10 CIP 2003 10 ISBN7 111 13084 7 Ⅰ Ⅱ Ⅲ Ⅳ F810 423 CIP 2003 083742 22 100037 2004 1 1 1 890mm 1240mmA5 12 25 316 0001-010 68993821 88379646
TaxPlanning 11 10
Ⅳ 1 2 3 4 5 6 2003 10
1 1 15 23 23 38 56 56 62 67 67 76 125 135 172 172 194 209 209 212 214 261 261
Ⅵ 267 280 288 288 291 296 297 300 312 312 325 337 342 342 380
2 2010 5~10 1
3 2 3 1 2 3 2010 17% 3% 10%
4 100
5 GB T19000 ISO9000 CMM 3~5 1
6 2 3
7
8 2010 17% 6% 1 80 2 0 25μm 3
9 2000 18 2002 2005 2005 2500 60% 50 50 80
10 2005 1
11 2 3
12 4
13 1 2 30% 3
14 4 40 863 30 2003 ~2005 10 5 17% 3%
15 6 7 1 2 3
16 4 5 6 7 8 9 10 11 1 2 3 30% 10% 20%
17 4 5% 5 60% 60% 6 1 2
18 3 12 1 2 3
19 1 2 3 4 11 5 6
20 7 8 9 10 11 12 13 14
15 21 2000 11 16 2001 1 1
2 1 1 烄 烄 烄 烅 烅烆 烅 烆 烆 烄 烅 烆 1 1
24 1 2 1 50% 100 2 180 3 3 1
25 1 2 3 4 1 5 2
26 1 2 3 4 30 3 1 2 3 4 1 2 3
27 4 1 17% 2 17% 13% 1 2 3 4 5
28 1 1 2 2 1 6% 3 2 6% 1998 7 1 6% 4% = - 1
29 2 3 4
30 = = + + = 1 1
31 = = 1 1 2 1 2 1 2 3 3
32 2 3 4 = 1+ 5
33 1 2 3 = 1+ = 1+ + = 1+ 1-1 2 10% 6 1 1995 6 1 7 = +
34 = + + = 1 2 1 1 2 3 10%
35 = 10% 4 1 1998 7 1 7% = 1998 7 1 7% 2 3 4 5 7% 5 6
36 2 1 1 2 2 3 1 2000 2 3 1
37 2 3 4 5 6 7 8 4 5
38 1 2 3 4 5
6% 4% 3 = - = - = - = 17%- 17% 1- = 17% = 6% 39
40 17% = 6% =6% 17% 100%=35 29% 35 29% 35 29% 35 29% 13% 4% 2 1 2 1 17% 6% 35 29% 17% 4% 23 53% 13% 6% 46 15% 13% 4% 30 77% = - =1- =1- x 17% 1-x = 6% x=64 71% 64 71% 64 71%
41 64 71% 2 2 2 2 17% 6% 64 71% 17% 4% 76 47% 13% 6% 53 85% 13% 4% 69 23% y x y 1+17% -x 1+17% 17% =y 1+6% 6% x=61%y 61% 61% 61% 2 3
42 2 3 17% 6% 61 04% 17% 4% 73 53% 13% 6% 50 80% 13% 4% 66 57% 1 50% 50% 2
43 50% 50% 50% 50% r s p 17% 5% r= s-p s 100% =s 1+17% 17% r =s 5% s 1+17% 17% r=s 5% s=34 41% 2 4
4 2 4 17% 3% 20 65% 17% 5% 34 41% 13% 3% 26 08% 13% 5% 43 46% 1
45 2 3 1 2 3 4
46 1 2 3 4 5 6 7 1 2 3 4
47 5 1 2 3 4 5 1997 37 6 7 2000 6 24 2010 17% 3% 8 2000 6 24 2010 17% 6% 9
48 10 11 12 13 2000 7 1 14 2000 7 1 15 80 0 25μm 16 6% 17 6% 18 19
49 1 25% 1997 37 1 2 1999 9 1
50 = - 2 1 2 3 4 5 6 7 8 9 3
51 1 1 4 1 2 3 4 5 = 5 = = -
52 5 1999 9 1 1999 171 1999 171
53 3
54 1 3 5 10 15 1 1 1 10 1 10 2 1 3 5 10 15 5 1 10 3 7 4 31 3
55 1 2 3 4 5
57 9 3 1 3 1 3% 3% 5% 1 3% 3% OK 5%~20%2 5% 5%
58 5% 1 8% 2001 1 1 3 1% 2003 5% 2 2001 5 1 20% 1 2 3 = 1+ 1-
59 10% 1 3 2 3 = = 1
60 2 1 2 1 2 3 5 10 15 1 1 10 5 10 15 1 10
61 1993 1993
62 1 2 3 1
63 1 2 3 2
64 1 2 1 2 3 4
65 1 2
6 1 2 3 3 1999 2003 4 1999 5 1
1 2
68 1 2 3 100%
69 33% 3 3 18% 3~1010 27%
= - = + + 1 = - 2 = - 3 = - - - = - - - 1 = - 2 = + - = + - 0 7
71 = + + = + - 1 1 2 1 4 = 33% = 1 2 1 4 33% 2 = 33%
72 = - 1 = + + 2 = - - - - + 3 = - - - + - 4 = 1 1 12 31 12
73 15 4 45
74
75 60% 15%
76 4
77 1 1 2
78 3 4 5 2 3
79 4 5
80 1 2
81 33% 1 3~10 10 27% 2 33 18% 3 15% 15%
82 4 10% 1 2 3 1 2 3 4 5 6 7 8 9
83 1 2 3 1 2 3
84 4 800 20% 5 1 2 3 4 35% 5 50% 6 5% 6 1 2
85 3 4 50% 1 5 2 3
86 1 2 3 4 5 6
87 2% 1 2 3 5 1 2 3 4
8 5 1500 5 1500 3 1 2
89 5 3 1 2 3 5 4 5 6 1 5
90 2 1 2 3 4 5 3 6 3 1 2000
91 1 2 3 4 5 6 7 8 1
92 2 1 2 3 5% 1 1 20 2 10 3 5
93 2 1996 41 2000 84 1 2 10 3 30%~50% 4 1
94 2 3 3 4 5 1 2 3 4 1
95 2 1 2 3 1 2
96 3 2% 1 2 3 4 4 1 2 3
97 1 2 3 5 45 3
98 3% 1 5% 1 1 10% 1 2 3 4
99 2 3% 3 4 5 2000 1 1 6 2000 10 1 7 2 1 2 3% 1 5%
100 3 3% 5 5 5 1 2
101 3 4 5 1 2 1 2
102 3 6 45 7 45 8
103 1 2
104 1 2 = 3
105 5 4 16 5% 5 40% 獉獉獉獉獉獉獉 5
106 5
107 1999 7 1
