2011 / / / / /Facility/Gas & Chemical section
V.S HOW?! Page 2/51
: 1. ( ) 2. ( ) 3. 2,100 ( ) HOW?! WHO?! NEW?! NEW?! Page 3/51 ( / ) / : 1. 2. 3.
SUMMARY & Q & A TMAH Page 4/51
SUMMARY & Q & A TMAH Page 5/51
:Drum/Tote/Lorry /Tote/Lorry Tools 3F FAB CCB: Chemical Coupler Booth CTU: Chemical Transfer Unit CDU: Chemical Dispense Unit VMB: Valves Manifold Box VMB VMB 2F SUB FAB CCB Storage CTU Supply Tank Tank CDU 1F HPM Page 6/51
:H2SO4H3PO4PGMEAIPAHF Tools 3F FAB Waste Chemical Collect Tank WCB (Waste Coupler Box) 1F HPM Page 7/51
SUMMARY - Scrubber - 1. 2. PGMEA- PGMEA - 1. - - 2. - Page 8/51
SUMMARY - Scrubber - 1. 2. PGMEA- PGMEA - 1. - - 2. - Page 9/51
- Scrubber Scrubber (80%) (40%) WET SCRUBBER INV From Prouduction Area Suction Chamber WET SCRUBBER WET SCRUBBER WET SCRUBBER INV INV INV Exhaust Stack Scrubber H2SO4 Tank Exhaust Fan PT Controller 5F RF Tools 3F FAB 80% W-H2SO4 Collect Tank P Page 10/51 Dilute Tank P CW P 1F HPM
- : 给 40% 1,169/ 40% 444/ 80% 650/ 175/ NaOH 940/ 799 / 1,418 / 1,600 10,000 KNTD/ 1,400 Ton/ 1,200 1,000 800 600 400 200 0 650 1,169 4,442 940 2,000 1.H2SO4 : 89.7 Tons-CO2/ 0 2.NaOH : 1,052.8 Tons-CO2/ 1,143 Tons-CO2/ 1,755 7,990 Page 11/51 8,000 6,000 4,000 (Ton/) (KNTD/)
SUMMARY - Scrubber - 1. 2. PGMEA- PGMEA - 1. - - 2. - Page 12/51
1,600(L/day) : 1. Chemical ( 5,600 s/cm 4,800 s/cm ) 2. Tank 3 Tank 4 Tank 5 Tank 6 AWH drain Page 13/51
1,600(L/day) : 1. Chemical ( 5,600 s/cm 4,800 s/cm ) 2. Tank 3 Tank 4 Tank 5 Tank 6 H3PO4 PM tank Page 14/51 AWH drain
- (Na 3 PO 4 ) % 70 75~80 % 30 20~25 Color - TCLP mg/l OK H 3 PO 4 + 3NaOH Na 3 PO 4 + 3H 2 O Page 15/51
- ( ) ( ) NaOH ( ) Page 16/51
- % 70 75~80 % 20~25 &% NA Color - TCLP mg/l OK ( 158 ) 85 % Page 17/51
- ( & ) Page 18/51
- NaOH :( ) H 3 PO 4 H + +H 2 PO - 4 Ka 1 = 7.5 10-3 -----(1) H 2 PO - 4 H + +H 1 PO -2 4 Ka 2 = 6.25 10-8 -----(2) H 1 PO -2 4 H + +PO -3 4 Ka 3 = 2.2 10-13 -----(3) Ka ph=7 (1) [H 3 PO 4 ]=[ H 2 PO - 4 ]-----(4) 2 H 2 PO - 4 H + +H 1 PO -2 4 Ka 2 = 6.25 10-8 PH = 7 (2) PH=pKa 2 +log [H 1 PO -2 4 ]/[H 2 PO - 4 ] 7 = 7.2 + log [H 1 PO -2 4 ]/[H 2 PO - 4 ] [H 1 PO4-2 ]/[H 2 PO4 - ] =10-0.2 =0.63 [H 1 PO - 4 2 ]=0.63[H 2 PO - 4 ] -----(5) PH = 7 (3) PH=pKa 3 +log [PO -3 4 ]/[ H 1 PO -2 4 ] 7= 12.7+log [PO -3 4 ]/[ H 1 PO -2 4 ] [PO -3 4 ]/[ H 1 PO -2 4 ]=10-5.7 [PO -3 4 ]= 10-5.7 [ H 1 PO -2 4 ] ph= 7 (4)(5) [H + ]=[H 2 PO 4- ] +[H 1 PO -2 4 ]+ [PO -3 4 ] =1.63[H 2 PO - 4 ]=1.63[H 3 PO 4 ] H 3 PO 4 ph 7 1.63 [H + ] H 3 PO 4 ( ) :NaOH( ) =1:1.63 Page 19/51 ( H 3 PO 4, ) 400 ml 85% H 3 PO 4 2ml 10%NaOH ph=7 10%NaOH 18 ml H 3 PO 4 98 85% H3PO4 1.68 85% H 3 PO 4 2ml mole 85%*2*1.68=2.85 2.85/98= 0.029 M (1) NaOH 40 10%NaOH 1.1 10%NaOH 18 mlmole 10%*18*1.1=1.98 1.98/40=0.049 M -----(2) (2)/(1)= 0.049/0.029=1.68 85% H 3 PO 4 2ml 45%NaOH 4ml 79% H3PO4 2,490 * 0.8(wafer )*(79/85)=1,851L/ WWT AW 45% NaOH = 3,702L/ 3,702 L 1.48 kg/ L =5,479 kg NaOH/ 5,479kg 365 2,000,000Kg NaOH/ 2,000,000Kg 8.5/Kg= 17,000,000
