ISO 9000 ISO 14000 BS 8800 OHSAS 18001
...1...6 2.1...6 2.2...12 2.3...17 2.4...24...30 3.1...30 3.2...32 3.3 Dow...37 3.4...42...45 4.1 What-if...45 4.2...47 FMEA HazOp...54 5.1...54 5.2...65...77 6.1...77 6.2...81 6.2.1...87 6.2.2...89 6.3...93 6.4...94 6.5...98 6.6...101...110 I
1.1...5 2.1...9 2.2...15 2.3 ( )...21 3.1 F&EI...39 4.1...53 5.1...60 5.2 CO P&ID...61 5.3 HazOp...69 5.4 HazOp...70 5.5...72 6.1...83 6.2...101 II
2.1...7 2.2...10 2.3...11 2.4...13 2.5...13 2.6...14 2.7 (HI)...16 2.8...17 2.9...18 2.10...18 2.11...18 2.12 ( )...20 2.13 ( )...22 2.14 ( )...23 2.15 ( )...25 2.16 ( )...27 2.17 ( )...29 3.1...34 3.2...35 3.3...36 3.4...37 3.5...43 3.6...44 3.7 PE...44 4.1 What-if...46 4.2...49 4.3...50 III
4.4 ( Hook-up )...51 5.1...54 5.2...57 5.3...62 5.4...62 5.5...63 5.6 HazOp...67 5.7 HazOp...68 5.8 HazOp...68 5.9 HazOp...68 5.10...73 6.1...78 6.2...85 6.3...86 6.4...86 6.5...86 6.6...91 6.7...91 6.8 ( )...91 6.9 ( )...92 6.10 ( )...92 6.11 SEMI S10-96...93 6.12 SEMI S10-96...94 6.13 SEMI S10-96...94 6.14...97 6.15...98 6.16 SEMI S14...99 6.17 SEMI S14...99 IV
(Occupational Health and Safety Management Systems-Specification, OHSAS 18001:1999)[1]4.3.1 : -- -- ( ) -- -- : -- -- 4.3.3 4.3.4 -- -- () -- (Lifecycle) " 1
OSHA (PSM) [2]29CFR Part1910.119(e) (Process Hazard Analysis, PHA) : -- -- -- -- -- -- -- PHA " () "".. 4.3.3 4.3.4 " (Risk-based) " 1.1.. 2
1. (1) " ERPG-3 IDLH 38(100) SEMI S2-0200 (2) (3) (Checklist) What-if (What-if brainstorming) (Failure Modes and Effects Analysis, FMEA) (Hazard and Operability Study, HazOp) (4) (Fault Tree Analysis) 2. 3
(1) (2) (Job Safety Analysis, JSA) (3) JSA (4) 4
vs. ( ).. ( ).... 1 vs....... 2 1 Checklist FMEA HazOp 2 / / Review SOP/ / 1.1 5
(Significant Risk) (Physical Models) (Effect Models) (HazOp) (FMEA) (Fault Tree Analysis) : (Risk Matrix) 2.1 50 20 1000 (Critical Few Principle) : (1) (2) (3) ( ) (4) (Frequency of Occurrence) (probability of loss) : (Severity) (Frequency) (Probability) (1) (Severity): 0246 0: ( x ) 6
2: ( ) ( x y ) 4: ( ) ( y z ) 6: ( z ) xyz (2) (Frequency of Exposure): 2.1 : 2.1 ( ) 1 1 1 2 2-3 1 2 3 4 2 3 3 2.1 A 2 2 ( )2 (3) (Probability of Loss): -101 : -1:( ) 0:( ) 1:( ) : a. (Hazardousness): b. (Difficulty): c. (Complexity) ( 0) 7
( 0~10) 1000 8 70 5~8 200 5 730 8 () 70 70 (Critical Few Principle) 20~30 80 2.1 2.2 2.3 (International Loss Control Institute, ILCI) Practical Loss Control Leadership [3] / (Likelihood/Frequency) / (Severity/Consequence) 8
2.1 9
2.2 : : : : : : : 10
2.3 : : : : 4/18/1990 : : : 4/25/1990 1. 5 2 0 7 / 2. 4 2 0 6 3. 3 1 0 4 4. 6 2 1 9 5. 5 3 1 9 C-12 C-14 6. 4 2 0 6 7. 5 2 1 8 11