108 5000 5000 1 2 3 4 5 10
109 20 5
110 1999 7 1 1999 1999 7 1 12 31 2000 6 1
111 2 3 3 15% 1 2 1 2 3 1 2 4 1 5
112 1 5 1 5 2 5 3 1 2 30 30 30 3 4 40% 1999 290 94 001 5
113 1 15% 2 30 5%~10% 3 1 30 2 2000 1 1 2004 12 31 5
114 4 1999 10 1 2003 1999 10 1 5 1 1 2 3 5 2 3 80 0 25μm 2000 7 1 6 1
115 2 10% 10% 50% 3 10% 50% 4 7 1 5 6 10
116 3 3 2000 1 1 3 1 2
117 1 2 20% 1 = 2 3
118 3 4 4 1 2000 9 500 100 550 400 3 1 2000 1 33% 180 10 3 150 100
119 3 900 5 10% 10 20% 180 20%=36 1 2 100 900 180 3+10 3 1 2000 =79 84 100-79 84 =20 16 180 1 2 1 900 1-33% +79 84 33%= 629 34 1-25% = 472 01 10% 5% 180 2000 472 01 0 909 =38 62 2
120 34 10% 180 2000 900 67% 1-25% 10% 0 8264 =336 36 418 98 10+ 38 62+34+336 36 100 20% 30 180 3+10-500 33%=16 5 550-500 5 33%=3 3 1 900 1-33% + 3 3-16 5 =589 8 1 30 16 2 5 89 33 210 60 446 59 16 5+100+ 30 16+89 33+210 60
121 4 1 4 1 20%
122 1 2 20% 1 2 3 3
123 1 2 8 = + +
124 33% 3 3 18% 10 10 3 27% 4 2 1 2
125 50% 17% 3% 1 2 3
126 1 2 3 4 5 6 4 1 2
127 3 1 2 3
128 1 30% 3% 33% 2 20% 1 1 12 31 12 12
129 = 1 1 2000 2 1 2 3 4 5
130 6 3 1 2 3 10% 4 = - = 100% 5 4 1 4 1 20 10 5 1
131 2 3 6 7 8 9 1 2 3
132 10 5 1 2 1
133 2 3 3 1 2 10 20%
134 5 15 5 = = 1 1 12 31
135 1 12 2 12 3 15
136 1
137 2 3 1 2 1 2 3 4 5 6 1
138 2 1 2
139 1 2 1 2 3 3 4
140 1 2 10% 1 1 2 3 2
141 3 4 5 1 2 3 4 5 6 7 8 3 2000 1 1
142 10% 1 2 1 2 3
143 3 1 1500 5 1500 3 2 500 10 500 5 4 5 5 14% 6 7
144 8 9 10 11 2000 1 1 10% 10% 50%
145 10% 50% 12 2000 13 2000 4 1 14 1 2 3 4
146 5 6 7 8 9 10 1 2 1 20 1 2 2 10
147 3 5 3 1 2 3 4 5 6 7
148 10 1 1997 37 1997 37 40%
149 40% 2 3 5 7 4 5 6 7 5 1999 7 1
150 1999 7 1
151 1 1 2 3 4 5 6 7 8 4 1999 7 1 1999 7 1 1999 12 31
152 2000 6 2000 9 1 2000 49 1997 37 1997 37 2
153 5 1 2 1 2 3 5 5 5 6 4 5 5
154 60 1 1 1 = 2 = - 2
155 1 2 3 5 4 2 1 5
156 40% 1 2 3 4 1 5 5 2 = 1-
157 1 3 100% 4 60% 3 3 3 1 15%
158 15% 2 24% 24% 1 2 3 4 5 6 7 8 9
159 1 2 3 4 5 1 2 3 4
160 3 15% 1 1 2 3000 3 15% 2 3 1000 10 4 5
161 6 7 15% 15% 8 15% 9 24% 10 1 2 3 5 1999 1 1 15% 50% 4 2000 1 1 3 15%
3 8 1 10 1 2 3 5 75 1 8 3 70% 10% 2000 1 1 2000 1 1 2000 1 1 2000 1 1 1 10 1 2 3 5 62 1
163 6 2 10 15%~30% 50% 3 1
164 15% 10 1 2 3 5 3000 2 3 10% 10% 15% 10%
165 3 = 1-1 40% 1 100% 1 70% 2 15% 10% 3 =
166 1-1 40% 100% 15% 15% 1991 4 9 45 15%
167 24% 15% 85 15%
168 1 2 3000 3 15% 1988 6 15 88 091 3000 15%
169 1995 139 15% 2000 2000 26 2000 9 27 2000 13l 2000 2000 71 72
170 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 2000 87 2000 1 24 1993 261
171 67 1993 465 1997 585 1998 787 1994 1999 67
11 1
173 2 3
174 1 2 4
175 5 6 1 2 3 4
176 7 8 9
177 10 11 1 1 5%~45% 5 1 2 5%~35% 5 2
178 3 20% 5 3 5 1 % 1 500 2 3 4 5 6 7 8 475 5 0 500~2000 475~1825 10 25 2000~5000 1825~4375 15 125 5000~20000 4375~16375 20 375 20000~40000 16375~31375 40000~60000 31375~45375 60000~80000 45375~58375 80000~10000 58375~70375 9 10000 5 2 25 1375 30 3375 35 6375 40 10375 70375 45 15375 % 1 5000 2 4750 5 0 5000~10000 4750~9250 10 250 3 4 10000~30000 9250~25250 20 1250 30000~50000 25250~39250 30 4250 5 50000 39250 35 6750
179 5 3 % 1 20000 2 16000 20 0 20000~50000 16000~37000 30 2000 3 50000 37000 40 7000
180 1 2 3 4 1 800 = -800 2 1 800 3200 = -800-3200 1 2 3
181 4 2 3 4
182 5 800 800 3 800 4000 = - = -800 4000-1
183 1 = - - 1-5 1 = - 5 2 5 1 5 2 2 = + - 5 3 = - 5 4 5 1 5 2 = - - 1- =
184 2 3 = - 5 5 5 5 4 800 12 = - 12-12 5
