21
CIP. 2004.8 21 ISBN 7810823450 TP274 CIP 2004 068396 10008401062776969 100044 0105168604562237564 185260 8.5 203 2004 8 1 2004 8 1 ISBN 7810823450TP 136 15 000 13.00
21 12 9 YL CG 120 21 11 18 1520 14 18 510 2004 8
1...1 1.1...1 1.1.1...1 1.1.2...1 1.2...1 1.2.1...1 1.2.2...3 1.2.3...4 1.3...4 1.4...5 1.5...6 1.6...7 1.7...7 2...8 2.1...8 2.1.1...8 2.1.2...8 2.2...8 2.2.1...8 2.2.2...9 2.2.3...10 2.3...10 2.3.1...10 2.3.2...10 2.3.3...11 2.4...12 2.5...12 2.5.1...12 2.5.2...12 2.5.3...13 2.6...13 2.7...14 3...15 I
3.1...15 3.1.1...15 3.1.2...15 3.2...15 3.3...17 3.3.1...17 3.3.2...18 3.4...18 3.5...18 3.6...19 3.7...20 4...21 4.1...21 4.1.1...21 4.1.2...21 4.2...21 4.2.1...21 4.2.2...22 4.3...22 4.4...23 4.5...24 4.6...24 4.7...25 5...26 5.1...26 5.1.1...26 5.1.2...26 5.2...26 5.3...27 5.4...28 5.5...28 5.6...29 5.7...29 6...30 6.1...30 6.1.1...30 6.1.2...30 II
6.2...30 6.2.1...30 6.2.2...33 6.3...33 6.4...34 6.5...39 6.6...39 6.7...40 7...41 7.1...41 7.1.1...41 7.1.2...41 7.2...41 7.3...42 7.4...43 7.5...43 7.6...43 7.7...44 8...45 8.1...45 8.1.1...45 8.1.2...45 8.2...45 8.2.1...45 8.2.2...47 8.2.3...48 8.3...49 8.4...50 8.5...51 8.5.1...51 8.5.2...51 8.5.3...51 8.6...52 8.7...52 9...53 9.1...53 9.1.1...53 III
9.1.2...53 9.2...53 9.3...54 9.4...55 9.5...55 9.6...56 9.7...56 10...57 10.1...57 10.1.1...57 10.1.2...57 10.2...57 10.3...59 10.4...59 10.5...59 10.6...60 10.7...60 11...61 11.1...61 11.1.1...61 11.1.2...61 11.2...61 11.3...62 11.4...62 11.5...63 11.6...63 11.6.1 MPM...63 11.6.2 CYG...65 11.6.3 CYYZ...65 11.6.4 MPX...66 11.7...68 12...69 12.1...69 12.1.1...69 12.1.2...69 12.2...69 12.2.1...69 IV
12.2.2...71 12.2.3...71 12.2.4...72 12.3...73 12.4...73 12.5...74 12.5.1...74 12.5.2...74 12.6...75 12.7...75 13...76 13.1...76 13.1.1...76 13.1.2...76 13.2...76 13.3...77 13.4...77 13.5...78 13.6...78 13.6.1...78 13.6.2...78 13.6.3...81 13.7...82 14...83 14.1...83 14.1.1...83 14.1.2...83 14.2...83 14.2.1...83 14.2.2...84 14.2.3...86 14.3...87 14.4...87 14.5...87 14.6...88 14.7...89 15...90 V
15.1...90 15.1.1...90 15.1.2...90 15.2...90 15.3...91 15.4...91 15.5...92 15.6...92 15.6.1...92 15.6.2...93 15.6.3...94 15.6.4...94 15.7...94 16...95 16.1...95 16.1.1...95 16.1.2...95 16.2...95 16.2.1...95 16.2.2...96 16.2.3...97 16.2.4...97 16.3...98 16.4...99 16.5...99 16.5.1...99 16.5.2...100 16.6...100 16.7...100 17...101 17.1...101 17.1.1...101 17.1.2...101 17.2...101 17.3...102 17.4...102 17.5...103 17.6...103 VI
17.6.1...103 17.6.2 TB-850...104 17.7...104 18...105 18.1...105 18.1.1...105 18.1.2...105 18.2...105 18.2.1...105 18.2.2...106 18.2.3...106 18.2.4...108 18.3...108 18.4...109 18.5...109 18.6...110 18.7...110 19...111 19.1...111 19.1.1...111 19.1.2...111 19.2...111 19.2.1...111 19.2.2...111 19.2.3...112 19.2.4 AD590...113 19.3...113 19.4...113 19.5...115 19.6...115 19.7...115 20 PN...116 20.1...116 20.1.1...116 20.1.2...116 20.2...116 20.2.1 PN...116 VII
20.2.2 PN...116 20.2.3 PN...118 20.2.4...118 20.3...119 20.4...119 20.5...119 20.6...119 20.7...120 21...121 21.1...121 21.1.1...121 21.1.2...121 21.2...121 21.2.1...121 21.2.2...122 21.2.3...123 21.3...123 21.4...123 21.5...124 21.6...124 21.7...124...125 VIII
1 1.1 1.1.1 (1) (2) (3) YLCG (4) 1.1.2 (1) (2) (3) 1.2 1.2.1 [1] 1. L r ρ R L L R = ρ = ρ (1-1) 2 A π r L A ρ dldadρ dr1-1 dr/r
2 d d d d dρ = 2 + (1-2) ρ d εr εl ε L = µε r (1-3) µ 0.3~0.5 1-31-2 dρ = 1 + 2µ ε + (1-4) ρ (1-4) 2. (1) K d 1+ 2µε τ (1-5) K= d = 1+ 2µ (1-6) ε l 2 5 (2) KdR/R dρ ρ [2] d ρ =πεe ρ π E K= dr/rε=πε 100~200 3. 1-1 [3] 1-1
1 3 4. σ ε σ εσε ε dr/r 5. 1-2 1-2 1.2.2 LYCG 1-3 R 1 R 2 R 3 R 4 RP r
4 ±4V 74SL LYCG 20 g mv/g 1 5 mv 2 10 mv 0.25 mv/g 1-3 1.2.3 1.3 1. 2.
