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(NAIST) 103e-Learning() CIC 0.35um Multi-option MEMS CIC T25HVG2 UMC 2014 /http://www.cic.org.tw/cic_v13/login/login.jsp CIC Introduction to Conversational French - Syllabus Summer 2004 1

(NAIST) (NAIST) NAISTSoC NAIST 2

/ / 1 / (Data Logger)/ / / 3

xy xyz[2] 1 2 /(3-Axis ACC) 110V UPS (CES-302N) / 4

UPS 110V 48V - (DR-75-48)48 V 48V24V(RDS-200C-24) (Power module) Data Logger Data Logger MXE-1304 ADC Ethernet Injector Data Logger Relay Injector Ethernet Switch(EDS-308-T) 2-3 (Sensor Node)50 Host Controller(MEX-5302) USB Extender / Host Controller USB Hub(UPort 407-T) USB 2.0 USB Extender Host Controller 5

2Host ControllerEthernet Switch48 V24 V24 V 3 - (Data Logger) 4Data Logger(Industrial PC, M X E - 1 3 0 1 ) A D C ( A D C M o d u l e, A D C - 1 R 2 ) ( P o w e r M o d- ule)(relay)(integrated Signal Board) (Power In/Output Board) 12 bitsadc RS232 RS232Injector 48V 12V 5V 6

48V(45 48V78 GND) 24V 48V 24V 4 Data Logger 5 Data Logger / 0 ~ 10 V ADC 4 ~ 20 ma / ADC 7

5 / Data Logger 6 / 8P / 5.00 mm 6 Data Logger 8

[2] 7 (1-Axis accelerometer, SDI1221) [3]xyz ADC(ADS1258) [4] Data Logger Gateway (RM48HDK) [5] serial peripheral interface (SPI)ADC Switch Data Logger Data Logger 8Gateway modulepower module GatewayIPMAC Data Logger xyz Data Logger 7 9

8 9 Sensor Node Sensor Node Sensor Node Sensor NodeUSB ExtenderUSB HubHost controller 10STMicroelectronicsiNEMO [6](Accelerometer)(Gyroscope) Sensor Node 10

9 10 [6] Data Logger ADC : 11

: 11-1/ADC channel : 2363 2.88 V 5.76 V : 0~10V 0~100% RH 57.6% RH : 2390 2.92 V 5.84 V :0~10V-40~60 C18.4 C (a) (b) 11-1 (a) (b) 11-2 3696 4.511 V 18.04 ma: 4 ~ 20 ma 0 ~ 35 30.71()4-5 12

11-2 11-3 891 1.087 V 4.35 ma : 4 ~ 20 ma 0.3 ~ 8 m/s 0.468 (m/s)6-7 13

11-3 11-4 RS232 Data Logger xyx 0.63y-0.12 11-4 11-5 xyz ±4 V±2 gxy z(0.48 V, 0.35 V, 2.49 V) offset(0 g, 0.07 g, 1 g) 14

11-5 20141P28 [1] CIC [2] Chih-Hsing Lin, Ssu-Ying Chen, Chih-Chyau Yang, Chien-Ming Wu, Chih-Ting Kuo, Gang- Neng Sung, Yi-Jie Hsieh, Yu-Da Huang, Yung-Bin Lin, and Chun-Ming Huang, Structural Health Monitoring of Bridges Using Cost-Effective 1-axis Accelerometers, IEEE Sensors Applications Symposium (SAS), 2014, accepted. [3] Silicon Designs data sheet, SDI1221, Low Noise Analog Accelerometer [4] Texas Instruments data sheet, ADS1258, 16-channel, 24-Bit Analog-to-Digital Converter [5] Texas Instruments user s guide, RM48 Hercules Development Kit [6] STMicroelectronics data sheet, inemo system-on-board 15

103 IC IC IC 1040 http://www.cic.narl.org.tw/ CIC268 511 5,0003,000 10,00050%70% 3 300 16

(1) (2) 03-5774064 300267 180 60 03-577-3693144 E-Mail: huyjen@narlabs.org.tw FAX03-5774064 267 17

