第八章 容忍度分析(Iolerancing)

Similar documents
!! # % & ( )!!! # + %!!! &!!, # ( + #. ) % )/ # & /.



99710b43ZW.PDF

!!! #! )! ( %!! #!%! % + % & & ( )) % & & #! & )! ( %! ),,, )

Ρ Τ Π Υ 8 ). /0+ 1, 234) ς Ω! Ω! # Ω Ξ %& Π 8 Δ, + 8 ),. Ψ4) (. / 0+ 1, > + 1, / : ( 2 : / < Α : / %& %& Ζ Θ Π Π 4 Π Τ > [ [ Ζ ] ] %& Τ Τ Ζ Ζ Π

3.1 ( ) (Expectation) (Conditional Mean) (Median) Previous Next

,!! #! > 1? = 4!! > = 5 4? 2 Α Α!.= = 54? Β. : 2>7 2 1 Χ! # % % ( ) +,. /0, , ) 7. 2

untitled

! # %& ( %! & & + %!, ( Α Α Α Α Χ Χ Α Χ Α Α Χ Α Α Α Α

4= 8 4 < 4 ϑ = 4 ϑ ; 4 4= = 8 : 4 < : 4 < Κ : 4 ϑ ; : = 4 4 : ;


第九章 高斯光束(Gaussian beams)

/ Ν #, Ο / ( = Π 2Θ Ε2 Ρ Σ Π 2 Θ Ε Θ Ρ Π 2Θ ϑ2 Ρ Π 2 Θ ϑ2 Ρ Π 23 8 Ρ Π 2 Θϑ 2 Ρ Σ Σ Μ Π 2 Θ 3 Θ Ρ Κ2 Σ Π 2 Θ 3 Θ Ρ Κ Η Σ Π 2 ϑ Η 2 Ρ Π Ρ Π 2 ϑ Θ Κ Ρ Π

, ( 6 7 8! 9! (, 4 : : ; 0.<. = (>!? Α% ), Β 0< Χ 0< Χ 2 Δ Ε Φ( 7 Γ Β Δ Η7 (7 Ι + ) ϑ!, 4 0 / / 2 / / < 5 02

., /,, 0!, + & )!. + + (, &, & 1 & ) ) 2 2 ) 1! 2 2

8 9 8 Δ 9 = 1 Η Ι4 ϑ< Κ Λ 3ϑ 3 >1Ε Μ Ε 8 > = 8 9 =

第十二章 偏振\(polarization\)

第10章 繞射光學(Diffractive Optics)

Β 8 Α ) ; %! #?! > 8 8 Χ Δ Ε ΦΦ Ε Γ Δ Ε Η Η Ι Ε ϑ 8 9 :! 9 9 & ϑ Κ & ϑ Λ &! &!! 4!! Μ Α!! ϑ Β & Ν Λ Κ Λ Ο Λ 8! % & Π Θ Φ & Ρ Θ & Θ & Σ ΠΕ # & Θ Θ Σ Ε

8 9 < ; ; = < ; : < ;! 8 9 % ; ϑ 8 9 <; < 8 9 <! 89! Ε Χ ϑ! ϑ! ϑ < ϑ 8 9 : ϑ ϑ 89 9 ϑ ϑ! ϑ! < ϑ < = 8 9 Χ ϑ!! <! 8 9 ΧΧ ϑ! < < < < = 8 9 <! = 8 9 <! <

第六章 像質品估(Image Evaluation)

) Μ <Κ 1 > < # % & ( ) % > Χ < > Δ Χ < > < > / 7 ϑ Ν < Δ 7 ϑ Ν > < 8 ) %2 ): > < Ο Ε 4 Π : 2 Θ >? / Γ Ι) = =? Γ Α Ι Ρ ;2 < 7 Σ6 )> Ι= Η < Λ 2 % & 1 &

PowerPoint 演示文稿

> # ) Β Χ Χ 7 Δ Ε Φ Γ 5 Η Γ + Ι + ϑ Κ 7 # + 7 Φ 0 Ε Φ # Ε + Φ, Κ + ( Λ # Γ Κ Γ # Κ Μ 0 Ν Ο Κ Ι Π, Ι Π Θ Κ Ι Π ; 4 # Ι Π Η Κ Ι Π. Ο Κ Ι ;. Ο Κ Ι Π 2 Η