1 5 3. 4. K 5. 1.4 5.1 k 1-4 RP 1 RP 2 C 1-4 1100 µa741 1-5 RP 1 V 1 V 2 V o R F V 1 /R 1 (1R F /R 1 )(R 3 /(R 2 R 3 )) V 2 R F R 4 RP 2 RP F R 4 RP 2 RP 2
6 (1) V i1 V i2 15 V V o (2) 0 RP 1 RP 2 2 V 15 V 0 15 V 1-5 1.5 (1) (2) (3) 1-3 (4) (5) 4 V RP
1 7 (6) 10 20 g/ (7) 1-1 (8) S=V/WV W 20 g/ V-W 1-1 W /g V /mv 1.6 (1) (2) (3) (4) (5) (6) (7) (8) 1.7 1. 2. 3. 4.
2 2.1 2.1.1 (1) (2) (3) (4) 2.1.2 (1) (2) (3) 2.2 1 2.2.1 1. 2-1 R 2 R 4 R 1 R 3 E U o 2. ε R R E R1 R3 E U o = ( + ) = kε (2-1) R R 2 4 1 3
2 9 2.2.2 1. 2-2 R 1 R 2 R 3 R 4 E U o 2. R R 1 R 3 εr 2 R 4 ε R R E R1 R3 R2 R4 U = ( + ) = Ekε [3] o (2-2) R R R R 4 1 3 2 4 2-3
10 2.2.3 1. 2-3 Z 1 Z 2 Z 3 Z 4 e u 2. 2.3 2.3.1 1. 2-4 R 2 R 4 R 1 R 3 R 1 R 3 2. K 1 2-4 2.3.2 1. 2-5 R 1 R 2 R 3 R 4
2 11 2-5 2. 20 g K 2 2.3.3 1. 2-6 5 khz 2-6 2. 20 g K 3
12 2.4 1 2.5 2.5.1 (1) (2) (3) (4) 2-4 (5) (6) 4 V RP (7) 10 20g/ (8) 2-1 (9) K 1 =V/WV W 20g/ V-W 2-1 W /g V /mv 2.5.2 (1) (2) (3) 2-5 (4) 4 V RP
2 13 (5) 10 20 g/ (6) 2-2 (7) K 2 V/WV W ( 20 g/) V-W 2-2 W /g V /mv 2.5.3 (1) (2) (3) 2-6 (4) 5 kh Z RP (5) 10 20 g/ (6) 2-3 (7) K 3 V/WV W 20 g/ V-W 2-3 W /g V /mv 2.6 (1) (2) (3) P 1 P 2 (4)
14 2.7 1. 2. 3. 4.
3 3.1 3.1.1 (1) (2) (3) (4) (5) 3.1.2 (1) (2) (3) (4) 0.1 g 101 000 g 3.2 0.1 10
16 1g 1 g 100 kg 1 g~100 kg [4] () 3-1 A B R = R (3-1) ( ) t ( ) t
3 17 3-2 R 5 R T 3.3 0.1g 10g1 000g YLCG 1 2 3.3.1 3-3 3-3 ε
18 3.3.2 3-4 3-4 3.4 (1) (2) (3) (4) (5) (6) 3.5 1. 2.
3 19 3. 3.6 3-1 [1] 3-1 (DC) (V) (MPa) (%FS) (mv/v) (Ω) (MΩ) ACY5 7 1215 0.1 350±30 2 000 0~5 ACY5 7F ±9 0~10 0.2 400 2 000 YCB 30FD 15 0~20 0.2 3 000 YC 20A 10~15 0~30 0.2 1 >2 000 0~40 YCB20AF ±9 0.2 1.1 (DC) (V) (kg) (%FS) (mv/v) (Ω) (MΩ) CZL 3 6~15 0.03 2 350 >2 000 CZL YB 10 10 0.02 2 350 GGC 14 6 1.5 120 1 000 GGC16 12 0.05 2 250 2 000 GS10 10 0.05 2 350 T61 10 kg 0.05 350 ABA/SBA 10 0~10 0.02 350 2 000 0~20 SBB 10 0~50 ±0.02 400 T81 10 0~100 350 1 000 T90 10 0~500 350 5 000 T95LA 10 350 1 000 GYL 6 12 0.03 1.5 350 5 00 CZL 8 12 0.02 2 350 5 000 CUB2 10 ±0.05 2 350 1.2~1.5 CLHM 2 15 0.03 650
20 (DC)(V) (N) (%FS) (mv/v) (Ω) (MΩ) GYL2 12 0.1 2 700 500 CLYB2 12 0.05 2 700 YLC2 12 0.02 2 700 500 UH6 10 0.02 2 351 5 000 CDLG1 15 0.05 2 650 GYL5 12 0~50 0.05 0.2 350 500 0~100 2GYL11 12 0~200 0.05 1 350 500 YLC7 12 0~500 0.02 2 350 500 CLYB8 12 0~1 000 0.02 2 350 500 XF 10 0.03 2 350 2 000 CLYB 1 12 0.05 2 350 500 1.2 CLYB41 24 0.02 2 3 000 3.7 1. 2. 3.
