(fourth verso; 00 ) 8. Toleracg 8. Default toleraces 8.3 statstcs backgroud 8.4 8.5 user-defed toleracg 8.6 chage table toleracg 8.7 MTF/RMS 8. costructo parameter sestvty performace 8. Default toleraces OSLO ISO 00 ISO 00 OSLO 8. OSLO surface form 3/ gve frges OSLO (mm) 0 0 30 30 00 00 300 ± 0. ± 0. 5 ±. 0 ±. 5 (mm) 8-
(fourth verso; 00 ) (mm) ±. 0 ± 0. ± 0. 4 ± 0. 8 ± 30 ± 30 ± 30 ± 30 0. 0.3 0. 0. 5 0.3 0. 8 0.5. 6 (mm) 0 0 0 0 (m/cm) 3 0. 6 5 0. 5 5 0. 4 5 0. 63 ; ; 3 5() 3 0() 3 0() 3 0() 30 mm 60 mm 4 30 4 0 4 0 4 0 5 3 0.6 5 5 0. 5 5 5 0. 4 5 5 0. 63 8. ISO 00 8.3 statstcs backgroud 78.5mm 3.5mm 78.5mm 78. 78.38 79. 78.5 3 W. Goodma statstcal optcs 8-
(fourth verso; 00 ) X X F(x) X x Pr ob {} x F ( x) ob{ X x} = Pr 8. z X F(x) x F(- )=0 F( )= x 0 x 5 p(x) d p ( x) = F( x) 8. dx p(x)dx X x X xtdx d F( x) dx Pr ob = F { x X } ( x) F( x + x) Pr ob{ X x} Pr ob{ X x + dx} x = x < x + x p x ( x) dx = Pr ob{ x X < x + dx} ( x) 0 p 8.3 ( x) dx = p 8.4 b { a < X b} = p( Pr ob x) dx 8.5 a statstcal averages expected values g(x) x g(x) <g(x)> g ( x) g( x) p( x) = dx 8.6 momets g(x)=x x ( x) = xp dx 8.7 secod momet mea square value x ( x) = x p dx 8.8 g(x)=(x-<x>) varace 8-3
(fourth verso; 00 ) σ = ( x x ) p( x)dx 8.9 σ = x x 8.0 stadard devato X X 8.4 Cooke trplet 6 6 rregulartes 3 3 3 x x x S S MTF S S 0 δs = S S 0 S 0 S f ( x, x, ) δ S = f, 8. L x x =0 S=0 x S S S = x x = δ S = δs = α x 8. = = = δ S = α x = α x 8.3 8-4
(fourth verso; 00 ) δs = = α x = = α x = α x = = α x +, = α α x x 8.0 8.3 8.4 S 8.4 σ δ = + S α x α α x x α x + α α x x 8.5 = = x x x x x x = x x 8.5 = x ( x x ) = σ δ = α α σ 8.6 S x = x σ = x x 8.7 8.3 8.6 S d 8.6 x k σ = k x 8.8 x ( k x ) = k α x = k ( α σ δ = S ) 8.9 S = = = S = x k k δs ( S ) = σ = k 8.0 8.0 x S k k S 8.0 x 8. ed-pot dstrbuto uform dstrbuto Gaussa ormal 8-5
(fourth verso; 00 ) <x >=0 8.3 < S>=0 x x x x x x 8. k κ. 0 0. 58 0. 44 8. k tolerace budgetg square Root of the Sum of the squrace, RSS 8.0 k= 3 k RSS k 8.0 S 8.0 8.0 cetral lmt theorem x,x,x 3,x z = x = 8-6
(fourth verso; 00 ) ( z µ ) p ( z) = exp 8. πσ σ < S>=0 8. S p () s exp ( δs ) = πσ σ δs δ S 8. 8.5 8. ±δs max Pr ob δs δs max { } ( ) ( ) max δs δs = p S d S = erf max δ δ δs σ max δs 8.3 erf(x) error fucto erf ( x) = e π x 0 t dt 8.4 σ δs δs max 8.3 95 ±σ δs 95 tolerace budget 8.3 8.3 δs max /σ δs δ s max σ δs 0.67 0. 50 0.8 0. 58.0 0. 68.5 0. 87.0 0. 95.5 0. 99 8.3 δs max /σ δs sestvty aalyss verse sestvty aalyss ISO00 chage table sestvty table S 8-7
(fourth verso; 00 ) tolerace budget 8.0 σ δs S S = S tar δs = ( S ) = k Star = k Star σ = k 8.5 tar σ δ S Star = 8.6 k 8.3 8.6 8.5 user-defed toleracg CCL SCP 8-8
(fourth verso; 00 ) Compesators Optcs Toolbox : publc\le\lb\walker\toolbox\yama00.le - vgettg *apset SCP vgettg vgettg 8.4 8. 8.4 8-9
(fourth verso; 00 ) 8. RMS OSLO 8.5 8.5 back focus compesator 8.6 8.6 30mm 0 frges 0 9 sphercal form error 0 8.7 8.7 8-0