2.2 (Risk Matrix) 2.4 A E 2.4 2.5 2.4 2.5 2.6 1 (Unacceptable Risk) 2 3 4 ( ) ( ) ) 2.2 2.7 ( ) 2.7 2.2 2.7HI 12
2.4 ( ) A 2000 B C ( ) ( ) 1000 2000 500 1000 D 500 E 2.5 1 2 3 4 5 2.4 2.5 2.6 2.7 13
2.6 1 2 3 4 5 A 1 1 2 3 4 B 1 2 3 4 4 C 2 3 4 4 4 D 3 4 4 4 4 E 4 4 4 4 4 1: 3 3 2: 3 3 3: 4: 14
: 2.2 15
2.7 (HI) 40 100 110 120 130 140 150 160 170 180 190 30 90 99 108 117 126 135 144 153 162 171 25 80 88 96 104 112 120 128 136 144 152 20 70 77 84 91 98 105 112 119 126 133 15 60 66 72 78 84 90 96 102 108 114 10 50 55 60 65 70 75 80 85 90 95 4-5 40 44 48 52 56 60 64 68 72 76 2-3 30 33 36 39 42 45 48 51 54 57 1 20 22 24 26 28 30 32 34 36 38 0 10 11 12 13 14 15 16 17 18 19 25 50 100 200 400 800 1600 3200 6400 12800 16
2.3 : (1) / ( ) ( ( ) ( ) ( )( ) ( ) 0 1 ( )( ) ( ) 2.8 2.9 2.10 (3)2.8 ( ) 10 ( ) 6 ( ) 3 ( ) 2 ( ) 1 ( ) 0.5 17
(4)2.9 (Quite possible): ( ) 10 1/1,000 (Possible): 2 1/10,000 (Virtually impossible): 0.5 1/100,000 (5)2.10 ( NT ) 100 ( NT ) 40 ( NT ) 15 ( NT ) 7 ( NT ) 3 1 :1. ( /3000) 0.4 2. (6) (7)2.11 400 1: 200 399 2: 70 199 3: 20 69 4: 20 5: 18
2.12 : 2.8 6 2.9 10 60 2.12 2.10 15 900 2.11 1 2.3 2.13 2.14 19
2.12 ( ) :D505 MUCK : 1. 1-1 1.MUCK 1. 1.MUCK FC5014 2. 800kg/cm 2 1000 3. kg/cm 2 5 4. 1-2 buggy 5. 1-3 D505 2.MUCK MUCK FC5014 2.PURGE 2-1 D505 MUCK 2-2 3 2 SM 2-3 MUCK MUCK PURGE 3.MUCK 4.PURGE 3-1 PURGE MUCK 3. SM MUCK purge 3-2 MUCK steam PURGE D505 4-1 MUCK MUCK 4.MUCK PURGE10 4-2 MUCK 4-3 D505 5.Buggy MUCK 20
21 06 05 04 03 02 01 /( ) CO /( ) ( )
2.13 ( ) / / 01 / W322-04-01-A01 W322-04-01-J01 W322-04-01-F01 W322-04-01-J02 W322-04-01-D01 02 / W322-04-02-D02 W322-04-02-J03 03 / W322-04-03-J04 W322-04-03-D03 W322-04-03-D01 04 / W322-04-04-J04 W322-04-04-J05 W322-04-04-B01 16 CO W322-04-04-D05 W322-04-04-J02 W322-04-04-J06 W322-04-04-C01 W322-04-04-J07 W322-04-04-J08 05 / W322-04-05-D06 / W322-04-05-J09 W322-04-05-I01 W322-04-05-J10 W322-04-05-D03 06 / W322-04-06-D07 W322-04-06-J11 W322-04-06-J12 22
2.14 ( ) (C) A B (SJP ) (A) (B) C D (D) 01 W322-04-01-A01 10 0.5 5 15 75 3 W322A-001 W322-04-01-J01 10 2 20 7 140 3 W322A-001 W322-04-01-F01 10 0.5 5 3 15 5 W322A-001 W322-04-01-J02 3 10 30 1 30 4 W322A-001 W322-04-01-D01 10 2 20 7 140 3 W322A-001 02 W322-04-02-D02 10 2 20 7 140 3 W322A-002 W322-04-02-J03 10 2 20 1 20 4 W322A-002 03 W322-04-03-J04 10 0.5 5 7 35 4 W322B-003 W322-04-03-D03 10 2 20 7 140 3 W322B-004 W322-04-03-D01 10 0.5 5 40 200 2 W322B-004 04 W322-04-04-J04 10 2 20 7 140 3 W322C-001 W322-04-04-J05 10 0.5 5 7 35 4 W322C-008 W322-04-04-B01 10 0.5 5 40 200 2 W322C-008 W322-04-04-D05 10 2 20 15 