4 4.1 4.1.1 (1) (2) (3) 4.1.2 (1) (2) (3) (4) 4.2 4.2.1 4-1 C 1 C 2 C 1 C 2 C 0 C C [5] 4-2
22 4.2.2 YLCG 4-3 C 1 C 2 4-3 4.3 (1) (2) (3) (4) (5)
4 23 4.4 4-4 74LS20 U 1 4-4 4-5 µa741 4-5
24 4-6 Vo 4-6 4.5 (1) (2) V/F 2 V (3) (4) 0.5 mm (5) Xmm VmV 4-1 (6) K V =V/X V-X (7) 4-1 X-V X /mm V /mv X /mm V /mv 4.6 (1) (2) (3) (4)
4 25 4.7 1. 2. 3.
5 5.1 5.1.1 (1) (2) (3) (4) 5.1.2 (1) (2) (3) (4) (5) 15 mm 0.01 mm (6) 5.2 5-1 5-2
5 27 5-2 5-3 5-3 5.3 (1) (2)
28 (3) (4) K V (5) (6) 5.4 (1) (2) (3) (4) (5) 5-1 K V K V = A/ Vmm/mV (6) 5-2 (7) 5-1 A -V A /mm V /mv F /mm V /mv 5-2 F -V 5.5 (1) (2) (3) (4)
5 29 5.6 5.7 1. 2. 3. 4.
6 6.1 6.1.1 (1) (2) (3) 6.1.2 (1) (2) (3) (4) 6.2 6.2.1 1. 6-1 L 0 W ( ) 2 2 µ 0SW r x L = + ( ) 0 1 µ r 1 (6-1) l r0 l r r 0 S(S=πr 2 0 ) µ r X L
6 31 L 2 dl µ 0µ r SW K L = = (6-2) 2 dx 2l 2. 6-2 O Z 1 1 U & U& V& V& = = = U& 2 Z 1 Z 2 2 (6-3) o AB A B + 6-3 Z 1 =Z 0 + ZZ 2 =Z 0 Z6-3 Z 1 1 Z U & U& V& V& U& = = = 2 U& = 2 Z 1 Z 2 2 (6-4) o AB A B + 2Z 0 Q 6-4 L U & o = U& (6-5) 2 2L 0 6-3 Z 1 Z 2 Z 3 Z 4 VD 1 VD 4 AB CD
32 6-3 X 6-4 (a) Z Z (6-6) Uo = VD VC = U i U 2 i Z 2Z 0 2Z 0 1 2Z 0 6-4(b) Z Z (6-7) Uo = VD VC = U U 2 i i Z 2Z 0 2Z 0 1 2Z 0 6-4
6 33 3. 6-5 RP 1 RP 2 6-5 6.2.2 F K V 6.3 (1) RP 1 RP 2 (2)
34 (3) (4) 6.4 353 RC 6-6 6-6 4kHz5 6-7 6-7
6 35 (a)
36 b 6-8 (1) (2) (3) (4) (5) X-Y (6) 6-8(a) 1. 37 6-8(b) POWER INTENSITY FOCUS TRACE ROTION
6 37 SCALE ILLUM 2. 1 [CH1 INPUT(X)] X-Y X 2 [CH2 INPUT(Y)] 1 - Y --AC-GND-DC ACGNDDC 26 33 VOLT / DIV 101 10 25 32 VARIBLE 2.5 20 36 CH15 CH25 CH15MAGCH25MAG5 5 1mV / div 23 35 POSITION VERTICAL MODE 34 1 CH1 CH1 28 2 CH2 CH2 34 28 DUAL CH1 CH2 CH1 CH2 31 ADD CH1 CH2 21 CH2 INVERT CH2 3. 15 TIME / DIV 20 0.1µs/div 0.2S/div 11 X-Y X-Y CH2 CH1 7 ALT ALT-MAG 6-9 6-9 ALT
38 23 2 2 X-Y Y 12 VARIBLE TIME / DIV 2.5 14 POSITION 9 MAG5MAG10 YB43605 10 TIME / DIV 1/5 1/10 5 10 5 10 15 10 ALT-MAG 13 1 1.5div ALT-MAG 6-10 6-10 4. TRIG 18 SOURCEINTCH1 CH2 2 CH2CH2 LINE EXT 19 EXT INPUT 17 TRIG LEVEL 10 SLOPE 16 TRIG MODE AUTO NORMAL
6 39 20 Hz TV-H TV-V ()TVV TVH 38 Z Z AXIS INPUTZ 5 V 39 1 CH1 OUT 1 7 CAL 0.5 V 1kHz 27 6.5 (1) 6-5 (2) (3) (4) (5) 5 khz 0.5 mm 6-1 V-X K V = V/ X V-X (6) 6-2 V-F K V (7) (8) 6-1 X-V X /mm V /mv F /mm V /mv 6-2 F-V 6.6 (1) (2)
40 (3) (4) 6.7 1. 2. 3. 4. 5.
7 7.1 7.1.1 (1) (2) (3) 7.1.2 (1) (2) ±1% 525 Hz 15 mm (3) 7.2 7-1 L 1 L 2 X
42 7-1 7-2 A f s f v 7-2 7.3
7 43 7.4 (1) (2) (3) (4) (5) 7-1 (6) (7) (8) 7-1 V-A-f V /mv A /mm f /Hz 7.5 (1) (2) (3) (4) 7.6
44 7.7 1. 2. 3. 4.