185 6 6 6 6 1 2 12 12 3 7 4
186 5 6 1999 10 1 1 2 3 4 5%~35%
187 1997 43 1 2 3 4 5 2% 14% 1 5% 6
188 2% 7 5 1500 3 8 1 2 3 = = = 1-5 4 5 4 % 5~20 7~20 7~25 20~40 10~30
189 5
190 7 3 60 12 1 2 5 5 30
191 2000 1 1 1 800 = - 800 2
192 = - 12 = - 800 = - 1 4000 800 4000 20% 2 20% =
193 1 2 20% = 50%
194 7 2%
195 90 90 183 1 1998 12 1 1999 1 20 1998 31 1999 19 2 30 90 1998 5 1 6 1 25 7 31 5 31 5 1 ~5 31 6 30 6 1 ~6 30 7 30 7 1 ~7 30 91 6 25 30 30 90
196 5 1
197 2 800 3 800 3200 1 2 3 4 4 5 5%~45% 20% 20% 30% 40%
198 6
199 1 2 3 4 7 1 2 3
200 8 1 2 3 4 5 9 10 1 2
201 11 12 1 2 30% 2000 1 1 2000 1 1
202 1 2 3 4 2001 1 1
203 1 2 3 4 1997 43 1 2 3 4 2% 14% 1 5% 5 2% 6 1500 5 1500
204 3 5 1 2 2000 6 1 3 1 2
205 1 2 3 5?? 1997 14
206 1 2 1 90 183 2 3 1 B
207 2 3 B H B 4 5 6 7 8 9
208 4 1 2 1 90 3 5 1 2 3
1998 1 1998 1 1 1 2 1999 8 1999 8
210 1 2 3 4 2002 9 4 1 1996 4 1 1996 4 1 1997 37 2
211 1 5 20% 5 2 5 3 1994 42 3 20
212 2002 9 1 2002 10 1 2000 2000 9 7 2000 83 1 2000 2000 10 1 1 2000 2 2000 9 30 9 30 2001 9 31 1997 12 31 2001 10 1 2000 3 1997 12 1 2 3
213 1 2 3 4 10% 5 6 7 8 9 10 11 12 13 14 15 16
214 1997 4 10 2001 1 1 1997 3 1 2 3 WTO 2002 1 1 21 5% 1997 3 1
215 6% 2 3 2000 7 1 1 2001 1 1 80 0 25μm 2 6 1 3 6 2
216 4 5 6 1 1 2 ShearStuds 3 Fire Paint Proofing FM factorymutual 4 5 6 Epoxy Zinc FM PhosphatePrimer FM EP66Paint Conductive FloorTile HardenerforE 7 poxy 8 0 8m~1 2m 0 8m~1 2m 9
217 10 11 12 0 9m~2 4m 2 2m 13 Aluminum Al loy RaisedFloor RaisedFloor Aluminum ES 14 DFloor 15 2 5m~6m 1 0m~1 2m 16 17 18 60cm 60cm 0 1cm 19 60cm 120cm 90cm 120cm 90cm 75cm 75cm 120cm
218 20 21 22 23 24 25 Clean Room Partition door 26 27 Clean Room >0 35mm Partition Door Hardware Doors 28 29 Ionizer 30 31 Water Proofing Menbrane 32 33 PrepaintedAlu minumpanels
219 34 35 36 37 Antistatic PVC 38 PVC Plate Door Wal Glazing 39 CopperTape 40 SUSSafetyNet UnderRaisedFlo 41 ordivider 42 PVC Conductive FloorTile 43 44 45 Tear Drop LightingFixture 46 Lighting
220 47 Exit Direction LightingFixture 48 Surface Mount edlighting 49 Anti Static TemperedGlas 50 51 52 Ionizer 53 54 55 56 57 58 59 60
221 61 62 63 64 316LBA&EP Ra BA<10u EP< 3u Rmax BA<3um EP<0 7um 1 8 1 4 3 8 1 2 5 8 3 4 15A 25A 40A 50A 65A 80A 100A 125A 200A 250A 300A 10 10 65 66 67 68 69 70
222 71 72 73 74 Y 75 76 77 ExpansionJoint 78 Flexible Pipe Connector 79 GeneralProces ExhaustFan VOC Abatmaent 80 Device ContainFan andvfd 81 82 Deaerator 83 Steamde temp Device
223 84 OilPump MotorizedDamper 85 PenumaticDamper FM Fire Damper Air Damper VAV Box Sys 86 tem 0 ~100%±3% 87 88 89 90 Steam Pumps System ProcesVacuum 91 Pump& Auxiliary Equipments 92 Fan 93 AirShower 35000~ 130000CMH 8 WG 94 CoolingTower 95 Chiler Proces 96 Cooling WaterSystem
224 97 Fire Sealing Barier UL FM 98 Refrigerant 99 HeatExchanger 100 Insulation 101 Valve 102 FanFilterUnit 103 DryCoil 0 12μm HEPA ULPA 99 9999% 104 Filter 105 Filter 106 107 Docklevelers 108 SectionalDoors 109
225 Steam Type Hu 110 midifier 111 Sound Atenu atingchamber 112 ShockAbsorber 113 AirVent FanFilterUnits 114 Controland Moni tor 115 Actuator 116 117 SteamTrap Temp22±0 5 RH43±3% 118 CleanRoomGro undingsystem 119 AirWasher 120 Stainles Steel Damper Stainles 121 Rotator 122 123 Flammable Oven Flammable De vice
226 124 125 House Vacuum 126 System 127 128 129 130 131 132 133 134 15 135
