[1~5] sp 2 C sp 3 C [17] (ta-c) sp 2 C sp 3 C 250~1700nm 380~1700nm XPS ta-c ta-c sp 2 -πc sp 3 -σc sp 2 C 2 sp 3 C 2.1 FCVA ta-c sp 2 C sp 3 C ta-c (

Size: px

Start display at page:

Download "[1~5] sp 2 C sp 3 C [17] (ta-c) sp 2 C sp 3 C 250~1700nm 380~1700nm XPS ta-c ta-c sp 2 -πc sp 3 -σc sp 2 C 2 sp 3 C 2.1 FCVA ta-c sp 2 C sp 3 C ta-c ("

针伏
5 years ago
Views:

1 32 10 Vol.32No ACTAOPTICASINICA October2012 ( ) (FCVA) (ta-c) (SE) ta- C sp 3 C sp 2 C X (XPS) -100V 33.9nm; sp 2 C sp 3 C ta-c sp 2 C sp 3 C sp 2 C 250~1700nm ; ; ; O A doi: /aos DeterminationofChemicalBondofTetrahedralAmorphous CarbonFilmsbyElipsometryApproach LiXiaowei ZhouYi SunLili WangAiying (Ningbo Key Laboratoryof MarineProtection MaterialsNingboInstituteof MaterialTechnologyand Engineering ChineseAcademyofSciencesNingboZhejiang315201China) Abstract Tetrahedralamorphouscarbon(ta-C)filmsunderdiferentsubstratenegativebiasarepreparedbyahome developedfilteredcathodicvacuumarc(fcva)technologywithdoublebendshape.thefilmthicknessismeasured byacombinedspectrophotometryandspectroscopicelipsometry (SE)approach;thechemicalbondsincludingsp 2 C andsp 3 Caregainedbythefitedelipsometrymethod.Furthermoretheaccuracyofelipsometryresultsisevaluated bycomparingwiththoseofx-rayphotoelectronspectroscopy(xps)andramanspectra.theresultsindicatethatthe minimumthicknessofta-cfilmof33.9nmisobtainedwhenthebiasvoltageis -100V;withtheincreaseofbias voltagethe optical gaps and the content ofsp 3 C atomic bond decrease while the sp 2 C contentincreases correspondingly.bycomparison withtheresultsofxpsand Ramanspectraitisfoundthat whentheoptical constantsofsp 2 C modelarerepresentedbytheglassycarbonandthefitingwavelengthrangesarechosenfrom250 to1700nmthebestfitingresultofatomicbondsofta-cfilmscanbededucedbytheelipsometry method. Thereforeitcouldbesaidthattheeliposometrymethodisaquitepromisingmethodtocharacterizetheatomicbonds ofta-cfilmsincludingsp 2 Candsp 3 Casanewnondestructivefastquantitativeandeasyway. Keywords thinfilms;chemicalbond;elipsometryapproach;filteredcathodicvacuumarc;tetrahedralamorphous carbon OCIScodes ; ; : ; : : (Y ) (2011B1016) (2010D A0203) : (1982 ) lixw@nimte.ac.cn : (1975 ) aywang@nimte.ac.cn( )

2 [1~5] sp 2 C sp 3 C [17] (ta-c) sp 2 C sp 3 C 250~1700nm 380~1700nm XPS ta-c ta-c sp 2 -πc sp 3 -σc sp 2 C 2 sp 3 C 2.1 FCVA ta-c sp 2 C sp 3 C ta-c ( 99.99%) ta-c 1mm (525±5) μ m sp 2 C sp 3 C p (100) : sp 3 /sp 2 [6] X (XPS) [7] (EELS) [8] 10~15 min (NMR) [9] ; Pa sp 2 C Ar(0 1 sp 3 C π 20mL/min) -400V 4 min; σ sp 2 C V sp 3 C 50~100 Ar 1 ml/min sp 3 C Pa 10min 60A EELS sp 2 C sp 3 C 20V A ta-c 2.2 NMR XPS ta-c C1s [16] sp 2 C sp 3 C PerkinElmer Lambda950 - (VIS-NIR) ta-c / / sp 2 C sp 3 C ta-c 250~1700nm (SE) 1nm [1011] sp 3 C sp 2 C J.A.Woolam M- 2000DI (VariableAngle [12~15] SpectroscopicElipsometry) Ψ Δ sp 2 C sp 3 C sp 2 C ~1700nm [16] (FCVA) ta-c WVASE