2 2 Λ ϑ Δ Χ Δ Ι> 5 Λ Λ Χ Δ 5 Β. Δ Ι > Ε!!Χ ϑ : Χ Ε ϑ! ϑ Β Β Β ϑ Χ Β! Β Χ 5 ϑ Λ ϑ % < Μ / 4 Ν < 7 :. /. Ο 9 4 < / = Π 7 4 Η 7 4 =

! Ν! Ν Ν & ] # Α. 7 Α ) Σ ),, Σ 87 ) Ψ ) +Ε 1)Ε Τ 7 4, <) < Ε : ), > 8 7

第三章 單色差(monochromatic aberration)

= Υ Ξ & 9 = ) %. Ο) Δ Υ Ψ &Ο. 05 3; Ι Ι + 4) &Υ ϑ% Ο ) Χ Υ &! 7) &Ξ) Ζ) 9 [ )!! Τ 9 = Δ Υ Δ Υ Ψ (

4 # = # 4 Γ = 4 0 = 4 = 4 = Η, 6 3 Ι ; 9 Β Δ : 8 9 Χ Χ ϑ 6 Κ Δ ) Χ 8 Λ 6 ;3 Ι 6 Χ Δ : Χ 9 Χ Χ ϑ 6 Κ

( ) (! +)! #! () % + + %, +,!#! # # % + +!

➀ ➁ ➂ ➃ Lecture on Stochastic Processes (by Lijun Bo) 2




%% &% %% %% %% % () (! #! %!!!!!!!%! # %& ( % & ) +, # (.. /,) %& 0

! + +, ) % %.!&!, /! 0! 0 # ( ( # (,, # ( % 1 2 ) (, ( 4! 0 & 2 /, # # ( &

Lecture #4: Several notes 1. Recommend this book, see Chap and 3 for the basics about Matlab. [1] S. C. Chapra, Applied Numerical Methods with MATLAB

<4D F736F F D B0EAA5C1A470BEC7A4CEB0EAA5C1A4A4BEC7B8C9B1CFB1D0BEC7B9EAAC49A4E8AED7>

84 / ! / ! 9 9 9!! 9 : ; < = 1 //< & >!! ? : ; <. 1 //< &! Α




Untitled

untitled


14052_公開用.pdf

# 7 % % % < % +!,! %!!

Α 3 Α 2Η # # > # 8 6 5# Ι + ϑ Κ Ι Ι Ι Η Β Β Β Β Β Β ΔΕ Β Β Γ 8 < Φ Α Α # >, 0 Η Λ Μ Ν Ο Β 8 1 Β Π Θ 1 Π Β 0 Λ Μ 1 Ρ 0 Μ ϑ Σ ϑ Τ Ο Λ 8 ϑ

2 Abstract 厦门大学博硕士论文摘要库 1

% & :?8 & : 3 ; Λ 3 3 # % & ( ) + ) # ( ), ( ) ). ) / & /:. + ( ;< / 0 ( + / = > = =? 2 & /:. + ( ; < % >=? ) 2 5 > =? 2 Α 1 Β 1 + Α

x y z.... X Y (cdf) F (x, y) = P (X x, Y y) (X, Y ) 3.1. (X, Y ) 3.2 P (x 1 < X x 2, y 1 < Y y 2 ) = F (x 2, y 2 ) F (x 2, y 1 ) F (x 1, y 2



1.3

Transcription:

(fourth verso; 00 ) 8. Toleracg 8. Default toleraces 8.3 statstcs backgroud 8.4 8.5 user-defed toleracg 8.6 chage table toleracg 8.7 MTF/RMS 8. costructo parameter sestvty performace 8. Default toleraces OSLO ISO 00 ISO 00 OSLO 8. OSLO surface form 3/ gve frges OSLO (mm) 0 0 30 30 00 00 300 ± 0. ± 0. 5 ±. 0 ±. 5 (mm) 8-

(fourth verso; 00 ) (mm) ±. 0 ± 0. ± 0. 4 ± 0. 8 ± 30 ± 30 ± 30 ± 30 0. 0.3 0. 0. 5 0.3 0. 8 0.5. 6 (mm) 0 0 0 0 (m/cm) 3 0. 6 5 0. 5 5 0. 4 5 0. 63 ; ; 3 5() 3 0() 3 0() 3 0() 30 mm 60 mm 4 30 4 0 4 0 4 0 5 3 0.6 5 5 0. 5 5 5 0. 4 5 5 0. 63 8. ISO 00 8.3 statstcs backgroud 78.5mm 3.5mm 78.5mm 78. 78.38 79. 78.5 3 W. Goodma statstcal optcs 8-