300 2 W322C-008 W322-04-04-J02 10 0.5 5 40 200 2 W322C-008 W322-04-04-J06 6 2 12 7 84 3 W322G-002 W322-04-04-C01 3 2 6 3 18 5 W322C-006 W322-04-04-J07 3 2 6 3 18 5 W322C-006 W322-04-04-J08 10 2 20 7 140 3 W322C-008 05 W322-04-05-D06 10 2 20 7 140 3 W322E-002 W322-04-05-J09 10 2 20 3 60 4 W322E-002 W322-04-05-J01 10 2 20 3 60 4 W322E-002 W322-04-05-J10 10 2 20 3 60 4 W322F-001 W322-04-05-D03 10 2 20 15 300 2 W322E-002 06 W322-04-06-D07 10 2 20 7 140 3 W322F-004 W322-04-06-J11 10 2 20 3 60 4 W322F-004 W322-04-06-J12 10 2 20 7 140 3 W322F-001 23
2.4 / 2.15 2.16 2.17 24
25 2.15 ( ) / / 4 3 2 1 4 3 2 1
26 2.15 ( )() 4 3 2 1 0 * * 48 * * 32 * * 16 * * 15 * * = 0
2.16 ( ) 88624 A*B / * / C= (A) (B) (C) (D) (R) (G) (T) (P) (H) (CL) (E) (W) (O) 4 4 4 64 1 PEA-1 2004 1 PEA-1 2001 a.100 b. 3 4 3 36 2 c. 4 2 1 8 4 27
( ) PEA-4 3 5003 a. 4 1 2 8 4 b. 4 2 2 16 3 PEA-4 4 2005 a. 3 3 1 9 4 b. 3 3 1 9 4 c. 2 3 1 6 4 28
2.17 ( ) 88.08.26 ABC PEA12004 1. 2. 1. 2. 1. 2. 3. 3. 3. 4. 2. 1. 2. 3. 1. 2. / 3. 1. 2. ( ) 4.4. 5. 6. 3. 1. 2. 3. 1. 2. / 3. 1. 2. ( ) 4.4. 5. 6.. 29
(ChecklistWhat-ifHazOp FMEAFTA) (1) (2) (3) (Dow Fire and Explosion Index, Dow F&EI) 3.1 1. (1) (2) (3) ( ) 30
(4) (5) (6) (7) 2. OSHA (PSM) (1) A. B. C. D. E. F. G. (MSDS) (2) A. (PFD) B. C. D. 31
(3) A. B. (P&ID) C. D. E. F. G. H. 3.2 (inherent hazard) (interact hazard) (1) [4] (A) A 3.1 (B) B 3.2 (C) C 3.3 (2) (A) 32
33 (B) Q>20%TQ (oxidation) (nitration) (halogenation) (organmetallics) (diazotization) (hydrogenation) (thermal decomposition) (polymerization) (sulphonation) (condensation) (LEL) (UEL) ( 25% ) 100 P 10psig(1.75atm.Abs) T>AIT P 20kg/cm 2 P 500mmHg P( ) 4( ) Q kg TQ T AIT P P 3.4
3.1 45 i.e. NOTE 45 A / ( / ) / 34
3.2 i.e. NOTE 45 45 B 35
3.3 C i.e. NOTE 45 45 ( / ) 36
3.4 1. 2. 3. 4. 20,000 25,000 >4,000 1/5 1/5 3.3Dow Dow F&EI 1964 (1994)[5]Dow F&EI Dow F&EI ( 5,000 ) (1) SBR SM (2) Dow F&EI ( ) (3) A. B. C. D. 37
E. F. (4) A. B. C. D. E. F. G. H. I. J. K. L. (5) (unit hazard factor) (damage factor) (6) (F&EI) (7) (base maximum probable property damage, Base MPPD) (8) (credit factors) (9)Base MPPD (8) MPPD 3.1 (LPG) F&EI=183.58 38
F 1 F 2 F 1 F 2 F 3 F 3 F&EI Base MPPD Actual MPPD MPDO BI 3.1 F&EI 39
A DOW LPG LPG LPG (MF 1 A B) 21 140 1. 1.00 1.00 A. ( 0.30 1.25) B. ( 0.20 0.40) C. ( 0.25 1.05) 0.5 D. ( 0.25 0.90) E. 0.35 0.35 F. ( 0.25 0.50) 221,900 0.5 (F 1 ) 2.35 2. 1.00 1.00 A. ( 0.20 0.80) B. (500 mmhg) 0.50 C. (1) 0.50 0.5 (2) 0.30 (3) 0.80 D. ( 0.25 2.00)( 2) E. ( 2) 132 Psig 188 0.52 F. ( 0.20 0.30) G. 1.03 10 6 1bsHc20 10 3 BTU/1b (1) ( 3) (2) ( 4) 1.4 (3) ( 5) H. ( 0.10 0.75) 0.2 I. ( 0.10 1.50) 0.1 J. ( 6) K. ( 0.15 1.15)( 3) L. 0.50 (F 2 ) 3.72 3. (F 1 F 2 F 3 ) 8.742 4. (F 3 MFF&EI) 183.58 40