227 136 300kW~1500kW 137 138 139 140 141 PowerPanelMCC 142 143 144 145 146 147 148
228 149 Protection Sys 150 tem 151 152 PVC 153 154 304 316 155 Valve 156 157 158
229 159 160 316 161 162 316 163 >300 164 165 50 ~300 <50 166 Agitator Mix 167 er Fan Blower andaccesory 168 UV Unit Ac cesory 169 AnalysisInstru ments Accesory 170 Reverse Osmo sis RO Unit Accesory
230 171 Power&Control Unit Acesory 172 Membrane De gasified Unit & Accesory 173 Ultrafitration Unit Accesory 174 Multi Media Fitcr Accesory 175 Active Carbon Filter Accesory 176 Ejector 177 Membrane De gasifymodule 304 178 Reducer 179 Filter 180 SiliconSand 181 ActiveCarbon 182 FRPMaterial Packing EPDM PTFE PVDF 183 SUS316 Viton 316 304 SUS304
231 184 Gravel 185 SightGlas 186 187 Blower 188 Accesory Filter Housing 189 304 316 SUS304 SUS316 ACTower CS CS Rub ber Lin 190 316 304 ing SUS316 SUS304 Ion Exchange Tower CSRubber 191 316 304 Lining SUS316 SUS304 192 Accesory 193 SCADASystem 194 Agitator
232 195 Accesory 196 197 FilterPres 198 TOCUVUnit 199 Balast 200 O ORing 201 OGenerator 202 Distributor 203 Virbaration 204 BreatherUnit 205 FlowMeter SUS 304 SUS316 Ultra sonic 206 GasDetector BA QuickCou 207 pling 208 AirChamber
233 Ion Exchange Tower CSRubber 209 316 304 Lining SUS316 SUS304 Man Machine 210 interface 211 CDADryer 212 Vacuum Detec tor Supply Unit 213 N2Presure & PumpingType 214 DilutionUnit 215 ChargeUnit Waste Colec 216 tionunit Valve Manifold Box Valve Regula 217 tor FilterandPres suretrans ducer Gas 218 Monitoring System Specialty Gas 219 Purifierand Moni tor MonitoringSys 220 tem
234 221 DIW Gun 222 N2Gun 223 316 Heater Line 224 Hea tertrace 225 HeatJacket BreathAirSys 226 tem 227 Accumulator 228 Cooler Aluminum Ca 229 bletray 230 EndBox 231 GasCabinet
235 232 Emergency Re sponse Contain 233 mentveselsfor LeakingCylinders Oxide Cu Pro 234 ces& MetalDilu tion&suplyunit 235 DoorSensor 236 UVSensor 237 LeakDetector 238 SCBA 239 240 241 4 242
236 243 Back UpGasCyl 244 SCBA inderofscba 245 Chemical leak agespecialmatrial 246 Chemical Tem porarystorage Sprinkler Sys FM 247 tem FireFightingPro 248 tectionmaterial Self Container 249 Breathing Apara tus SCBA 250 AccesSystem 251 ElectricLock 252 Addresable Fire AlarmControlPanel & Module 253 CO 2FireExtin guisher 254 CO 2System 255 CCTVSystem
237 256 FireStop Fire SmokeDamper 257 Proximity Card Reader 258 Coupresed Cy linder Leakage TreatEquipment 259 DrawingHandle Unit Monitoring Sys tem IncludingVideo 260 Receiving Proces ing RecordingSys tem Loop Control 261 Unit 262 Loops troler Con FireAlarm Pub lic AddresSystem 263 FM De tection Alarm Unit FireSystem Mat 264 rixlink 265 VeryEarlySmoke DetectionSystem FM 266 Emergency P A MainControler & Module
238 267 I O Alarm I O In 268 terface ABS Air 269 Sampling Piping 270 Air Sampling Smoke Detector MainMachine Aces Control AlarmSystem Ac 271 esory ControlU nit Foam Extin 272 guishsystem NetworkInter faceunit Graphic 273 Compres Soft ware NetworkInter 274 faceunit System Acces 275 sories Fir Protection System Acesories Sprinkler Head 276 Foam Head Emer gencypushboton Speaker
239 277 Signal Colect Unit 278 SmokeDetector 279 Safety Protec tionequipment FM Facility Man 280 agement & Con trolsystem 281 Programming Tools Controler and 282 ControlPanel I O Control 283 Workstation EtchmetKingbus 284 Neworking De vice 285 DatabaseAppli cationtools