- : 1,100/ 79% 45% NaOH 2,000Ton ( 8.5/Kg ) 1,700 / 1,080/ 2/Kg 216 / 1,916 / 1.H3PO4 : 1,606 Tons-CO2/ 2.NaOH : 2,240 Tons-CO2/ 3,846 Tons-CO2/ Page 20/51
SUMMARY - Scrubber - 1. 2. PGMEA- PGMEA - 1. - - 2. - Page 21/51
PGMEA PGMEA PGMEA PGMEA % 85 90~93 % 10 3~5 % 5 4~5 Color - TCLP mg/l OK PGMEA 99% PGMEA Page 22/51
PGMEA PGMEA PGMEA ( ) ( ) ( ) PGMEA Page 23/51
PGMEA PGMEA PGMEA EBR7030(70%PGME & 30%PGMEA) PGME PGMEA Page 24/51
PGMEA PGMEA PGMEA EBR 7030(70%PGME & 30%PGMEA) 760 H2O 100 120 146 200 PGME PGMEA 760 100 100 Vapor Pressure mmhg 10 10 100 200 Temperature Page 25/51
PGMEA PGMEA PGMEA EBR 7030(70%PGME & 30%PGMEA) 760 H2O 100 120 146 200 PGME PGMEA 760 54 100 (85~140mmHg) 100 Vapor Pressure mmhg 10 10 100 200 Temperature Page 26/51
PGMEA PGMEA PGMEA EBR 7030(70%PGME & 30%PGMEA) 760 H2O 100 120 146 200 PGME PGMEA 760 100 92 (85~140mmHg) 90% 100 Vapor Pressure mmhg 10 10 100 200 Temperature Page 27/51
PGMEA PGMEA PGMEA EBR 7030(70%PGME & 30%PGMEA) 760 H2O 100 120 146 200 PGME PGMEA 760 100 92 (160~210mmHg) 99% 100 Vapor Pressure mmhg 10 10 100 200 Temperature Page 28/51
PGMEA - : PGMEA 890/ 5,000/ 446 PGMEA 1,279/ PGMEA 2/Kg 256 / 700 / 1.PGMEA: 1646.5 Tons-CO2/ PGMEA Page 29/51
SUMMARY - Scrubber - 1. 2. PGMEA- PGMEA - 1. - - 2. - Page 30/51
- (CaF 2 ) % 6 15~25 Color - TCLP mg/l OK CaCO 3 + H 2 O Ca(OH) 2 + CO 2 2HF + Ca(OH)2 CaF 2 + 2 H 2 O Page 31/51
- &CO2 H 2 O (15~25%) ( / ) H2O ( ) Page 32/51
- (NaSiF 6 ) % 6 15~25 Color - TCLP mg/l OK 6HF + SiO 2 H 2 SiF 6 + 2H 2 O H2SiF 6 + 2NaOH NaSiF 6 + H 2 O Page 33/51
( ) - (15~25%) ( ) ( ) 49% (SiO 2 ) NaOH Page 34/51
SUMMARY - Scrubber - 1. 2. PGMEA- PGMEA - 1. - - 2. - Page 35/51
WET 1. HF49% (DHF ) 2. HF 1,100~1,200L HF 1/3 HF Drain HF Drain Page 36/51
1. (Waste Tank 10,000 L ) ( ) Backup WT WT WT NEW WT HPM L25 10,000L 10,000L HPM L10 Pump Pump WCB Page 37/51
(25%) % 25 34~36 Color - TCLP mg/l OK DI 25% / Page 38/51
(34~36%) ( & ) DI Water (25%) Page 39/51
- : 1. : 4,901.9 Tons-CO2/ 1. 960/ 2. : 1,965.4 Tons-CO2/ 6,867 Tons-CO2/ 20% ( 16.4/Kg ) 1,570 / 2. 220/ 35% ( 28.7/Kg ) 630 / 25/Kg 550 / 3. 2,750 / Items WWT-FW (500ppm) W-HF (200,000ppm) W-HF (350,000ppm) 1. (NT/L) 0.001 0.42 0.73 2. (NT/L) 0.033 13.03 22.81 3. (NT/L) 0.007 2.95 5.16 (NT/L) 0.041 16.40 28.70 Page 40/51
SUMMARY & Q & A TMAH Page 41/51
3,820/ 7,698/ 5,000 6,791 8,000 7,000 6,000 4,000 3,000 2,000 1,000 13,502/ 0 546,639 14 (Ton/) (KNTD/) (Ton/) 650 940 14,187 1,143 1,100 1,080 19,160 3,846 PGMEA 890-7,008 1,647 1,180 5,678 27,558 6,867 Total 3,820 7,698 67,913 13,502 650 14,187 940 1,143 1,100 Page 42/51 19,160 1,080 3,846 890 7,008 0 1,647 27,558 1,180 5,678 6,867 (Ton/) Ton/ KNTD/ 30,000 25,000 20,000 15,000 10,000 5,000 0 (Ton/) (Ton/) (Ton/) (KNTD/)
SUMMARY & Q & A TMAH Page 43/51
-TMAH TMAH TMAH On -s ite TM AH ( 0.3%- 0.8% ) TM AH < 20ppm TM A H 20 % : 10%- 11% TM A + 12% -13% TMAX ( by tan ktr uck ) Re cyc le Fa cto ry site TM AH TM A X 25% TMAH 20% ( by tan ktr uck ) Page 44/51
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