B 1. (C 1 ) a) 0.98 0.98 f) 0.94 0.96 b) 0.99 c) d) e) 0.97 0.99 0.84 0.98 0.96 0.99 0.93 0.99 g) 0.98 0.91 0.99 h)0.91 0.98 i) 0.91 0.98 C 1 0.95 2. (C 2 ) a)0.96 0.98 c) 0.91 0.97 b) 0.96 0.98 d) 0.98 C 2 1 3. (C 3 ) a) 0.94 b) 0.97 c) 0.94 0.98 0.95 0.98 0.84 0.91 f) 0.97 g) h) 0.74 0.97 0.97 0.98 0.92 0.97 d) 0.97 0.94 0.97 i) / 0.97 0.93 0.98 e) 0.91 j) 0.94 0.94 0.98 C 2 0.78 C 1 C 2 C 3 0.74 D A-1... F&EI 183.58 A-2...154 ft A-3......$MM 5 B...0.84 C... MPPD(A-3 B)...$MM 4.2 D... 0.74 E... MPPD(C D)...$MM 3.1 F... (MPDO)... 40 days G... (BI)...$MM 18.33 41
3.4 1970 1976 12 " "[7] (Fault Tree Analysis) (1) (2) (3.5) (3) (4) 3.6 3.5 ABCD A(10 )B(5 )C(2 )D(0 ) 3.6 3.7 (PE) I 42
3.5 A 10 B 5 C 2 D 0 1. 1. 1. 1. ABC 2. 2. 3. 2kg/cm 2 2. -30 4. 3. -30 30 4. 2. 1000m 3 500m 3 100m 3 100m 3 1000m 3 500m 3 100m 3 50m 3 10m 3 50m 3 10m 3 100m 3 3. 1000 1.1000 1.250 250 1000 2.250 1000 2. 250 4. 1000kg/cm 2 200kg/cm 2 10kg/cm 2 10kg/cm 2 1000kg/cm 2 200kg/cm 2 5. 1.Qr/Cp V 1.Qr/Cp V 4 1.Qr/Cp V 400/min /min 4/min 400/min 2. 2. 2. 25% 25% 25% 3. 3. 3. 70% (batch) (Pro- 4. gramming) 4. 5. 4. 5. 5. 6. Qr/Cp V (/min)qr (Kcal/min) Cp (Kcal/Kg) (Kg/m 3 )V (m 3 ) 43
3.6 16 I 11~15 II 1~10 III 3.7 PE 1. 5 2. 0.2m 3 0 3. 300 2 4. 2,600kg/cm 2 10 5. =630/min 5 (element) 22 I 44
(1) (Checklist) (2) (3) 4.1 What-if What-if "?"(What-if) What-if 1. 2. 3. 4. What-if 4.1 What-if 45
4.1 What-if What-if VCM EDC ( ) ( ) ( ) ( )? / 1. 1. 1.a 1.a 2.b 1.b 2.2. 2.a 2.a VCM 3. 3. 3.a VCM 3.a 3.b 3.b 3.c 3.c 4. 4. 4.a 4.a ( ) 46
4.2 1. (1) (2) (3) (4) (5) (1) (2) (3) (4) (5) 2. (1) ( ) 4.2 47
4.3 4.4 48
4.2 1. a. b. c. d. 2. ( / ) a. b. c. d. 3. a. b. c. d. 4. a. b. c. d. 49
4.3 1. ( ) 2. 3. 4. 1. 2. 3. 4. 5. 6. 1. 2. 3. 4. 5. 6. 1. 2. 3. 4. 50
4.4 ( Hook-up ) 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. ( ) 12. SUBMAIN 13. 14. 51
(2) A. B. C. D. 4.1 A. B. C. ( ) D.Hook-up E. F. G. H. I. J. 52
NO OK 4.1 53
FMEAHazOp (Guidewords) (Failure Modes and Effects Analysis, FMEA) (Hazard and Operability Study, HazOp) FMEA HazOp (Failure Mode) (Process Deviation) 5.1 FMEA FMEA FMEA HazOp (process deviation) HazOp FMEA 1. 2. (1) (P&ID) (2) ( ) (3) 54
5.1 5.1 26 13 13 13 13 24 3. FMEA (1) (2) (3) (1) FMEA (A) (B) (boundary conditions) FMEA FMEA FMEA FMEA FMEA (A) (B) (2) FMEA FMEA FMEA (PFD P&ID) 55
FMEA A. B. 3-in C. (fails to open when require) (inadvertently moves to an open position) (leaks to the environment) (leaks internally) (ruptures) 5.2 56
