ⴀă

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