(fourth verso; 00 ) X X F(x) X x Pr ob {} x F ( x) ob{ X x} = Pr 8. z X F(x) x F(- )=0 F( )= x 0 x 5 p(x) d p ( x) = F( x) 8. dx p(x)dx X x X xtdx d F( x) dx Pr ob = F { x X } ( x) F( x + x) Pr ob{ X x} Pr ob{ X x + dx} x = x < x + x p x ( x) dx = Pr ob{ x X < x + dx} ( x) 0 p 8.3 ( x) dx = p 8.4 b { a < X b} = p( Pr ob x) dx 8.5 a statstcal averages expected values g(x) x g(x) <g(x)> g ( x) g( x) p( x) = dx 8.6 momets g(x)=x x ( x) = xp dx 8.7 secod momet mea square value x ( x) = x p dx 8.8 g(x)=(x-<x>) varace 8-3

(fourth verso; 00 ) σ = ( x x ) p( x)dx 8.9 σ = x x 8.0 stadard devato X X 8.4 Cooke trplet 6 6 rregulartes 3 3 3 x x x S S MTF S S 0 δs = S S 0 S 0 S f ( x, x, ) δ S = f, 8. L x x =0 S=0 x S S S = x x = δ S = δs = α x 8. = = = δ S = α x = α x 8.3 8-4

(fourth verso; 00 ) δs = = α x = = α x = α x = = α x +, = α α x x 8.0 8.3 8.4 S 8.4 σ δ = + S α x α α x x α x + α α x x 8.5 = = x x x x x x = x x 8.5 = x ( x x ) = σ δ = α α σ 8.6 S x = x σ = x x 8.7 8.3 8.6 S d 8.6 x k σ = k x 8.8 x ( k x ) = k α x = k ( α σ δ = S ) 8.9 S = = = S = x k k δs ( S ) = σ = k 8.0 8.0 x S k k S 8.0 x 8. ed-pot dstrbuto uform dstrbuto Gaussa ormal 8-5

(fourth verso; 00 ) <x >=0 8.3 < S>=0 x x x x x x 8. k κ. 0 0. 58 0. 44 8. k tolerace budgetg square Root of the Sum of the squrace, RSS 8.0 k= 3 k RSS k 8.0 S 8.0 8.0 cetral lmt theorem x,x,x 3,x z = x = 8-6

(fourth verso; 00 ) ( z µ ) p ( z) = exp 8. πσ σ < S>=0 8. S p () s exp ( δs ) = πσ σ δs δ S 8. 8.5 8. ±δs max Pr ob δs δs max { } ( ) ( ) max δs δs = p S d S = erf max δ δ δs σ max δs 8.3 erf(x) error fucto erf ( x) = e π x 0 t dt 8.4 σ δs δs max 8.3 95 ±σ δs 95 tolerace budget 8.3 8.3 δs max /σ δs δ s max σ δs 0.67 0. 50 0.8 0. 58.0 0. 68.5 0. 87.0 0. 95.5 0. 99 8.3 δs max /σ δs sestvty aalyss verse sestvty aalyss ISO00 chage table sestvty table S 8-7

(fourth verso; 00 ) tolerace budget 8.0 σ δs S S = S tar δs = ( S ) = k Star = k Star σ = k 8.5 tar σ δ S Star = 8.6 k 8.3 8.6 8.5 user-defed toleracg CCL SCP 8-8

(fourth verso; 00 ) Compesators Optcs Toolbox : publc\le\lb\walker\toolbox\yama00.le - vgettg *apset SCP vgettg vgettg 8.4 8. 8.4 8-9

(fourth verso; 00 ) 8. RMS OSLO 8.5 8.5 back focus compesator 8.6 8.6 30mm 0 frges 0 9 sphercal form error 0 8.7 8.7 8-0

(fourth verso; 00 ) sphercal frge clear aperture meu User-defed Toleracg>>Sestvty pop-up lst Sphere frges 8.8 8.8 refocusg back focus adustmet 30 m.5 m 3mm 0 m 7.5 m.5 m 99 8.3 δs max /σ δs =.5.0 m σ δs =0.00 k=0.58 =8 8.6 S tar =0.0006 8.9 8-

(fourth verso; 00 ) 8.9 3,4,6,7,8 9.5 5 8.0 8.0.5 m m 3,4 7 5 8 0 6 9 5 0 m 8. 8. 3mm 8. 8-