5.2 (external leak) (vessel, drum, knockout pot) (external rupture) (pluggage) (coil leak) (coil rupture) (coil fouled) (external leak) (reactor) (external rupture) (liner cracked) (coil leak) (coil rupture) (coil fouled) (external leak) (scrubber column) (external rupture) (tray rupture) (tray plugged) (packed bed plugged) (bed support collapsed) (contacting surface fouled) (electrostatic plate fails off) (electrostatic plate shorted) (electrostatic plate fouled) (external leak) (demister) (external rupture) (mesh plugged) (hole in mesh) (shell leak) (heat exchanger) (shell rupture) (shell plugged) (tube leak) (tube rupture) (tube plugged) (tube fouled) 57
5.2 (external leak) (contact dryer) (external rupture) (desiccant plugged) (desiccant saturated) (pump) (external leak) (external rupture) (fails to start) (fails off while running) (started prematurely) (operates too long) (operates at degraded head/flow performance: too fast, too slow, etc.) (pipe/duct/hose) (external leak) (external rupture) (plugged/kinked) (filer/strainer) (external leak) (external rupture) (internal element rupture) (element plugged) (relief devices) (external leak) (external rupture) (plugged) (fails to open on demand) (fails to re-seat) (opens permaturely) (closes permaturely) (sensor element) (external leak) (external rupture) (tap plugged) (fails with no output signal) (fails with a low output signal) (fails with a high output signal) (fails to respond to an input change) (spurious output signal) 58
5.2 (generator) (high voltage) (low voltage) (high current) (low current) (started prematurely) (operated too long) (fails opened) (conductor/bus) (shorts line to ground) (shorts line to line) (circuit board) (transformers) (uninterrupptible power supply, UPS) (fails opened) (shorts line to ground) (shorts line to line) (spurious output signal) (fails with no output voltage/current) (fails with a high output voltage/current) (fails with a low output voltage/current) (fails with no output voltage/current) (fails to transfer correctly) (fails with a low output voltage/current) (started prematurely) (operates too long) 59
4. (1) ( CHF 3 CF 4 ) (2) N2 R-1 CO (R-3) (H-2) O2 5.1 R-1 CO 5.1 CO R-1 R-1 O 2 CO CO 170 CO 2 R-1 CO R-1 CO, R-1 CO 5.2 (P&ID) 5.3 5.4 FMEA 5.5 60
5.2 CO P&ID 61
5.3 TICA-1 L H CO 150 250 SD-2 SD-1 TIA-2 H CO 400 SD-1 TIA-3 H CO 250 SD-1 TIA-4 H 60 SD-1 TI-5 40 PIA-1 H HH -50mmH 2 O 2000 mmh 2 O SD-4 PI-2 PI-3 CO O 2 PI-4 N 2 PI-5 FIA-1 L 25 1/min FIA-2 L CO O 2 5 1/min SD-3 CI-1 R-1 CIA-2 A R-1 SD-2 CI-3 CO CIA-5 A SD-2 AIA-1 H CO 20 ppm SD-2 AIA-2 H CO 20 ppm SD-2 BL-1 A SD-4 BL-2 A BL-3 A H-2 SD-1 SD-2 SD-3 SD-4 5.4 COAV-5 COAV-5 COAV-5 AV-3 COAV-5 AV-1/AV-2 62