240 Special Instru 286 ments for Clean Room 287 6 2 1 CMP 84799090 84669300 2 Defect Inspection BackOrderForRT8800 Automatic Reti 90299000 clelnspection System 90319000 MaskParticle& Pelicle DefectionSystem 3 ParticleCounter 4 Profiler 90299000 90309000 90309000 5 90309000 6 WaferSort 84799090 7 RTA 85149090 8 SheetResistance 90309000 90319000
241 9 SurfaceChargeAna lyzer 90279000 84859000 10 VFLPCVD 84799090 84799090 11 VF Poly Oxide An 85149090 neal Parts for Vertical 12 84199090 Furnace 13 IPI 84199090 14 VacuumPump 84149090 15 TubeCleaner 84219990 85149090 16 DryScrubber 84199090 17 PartsCleanerHF 84249090 84219990 85439090 18 84179090 19 85149000 20 84179090 21 85149000 22 85149090 23 85149090 24 85149090 25 90319000 26 85149090 84799090 84669300
242 27 90329000 28 29 30 90319000 84219990 TEOS 84799090 31 90269000 32 90309000 33 90309000 34 84799090 35 84219990 36 84139100 37 90319000 38 90269000 39 84799090 40 CIF3 84219990 41 84799090 42 FTIR 90319000 43 PVD 84219990 44 CVD 84219990 84799090 45 SMIFARM 84859000 46 SMIF 84219990
243 47 PartsCleaner 48 84249090 84219990 84799090 84669100 49 50 Waste Gas Treat ment Induding Local Scrubber BurnTube 85149090 CoolTrap Stres Measurement SystemParts 90309000 90269000 51 Sputer 84799090 52 VaporHF 84799090 X X 53 XRF 90309000 54 CuPlating 84799090 55 WaferTransferSys temparts 84859000 84799090 56 WaferScrubberSys 84219990 tempart 57 LiquidDeliverySys temparts 84859000 58 Sheet Resistance Measurement System andparts 90309000 59 ESDTLPSystem 90309000 60 84799090
244 61 90319000 62 90319000 63 85149090 HT 85149000 64 84779000 65 84249090 66 85149090 67 X 90319000 68 69 70 CornerRounding 84669300 Metal W Etch Etchback Microscope Wafer Loader 84669300 90119000 71 Etch Spacer 84669300 72 Opticstation 90319000 73 Etch 84669300 84669300 74 PlasmaClean 84799090 75 ResistStrip 84219990 84799090 84669300 84669300 76 SNDe Polymer 84799090 77 UVCuring MET 84799090 78 84669300
245 79 90269000 80 84669300 81 82 Backside Polisher 85149090 84799090 Grindcr 84799090 84669300 83 Backside Thicknes Measurement 90269000 84799090 84 Detape 84669300 85 Tape 84799090 84669300 86 DoseMeasurement 87 CurentIMP 90289010 85439010 88 85439010 89 85439090 90 AIMS System Metrology 90089090 91 92 AutoPelicleMount ingsystem CD Metrology Sys tem 84799090 90179000 93 Goater& HotPlate 84799090 94 FIB Reticle Repair System 90279000
246 95 FilmThicknesMea surementtool 96 LaserBeam Writing 90309000 90319000 90109090 97 98 Laser Reticle Repair System 84799090 90279000 99 90279000 100 101 102 103 104 105 106 M&M Visual In 90319000 spectiontool 84799090 Manual pelicle MountingTool OpticalChemicalPr ocesor Overlay System Phase Angle Mea surementtool Starlight Inspection System 84799090 90109090 Metrology 90179000 90179000 90309000 Reticle Fine cleaning 84799090 System WetBench 107 90309000 108 MOSAID EFA Tes ter 90309000
247 109 UVEraser 85439090 110 CyclingMachine 90309000 PrecisionSemiconductor 111 ParameterAnalyzer 90279000 112 AmmoniaDetector 90279000 113 HotPlate 84799090 114 In Line DUV Scan ner 90109090 115 84859000 116 In LineDUVTrack 84799090 117 118 MaskOpticalMicro scope 90129000 90119000 X 90119000 119 90119000 120 Overlay 121 Coater 122 123 Developer PR worker Re ReworkerDryerbe forecure 90309000 90319000 84799090 84799090 84799090 124 90109090 125 Reticle Charger 84799090 MacroCheckStation