(fourth verso; 00 ) 8.6 chage table toleracg chage table tolerace 3 trasverse, T logtudal, L wavefrot, W λ/4 strehl 0.8 λ/4 0.5 Smth Proc. SPIE, 53, 96(985) Smth laser recordg les 0.8 m 8. 8.3 8-3

(fourth verso; 00 ) 8. 8.3 8.3 Strehl 0.75 prescrpto Smth tolerace budget peak-to-valley OPD 0.7 8.3 0.5899 m Smth statstcal sum, RSS 0.057 mrad mllrada 8.3 8-4

(fourth verso; 00 ) 8.3 Smth peak-to-valley OPD 0.5 sphercal error elemet thckess ar space dex of refracto surface tlt sphercal aberrato coma astgmatsm OSLO 8.4 8-5

(fourth verso; 00 ) 8.4 OSLO Smth YFS XFS YFS XFS RSS 5 8.5 RSS ( λ ) 0.0 0.0 0.05 0.003 0.060 8.5 RSS 5 RSS 8.6 RSS ( λ ) 0.03 0.83 0.067 8.6 RSS RSS 8.7 RSS ( λ ) 0.099 / 0.03 0.0 0.73 8.7 RSS 8-6

(fourth verso; 00 ) RSS 0.308 Smth budget 0.73λ OPD 0.84λ tolerace budgetg OPD Smth 6 Tolerace Budget 0.84 OPD 0.88 Strehl 0.75 0.84/0.88=.9x RRS optcal shop tolerace profle 5 ±0.mm oe mute customary profle profle 0.00 0.005 8-7

(fourth verso; 00 ) RSS 8.7 RSS Smth budget RSS 0.67 0.73 0.73 75 Strehl 8.8 8.8 budget 8.7 MTF/RMS Cooke 3 Hopks Tza H. H. Hopks ad H. J. Taa, A theoretcal ad expermetal study of les cetrg errors ad ther fluece o optcal magg qualty, Brt. J. Appl. Phys. 7, 33-54 (966). 8-8

(fourth verso; 00 ) omal system MTF MTF/RMS 8.4 QG G omal ray Q Hopks Tza Q G W δ w = PQ ' PG 8.7 ' 8.7 ( δrˆ ˆ)( ˆ gˆ ' ˆ' gˆ ) δ w = δ 8.8 δr v ĝ î 'ˆ PQ ĝ î 'ˆ δrˆ 8.4 Hopks Tza Hopks Tza Brt. J. Appl. phys. 7,33-54 (996) Rmmer Proc. SPIE 47, 8-9

(fourth verso; 00 ) 66-70 (978) MTF = = δ S = A x + B x + c x x 8.9 S S x x 0 S = A = δ S = σ 8.30 4 4 ( x σ x ) + B σ x + = x σ δ = A c σ σ 8.3 S x x A B A B S S x S S 0 A B 8.30 8.3 B A Koch Proc. SPIE 47, 7-8(978) 8.9 A B MTF MTF MTF RMS compesators Smth scaled verso \le\ls\wsmth\ch\hofmmc.le Smth Moder Les Resg.4 Smth 8-0

(fourth verso; 00 ) 00mm 5mm Edt meu scale les pop-up lst scale les to ew focal legth 5 Helum-Cadmum 0.446 m o-axs performace paraxal setup spreadsheet.0x0 0 5.7x0-5 mrad o-axs Spot dagram RMS -4 m 3-4 m 8.9 8.5 8.9 8-

(fourth verso; 00 ) 8.5 RMS OPD 0.049 8.0 8.0 RMS OPD RMS OPD 5 decetrato 0 m 4 6 8 0 0 m OSLO =0 m 8. 8. 8-

(fourth verso; 00 ) Tolerace MTF/Wvf RMS 0.446 m 8. 8. 8. B 0 A RMS OPD A 0 0.054 RMS strehl 0.8 RMS 0.07 RMS 0.049 0.0 RMS 0.0 8.3 8.3 5 0.04 budget 8.4 8-3

(fourth verso; 00 ) 8.5 8.4 8.5 RMS 0.08 0.0 8-4

(fourth verso; 00 ) [] OSLO Optcal Referece verso 5 (Sclar Optcs, 996) [] OSLO Optcal Referece verso 6. (Lambda Research Corp., 00) 8-5

(fourth verso; 00 ). Smth 8-6