8 8.1 8.1.1 (1) (2) (3) (4) (5) (6) 8.1.2 (1) (2) (3) (4) (5) 8.2 8.2.1 1. (1) [6] 8-1 Q [7] 8-2
46 (2) 1/4 K U = U/ X 2. ()
8 47 8.2.2 8-3 R L 8-3 8-3 u 0 u R VD 1 VD 4 VD 2 VD 3 u 0 u R 8-4 (a) OM T 2 T 1 u R u R1 = u R2 = u0 u 01 = u02 = (8-1) K K 2 u 2 2 u 1 K u1 K u2 T 2 T 1 RL RL ul = u02 = u (8-2) R / 2 + R K R + 2R L u1 ( ) 0 L
48 u 0 u R 8-4 b RL RL ul = u01 = u (8-3) R / 2 + R K R + 2R L u1 ( ) 0 L 8-4 8-5 [8] I=I 2a I 2b 8-5 8.2.3 YLCG
8 49 8-6 X U 01 U 02 8-6 8.3 1 2 RP 1 RP 2 3
50 8.4 50Hz 0 30Hz() RC RC 1 MHz 8-7 8-7 8-8 C 3 8-8
8 51 Q1 / (3A µf ) A µf 1R f / R 1 ω 0 1 / RC ω 0 3 f H 1 / (2πRC) Q0.707 8.5 8.5.1 (1) (2) 2 V (3) U 2 (4) (5) 8.5.2 (1) 8-6 (2) 2 V (3) (4) RP 1 RP 2 8.5.3 (1), (2) 0.5 mm 8-1 (3) (4) (5) K= V/ X (6) X-V 8-1 X /mm V /mv X /mm V /mv
52 8.6 (1) L V (2) (3) (4) (5) (6) 8.7 1. 2. 3. 4. 5. 6.
9 9.1 9.1.1 (1) (2) (3) 9.1.2 (1) (2) (3) (4) (5) (6) 9.2 1100 mm 150 Hz YLCG 9-1 L 0 L 1 L 2
54 9-1 9-2 K V A F s f v 9-2 s 7 9.3 A ±0.01 mm±1 Hz
9 55 K V 9.4 (1) (2) (3) (4) 8 K V (5) 9-1 (6) (7) (8) 9-1 V-A -f V /mv A /mm f /Hz 9.5 (1) (2) (3) (4)
56 (5) 9.6 [9] 9.7 1. 2. 3. 4.
10 10.1 10.1.1 (1) (2) (3) U (4) 10.1.2 (1) (2) (3) (4) 10.2 [8]
58 YLCG 10-1 10-2 10-1 U 10-2 10-1 10-2
10 59 K V 10.3 (1) (2) U (3) (4) 10.4 U U 0.03% 10-3 10-3 10.5 (1) (2)
60 (3) U U (4) ()U 20 cm (5) 3 ma (6) (7) U U 4 cm (8) 10-1 (9) K V = V/ P 10-1 P /kpa V /mv P /kpa V /mv 10.6 (1) U (2) U (3) RP 1 RP 2 (4) 10.7 1. 2. 3.
11 11.1 11.1.1 (1) (2) (3) 11.1.2 (1) U (2) 2% (3) 11.2 U U 11-1 3 ma MPX10 11-2
62 11-1 11-2 11.3 11.4 (1)
11 63 (2) 10 (3) U (4) (5) 11-1 (6) (7) 11-1 V /mv P /kpa 11.5 (1) U (2) (3) (4) 11.6 101 MPM 134 CYG 65 CY-YZ MPX 11.6.1 MPM 280 306 310 316 [1] ISO 11-2 11-3 MPM280
64 11-2 MPM280 (DC) 2.0 ma φ0.45 mm 50% 2~8 kω 3.5~6 kω (10%~90%) 1 Ms (50V)(DC) 100 M Ω L+H+R ++ 0~70kPa ±0.3 ±0.5 % 0.1~35MPa ±0.1 ±0.3 ±0.5 % (DC) ±0.2 mv (DC) 80 100 130 mv 070 kpa ±1.0 ±2.0 % 0100 kpa ±0.5 ±1.25 % 0.235 MPa ±0.5 ±1.0 % 070 kpa ±1.0 ±2.0 % 0100 kpa ±0.5 ±1.25 % 0.235 MPa ±0.5 ±1.0 % 0.1 0.2 0.3 % 0~50 40~121 40~121 11-3 MPM280 MPM28002 070 kpa MPM28003 0100 kpa MPM28007 0200 kpa MPM28008 0350 kpa MPM28009 0700 kpa MPM28010 01 000 kpa MPM28012 02 000 kpa MPM28013 03 500 kpa
11 65 MPM28014 07 MPa MPM28016 014 MPa MPM28017 021 MPa MPM28018 035 MPa 11.6.2 CYG CYG 01 02 19 21 30 54 4 11-4 CYG01 11-4 CYG01 (DC) 612 ma (DC) 1020 V 020 mpa 3580 1 200±20% Ω (DC) 10 mv (DC) 100±20% mv 130% 0.2 %FS A B C D 0.1 0.1 0.1 0.1 mv/4h ±0.3 ±0.2 ±0.15 ±0.1 %FS 5 2 1 0.5 10-4 / FS 5 3 1.5 1 10-4 / FS 0.3 0.2 0.15 0.1 %FS 0.35 0.25 0.2 0.15 %FS 11.6.3 CY-YZ 101 104 201 204 301 303
66 1 2 3 01 02 03 04 CY-YZ203 4 11-5 CY-YZ104 11-5 CY-YZ104 0~2030405060 MPa (DC) 6~12( 6V) ma 130% 800±25% Ω (DC) 60±20% mv 40~80 40~80 3 ms 100(500V(DC)) MΩ DC 10 mv S A B C D ±1.0 ±0.3 ±0.2 ±0.15 ±0.1 %FS 10 7 5 3 1 10-4 / FS 10 7 5 3 1.5 10-4 / FS 0.5 0.3 0.2 0.15 0.1 %FS DC 0.3 0.1 0.1 0.1 0.1 mv 11.6.4 MPX MPX 4 MPX X X 4 11-3 X 4
11 67 MPX10122002300 11-6 MPX10 11-3 11-6 MPX10 (P) kpa kpa (DC) V (P op ) 0 10 kpa (DC)(V S ) 3.0 6.0 V (DC) (I O ) 6.0 ma (DC) (V FSS ) 20 35 50 mv (DC) (V OFF ) 0 20 35 mv ( V/ P) 3.5 mv/ kpa 1.0 1.0 %FS (0~700kPa) 1.0 0.1 %FS (T C /V FSS ) 0.22 0.19 0.16 %/ (T C /V OFF ) ±15 µv/ (T C /R) 0.21 0.24 0.27 %/ (Z IN ) 400 550 Ω (Z OUT ) 750 1 875 Ω (10%~90%T R ) 1.0 ms ±0.5 %FS
68 11.7 1. MPX 2.
