* ** * / / ph 1. 2. * ** 1
Operational Practices of Scrubber Systems in Semiconductor Chinggaam Lin * Chun Hung Tsai**Li Der Chen * Abstract Scrubbers are widely used for air pollution treatment in semiconductor. Efficiency of waste gas treatment must be carefully maintained for environmental and healthy issue. In practical operation, some problems were frequently occurred that reduce the treatment efficiency of scrubber. These problems such as ph unstable, bacteria growth, and smoke appear in exhaust stack, are investigated in this paper and we provide practical solutions for them. All the analysis and results can contribute as useful reference for other semiconductor companies. Keywords1.Scrubber 2.Air Pollution Treatment *United Microelectronics Corporation. Principal Engineer **United Microelectronics Corporation. Manager 2
/ local scrubber / [1~5] ph sensor / 1 / tank / // / - ph>7 pump / ph>7 3
1 1 HF,HCl,HNO 3, H 2 SO 4,, CH 3 COOH, H 3 PO 4, H 2 Cr 2 O 7 NH 3, NAO CH 2 Cl 2, CHCl, -2- AsH 3, PH 3, SIH 4, B 2 H 6, B 4 H 10, P 2 O 5, CCl 4, HBr,BF 3, AlCl 3, B 2 O 5, AS 2 O 3, CV POCl 3, Cl 2, HCN AsH 3, PH 3, SIH 4, BH 3, H 2 CVD / p p p pump NAOHH2SO4 PH>7 FAN FAN chemical 1 2 4
76 % ALKA 12% GEN 6% SOL 5% 5% ACID 72% 2 3 4 80 % 3 5
4 4 ph 3 1. pump 2.pH ph ph ph 3. bearing powder 4.Damper Damper powder damper 80 % 6
5. 6. 7. 1.pH ph meter ph:7,4 10 sensor ph sensor 1 sensor 1 5 1 ph sensor sensor sensor ph sensor ph HF sensorsensor ph sensor 5 ph sensor 7
2.Damper Damper damper damper damper 锈 coating damper damper damper damper 3. 2 pump ph 6 2 9 20 1 30 6 8
7 (a) ( ) (b) ( ) 7 (1) (2) / H 2 O 2 塩 (3) (1) (2) 8 2 ph 7 ph 8.5 ph 24 ( ) (1) (2) 9
(a)(b) 8 4. SiO 2 NH 3 SiH 4 SiO 2 Exhaust Scrubber NH 3 NH 3 NH 3 NH 3 (1) hookup 10
(2) NH 3 SiH 2 Cl 2 NH 3 (3)PECVD SiH 4, PH 3, NH 3, NF 3, N 2 O NH 3 (4) (Rapid Thermal Processing, RTP) NH 3, N 2 O NH 3 NH 3 (local scrubber)local scrubber NH 3 5. (pitot tube) ( ) 3 9 10 30 40 Hz 11 600 cmm 1,000 cmm 8 1.5 D 12 1.5D 1.5/0.5 D (1) (2) 11
3 (m) (z) n=1 n=2 n=3 n=4 n=5 1 1 4 0.707R 1-2 2 8 0.500R 0.866R 2-4 3 12 0.408R 0.707R 0.913R 4-4.5 4 16 0.354R 0.612R 0.791R 0.935R 4.5 5 20 0.316R 0.548R 0.707R 0.837R 0.949R (r/r) 9 12
50 40 0 10 11 13
12 / 1.pH ph sensor F- ppm sensor 2. ph ( ) 3. NH 3 Exhaust Scrubber NH 3 14
(local scrubber) local scrubber NH 3 4. 1.5/0.5 D 1. 131 2. 3. 4. SCR 2000 5. 2002 15