smic presentation for VOC abatement system

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骐缝宓
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1 IPA/Acetone/PGME/PGMEA Rotor type VOC abatement system Organic Exhaust Control Techniques in Wafer & Monitor Fab Application 1

2 Volatile Organic Compounds VOCs kg/hr =E-Eo kg/hr = E-Eo /E 100% kg/hr kg/hr ( ) 2

3 (LED) (Physical Vapor Deposition) (Chemical Vapor Deposition) (Photolithography) (Etching) Maybe: 80% 90% 3

4 / (FDB) / (Concentrator) (TO) (Recuperative TO) (CTO) (Regenerative TO;RTO) Ex.: + TO or RTO (Corona Destruction) (Electron Beam Destruction) (Plasma Destruction)

5 CVD Local scrubber Dry scrubber Plasma POU (8D/2D or 1.5D/ 0.5D) Stripper Pre-filter CO 2 +H 2 O POU Demister 5

6 Rotor Type Concentrator + Oxidization 6

7 System flowchart hot gas

8 System flowchart In Situ. A B B A 8

9 Rotor Type Concentrator + Oxidization UZC 250 V.0 zeolite honeycomb type concentrator 9

10 Rotor Type Concentrator + Oxidization Seibu Giken 10

11 Rotor Type Concentrator + Oxidization Seibu Giken 11

12 Rotor Type Concentrator + Oxidization Process Zone: = for adsorption Desorption Zone: = for regeneration Cooling Zone: = for rotor cooling for purge(seperation) for heat recovery Seibu Giken 12

13 Choices of Adsorption Media Match the adsorbent media to the emissions in the process Zeolite vrs. Carbon Complimentary Rather Than Competing Technologies Structural Differences Applications Differ Adsorption Characteristics Differ 13

14 Choices of Adsorption Media UZCR: Hydrophobic zeolite is impregnated into calcined ceramic honeycomb substrate with an inorganic binder and recalcined under high temperature to tightly combine the zeolite with the substrate. Various kinds of VOCs are efficiently purified and concentrated.the most suitable zeolite or mixture is selected in accordance with the system conditions. (UZCR-I,II,III,IV) Incombustibility:nonflammable,Heat resistance:500 Desorption temperature:150~220 KCCR: Activated carbon powder is impregnated into calcined ceramic honeycomb substrate with an inorganic binder and recalcined to combine the power with the substrate. Incombustibility:nonflammable,Heat resistance:200 Desorption temperature120~200 KZCR: Activated carbon powder and zeolite are impregnated,as a mixture or separately,into calcined ceramic honeycomb substrate with an inorganic binder and recalcined to combine the carbon power and zeolite with the substrate. Incombustibility:nonflammable,Heat resistance:200 Desorption temperature120~

15 Choices of Adsorption Media Activated Carbon Hydrophobic Zeolite Combinations of Both Zeolite vrs. Carbon Complimentary Rather Than Competing Technologies Structural Differences Applications Differ Adsorption Characteristics Differ 15

16 Choices of Adsorption Media Activated Carbon Adsorption Media Advantages: Light Weight Wide Pore Size Distribution Applicable to a multitude of VOCs Low Desorption Temperature Disadvantages: Hygroscopic - Requires Dehumidification Impurities May Catalyze Chemical Reactions GAC Pre-filter Often Required for High Boilers Poor Removal Efficiency for Low Boilers 16

17 Choices of Adsorption Media Hydrophobic Zeolite Adsorption Media Advantages: Reduced amount of humidity control may be possible for some applications Guard bed upstream of zeolite may not be needed in some applications Does not promote chemical reactions Non-flammable Disadvantages: Weight Higher desorption temperatures are required F Vs. 250 F for AC Narrow pore size distribution makes it less flexible adsorbent for wide range of VOC 17

18 Choices of Adsorption Media Comparison of Adsorption Media Activated Carbon Zeolite 1. Performance (high BP) high high 2. Performance (low BP) medium high 3. Effect of humidity medium low. Cost low low/medium 5. Operating Cost low low ( P and Desorb. Temp.) 18

19 Choices of Adsorption Media Typical applications of the concentrator and VOCs treated Industry Facilities Treated VOCs Automobile Steel and structure manufacturing Steel furniture Printing Sticky tape Magnetic tape Chemicals Synthetic resin adhesive Semi-conductor Painting booth Painting booth,oven Dryer Coating process Cleaning unit Oil refinery,reactors Plastics,Plywood Manufacturing process Cleaning unit Toluene,Xylene,Esters,Alcohols -ditto -ditto Ketones (MEK,Cyclohexanone,Methylisob utylketones,etc) Aromatic hydrocarbons, Orginc acids,aldehydes,alcohols Styrene,Aldehydes,Esters Alcohols,Ketones,Amines 19

20 Choices of Adsorption Media VOC CONCENTRATOR GROUP NAME UZCR KCCR KZCR I II III IV V Alcohols Methanol Ethanol Propanol IPA Ketones Acetone MEK 3 MIBK Cyclohexanone 5 5 Ethers P.G.M.E.A 5 5 Aromatic hydrocarbons Benzene Toluene Conc. ratio/removal efficiency 5: 10 times / 98% & over : 5 to 10 times / 98% & over 3: 5 to 10 times / 98% & over 2: 3 to 5 times / 98% & over 1: 3 to 5 times / less than 90% Xylene Stylene Phenol 3 3 Ethyl benzene Aliphatic hydrocarbons Cyclo hexane