12 12.1 12.1.1 (1) (2) (3) (4) 12.1.2 (1) (2) (3) (4) 12.2 12.2.1 12-1 12-1 I B [10] µ ρ 12-1 B
70 f = e v (12-1) e v B E H U E H H b (12-2) U H b ee H ee H =evb E H =vb (12-3) n v I=nevbd I v = bdne (12-4) 12-3 IB E H = bdne (12-5) (12-2) I U H = dne (12-6) R H =1/ne I U H = RH = K H I d (12-7) K H =R H /d (12-7) I B R H R H ρ µ N 12-2
12 71 12.2.2 12-2 3-3 4-4 MHz 12.2.3 1. 12-3 I E R I B I B I 10-13 10 9 Hz 2. 12-3 ρ µ [10] 12-4 R t R t B RP 1 RP 2 B=0 T 1 R t R t (T 1 ) RP 2 RP 1 U ML T 1 T 1 + T R t R t (T 1 + T)RP 1 RP 2 U ML + U ML T 1 U ML T U ML
72 12-4 12.2.4 12-5 12-5 0.02 12-6 12-7
12 73 12-6 12-7 12.3 12.4
74 12.5 12.5.1 (1) (2) (3) (4) 12-6 (5) ±2V (6) 3mm (7) RP 1 (8) 0.2mm 12-1 (9) K V K V = V/ X V-X 12-1 X /mm V /mv 12.5.2 (1) (2) 12-7 (3) (4) 5V (5) RP 1 RP 2 (6) 0.2 mm 12-2 / V 7. K / / V K = V / 8. V-X X
12 75 12-2 X /mm V /mv 12.6 (1) (2) ±4V (3) (4) (5) RP 1 RP 2 (6) LV 5V (7) (8) 12.7 1. 2. 3. 4.
13 13.1 13.1.1 (1) (2) (3) (4) 13.1.2 (1) (2) (3) 1% (4) 13.2 13-1
13 77 r 1 C L V RP2 0 V i 1 2 U o N S P 1 V i1 V i2 U o P 3 U o V i U o 13-1 13.3 13.4 (1) (2) (3) 0.1mm (4)
78 13-1 (5) (6) 13-1 V /mv X /mm 13.5 (1) (2) (3) (4) (5) 13.6 13.6.1 [11] SL3501 13-2 ab 20mV A VT2N5812VT
13 79 SL3051 S 470k +12V R 4 V C 1 22 10k R 1 R 3 1k 11k R 2 A A741 R s 470k 12V V T 2N5812 N S (a) (b) 13-2 13.6.2 [11] 1. 13-3 I C φ 1 I C UPS 13-2 I C U o U X U X V 0 13-3
80 13-2 A A (khz) V BLK50FF 50 0100 020 2% 4V 010V 12 BKL100FF 100 0200 020 1% 4V 0±10V 12 BKL100FY 100 0200 020 1% 4V 0±10V 12 BKL200ZF 200 0300 020 1% ±50mV BLBS5DC 5 05 020 1% 20mA 020mA 15 LKF-25 25 000 05 000 020 0.2% 1V 01V 1524 CHFT50A 50 0100 020 1% ±4V CHFT100A 100 0200 020 1% ±4V CHFT200A 200 0300 020 1% ±4V CHFT300A 300 0500 020 1% ±4V CHFT400A 400 0500 020 1% ±4V CHFT600A 600 0800 020 1% ±4V KT50VT 50 075 020 1% ±4V ±15 KT75VT 75 0105 020 1% ±4V ±15 KT100VT 100 0150 020 1% ±4V ±15 KT200VT 200 0300 020 1% ±4V ±15 KT300VT 300 0450 020 1% ±4V ±15 KT400VT 400 0600 020 1% ±4V ±15 CSNA111 0600 0150 0.1% ±15 CSNB121 0600 0150 0.1% ±15 CSNC241 0600 0150 0.2% ±15 CSNE151 0600 0150 0.2% ±15 CSNF163 0600 0150 0.1% ±15 CSNF173 0600 0150 0.1% ±15 CSNJ481 0600 0150 0.1% ±18 701 2. 13-3