248 126 StarliSht Mask In spectionsystem 90319000 127 90330000 9 128 90330000 9 129 90330000 9 130 90330000 9 131 90330000 9 132 90330000 9 133 90330000 9 134 84799090 135 90319000 136 90119000 137 90330000 9 138 90319000 139 84799090 140 90319000 141 90319000 142 SIMS 143 AirSampler 90279000 90329000 144 GC MS GasChro matography 90279000 145 GFAAS 90279000
249 146 IonChromatography 90279000 147 KFTitrator 90319000 148 Microwave Concentra tor 90309000 149 ArtoTitrator 90319000 150 Viscometer 90319000 151 HotPlate 84749000 152 85169090 153 Auto Decapsulation Machine 84799090 154 FIB 85439030 155 IonMiling 84799090 156 MicroCleaving 84799090 157 Microsection Polish er 84859000 84669100 158 PrecisionSaw 84859000 84669300 159 Reflow 84689000 160 Sample Preparation CO 2System 84799090 161 Sample DicingSaw Preparation 84799090 84779000 84649100 162 Sample DieBonder Preparation 84799090 163 Sample Preparation WaferMounter 84799090
250 Sample Preparation 164 85159000 WireBonder X X 165 X ray 90309000 166 167 Failure AnalysisIn strument Failure Analysis SamplePreparation 90309000 90319000 168 169 170 ELGradeCleanPlastic Botle PE PP PTFE 39269010 Sterilized Tube Sampling 39172900 VolumetricFlask PE 39269010 PP PFA PMP 171 Micropipete 39269010 172 DIWSampleBag 39239000 173 plasticsyringe 39173900 174 90319000 175 84219990 176 84733090 9 177 85439090 178 90319000 179 84669100 180 84669300 181 84669300 182 90319000
251 183 90319000 184 90319000 185 POD Casete In spection 90309000 186 TXRF X 90279000 187 W S Wafer Scrub ber NonMetal 188 WaferMarker 84249090 84799090 189 Wafer Flat 190 ALU RS&THK 90309000 84799090 DynamicSignalAna 191 lyzer 90309000 192 90319000 193 85439090 194 90309000 195 90279000 196 85439090 197 90309000 198 LCR Meter 90309000 199 PulseGenerator 85439029 200 Semiconductor Pa 90279000 rameteranalyzermanual 85439090 Semiconductor Para 201 90309000 metrictester 202 SwitchMatrix 85191090
252 203 RFNoiseFigureIn strument 90319000 204 CCAP RF Measure mentsystem 90319000 205 CurveTracer 90319000 206 ESDTLPSystem 90309000 207 84719000 208 90330000 9 209 90279090 210 90319000 211 90319000 212 90319000 213 90319000 214 LaserRepair 90319000 215 LogicTester 90319000 216 ProberCardCheck 90309000 217 Prober 84799090 90319000 218 219 Wafer Bake Oven Fitings 85149090 84199090 220 LogicTesterFitings 90319000 221 Memory TesterFit tings 90319000 222 WaferLoader 84799090
253 223 224 225 226 227 228 Tester Equipment PCToolFitings Probe Card Making EquipmentFitings UltraSonicContain erfitings Tester Electronic MeterFitinhs Mother Plate Fiting fortester MicroscopeGuardA gainstearthquakesfit tings 84719000 84799090 90319000 90309000 90319000 90119000 229 230 Thermometer& Hu midometerfitings 90259000 84859000 231 Logic Analyzer Fit ting 90279000 232 Precise Fitings Oscilator 90309000 233 234 235 WaferBurn intester Fiting DynamicWaferBurn in BakeOvenFitings MixedSignalTester Fitings 84799090 84199090 90319000 236 90319000 237 90319000 238 84779000
254 239 90319000 240 84669100 241 84213990 9 242 90319000 243 90319000 244 W S Cleaner 84799090 245 84569990 9 246 247 WaferTransfer Trans fer Horizontal Wafer 84859000 Automatic 84669300 248 84669300 249 84669300 250 84669300 251 84669100 252 84669300 253 84669300 254 84669100 255 256 84669100 HSG 84669300 257 90319000