103e-Learning 立練參 103 了見 CIChttp://www.cic.org.tw/ 1035510:00103525 http://www.cic.org.tw/e-learning 流劉 03-577-3693144 E-Mail: huyjen@cic.narl.org.tw 6 9 11 5/5~5/25 8/4~8/24 10/6~10/26 6/2~6/15 9/1~9/14 11/03~11/16 103E001-A HSPICE 18

103E002-A Full-Custom IC Design Concept 103E003-A RF CMOS IC Design 103E004-A Verdi fundamental and Siloti full-chip-simulation training 103E005-A LakerADP+LakerL3 SDL flow training 103E006-A Advanced Design System - Fundamentals 103E007-A CMOS BioMEMS Sensing Technology 103E008-A Sensor Readout Circuit Technology 103E009-A RF 103E010-A Advanced Design System - Momentum 103E011-A Digital IC Testing Step-by-Step with Verigy 93000 103E012-A Step Into Electronic System Level Design 103E013-A FPGA Design Fundamentals for Altera 103E014-A Logic Synthesis (Synopsys) 103E015-A Cell-Based IC Physical Design and Verification with IC Compiler 103E016-A Brief Introduction of Cell-based Design 103E017-A T18 103E018-A TSMC 0.35UM 19

CIC 0.35um Multi-option MEMS CICD35-103BMEMS35 BioMEMS350.35um Multi-option MEMSMulti-option MEMS 1. MEMS35BioMEMS35 2. MEMS35MEMS (#190)BioMEMS35 MEMS Layer number Mask name MEMS Process description 19 PAD PASS opening in CMOS step 71 RLS MEMS 191 Gold (Gold) 190* RLSSi MEMS 3. MEMS35 BioMEMS35 (MEMS) CMOS MEMS Multi-option-MEMS Process 1 mask (RLS) MEMS : BioMEMS : M E M S : >2um 3 masks ( RLS /Gold / RLSSi) CMOSD35 (TSMC 0.35 um process) EDA Cloud Multi-option MEMS -103B 2014/05/05 2014/05/12 41110:30Multi-option MEMS 20

CIC T25HVG2 T25HVG2 Power CellBandgap IP EDA Cloud T25HVG2 clfang@narlabs.org.tw06-2087971ext.108 21

UMC ( UMC) 0.18 um Mixed-Mode and RFCMOS 1.8V/3.3V 1P6M Metal Metal Capacitor Process U18U18 1. MiM CapacitorPoly ResistorMulti-Vt deviceumc MEMS CMOS-MEMS 2. U18 3. U18//30% 1.2*1.2mm^2 4. U18 EDA Cloud () (UMC NDA) UMC NDA UMC NDA() () http://www.cic.org.tw/cic_v13/fab_services/index.jsp?menu=apply 03-5773693 886E-Mailprocess@cic.narl.org.tw 03-5773693 190E-Mailpjlin@cic.narl.org.tw 22

2014 2014 03-5773693219 hlyu@cic.narl.org.tw 奬 IC () D35-102B-S0010 A Remotely Controlled Locomotive IC Driven by Electrolytic Bubbles and Wireless Powering T18-101Ce-66 T18-102A-E0083 2.5D Heterogeneously Integrated Bio- Sensing Microsystem for Multi- Channel Neural-Sensing Applications A 2.3-GHz Fractional-N Divider-less Phase-Locked Loop with -112dBc/Hz In-Band Phase Noise TN90MSG-102A- P0014 A 0.5V 1.27mW Nose-on-a-Chip for Rapid Diagnosis of Ventilatorassociated Pneumonia 奬 IC D14 TN90MSG-101C-13a D08 T18-102A-P0010a ; H264 23

A05 D35-101D-802s A03 D35-101C-807s - A14 D35-102A-807s ; R40 TN90RF-101C-34 R30 T18-102A-A0202 Class-CQVCO R01 GIPD-101D-20 M05 D35-101C-52b M18 T18-101Ee-37e 奬 IC D10 TN40G-101B-06a ; ANSI S1.11 D12 TN90MSG-101C-03a 1GHz D15 TN90MSG-101C-35a D19 TN90MSG-102A- A0023 祿 ; 路 BCH 24