5.5 1.1 (AV-1) CO FI-3 PI-4 FIA-1 TICA-1,TIA-2/3/4 1.2 1.3 FI-3 1.4 1.5 CO FI-3 PI-4 FIA-1 TICA-1,TIA-2/3/4 1.6 1.7 2.1 BL-2 PI-5 2.2 BL-2 PI-5 2.3 / BL-2 PI-6 3.1 R-1 R-3 CO CI-1/CIA-2 R-3 CO (CIA-2) CO AIA-1-1 AIA-1-1 CO 63
5.5 ( ) 3.2 CI-1 CI-3 4.1 CO CO TIA-2/TIA-3 R-3 CO (TICA-1) AIA-1-1 CO AIA-1-1 4.2 R-3 TIA-2/TIA-3 4.3 CO CO TIA-2/TIA-3 R-3 CO AIA-1-1 CO AIA-1-1 4.4 R-3 TIA-2/TIA-3 4.5 R-3 TIA-2/TIA-3 4.6 CO CO TIA-2/TIA-3 R-3 CO AIA-1-1 CO AIA-1-1 64
5.2 (HazOp) 1961 ICI HazOp HazOp ICI HazOp HazOp HazOp HazOp HazOp HazOp HazOp (study nodes) HazOp (deviation) (guidewords) (10 20 ) HazOp HazOp P&ID HazOp HazOp HazOp HazOp HazOp 5.6 HazOp 5.7 ICI HazOp 5.8 ICI ( ) 65
(guideword) (parameter) (deviation) + = + = + = + = ( ) ( ) ( ) () HazOp 5.3 5.4 66
67 5.6 HazOp ( ) ( ) P&ID ( ) HazOp ( P&ID) ph (phase) ( ) ( ) ( ) ( ) ( ) ( )
5.7 HazOp (No) (Less) (More) (Part of).(as well as) (Reverse). (Other than) 5.8 HazOp ph 5.9 HazOp 68
( ) ( ) 5.3 HazOp 69
HazOp / HazOp (P&ID, PFD) 5.4 HazOp 70
: XYZ 90 (Cl 2 storage tank) (feed tank) 1 1 1 5.5 PCV-1 HCV-1 (HCV-2 ) 1 HCV-1 PCV-1 HCV-1 HCV-2 (scrubber) (N 2 purge) ( ) ( ) 5.10 71
5.5 72
5.10 1.0 CFL-1 1.1 (High flow) 1. 1.2 / 1. HCV-1 1. 1. 01 HCVs (Low / no flow) HCV-2 02 2.HCV-1(HCV-2) 2. 3.HCV-1(HCV-2) 4. ( PCV-1 ) 5. 6. ( 1.5) 73
5.10 ( ) 1.3 1. 1. 1. 03 (Long flow duration) 2.HCV-1 2. 04 3.HCV-1 2. (HCV-2)( 4. HCV-1 AO fail closed) 5.3. 05 HCV-1 1.4 1. 1. 1. 06 (Short flow 2. 07 duration) 2.HCV-1 HCV-2 3. HCV-1 HCV-2 4. 5. ( PCV-1 ) 74
5.10 ( ) 1.5 1. ( 1.2) 1. 08 (Skipped/ missing) 2. 2. 09 3. 1.6 (Reverse 1. flow) 1.7 (High 1. 1. 10 temp) 2. 3. ( 1.12) 248 2. ( 1.9) 1.8 (Low 1. 1. 11 temp) ( ) 1.9 (High 1. ( 1.7) 1. (1. 12 pressure) 2. HCV-2 1.14) 2. 250psig 75
5.10 ( ) 3. ( ) 4.PCV-1 1.10 (Low pressure) 1. 1.11 1. 1. 1. 13 (As well as) 2. 2. 1.12 1. ( 1.7) 1. 14 (As well as ) (diaphragm) 1.13 (Leakage) 1. 2. (gasket) 1.1. 15 2. 3. 1.14 1. ( 1.9) 1.1. 16 HCV-1 HCV-2 (Rupture) 2. 3. (gasket) 2. HCV-1 250 psig 4. HCV-2 76
6.1 6.1 H 2 SiH 4 SiH 2 Cl 2 PH 3 B 2 H 6 Cl 2 CONF 3 C 2 F 6 ( ) 77
6.1 SiH 4 (duct) N 2 ( PVC ) ( ) CCl 4 (purge) (purge) CCl 4 1000 CCl 4 Cl 2 (CCl 4 C+2Cl 2 ) SiH 4 +2Cl 2 SiCl 4 +2H 2 H 2 +Cl 2 2HCl SiH 4 20 PVC 30 PH 3 N 2 ( ) AsH 3,PH 3 (packing) packing SiH 4 SiH 4 ( ) N 2 N 2 SiH4 (purge) N 2 78
6.1 () ( SUS ) SiH 4 ( ) ( ) CVD (chemical vapor deposition) SUS ( ) N 2 Flange SiH 4 N 2 SiH 4 N 2 N 2 purge batch SiH 4 ( ) ( ) SiH 4 SiH 4 packing packing SiH 4 SiH 4 phosphine N 2 N 2 phosphine 79