3 : 2.3 ta-c ta-c fsp2+ fsp3+fvoid=1; sp 2 C fsp2 sp 3 C fsp3 fvoid; 250~1700nm 380~1700nm; (EMA) Bruggeman ta-c sp 3 /sp 2 AXIS 1 ta-c UTLTRADLD[Al(mono)Kα (160eV)Ar + Fig.1 Thicknessofta-Cfilmsatdiferent 5min] X JY biasvoltages LabRam HR800 ta-c k XPS : ta-c 532.2nm s sp 3 C sp 2 C 3 sp 3 /sp 2 ta-c ta-c sp 2 C sp 2 [18] ; -100 V sp 2 C ta-c 33.9nm 3.4nm/min ta-c p 3.2 ta-c Tauc α 2 55 ta-c E opt WVASE32 αhv =A(hv-E opt ) 2 (1) (αhv) 1/2 =A(hv-E opt ) (2) ta-c hv A 3 ta-c (αhv) 1/2 hv n 2.37~2.72 ; ta-c E opt ta-c (a)ψ;(b)δ Fig.2 Elipsometryspectraofta-Cfilmswiththeincidentangleof55 atdiferentbiasvoltages.(a)ψ;(b)δ

4 3 ta-c n k (a)n;(b)k Fig.3 Refractionindexnandextinctioncoeficientkofta-Cfilmsatdiferentbiasvoltages.(a)n;(b)k ta-c sp 3 C sp 2 C sp 2 C 250~1700nm 380~1700nm 1 1 (MSE) 10 ;sp 3 C ta-c sp 2 C 250~ 1700nm sp 2 C 0-150V ta-c sp 3 C 62.6% 28.6% 4 ta-c sp 2 C Fig.4 Opticalbandgapofta-Cfilmsatdiferent sp 3 /sp 2 sp 3 C biasvoltages sp 2 C V ta-c sp 2 C 1.42eV 0.88eV sp 3 C sp 2 C 0-150V sp 3 C 3.3 sp 3 /sp 2 26% 44.1% ta-c sp 2 C sp 2 C 1 sp 3 C sp 2 C Table1 Contentsofsp 3 Candsp 2 Cinta-Cfilmsbyelipsometryapproach Wavelength/nm 250~1700 Wavelength/nm 380~1700 Substratebias/V Glasscarbonforsp 2 C Graphiteforsp 2 C sp 3 /sp 2 sp 3 /% MSE sp 3 /sp 2 sp 3 /% MSE Substratebias/V Glasscarbonforsp 2 C Graphiteforsp 2 C sp 3 /sp 2 sp 3 /% MSE sp 3 /sp 2 sp 3 /% MSE

5 : sp 2 C C-O ( ) 380~1700nm sp 3 C 3.4 XPS sp 3 C sp 2 C ta-c sp 3 /sp 2 sp 3 sp 2 XPS XPS- sp 3 C 2 PEAK41 ta-c XPS-C1s Shirley ; sp 3 C 64.6% 31.2% sp 2 C sp 3 C 0.8eV [19] 5 sp 2 C sp 3 C sp 2 C sp 3 C sp 2 C sp 3 C ta-c 0-150Vta-C 5 ta-c XPS-C1s Fig.5 XPS-C1sspectraofta-Cfilmsatdiferentsubstratenegtivebiasvoltages 2 ta-c XPS Table2 XPSfitingresultsofta-Cfilmsatdiferentsubstratenegtivebiasvoltages Substratebias/V sp 2 Cpeakposition/eV sp 3 Cpeakposition/eV C-Opeakposition/eV sp 3 /sp 2 sp 3 /% ta-c sp 3 /sp 2 π G [20] π [2122] ta-c 6 D sp 3 / 900~1000cm -1 sp 2 fityk 1200~1700cm cm -1 sp cm -1 D 1558cm -1 G I d /I g G

6 Vta-C I d /I g G cm cm -1 ta-c sp 3 C XPS ta-c 6 ta-c ta-c Fig.6 Ramanspectraofta-Cfilmsatdiferentsubstrate ta-c negtivebiasvoltages sp 3 C sp 2 C XPS -100V 33.9nm 3.4nm/min; sp 2 C ; 0 sp 3 C 63% 7 Id/I g G Fig.7 IntensityratioId/I gandgpeakposition oframantest sp 3 C sp 2 C XPS ( 7 8 ) sp 3 C XPS 1J.BrandR.GadowA.Kilinger.Applicationofdiamond-like sp 3 C carboncoatingsonsteeltoolsintheproductionofprecisionglass sp 2 components [J].Surf. Coat. Technol : C 213~ ~1700nm 2P.R.GogliaJ.BerkowitzJ.Hoehnetal..Diamond-like XPS sp 2 C 4 FCVA 8 XPS ta-c sp 3 Fig.8 Resultscomparisonofsp 3 contentobtainedby elipsometryseandxpsapproaches XPS : sp 3 C XPS sp 2 C 250~1700nm carbonapplicationsinhighdensityharddiscrecordingheads[j]. Diamond Relat.Mater (2):271~277 3 W.TilmannE.VogliF.Hofmann.Wear-resistantandlow- friction diamond-like-carbon (DLC)-layers for industrial tribologicalapplicationunderhumidconditions[j].surf.coat. Technol (6-7):1040~1045 4PanYongqiangHangLingxiaLiangHaifengetal..Ultrabroad bandandhardinfraredantireflectioncoatingson ZnSefor2~ 16μm [J].Acta Optica Sinica201030(4):1201~1204