A09 D35-102A-802s A29 T18-101E-103 A50 T18-102B-P0091 6.8µW A52 T25HV-101D-03 A60 TN90MSG-102A- A0015 A23 T18-101D-383a A45 T18-102A-I0002 ; ; ; Noise-Shaped A48 T18-102A-I0012 6 Gb/s A65 TN90RF-102A-P0037 R09 T18-101C-64 XbandCMOS R43 TN90RF-101C-76 W Band R35 TN40G-101B-05 DC- 80GHz R19 T18-101E-105 KCMOS R47 TN90RF-102A-P0010 CMOS R36 TN40G-101B-13 60GHz R02 P15-101B-14 ; M16 T18-101E-808sm 850- nm M14 D35-101D-11bm 25

T18-103A () T18-103A-A0001 0.5V30GHz 0.643*0.723 T18-103A-A0002 O IEEE802.11AC 0.539*0.724 T18-103A-A0004 IF5/60 GHz 2.104*1.222 T18-103A-A0006 2.780*1.470 T18-103A-A0008 10 Gb/s 0.539*0.734 T18-103A-A0010 Ku3 0.824*0.518 T18-103A-A0012 3.6~6 GHz 1.467*1.126 T18-103A-A0013 0.942*0.471 T18-103A-A0016 MOS4 1.026*0.943 T18-103A-A0017 Balun 1.128*1.082 T18-103A-A0018 1.143*0.892 T18-103A-A0019 0.832*0.250 T18-103A-A0020 LTE 1.422*1.359 T18-103A-A0021 60GHz,94GHz 1.507*0.854 T18-103A-A0022 24-GHz 0.756*1.153 T18-103A-A0023 1.2GHz 1.021*1.339 T18-103A-A0025 3 0.824*0.518 T18-103A-A0027 ( 4) 0.839*0.565 T18-103A-A0028 24GHz CMOS 1.538*2.916 T18-103A-A0029 24GHz CMOS 1.795*5.852 T18-103A-A0030m CMOSV-Band 1.064*1.158 26

T18-103A-A0031 0.744*0.911 T18-103A-A0032m 1.190*1.570 T18-103A-A0037 MOS4 0.909*0.536 T18-103A-A0038 0.957*0.946 T18-103A-A0042 CMOS-MEMS 1.479*1.162 T18-103A-A0043 CMOS LC VCO 0.626*0.759 T18-103A-A0044 5GHz 0.709*0.831 T18-103A-A0046 Class C 0.871*1.399 T18-103A-A0047 32dBm 5.2GHz 2.370*1.210 T18-103A-A0048 1.090*0.933 T18-103A-A0049 1.147*1.105 T18-103A-A0050 LTE 1.185*0.975 T18-103A-A0051 T18-103A-A0053 10-bit 300KS/s 60GHz 0.939*0.730 1.265*1.177 T18-103A-A0054 LC 0.707*1.052 T18-103A-A0055 5 GHzLC 0.756*0.825 T18-103A-A0057 5 GHz / 60 GHz 2.123*2.020 T18-103A-A0058 5 GHz 1.511*1.000 T18-103A-A0059 1.713*0.861 T18-103A-A0060 1.601*1.536 T18-103A-A0063 0.938*1.048 T18-103A-A0064 0.646*0.446 T18-103A-A0065 CMOS 0.18um60/5 GHz 2.129*1.780 T18-103A-A0068 0.870*0.785 T18-103A-A0071 360 1.723*2.353 T18-103A-A0073 0.898*0.898 27

T18-103A-A0074 CMOS 1.999*1.990 T18-103A-A0076 CMOS-MEMS 0.654*0.777 T18-103A-A0078 1.353*1.143 T18-103A-A0084 32 1.127*1.127 T18-103A-A0085 1.058*1.058 T18-103A-A0086 KGuanella 0.670*0.490 T18-103A-A0089a,,,, 2.828*2.753 T18-103A-A0090 0.266*0.279 T18-103A-A0099a 110 1.233*0.853 T18-103A-A0100 0.393*0.555 T18-103A-A0101 1.558*0.818 T18-103A-A0103 20GHz18 0.18um CMOS 0.415*0.490 T18-103A-A0105 SCR 1.180*1.422 T18-103A-A0108 T18-103A-A0109m T18-103A-A0110m T18-103A- A0111a+m 2.4-GHz C M O S - MEMS 1.000*2.560 1.878*1.515 1.423*1.458 3.093*1.858 T18-103A-A0112 0.948*0.753 T18-103A-A0113 0.823*0.823 T18-103A-A0114 1.328*1.340 T18-103A-A0115m 2.198*1.848 T18-103A-A0116 C 0.936*1.030 T18-103A-A0117a,,,, 2.985*2.795 T18-103A-A0119 1.580*1.581 T18-103A-A0121 0.689*0.715 28