21 Rotor Introduction About VOC concentrator: VOC concentrator can effectively purify and concentrate VOCs (Volatile Organic Compounds) being contained in the exhausted stream from industrial factories. By being combined with incinerator or solvent recovery equipment, both initial and operating costs of the entire VOC abatement system can be drastically diminished. Function of the VOC concentrator *Purification The laden VOC(s) in the exhaust stream is purified by zeolite or other adsorbent while passing through the rotor and the purified air stream is vented into the atmosphere. *Concentration The laden VOC(s) in the exhaust air stream is adsorbed in the process zone and desorbed in the desorption zone by heated desorption air stream with much less air volume than that of process air stream. The concentration of VOC is concentrated nearly equal to the air volume ratio(5~15) of process and desorption (QP/QD). Applications of the concentrator *Painting booth (Automobile, Airplane, Furniture,... etc.) *Printing *Semi-conductor(DRAM/LCD/TFT/...etc) 21

22 Rotor Introduction Adsorption = F (Temp., RH, VOC Type, Quantity, Flow Rate) Adsorption α (< 100 F) α (< 60% Carbon/90% Zeolite) α (< 1000 ppmas THC ) α (Maximum For Each Model)? Adsorption VOC TYPE EXPERIENCE OR EXPERIMENTS ARE NECESSARY TO PREDICT AND/OR GUARANTEE EFFICIENCY! 22

23 Rotor performance 23

24 Rotor performance 2

25 Rotor performance 25

26 Rotor performance 26

27 Rotor performance 27

28 Rotor performance 28

29 Rotor performance Specification of the honeycomb zeolite concentrator. Diameter(mm) 320 Height (mm) Bulk Density(kg/m 3 ) Zone Area Ratio (Process/Regeneration/Cooling) Channel Shape Channel Size(mm mm mm) Cell Per Square Inch(cpsi) BET Surface Area(m 2 /g) Mass Fraction of Adsorbent e in Matrix (%) Adsorbent Type Si/Al Ratio of Adsorbent Pore volume of Adsorbent (cc/g) :1:1 Parabolic honeycomb 3.0(pitch) 1.6(height) 0.2 (thickness)

30 Rotor performance Following Slides data are published on AWMA Journal 30

31 Rotor performance 31

32 Rotor performance 32

33 Rotor performance Effect of temperature on the removal efficiency of IPA Average removal efficiency(%) Inlet temperature( 0 C) 33

34 Rotor performance Effect of humidity ratio (g water/kg air) on the removal efficiencies of IPA Average removal efficiency(%) Removal efficiency of IPA Removal efficiency of Acetone Overall efficiency of VOCs Moisture removal per weight of zeolite concentrator(g/kg) Moisture removal per weight of zeolite concentrator(g/kg) Humidity ratio in inlet flow(g/kg) 3

35 100 Rotor performance Removal efficiency of individual measuring point(%) Regen. Cool n:rotational speed n=2.2 rph n=3.3 rph n=. rph n=6.1 rph Process Dimensionless angle(τ) 35

36 Rotor performance Relationship between rotation speed and VOCS removal efficiencies at an inlet concentration of 250 ppmv Average removal efficiency(%) regeneration temperature: 180 o C concentration ratio: 13 times humidity ratio: 11g/kg process inlet temperature: 25 o C Acetone(30%) IPA(35%) PGME(20%) PGMEA(15%) Overall efficiency Rotation speed(rph)

37 Rotor performance Relationship between rotation speed and VOCS removal efficiencies at an inlet concentration of 100 ppmv Average removal efficiency(%) regeneration temperature: 180 o C concentration ratio: 13 times relative humidity of inlet flow: 11g/kg process inlet temperature: 25 o C Acetone(30%) IPA(35%) PGME(20%) PGMEA(15%) Overall efficiency Rotation speed(rph) 37

38 Rotor performance Effect of the concentration ratio (f) on the removal efficiency of IPA. 100 Removal efficiency of individual measuring point(%) f:concentration ratio f=6.5 times f=13 times f=19.5 times 0 Regen. Cool Process Dimensionless angle(τ) 38

39 Rotor performance The adsorption rates of the four VOCS species on the zeolite concentrator followed the order of PGMEA > PGME> IPA> acetone. This sequence was mainly y due to their relative boiling points. Notably, unless sufficient heat energy is supplied, the VOCS with high boiling points, including PGME and PGMEA, may not be desorbed d effectively downstream in the regeneration zone. If VOCS with high boiling points cannot be well desorbed, as days pass, they become saturated and form mists of high viscosity, which occupy the adsorption sites. This study also determined that the inlet relative humidity and temperature of the adsorption process affect the removal efficiency of VOCS, of which the relative humidity has a particularly strong effect. 39

40 Discussion 0

Building Technology Experience Center concept air conditioning concept heat pump special energy-saving techniques in hydraulics Concrete core conditio

Building Technology Experience Center concept air conditioning concept heat pump special energy-saving techniques in hydraulics Concrete core conditioning Initial situation Passive House Technology Experience