7 :. 2~16μm [J]. 光学学报 (4):1201~1204 5LuoLeZhangJunfangFangXiaodongetal..Influenceofthe laserpulsedenergy uponthediamond-likecarbonfilm andits infrared property [J].Chinese J.Lasers (12): 3121~3126 [J]. 中国激光 (12):3121~3126 6N.Paik.Ramanand XPSstudiesofDLCfilmspreparedbya magnetronsputer-typenegativeionsource [J].Surf.Coat. Technol (7):2170~2174 7G. Speranza N. Laidani. Measurement of the relative abundance of sp 2 and sp 3 hybridised atoms in carbon-based materialsby XPS:acriticalapproach.Part Ⅱ [J].Diamond Relat.Mater (3):451~458 8D.Galvan Y. T. PeiJ. Th. M. De Hosson et al.. Determinationofthesp 3 C contentofa-cfilmsthrough EELS analysisinthetem [J].Surf.Coat.Technol (1-4):739~743 9A.Dorner-ReiselL.KüblerG.Irmeretal..Characterisation ofnitrogenmodifieddiamond-likecarbonfilmsdepositedbyradio- frequency plasma enhanced chemical vapour deposition [J]. Diamond Relat.Mater (3-7):1073~ ZhouYiWang Aiying.Determinationofopticalconstantand thicknessof diamond-like carbon films by a multiple sample method[j].acta Optica Sinica201030(8):2468~2472 [J]. 光学学报 (8):2468~ YangKunWang XiangzhaoBu Yang.Research progressof elipsometer [J].Laser & Optoelectronics Progress (3):43~49. [J]. 激光与光电子学进展 (3):43~49 12 W.S.GuoS.P.WongY.H.Yu.Spectroscopicelipsometry characterizationofdiamond-likecarbonfilmsformedbyfiltered arcdeposition [J].Nucl.Instr.& Meth.in Phys.Res.B (1-4):54~58 13J.LeeR.W.ColinsV.S.Veerasamyetal..Analysisofthe. elipsometric spectra of amorphous carbon thin films for evaluationofthesp 3 -bondedcarboncontent[j].diamond Relat. Mater.19987(7):999~ S.S.MahajanH.C.BarshiliaB.R.Mehtaetal..Onthe determinationofthesp 3 tosp 2 ratioindiamond-likecarbonthin films[j].thin Solid Films (1-2):250~ MoDangLiFangChenDihuetal..Spectroscopicelipsometry studyofthechemicalbondsofcarbonfilms [J].J.Functional Materials200334(5):582~584. [J]. 功能材料 (5):582~584 16ZhouYiWuGuosongDaiWeietal..Accuratedetermination ofopticalconstantsandthicknessofabsorbingthinfilmsbya combinedelipsometryandspectrophotometryapproach[j].acta Physica Sinica201059(4):2356~2363. [J]. 物理学报 (4):2356~ E. T. Arakawa M. W. Wiliams T.Inagaki. Optical propertiesofarc-evaporatedcarbonfilmsbetween0.6and3.8ev [J].J.Appl.Phys (7):3176~ J.Robertson.Electronicandatomicstructureofdiamond-like carbon [J].Semicond.Sci.Technol (3):S12~S19 19J.DíazG.PaoliceliS.Ferreretal..Separationofthesp 3 and sp 2 componentsinthec1sphotoemissionspectraofamorphous carbonfilms[j].phys.rev.b199654(11):8064~ ZhuJiaqiHanJiecaiGao Weietal..Ramancharacteristicsand intrinsic stress of tetrahedral amorphous carbon films with diferentfilm thickness [J].New Carbon Materials (1):59~63. [J]. 新型碳材料 (1):59~63 21 M.A.Tamor W.C. Vassel.Raman fingerprinting of amorphouscarbonfilms [J].J.Appl.Phys (6): 3823~ J.SchwanS.UlrichV.Batorietal..Ramanspectroscopyon amorphouscarbonfilms [J].J.Appl.Phys (1): 440~447 : 韩峰

目录第一部分序厦门大学嘉庚学院简介... 3 第二部分教学管理厦门大学嘉庚学院教师工作规范... 5 厦门大学嘉庚学院课程班管理说明... 15 厦门大学嘉庚学院本科生毕业

目录第一部分序厦门大学嘉庚学院简介... 3 第二部分教学管理厦门大学嘉庚学院教师工作规范... 5 厦门大学嘉庚学院课程班管理说明... 15 厦门大学嘉庚学院本科生毕业教师手册厦门大学嘉庚学院教务部二〇一一年编目录第一部分序厦门大学嘉庚学院简介... 3 第二部分教学管理厦门大学嘉庚学院教师工作规范... 5 厦门大学嘉庚学院课程班管理说明... 15 厦门大学嘉庚学院本科生毕业论文 ( 设计