(1) (2) (HF) (3) (Ion Implanter) (Ion Beam)X-ray (4) (Etching) (sputtering) RF (Heat Lamps) (IR) (Mercury Vapor Lamps) (UV) 80
(3) (5) (Robotics) 6.2 Cl 2 HClCO SiH 4 PH 3 B 2 H 6 HFH 2 SO 4 (DOW) (CEI)[6] 81
(1) ( ) (2) (3) (4) (5) 6.1 82
6.1 83
(1) 6.2 (2) ( ) (3) 6.2.1 (4) (5) 6.3 (6) (Nf) (Nr) (7) 6.2.2 (8) (9) 6.4 (10) 3 1 (11) 6.5 (HazOp) (FMEA) 84
6.2-1. (0-5) (0-4) 2. (1-4) 3. (1-3) 4. (1-4) 5. (1-3) (0-4) (0-4) (0-5) 85
6.3 0-5 0 6-15 1 16-35 2 36-70 3 >70 4 6.4 0-10 0 11-35 1 36-60 2 61-100 3 >100 4 6.5 0-1 2-3 4-5 86
6.2.1 (1) (1.1) ppm (ERPG-2) mmhg 760 ERPG-2(ppm) 760(mmHg)/ (mmhg) 5-0~0.99 4-1~9.9 3-10~99 2-100~999 1-1000~100,000 0- >100,000 ERPG-2 (STEL) (CEILING) (TWA)3 NFPA Nh( )4( HF) Nh (1.2) (a) 2 (b) 2A 2 2 3 (c) 1 1 1 1 4 87
(2) 15 100% 15 4->10kg 3-1~10kg 2-100g~999g 1-<100g (3) 2 1.5 (RAP SUB-FAB) 1 FAB 1 (4) (a) 10psig(1.75 ) 2 (b) 100 2 (c) 2 3 4 1 88
(d) 4 (5) 3FAB 24 2 (RAP SUB-FAB) PM 1 6.2.2 (1) NFPA Nf( ) 0~4 Nr 3 Nf Nr Nf Nf Nf 1. 4 2. 3. 22.8(73) 37.8(100) 1. <22.8(73) 37.8(100) 3 2. 22.8(73) 37.8(100) (2) 2 37.8(100)< <93.4(200) 1 >93.4(200) 0 89
15 100% 15 4 10kg 31~10kg 2100g~999g 1 100g (3) 2 1.5 (RAP SUB-FAB) 1 FAB 1 3 (4) (a) 10psig(1.75 ) 2 (b) 100 2 (c) (Nh2) 2 3 4 1 (d) 4 (5) / 90
/ 3FAB 24 FAB 2 (RAP SUB-FAB) PM 1 6.6 Chemical Station HNO 3, H 2 O 2, IPA, HF(49%), NH 4 OH PECVD SiH 4, N 2 O, N 2, PH 3, NH 3, O 2, C 2 F 6 DUV Stepper F 2 (1%) 6.7 ERPG-2 TWA(ppm) STEL(ppm) (ppm) N h (mmhg) N f HNO 3 10 15-2.9 3 0 H 2 O 2 1 2-5 2 0 IPA 400 500-33 1 3 HF 3 6 20 4.1KPa 4 0 NH 4 OH 50 75-570 - - NH 3 50 75 200 gas 3 1 SiH 4 5 10 - gas 1 4 PH 3 0.3 0.9 - gas 4 4 F 2 1 2 - gas 4 0 6.8 ( ) - - HF IPA Chemical Station 1. (0-5) 4 3 (0-4) 2. (1-4) 4 3 3. (1-3) 1 1 4. (1-4) 2 4 5. (1-3) 3 3 91
96 108 (0-4) 4 4 (0-4) (0-5) 5 6.9 ( ) - - PH 3 SiH 4 PECVD 1. (0-5) 5 4 (0-4) 2. (1-4) 1 2 3. (1-3) 1 3 4. (1-4) 3 3 5. (1-3) 3 3 45 216 (0-4) 3 4 (0-4) (0-5) 5 6.10 ( ) - - F 2 - Chemical Station 1. (0-5) 4 (0-4) 2. (1-4) 1 3. (1-3) 1 4. (1-4) 2 5. (1-3) 3 24 0 (0-4) 2 0 (0-4) (0-5) 2 92
6.3 (Semiconductor Equipment and Material International, SEMI)[9]2000 SEMI S2-0200 SEMI S2-0200 (Single point failure) (HazOp) (FMECA)"What-if" SEMI S2-0200 SEMI S10-96[11] (Severity) (Likelihood) (Risk Matrix) 6.116.126.13 6.11 SEMI S10-96 1 2 3 4 Catastrophic Severe Moderate / HF / Minor 93
6.12 SEMI S10-96 A B C D E 5 (Frequent) 1 5 (Likely) 5 1 1 1 (Possible) 10 1 5 1 (Rarely) 10 1 (Unlikely) 6.13 SEMI S10-96 A B C D E 1 1 1 2 3 4 2 1 2 3 4 4 3 2 3 4 4 5 4 3 4 4 5 5 1 2 3 4 5 6.4 SEMI SEMI S8-0999[10]SEMI S8-0999 SEMI S8 (Supplier Ergonomic Success Criteria, SESC) 94
