國立中山大學學位論文典藏.PDF

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1 AlGaN/GaN Transport Studies of Two-Dimensional Electron Gas in AlGaN/GaN Quantum Well at Low Temperature and High Magnetic Field

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10 ω * c = eb/ m θ Bcosθ 3

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13 τ ω c hω c k B T δρ = T, B xx 2π E i A i( ) cos( + φi) hω i ρ ( ω τ ) i i i i i A T, B) = exp( ) i i ( 2 2 [1 + ( ωiτ i) ] 2 π ω τ i i ξ sinh( ξ i ξ 2π 2 * = k T / hω ω = eb m i B τ i ρ i φ i i i' th i i ) i / i 6

14 k B h = h/ 2π h m i i i k, = 0 x k y E δρ i xx = E F E i πh n = m 2 i * i nih 1 = A i ( T, B) cos(2π + φi ) 2e B i ω i hn i f = i 2e m i = 0, 1 ni i E10 = E1 E 0 ( k x = 0, k y = 0) 7

15 (B) R xy R xy 2 = h / ν n e = νeb / h eb / h ( B) e ν ν R R xx xx 8

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18 1 e H + 2m c 2 = ( p A) E h k z ( n + ) h c + 2 2m = ω ω = c * m eb 11

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64 57 V I =

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68 6 I = V 61

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70 6 I = V 63

71 6 6 II= = V 64

72 600 DCSdH Rxx(Ohm) B(T) (a) 600 AACSdH Rxx(Ohm) (b) B(T) 65

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80 n H µ H 73

81 nh µ H 20 nm Si-doped Al x Ga 1-x N 10 nm Al x Ga 1-x N spacer 1~2 µm GaN Al 2 O 3 substrate 74

82 75 θ cosθ B H R er H n 1 = n e

83 Bcosθ f 1 f 2 m * = 0.215m0 76

84 E1 E 2 f f2 = f 1 f f beat 2 n1 n

85 f hn / e = f = hn / e n n 2 E E = 2πh ( n n ) / m * E E 78

86 Themt1G1 degree=0 LED=10440 s Rxx (arb.unit) B (T) Themt1H1 degree=15 LED=10440 s Rxx (arb.unit) B (T) Themt1H3 degree=30 LED=10440 s Rxx (arb.unit) B (T) 79

87 Themt1H4 degree=45 LED=10440 s Rxx (arb.unit) B (T) Themt1H7 degree=60 LED=10440 s Rxx (arb.unit) B (T) 210 Themt1H8 degree=75 LED=10440 s Rxx (arb.unit) B (T) 80

88 1.0 TuHemt1C1 BK-X 2 degree=0 Led=0s 0.8 f 1 = T A 1 = SdH amplitude (arb. unit) f 2 = T A 2 = SdH frequency (T) 1.0 TuHemt1D1 BK-X 2 degree=0 Led=240s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 5 TuHemt1E2 BK-X 2 degree=0 Led=1440s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 81

89 1.0 TuHemt1F1 BK-X 2 degree=0 Led=3240s 0.8 f 1 = T A 1 = SdH amplitude (arb. unit) f 2 = T A 2 = SdH frequency (T) 1.0 TuHemt1G1 BK-X 2 degree=0 Led=10440s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 82

90 n (10 13 cm -2 ) LED (sec) 83

91 HEMT1A1 BK-X 2 angle=0 Led=0 s SdH amplitude (arb. unit) f 1 = T A 1 = SdH frequency (T) HEMT1B1 BK-X 2 angle=0 Led=180 s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 84

92 HEMT1C1 BK-X 2 angle=0 Led=780 s 3.0 SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) HEMT1D1 BK-X 2 angle=0 Led=1380 s 3.0 SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 85

93 n (10 13 cm -2 ) LED (sec) 86

94 HEMT64G1 angle=0 LED=7980s/10mA s/50mA 500 Rxx (arb.unit) B (T) HEMT64H1 angle=15 LED=7980s/10mA s/50mA 500 Rxx (arb.unit) B (T) HEMT64H2 angle=30 LED=7980s/10mA s/50mA 500 Rxx (arb.unit) B (T) 87

95 HEMT64H3 angle=45 LED=7980s/10mA s/50mA Rxx (arb.unit) B (T) 550 HEMT64H4 angle=60 LED=7980s/10mA s/50mA 500 Rxx (arb.unit) B (T) 550 HEMT64H6 angle=75 LED=7980s/10mA s/50mA 500 Rxx (arb.unit) B (T) 88

96 SdH amplitude (arb. unit) HEMT62A1 BK-X 2 angle=0 Led=0 s f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 2.5 HEMT62B1 BK-X 2 angle=0 Led=180 s SdH amplitude (arb. unit) f 2 = T A 2 =1.610 f 1 = T A 1 = SdH frequency (T) 2.5 HEMT62C1 BK-X 2 angle=0 Led=780 s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 89

97 HEMT62D1 BK-X 2 angle=0 Led=2580 s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) HEMT62E1 BK-X 2 angle=0 Led=7980 s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) HEMT62F1 BK-X 2 angle=0 Led=13380 s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 90

98 n (10 13 cm -2 ) LED (sec) 91

99 200 TuHEM1C1 angle=0 LED=720 s Rxx (Ohm) B (T) TuHEM1C1 BK-X 2 angle=0 Led=720 s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 92

100 1300 HEMT1C1 angle=0 LED=780 s Rxx (Ohm) B (T) HEMT1C1 BK-X 2 angle=0 Led=780 s 3.0 SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 93

101 HEMT62C1 angle=0 LED=780 s 700 Rxx (Ohm) B (T) 2.5 HEMT62C1 BK-X 2 angle=0 Led=780 s SdH amplitude (arb. unit) f 2 = T A 2 = f 1 = T A 1 = SdH frequency (T) 94

102 1300 Sample H3 Al 0.25 Ga 0.75 N/GaN s R XX (arb. units) s 2580 s 780 s s s Magnetic field (T) 95

103 f 1 SdH frequency (T) Sample H3 Al 0.25 Ga 0.75 N/GaN f Illumination time (s) 96

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