T18-103A-A0122 14 4.117*3.888 T18-103A-A0123 1.5GHz~25GHz 1.184*1.105 T18-103A-A0124 1.183*0.868 T18-103A-A0125 0.864*0.822 T18-103A-A0126m C M O S - MEMS 2.358*1.871 T18-103A-A0127 0.903*0.755 T18-103A-A0128 ( 2) 0.733*0.580 T18-103A-A0129 () 0.895*0.800 T18-103A-A0130 PCSNIM10GHz 0.645*0.615 T18-103A-A0132 CMOS 0.18um 1.204*0.805 T18-103A-A0133 0.833*0.830 T18-103A-A0134 3.297*3.000 T18-103A-A0135 1.8V10GHz 0.486*0.778 T18-103A-A0136 CMOS 0.18um60GHz 1.537*0.879 T18-103A-A0137 1.443*1.007 T18-103A-A0141 2.4GHz 1.094*1.267 T18-103A-A0143 1.480*0.927 T18-103A-A0144 1.458*1.493 T18-103A-A0145 1.300*1.000 T18-103A-A0146 0.9GHz~15GHz 1.363*0.791 T18-103A-A0147 1-30GHz UWB 1.061*0.572 T18-103A-A0148 CMOS-MEMS 0.693*0.829 T18-103A-A0149 KVRuthoff 0.846*0.592 T18-103A-A0150 Ku band3 0.869*1.156 T18-103A-A0151 1.8V5.2GHz 0.478*1.016 T18-103A-A0152 Ku-Band 1.173*0.774 29

T18-103A-A0153 PCSNIM 1.243*1.790 T18-103A-A0154 Dog-BoneCMOS-MEMS 1.422*0.979 T18-103A-A0156 O CMOS 1.400*1.400 T18-103A-A0157 77 GHz 1.355*0.544 T18-103A-A0158 O 峯 24GHz 0.945*0.750 T18-103A-A0159 8G~30GHz 0.987*0.915 T18-103A-A0160a 1.288*1.098 T18-103A-N0001a 0.657*0.647 T18-103A-N0002a 1.447*1.447 T18-103A-N0003a T18-103A-N0004, 121 1.119*1.238 1.169*1.278 T18-103A-N0005, 1.440*1.440 T18-103A-N0006, 0.930*0.770 T18-103A-P0001 24GHz 0.974*0.826 T18-103A-P0002 IEEE 802.15 0.687*0.678 T18-103A-P0003 1.423*0.737 T18-103A-P0004 24GHz 0.953*1.193 T18-103A-P0005 K-band 0.872*0.942 T18-103A-P0006 1.328*2.184 T18-103A-P0007 2.691*1.671 T18-103A-P0013 2.4/5.8GHz 0.966*0.884 T18-103A-P0014 1.2V2.4 GHz ISMPLL 1.104*2.365 T18-103A-P0017 EEG,ECG,EMG 0.919*0.904 T18-103A-P0018 2.585*2.444 T18-103A-P0020 2.4/5.8-GHzLC 0.762*1.154 T18-103A-P0022 1ps 0.987*0.742 30

T18-103A-P0023 1.679*1.863 T18-103A-P0026a PPG 1.915*1.907 T18-103A-P0027 5.8GHz 2.4GHz FSK 1.276*0.692 T18-103A-P0028 T18-103A-P0029 T18-103A-P0030 0.853*1.005 1.213*1.758 1.308*2.128 T18-103A-P0032 10 GHz C 0.670*0.790 T18-103A-P0033 24-GHz CMOS (3/3) 2.759*2.344 T18-103A-P0034 V 0.965*0.720 T18-103A-P0035 1.551*1.131 T18-103A-P0036 0.621*1.020 T18-103A-P0037 ISM OOK 0.600*1.250 T18-103A-P0038 15 30 GHz CMOS T/R 0.516*0.400 T18-103A-P0040 5.2/5.8GHz 0.609*0.909 T18-103A-P0041 1.101*0.822 T18-103A-P0042 0.745*0.745 T18-103A-P0043 0.832*0.735 T18-103A-I0004 1.290*0.730 T18-103A-I0005 9 0.863*0.993 T18-103A-I0006 0.550*0.350 T18-103A-I0007 O - QPSK 0.745*0.510 T18-103A-I0008a 1.489*1.481 T18-103A-I0009a 1.489*1.481 T18-103A-I0010a 1.489*1.481 T18-103A-I0011 1.328*1.193 31

