97 年化工群北區研習計畫 平面顯示器製程簡介 Development of Display 2 單色低解析度厚 / 重 / 剛性高耗能量小 / 標準顯示面積 2D 平面顯像 彩色高解析度輕 / 薄 / 可撓曲低耗能量大 / 多樣化面積 3D 立體顯像
Introduction Flat Panel Display (FPD) Thin Film Transistor Liquid Crystal Display (TFT-LCD) Display CRT FPD LCD OLED PDP FED VFD LED Flat-CRT PM-LCD AM-LCD TN, STN a-si, Poly-Si 3 Liquid Crystal Display Power Supply Circuit Back Light Module Video Data Data Driver Polarizer TFT Panel LCD Timing Controller Timing Control Scan Driver TFT-LCD Array Polarizer Graphic Card Signal Back-Light Back-Light Power Supply Liquid Crystal 4 LCD LCD System TFT TFT Array LC LC Cell Cell Color Filter LCM: Polarizer film, film, TAB TAB or or COG, Back-light
LCD Manufacturing 添加製程 離子佈植 CVD 沉積薄膜 PVD 旋轉塗佈光阻網印 / 噴灑 / 注入 非晶矽, 多晶矽介電質金屬 ITO 配向膜 間隙子 液晶 LCD 生產 移除製程 清洗蝕刻剝除光阻 5 加熱製程 圖案製程 活化 結晶 微影技術 曝光 ( 加熱 ) 光阻塗佈 ( 添加 ) 烘烤 ( 加熱及移除 ) 顯影 ( 移除 ) TFT Manufacture Process Glass GATE Electrode Insulator & a-si DATA Electrode Passivation Pixel Electrode Patterning Patterning Patterning Patterning Patterning Deposition Cleaning PR Coating Exposure Develop Etch PR Strip Inspection PECVD R F Wet Etch H SiH H H NH H SiNSiNSiN SPUTTER Ar+ DC Ar+ TARGET SUBSTRATE Dry Etch Gas PLASMA F Si O Si SiF 4 RF 6
Various TFTs Technology Organic TFT a -Si TFT poly-si TFT c -Si TFT Crystalline Mobility (cm 2 /Vs) < 1 1 100 1000 Uniformity Poor Resonable Resonable Excellent Stability Poor Resonable Excellent Excellent 7 Characteristic a -Si poly-si Process Temp.( C) 350 450 Masks 4 to 7 5 to 9 TFT structure Bottom gate Top gate Non self-align LDD or self-align Configuration N-type CMOS Driver External Integrated Color Filter Process Color Array 8
Color Filter Process Glass BM Red Green Blue ITO Patterning A Patterning B Patterning B Patterning B Patterning A Deposition & Patterning Process in Detail C/F A B Colored PR Coating Exposure Develop Inspection B/M Deposition Cleaning PR Coating Exposure Develop Wet Etch Strip TARGET Ar+ DC Ar+ Dry Etch SUBSTRATE Gas RF SPUTTER PLASMA F O Si Si SiF 4 9 Cell Manufacture Process C/F Cleaning ignment-layer Rubbing Seal Printing Spacer Dispensing TFT 3 Assembly Scribing & Breaking LC Injection Autoprobe Inspection 10
TFT-LCD Module Process 11 Cell Driving Polarizer Glass Glass Liquid Crystal - - - - - - White (TFT Off) Black (TFT On) 12
Cost of TFT-LCD 材料佔成本的 60% 販售經費 6.39% R&D 5.32% 玻璃 3.07% 靶材 0.70% 彩色濾光片 16.60% 其他 14.90% 材料 62.82% 偏光板 7.47% 其他 Cell 材 2.82% 驅動 IC 10.33% 建物 / 設備 9.93% 背光模組 11.59% 人事 6.4% 其他模組材料 10.23% 以 15 吋面板為例 13 資料來源 : 工研院經資中心 國內顯示產業狀況 上游零件 設備 1. 微影 / 蝕刻 2.PECVD 3.Sputter 4.LCD 設備 5.Assembly 設備 6. 檢查量測設備 材料 1. 液晶材料 - 台灣默克 2. 玻璃基板 - 台灣康寧 旭硝子發殷 3. 偏光膜 - 力特 住友化學 協臻 汎納克 4. 彩色濾光片 - 台灣凸版 展茂 劍度 合鑫 奇美 5.Spacer 組裝零件 1. 驅動 IC- 聯詠 奇景 華邦 2. 控制電路 3. 背光模組 - 輔祥 瑞儀 先益 大億 元津 福華 盛美 中強光電 4.TAB/COG 中游製造 PDP 台塑 華映 OLED 錸寶 勝園東元激光 TN/STN LCD 華映 勝華 南亞 光聯碧悠 國喬 凌巨 高雄日立 台灣愛普生 TFT LCD 友達 奇美 華映彩晶 群創元太 統寶 其他 影視產品 消費產品 資訊產品 通訊產品 儀表產品 下游應用 攜帶電視 VCD Player 投影機 家電產品手錶計算機 筆記型電腦 LCD Monitor 數位相機數位錄影機 PDA 行動電話汽車導航呼叫器視訊電話 工業儀表商業儀表醫療儀表航太儀表 14
Generation of LCD 15 Panel Cuts per Glass Substrate More efficient and economic while moving toward larger substrate! 16
平面顯示器生產 手套 頭套 眼鏡 口罩 連身無塵衣 長統靴 17 Future Trend Future Panel Cost Down New Material New Process New Design High Image Quality Wide View Angle High Resolution Portable Low Power Compact 18
Input Display Toshiba An input display places the photo-sensors and related circuits in the pixel. As well as displaying a color image, the articles has been captured and redisplayed with 64-level gray scale. IDW 2003 AMD10-1 19 Sharp and SEL have succeeded in forming an CPU onto a glass substrate for LCD displays for the first time in the world (1998). The microprocessor used is 3MHz. Design rule = 3 to 4 μm The electron mobility of the CGS is 3 times faster than LTPS and 600 times faster than a-si. CPU on a Glass 20
Flexible Display 21 Thank you for your attention!