255 258 90319000 259 84669100 260 84669300 261 X 90319000 262 90319000 263 84669300 264 84859000 265 84859000 266 90330000 9 267 84799090 268 90319000 269 48779000 270 84799090 271 84799090 272 90309000 273 84799090 274 84799090 275 84439000 276 84669400 277 X 90229090 278 84779000 279 84799090 280 90309000 281 84689000
256 282 84779000 283 84799090 284 84799090 285 84799090 286 84799090 287 90309000 288 84799090 289 85439090 290 85049020 291 85439090 292 90309000 293 84799090 294 90309000 295 84779000 296 84779000 297 84779000 298 90319000 299 84779000 300 84779000 301 84779000 302 90319000 303 84779000 304 84779000
257 305 84799090 306 90319000 307 84779000 308 84733090 9 309 84733090 9 310 84733090 9 311 84733090 9 312 H W 84733090 9 313 84733090 9 314 84733090 9 315 FA OA84733090 9 316 84733090 9 WaferVacuumPack 84229090 317 ingmachine 84779000 84799090 318 OM DigitalPrinter 84859000 319 OM 3CCD RGB Camera 90069199 320 BarCodePrinter 84859000 321 VLSIStandardWafer 90319000 322 TRH Meter Anemome ter TRHRecorder 90269000 323 Lockreel 39269090
258 324 Tip Wand Vaccum 39269010 325 Vaccum Pick Up PencilWithHead 40161010 326 Cabiliary 69149000 327 DiamondCut ofwhel 68042100 328 DiamondBlade 82089000 329 RejectPin 73199000 330 Magazine Frame 73261910 331 Tweezer Wafer 82032000 73269010 332 PrintCmridge 84719000 HPC Sampler Red 333 25 PK Digital Multimeter 334 CalibratorParts 335 336 337 338 339 PrecisionOsciloscope CalibratorParts AC DC Voltageand CurentCalibratorparts Resistance Standard CalibratorParts Multiple Channel PowerCalibratorParts SignalGeneratorCal ibratorparts PresureGaugeCali 340 bratorparts 90318090 90319000 90309000 90309000 85389000 85049090 90319000 90269000
259 341 Liquid Gas Flow MeterCalibratorParts 90269000 342 Velocity MeterCali bratorparts Themlocouple Cali 343 bratorparts 90269000 90329000 344 345 346 TemperatureCalibra torparts HeaterFurnaceCali bratorparts Control Equipment &SpareParts 90329000 90329000 84859000 347 348 Ultra Violet Equip ment&spareparts 85399000 349 84799090 350 85489000 351 10kV 85489000 352 85489000 353 354 85389000 85030090 85049019
260 355 85389000 356 85389000 357 85389000 358 ATS 85049019 359 85030090 360 85389000 361 84189999 362 84219990 363 84219990 364 90329000 365 85319090 366 84219990 367 85319090 368 84313900 369 84219990 370 85319090 371 84733090 372 84819010 373 84219990 374 39269010 375 90289090 376 84239000
262 1 2 1 2 3 4 5 1 2 3 4 5
263 2002 1 1
264
265 1994 13% 17% 1995 7 1 1996 1 1 3% 13% 6% 17% 9% 6% 1997 1997 1998 7 1 1 17% 2
266 17% 3 15% 4 17% 13% 5 5% 6 13% 13% 7 15% 17% 8 13% 9 6% 2001 7 1 15% 17%
267 1 2 3 1 2 3
268 12 13 1 2 3 1 1 2 3 2
269 1 2 3 1 2 3 4 1 2 3 4
270 2002 11 1 1999 1 1 1999 7 1 17% 2 17% 1999 7 1 13% 11% 15% 2001 7 1 17% 3 17% 1999 7 1 9% 13% 1999 7 1 13%
271 1999 4 1 13% 1999 9 1 13% 1999 12 1 13% 2000 1 1 2001 1 1 17% 4 5% 2002 1 1 2002 46 1 FOB FOB FreeonBoard 2 CIF CIF CostInsuranceFreight Cost FOB CIF FOB 3 C&F C&F Costand Freight
272 FOB=CIF- - FOB=C&F- DAF FOB 1 2002 1 1
273 = - - - = - = 1 = = - 2 > = =0 = - 3 >0 =
274 85% 95% 1 2 1995 7 1
275
276 1 = - - - = - = - 2 = - =
277 = + + 3 1 = = - 2 > = =0 = - 2001 1 1
278
279 1 2 1 2 3 1999 10 1
280 A B C D A 100 B B 300 C C D D 17% 13% 7 1 7 1 7 1 1 D 600P 3 600 17%=102 17+34+51 =102