13 81 13-3 A A (khz) % (ma) (Ω) (V) TT5P 5 010 0100 1 5 15 15 TT10P 10 020 0100 1 10 15 15 TT20P 20 040 0100 1 20 15 15 TT30P 30 060 0100 1 30 30 15 TT50P 50 0100 0100 1 50 30 15 A A (khz) % (ma) (Ω) (V) TT100P 100 0150 0100 1 100 30 15 JTB 3 04 0.1 025 15 JT5B 5 08 0.1 025 15 JT10B 10 015 0.1 025 15 JT20B 20 030 0.1 025 15 JT25B 25 035 0.1 025 15 JT3P 3 04 0.1 025 15 CM A 020 0.5 050 15 CMB 050 0.5 050 15 CMC 0100 0.5 050 12 CMD 0200 0.5 050 12 CME 0500 0.5 050 15 CMF 01 000 0.5 050 5 13.6.3 HT R 1 U 1 I 1 N I 2 R mes U U HT 13-4 φ 1 I 1 N 1 N 1 φ 1 13-4 R 1
82 U 1 +HT -HT I 1 I 2 R mes R mes U 0 U 0 =I 2 R mes U 1 U 0 13-4 13-4 % V Ω V (kv) TV100AW/100 40mA 150 V 100 60 15 6 TV100AW/200 20 ma 300 V 200 60 15 6 TV100AW/400 10 ma 600 V 400 60 15 6 TV100AW/500 8 ma 750 V 500 60 15 6 TV100AW/800 5 ma 1200 V 800 60 15 6 TV200AW/2/200 40 ma 300 V 200 40 1524 6 LV200AW/2/200 40 ma 300 V 0.1 200 40 1524 6 LV200AW/2/400 20 ma 600 V 0.1 400 40 1524 6 LV200AW/2/800 10 ma 1200 V 0.1 800 40 1524 6 LV200AW/2/1600 5 ma 2400 V 0.1 1200 40 1524 6 LV200AW/2/3200 2.5 ma 4800 V 0.1 3200 40 1524 6 LV200AW/2/6400 1.25mA 9600V 0.1 6400 40 1524 6 CDLH5TV 5A 07.5A 2.0 15 2 CDLH50TV 50A 075A 1.5 15 2 CDLH100TV 100A 0150A 1.0 15 3 CDLH500TV 500A 0750A 0.5 15 3 CDLH5JV 5A 07.5A 1.0 15 2 CDYH50JV 50V 060V 1.0 15 3 13.7 1. 2. 3.
14 14.1 14.1.1 (1) (2) (3) (4) 14.1.2 (1) (2) (3) (4) 14.2 14.2.1 1. [6] 2. [9] 14-1 14-2 İ 1 H 1 I 2 I 2 H 2 H 2 H 1 ρµ
84 x Z Z=Fρµrfx r H 1 R 1 R 2 I 1 M I 1 I 2 H 2 x ~ L 1 L 2 I 2 14-1 14-2 Z Z 3. 14.2.2 1. 14-3 AB C 1 C 2 R 1 R 2 2. LC 14-4 LC Z X
14 85 1% 10% 14-4 R R R R R 1 C 1 A R 2 C 2 B 14-3 R L C 14-4 3. 14-5
86 14-5 4. [3] 14-6 L C Ll f 0 f x u 14-6 14.2.3 12 14-7
14 87 W L W L 14-7 14.3 K V 14.4 14-8 14.5 (1) (2) (3) 14-7 20V (4) (5) 0.25mm (6) 14-1 V-X
88 K V = V/ X (7) (8) 0.25 mm 14-2 V-X K V2 (9) (10) C 1 C 2 C 3 C 5 C 8 C R 5 7 R 8 WL R 1 R 3 R 6 R 4 V T2 R 9 V T1 C 4 C 6 L 2 L 1 V D1 R 2 R 7 R 10 V CC 14-8 14-1 X/mm V/v 14-2 X/mm V/v 14.6 (1) (2)
14 89 14.7 1. 2. 3.
15 15.1 15.1.1 (1) (2) (3) (4) 15.1.2 (1) (2) (3) A ±1% (4) (5) 15.2 14 15-1 14
15 91 ~ ) WL WL U o V i1 V i2 U o 4V RP 4V 15-1 15.3 14 A 15.4 (1) (2) (3) (4) 0.25mm K V (5) (6) 25Hz (7) 20V (8) RP (9) V A 15-1 (10)
92 15-1 V-X V /V X /mm 15.5 (1) (2) (3) 15.6 15.6.1 [5] 15-2 1.8 3.5 70% 15-3 D d K r 0.2mm 15-2 CZF1
15 93 15-2 Kr 1.2 1.0 0.8 0.6 0.4 0.2 0 1 2 3 4 D d 15-3 15-2 CZF 1 µ µ CZF 1000 1 000 φ 7 1 <3 15+80 CZF 3000 3 000 φ 15 3 <3 15+80 CZF 5000 5 000 φ 28 5 <3 15+80 15.6.2 [5] ρ f t U 2 =fh 500 Hz 2 khz
94 15.6.3 [5] 15-4 15.6.4 15-5 60% 3 2 2 x 3 15-4 15-5 15.7 1. 2.