(fourth verso; 00 ) sphercal frge clear aperture meu User-defed Toleracg>>Sestvty pop-up lst Sphere frges 8.8 8.8 refocusg back focus adustmet 30 m.5 m 3mm 0 m 7.5 m.5 m 99 8.3 δs max /σ δs =.5.0 m σ δs =0.00 k=0.58 =8 8.6 S tar =0.0006 8.9 8-
(fourth verso; 00 ) 8.9 3,4,6,7,8 9.5 5 8.0 8.0.5 m m 3,4 7 5 8 0 6 9 5 0 m 8. 8. 3mm 8. 8-
(fourth verso; 00 ) 8.6 chage table toleracg chage table tolerace 3 trasverse, T logtudal, L wavefrot, W λ/4 strehl 0.8 λ/4 0.5 Smth Proc. SPIE, 53, 96(985) Smth laser recordg les 0.8 m 8. 8.3 8-3
(fourth verso; 00 ) 8. 8.3 8.3 Strehl 0.75 prescrpto Smth tolerace budget peak-to-valley OPD 0.7 8.3 0.5899 m Smth statstcal sum, RSS 0.057 mrad mllrada 8.3 8-4
(fourth verso; 00 ) 8.3 Smth peak-to-valley OPD 0.5 sphercal error elemet thckess ar space dex of refracto surface tlt sphercal aberrato coma astgmatsm OSLO 8.4 8-5
(fourth verso; 00 ) 8.4 OSLO Smth YFS XFS YFS XFS RSS 5 8.5 RSS ( λ ) 0.0 0.0 0.05 0.003 0.060 8.5 RSS 5 RSS 8.6 RSS ( λ ) 0.03 0.83 0.067 8.6 RSS RSS 8.7 RSS ( λ ) 0.099 / 0.03 0.0 0.73 8.7 RSS 8-6
(fourth verso; 00 ) RSS 0.308 Smth budget 0.73λ OPD 0.84λ tolerace budgetg OPD Smth 6 Tolerace Budget 0.84 OPD 0.88 Strehl 0.75 0.84/0.88=.9x RRS optcal shop tolerace profle 5 ±0.mm oe mute customary profle profle 0.00 0.005 8-7
(fourth verso; 00 ) RSS 8.7 RSS Smth budget RSS 0.67 0.73 0.73 75 Strehl 8.8 8.8 budget 8.7 MTF/RMS Cooke 3 Hopks Tza H. H. Hopks ad H. J. Taa, A theoretcal ad expermetal study of les cetrg errors ad ther fluece o optcal magg qualty, Brt. J. Appl. Phys. 7, 33-54 (966). 8-8
(fourth verso; 00 ) omal system MTF MTF/RMS 8.4 QG G omal ray Q Hopks Tza Q G W δ w = PQ ' PG 8.7 ' 8.7 ( δrˆ ˆ)( ˆ gˆ ' ˆ' gˆ ) δ w = δ 8.8 δr v ĝ î 'ˆ PQ ĝ î 'ˆ δrˆ 8.4 Hopks Tza Hopks Tza Brt. J. Appl. phys. 7,33-54 (996) Rmmer Proc. SPIE 47, 8-9
(fourth verso; 00 ) 66-70 (978) MTF = = δ S = A x + B x + c x x 8.9 S S x x 0 S = A = δ S = σ 8.30 4 4 ( x σ x ) + B σ x + = x σ δ = A c σ σ 8.3 S x x A B A B S S x S S 0 A B 8.30 8.3 B A Koch Proc. SPIE 47, 7-8(978) 8.9 A B MTF MTF MTF RMS compesators Smth scaled verso \le\ls\wsmth\ch\hofmmc.le Smth Moder Les Resg.4 Smth 8-0
(fourth verso; 00 ) 00mm 5mm Edt meu scale les pop-up lst scale les to ew focal legth 5 Helum-Cadmum 0.446 m o-axs performace paraxal setup spreadsheet.0x0 0 5.7x0-5 mrad o-axs Spot dagram RMS -4 m 3-4 m 8.9 8.5 8.9 8-
(fourth verso; 00 ) 8.5 RMS OPD 0.049 8.0 8.0 RMS OPD RMS OPD 5 decetrato 0 m 4 6 8 0 0 m OSLO =0 m 8. 8. 8-
(fourth verso; 00 ) Tolerace MTF/Wvf RMS 0.446 m 8. 8. 8. B 0 A RMS OPD A 0 0.054 RMS strehl 0.8 RMS 0.07 RMS 0.049 0.0 RMS 0.0 8.3 8.3 5 0.04 budget 8.4 8-3
(fourth verso; 00 ) 8.5 8.4 8.5 RMS 0.08 0.0 8-4
(fourth verso; 00 ) [] OSLO Optcal Referece verso 5 (Sclar Optcs, 996) [] OSLO Optcal Referece verso 6. (Lambda Research Corp., 00) 8-5
(fourth verso; 00 ). Smth 8-6