281 0 A 17 B 34 C 51 102 D 102 P 4 600 102 O P 4 A B C 17 34 51 102 D D C 51 B 34 A 17 D 2 = + - + = - 17% 13% = - = + - -
282 + - = - + - - 1 2 4% 3 = - + - = - + + - = - + - = + - - = + - 7 2
283 X Y 7 2 Y 17% - X+Y 13% =Y 0 17-0 13X-0 13Y =Y 4% -X 13% Y 17% - X+Y 17% =0 17Y-0 17X-0 17Y=-0 17X = - + = - + - - - = - + - - 7 3 7 3
284 1 =-X + X+Y - 2 X X = Y - -X +X = X+Y - X+Y - Y = X+Y - - X 7 1 =Y 7 2 7 2-7 1 = Y - X+Y - 7 3 -X = X+Y - X+Y - 7 4 7 3 7 4 X+Y
285 7 4 7 4 7 4 1 X 17% Y 2 17% 13% Y 17% - 13% X X 17% - 13% X+Y 17% -13% X +Y 17% -13% -X 17% 3 X+Y 13% X 13% Y 13% Y 13% 1 X 4% X 4% Y 2 Y 4% 13% 13% -4% =9%
286 Y 9% X 17% Y 9% +X 17% 3 =X 4% -Y 9% -X 17% 4 0 1 0 X+Y 4% =X 4% +Y 4% X+Y 4% -X 17% =X 4% +Y 4% -X 17% 2 0 X 4% -Y 9% X 4% -Y 9% -X 17% 4 0 0 X 4% +Y 4% -X 17% - X 4% -Y 9% -X 17% =Y 13% 5 0 0 Y 13% 0 1 = X+Y 2 = - 3 X - X+Y -
287 0 4 0 X 4% +Y 4% -X 17% - X 4% - Y 9% -X 17% =Y 13% 5
Internet 20 60 20 90 EDI E-mail EFT Internet 1 2
289 3 4
290
291
292 3% 5%
293 1 2
294
295
297 1 2 3
298 4 5 6 7 8
299 9 10 11 1 2 3 4 5
300 1 2 3
301 4 5 6 7 8 9
302 10 1 2
303 3 4 5
304 6 1 1 2 3 4 5 2
305 1 2 1 2 3 4 5 6 7
306 8 3 4 1 2 1 2 3
307 4 5 6 7 8 9 7
308 8 1 2 3 4 5 6
309 9 10 11 12
310 13 1 2 3 4 5
311 6
1 2
313 3 4 5 6 1 2 3 4 1
314 2 3 4 1 1 2 3 4 2 3 1 2 4 5 1 2
315 6 1 2 3 7 8 1 2 3 1 2
316 3 1 2 3 4 5 6 7 8 9 10
317 1 2 3 4 5 6
318 1 1 2 3 2 1 2 3 4 3 1
319 2 1 1 2 3 2 1 2 3 4 5 3 1 2
320 1 1 2 3 2 1 2 3 3 1 2
321 60 15 1 2 3 4 5 6
322 1 2 3 4 5 10 1 2 3
323 1 2 3 4 5 1 1
324 2 3 4 2 1 2 3
325 1 2 3 4 1
326 2 3 1 2 1 2 3 4 5 6
327 11 12 1 2 3 1
328 13 14 15 16 2 17 18 19 20 3 21 22 23 1 2 3 1 1
329 2 2 1 2 3 1 2 3 4 5 6 7 8 1 5 7 1 1 2 3 2
330 1 2 3 4 3 1 2 3 4 5 6 7 8 7 8 1 2 3 32
331 33 1 2
332 1 2 3 1 2 3
333 1 2 3 4 5 1 2
334
335 1 2 1 2 3 3 4 5
336 1 2 3 4 5 6 7 8 1 2 3 4
337
338 1 2 3
339 67 1 2
340 3 1 2
341 3
1 1
343 2 3 4 5 6 7 8 9 10 1 10 10
344 10 2 3 2 3 1 2
345 3 1 2 3 4 5 6 7 8 4
346 5 1 2 3 1 2 3 4
347 1 1 1 2 3 4 5
348 6 7 8 9
349 10 11 2 3 5
350 2 11 1 11 1 1 2 3 4 5
351 6 7 8 9 10 11 12 13
352 1 = 2 = 3 1 2 3 4 5 6 1 1 5 5 1 1 1
353 5% 7% 5% 1% 1 7% 2 5% 3
354 1% 4 7% 5% 1% 1 2 = 1
355 2
356 1 2 3 4 1 1 10%~30%
357 2 2 1 2% 12%
358 = = 1-1 1 2 2 3 4 5
359 6 1996 1 1 1997 12 31 = 1 2% = 12%
360 1955
361 1953 1 1 2% 2 1 8% 3 1 8% 4 18% 1 2 3 4 1 = 1 2% = 1 8%
362 = + 1 8% 2 = 18% 10
363 1 2 3 4 1 0 5~10 2 0 4~8 3 0 3~6 4 0 2~4 50 20~50 20
364 30% =
365 1 1 2 2 1 2
366 1 11 2 11 2 120 10~19 144 20~39 180 40 240 45 36 48 16 12 2 11 3
367 11 3 150 151~500 501~1500 1501~3000 3001~10000 10001 1 20 1 60 2 20 3 20 4 20 5 00 10 11~50 51~150 151~300 301 0 60 0 80 1 00 1 20 1 40 1
368 1 1 1 2 7 2 1 = 2 =
369 11 4 11 5
370 11 4 60~320 16~60 20~60 32~80 4~32 12~24 2~4 11 5 50 1 20 51~150 1 40 151~300 1 60 301~500 1 80 501~1000 2 20 1001~1500 2 60 1501~2000 3 20 2001~3000 3 80 3001 4 40 10 0 60 11~50 0 80 51~150 1 00 151~300 1 20 301 1 40
371 = 3
372 1 11 2~10 2 1~2 2 1 6~8 3 2~3 3 1 3~6 5 4 3 1~5 50% 30
373
374 3%~5% 1 2 3
375 =
376 10 2000 11 16 294 2001 1 1
377 10% = 1 2 = + + 3
378 60 60 60
379 11 6 11 6 50km h 50cm 3 50km h 50cm 3 50km h 50cm 3 400kg 7 4kW 500kg 40km h 28kW 1500kg 50km h
380 1 2 3 4 1 2 3
381 1 2 3 4 1 2 3 4
382 5 6 7 8 1 2 3 1 5~10
383 2 3 4 5 6 7 8 9
384 1 2 3 4 5 1 1 1 2 3 4 2 1 2
385 1 2 3 4 5 6 1 2 3