16 16.1 16.1.1 (1) (2) (3) 16.1.2 (1) (2) (3) (4) 16.2 16.2.1 [2] 16-1 16-1
96 16.2.2 [2] 16-2a 16-2bc 16-2 d (a) (b) (c) (d) 16-2k
16 97 16.2.3 16-3 16-3 Y 16.2.4 YLCG 16-4
98 U V i1 V i2 16-4 16.3 16-4 0.05 mm 16-5 U o U o V i1 V i2 16-5
16 99 16.4 260 Y 16.5 16.5.1 (1) Y (2) 2 V (3) 16-4 / (4) (5) 1V (6) 0.05 mm 16-1 (7) K V = V/ X V-X 16-1 X/mm 0.05 V/v 16.5.2 (1) (2) (3) 16-5 (4) (5) 16-2 16-2 /Hz /V
100 16.6 (1) (2) (3) (4) 16.7 1. 2. 3.
17 17.1 17.1.1 (1) (2) (3) (4) 17.1.2 (1) (2) 1% (3) (4) YLCG (5) 17.2 17-1 n=60f(rpm)
102 U o U V i1 V i2 17-1 17.3 1% 17.4 (1) (2) (3) (4) ±10V (5) (6) 17-1
17 103 (7) n=60f/nrpm f HzN 8. 1% 17-1 f/hz n/rpm 17.5 (1) (2) (3) 17.6 17.6.1 1. 17-2 17-2 2. 17-3
104 17-3 s m WFH-65 8002 500 1.0% 28 0.8 HTY-1 1 4001 800 1.5% 0.5 7501 700 0.5% 0.2 >10 1000A 50200 0.1 1.0 2100 Lux tron 3. 17.6.2 TB-850 TB-850 90 Brinkmann 17.7 1. 2. 3.
18 18.1 18.1.1 (1) (2) (3) 18.1.2 (1) (2) (3) 18.2 18.2.1 [7] (1) (2) (3) (4)
106 (5) (6) 18.2.2 BaTiO 3 (PZT) 70 C (PbTiO 3 )(PbZrO 3 ) 55 C ~200 C PbO 18-1 18-1 PZT4 PZT5 PZT6 pc/n d 11 =2.31 d 14 =0.73 d 15 =260 d 31 =78 d 33 =190 d 15 410 d 31 =100 d 33 =230 d 15 670 d 31 =185 d 33 =600 d 15 3300 d 31 =90 d 33 =200 ε r 4.5 1 200 1 050 2 100 1 000 () 573 115 310 260 300 (10 3 kg/m 3 ) 2.65 505 7.45 7.5 7.45 80 110 83.3 117 123 (10 3 N/m 2 ) 10 5~6 500 80 800 95~100 81 76 76 83 (10 5 N/m 2 ) >1000 10(25 o C) >10 100(25 o C) (10 9 Ω٠m) () 550 80 250 250 (%) 100 100 100 100 18.2.3
18 107 C a U i1 A C a U C c R a R i C i R R C U i U o U a R (a) (b) 18-1 1. 18-1(a)(b)(a)(b) R=R a R i /R a +R i C= C c +C i U a =q/c a f =F m sinωt u a dfm ua = sin ωt = U m sinωt 18-1 C a U m U m =df m / C a d U i jrω U i = dfm 1+ jrω( C + C + C ) U i U im U im = 2 2 1+ ω R ( Ci + Cc + C a i c a ) 2 18-2 dfm Rω 18-3 π Φ = arctan[ R ( Ca + Cc + Ci )ω ] 18-4 2 R a R i ωr(c a +C c +C i ) 1 18-3 dfm U = 18-5 im C + C + C i c a ω/ω 0 >3 ω 0 ω 0 =1/RC a +C c +C i ω=0
108 U im C c 2. A Q C a Cc C i C f U 0 18-2 18-2 A U o q U U cf = 18-6 0 C f U 0 U cf 18.2.4 18-3 V i U o V i U o ~ 18-3 18.3
18 109 18.4 ( ) 18-4 R F R F R 1 R 2 2 3 A 5 1 7 4 +V cc 6 R 4 RP 2 V o R 1 R p V o V i R 3 RP 1 V cc 18-4 18-5 18-5 A vf =1+R F /R 1 R i R ic R o 0R p R 1 //R F R ic 1 000MΩ R F 0R 1 18.5 (1) (2) (3) 5 Hz20 Hz (4) 2 V (5) (6) 18-2
110 (7) K V = V/ f V-F 18-2 F /H Z V 18.6 (1) (2) (3) 18.7 1. 2. 3.