SEMI S10-96 (SESC) (1) (Manual Material Handling) (2) (Product Loading) (3) (Wafer Cassette Loading) (4) (Work in Process) (5) (Manual Wafer Cassette Rotation) (6) (Handle Design) (7) (Maintainability and Serviceability) (8) (Displays and Touch Screens) (9) (Hand Controls) (10) (Workstation Design) SEMI S8-0999SESC (Recommended Weight Limit, RWL) =(0.9RWL)(2) 14~20 20~30 6~18 ( 30 ) ( ) ( 15 47.5 5% ) (1)NIOSH (1991)[10][13] (2) (Psychophysical Data) 95
(3) (Biomechanical Analysis) 26 ( / / ) ( ) 1991 NIOSH RWL=LC HM VM DM AM FM CM LC (Load Constant), LC=51 lbs HM (Horizontal Multiplier), HM=10/H VM (Vertical Mutiplier), VM=1-(0.0075V-30) DM (Distance Multiplier), DM=0.82+(1.8/D) AM (Asymmetric Multiplier), AM=1-0.0032A FM (Frequency Multiplier), CM (Coupling Multiplier), / 6.14 SEMI S10-96 6.15 6.12 6.13 96
6.14 ( ) H H=10~25inches H>25, HM=0 V V=0~70inches V>70, VM=0 D A D=10~70 inches D>70, DM=0 A=0~135 A>135, AM=0 CM FM 0.9 V 97
6.15 1 (Catastrophic) 2 RWL (Severe) 3 RWL ( (Moderate) 10%~100% ) 4 RWL 10% (Minor) 6.5 SEMI SEMI S14[12] (reasonably foreseeable single point failures) (residual risk level) (acceptable risk) SEMI S10-96 SEMI S14 6.16 6.17 (1) (2) (3) (4) 98
(5) 6.16 SEMI S14 ( ) 1: (Catastrophic) 2. (Severe) 3. (Moderate) 4. (Minor), 6.17 SEMI S14 ( %) A: (Frequent) B: (Likely) C: (Possible) D: (Rare) E: (Unlikely) 1% 0.2% 1% 0.04% 0.2% 0.02% 0.04% 0.02% 6.2 FM4910 99
100
6.6 6.2 101
1.Occupational Health and Safety Management Systems-Specification (OHSAS 18001), BSI, 1999. 2.29CFR Part1910.119 Process Safety Management of Highly Hazardous Chemicals, US Government, 1992. 3.F. E. Bird, Jr., G. L. Germain, Practical Loss Control Leadership, ILCI, 1990. 4.Process SHE Guide 13 Hazard Study Methodology Part 1-Hazad Study 1, ICI Engineering, 1992. 5.Dow's Fire & Explosion Index Hazard Classification Guide, Seventh ed., AIChE, 1994. 6.Chemical Exposure Index Guide, First ed., The Dow Chemical Company, 1986. 7. 905, 1976 8.Guidelines for Hazard Evaluation Procedures, Second ed. with Worked Examples, AIChE, 1992. 9.SEMI S2-93A & SEMI S2-0200 Semiconductor Manufacturing Equipment Safety Guidelines, SEMI International. 10.SEMI S8-0999 Ergonomics/ Human Factors Engineering Guidelines, SEMI International. 11.SEMI S10-96 Risk Assessment Guidelines, SEMI International. 12.SEMI S14 Fire Risk Assessment and Mitigation for SEM, SEMI International. 13. GS3 2000. 14. 1994~2000. 102
( ) 90 12 41 3 (02)2754-1255 (02)2704-3753 310 195-10 51 11 1110 (03)591-2294 (03)591-8470 E-mailRene@itri.org.tw http://www.cesh.itri.org.tw http://cesh.moeaidb.gov.tw