19 19.1 19.1.1 (1) (2) (3) AD590 19.1.2 (1) (2) (3) 2 (4) 19.2 19.2.1 PN 19.2.2 19-1
112 19-1 25 25 V SC616A 40125 10mV TO5 SL616C 2585 10 mv DIP8 LX6500 5585 10 mv TO5 LX5700 5585 10 mv TO47 LM3911 2585 10 mv TO5 LM135 55~150 10 mv 2.98V 0.5 0.3 TO46 LM235 4025 10 mv 2.98V 0.5 0.3 LM335 40100 10 mv 2.98V 1.0 0.3 TO47 TMP35 10 mv 250mV 0.5 2.7 10125 TO92 5.5 LM134 55125 1µA LM134M SL334 070 1µA 3 AD590 55155 1µA 298µA 5 1.5 430 3 TMP03 55150 35Hz 1.5 1.0 4.57 3 TMP04 55150 35Hz 1.5 1.0 4.57 3 AD7414 10 10 2.0 2.7 55125 5.5 6 AD7415 10 10 2.0 2.7 55125 5.5 5 AD7416 10 10 2.0 2.7 55125 5.5 8 AD7814 10 10 2.0 2.7 55125 5.5 5 DS1820 9 32H ( ±0.5 5 55123 ) (0~70) 3 NS NS AD 19.2.3
19.2.4 AD590 19 113 AD590 YL-CG 2 C 19-1 +15V AD590 1mV/ C 15V 15V I OUT 450 400 A AD590 350 300 RP 1 RP 2 250 300 350 400 450 mv/k 19-1 19-2 19.3 AD590 RP1 RP2 1mV/ C 19.4 AD590 50 Ω/2 W AD590 430V55150 C1 C 10 MΩ 100 m AD590 19-2 [10] AD590 IJKLM AD590I ±10 C
114 19-3 [10] 25 C 298.2 mv AD590 1µA/K +5V 15V AD590 AD580 36k 10k 91k 10k V o =1mV/K 27k V o 100 AD310 AD590 100mV/ 950 19-3 19-4 19-4 [10] AD580 +10V 0 C 100 C AD310 100mV/ C 0 C R 1 0V 100 C R 2 10V 0.05 R R 2 U R R 1 U 01 R A741 U 02 U 01 19-5 AD950 K C 19-5 U R 0 C 273KU 02 0 V
19 115 U 02 100 mv/ C 19.5 (1) AD590 (2) (3) R P1 100 mv/ C (4) 15V 1 (5) AD590 19-2 2 C (6) R P2 (7) 19-2 t 0 t 1 t 0 t 1 AD590 =اt 1 - t 0 ا 19.6 (1) (2) 19.7 1. AD590 2. AD590
20 PN 20.1 20.1.1 (1) PN (2) (3) PN 20.1.2 (1) PN (2) (3) 2 C (4) 20.2 20.2.1 PN PN 1 C 2 mvpn PN 20.2.2 PN 0.2s 2s 2 mv/ C50 C 150 C 20-1 HW MW 2CWM JCW PN
20 PN 117 20-1 mw V mv/ % s HW4 100150 0.15 2.2 0.3 510 HW13 3050 0.1 4.5 0.3 2 HW16 50400 0.1 10 0.5 210 WM 50150 0.1 4.2 0.5 5 2CWM11A 1 1.5 2CWM11B 0.5 1 2CWM11C 0.3 0.5 2CWM11D 0.25 2CWM12A 1 1.5 50125 0.1 0.6 22.5 2CWM12B 0.5 1 0.12 2CWM12C 0.3 0.5 2CWM12D 0.25 2CWM21A 1 1.5 2CWM21B 0.5 1 2CWM21C 0.3 0.5 2CWM21D 0.25 2CWM22A 1 1.5 50200 0.1 0.6 22.5 2CWM22B 0.5 1 0.12 2CWM22C 0.3 0.5 2CWM22D 0.25 2CWM31A 1 1.5 2CWM31B 0.5 1 2CWM31C 0.3 0.5 2CWM31D 0.2 0.25 2CWM32A 1 1.5 2CWM32B 0.5200 0.1 0.6 22.5 0.5 1 0.12 2CWM32C 0.3 0.5 2CWM32D 0.2 0.25
118 mw V mv/ % JCWM22A 1 1.5 JCWM22B 0.5 1 JCWM22C 0.3 0.5 JCWM22D 0.2 0.25 JCWM41A 1 1.5 JCWM41B 0.5 10.5 JCWM41C 0.3 0.25 JCWM41D 0.2 1.5 0.6 JCWM51A 50200 1.2 420 1 1 JCWM51B 0.5 0.5 JCWM51C 0.3 0.25 JCWM51D 20.2.3 PN 0.3 0.25 s 0.12 PN 20.2.4 PN 20-1 10V PN 51k PN 1 10 +10V +6V 51k V i1 V i2 U o V i U r RP 1 20-1 PN
20 PN 119 20.3 PN PN PN 21 mv/ C 1 C 21 mv 20.4 20.5 (1) PN PN (2) (3) (4) 51k PN 6V (5) 20-2 (6) 10V 20-2 (7) V t K V = V/ t (8) 21 mv/ C 21 mv/ C t V 20-2 20.6 (1)
120 (2) (3) 20.7 1. 2. 51k 3. 4. PN 0100 C
21 21.1 21.1.1 (1) (2) (3) 21.1.2 (1) (2) (3) 1 (4) (5) 21.2 21.2.1 21-1 E AB(t t 0 )=f(t)-f(tt 0 ) A e AB(t) B e AB(t 0 ) 21-1
122 21.2.2 1001 500 21-1 21-2 21-1 %t WRK E 0800 ±0.75 WRN K 01 300 ±0.75 13 WRB R 01 600 ±0.25 10 WRP S 01 600 ±0.25 30 6 WRR B 01 800 ±0.25 1 2 3 4 5 6 WR 1 2 3 4 5 6 RPNE 1 2 1 2 3 4 5 a 6 1 2 3 4 5 6 016 120 225 3 21-2
123 21.2.3 21.3 1 mv/ 1 1 mv 21-3 10V 1 10 MCS51-10V 6V V i1 V i2 U o V i U o R RP r 21-3 21.4 MCS51 8 / UART I/O -
124 21.5 (1) (2) (3) (4) 21-2 (6) 10V 21-2 (7) V- t K V = V/ t (8) 21 mv/ 21 mv/ (9) (10) 21-2 21.6 (1) (2) (3) 21.7 1. 2.
[1].. 2002 [2].. 2001 [3].. 2001 [4].. 2001 [5].. 2001 [6].. 2001 [7].. 1991 [8].. 1989 [9].. 1995 [10].. 1990 [11].. 1999