T18-103A-I0014 1.493*1.493 T18-103A-I0016 1.500*1.500 T18-103A-I0017 0.4V 1.500*1.500 T18-103A-I0018 T18-103A-I0019 T18-103A-I0020 T18-103A-I0022a 0.5-3.0Gb/s WiMAX 3.5 GHz K 1.280*1.040 0.960*0.930 0.853*0.477 1.578*1.571 T18-103A-I0023 CMOS-MEMS 2.000*2.300 T18-103A-I0024 1.097*1.079 T18-103A-I0025 2.186*1.464 T18-103A-I0026 1.500*1.500 T18-103A-I0027 1.500*1.500 T18-103A-I0028 24 GHz 0.660*0.835 T18-103A-I0029a 1.495*1.481 T18-103A-I0030 24 GHz 1.300*0.630 T18-103A-I0031 V H F C M O S - MEMS 1.472*1.472 T18-103A-E0001 2.9-10.3GHz 1.145*1.165 T18-103A-E0003 0.833*0.831 T18-103A-E0004, PMOS 0.831*0.833 T18-103A-E0005 LFSR 0.983*0.983 T18-103A-E0007 0.680*0.680 T18-103A-E0008 0.705*0.580 T18-103A-E0009 LFSR 0.968*0.968 T18-103A-E0010 3-10 GHz 1.112*0.788 T18-103A-E0011 LFSR 0.983*0.983 T18-103A-E0012 0.573*0.545 32

T18-103A-E0013 5GHzCMOS E 0.940*0.730 T18-103A-E0016 10GHz 0.800*0.940 T18-103A-E0017 1.005*0.671 T18-103A-E0021 2-30GHz 0.810*0.646 T18-103A-E0022 2-30GHz 0.880*0.645 T18-103A-E0023 8 1.050*0.505 T18-103A-E0024 1.8GHz CMOS 1.151*0.865 T18-103A-E0025 8-10GHz 0.971*0.863 T18-103A-E0026 24GHz 1.197*0.858 T18-103A-E0027 5.8GHz 0.623*0.783 T18-103A-E0028 CMOS 1.038*0.853 T18-103A-E0029 24GHz 0.665*0.665 T18-103A-E0030 0.570*0.750 T18-103A-E0031 0.619*0.536 T18-103A-E0032 1.133*0.733 T18-103A-E0033 0.342*0.282 T18-103A-E0034 0.574*0.788 T18-103A-E0035 24GHz24 0.693*0.986 T18-103A-E0036 X 0.910*0.625 T18-103A-E0037 24GHz 22dBm 0.465*0.625 T18-103A-E0038 K-band 0.400*0.650 T18-103A-E0040 0.760*0.710 T18-103A-E0041 0.650*0.825 T18-103A-E0042 5.8GHzcmos 0.18-um 1.086*1.130 T18-103A-E0043, 0.680*0.680 T18-103A-E0044 0.550*0.550 33

T18-103A-E0045 0.500*0.500 T18-103A-E0046 0.490*0.509 T18-103A-E0047 0.500*0.498 T18-103A-E0048 O, 0.449*0.809 T18-103A-E0049,O 0.449*0.809 T18-103A-E0050 0.797*0.868 T18-103A-E0051 LTE 1.034*0.651 T18-103A-E0052 0.552*0.344 T18-103A-E0054 0.530*0.450 T18-103A-E0055 0.530*0.450 T18-103A-E0056 X-band 1.025*1.130 T18-103A-E0057 F 0.860*0.925 T18-103A-E0058 0.909*0.671 T18-103A-E0059 2/5 1.076*1.139 T18-103A-E0061 0.980*0.979 T18-103A-E0065 1.148*0.739 T18-103A-E0066 0.727*1.119 T18-103A-E0068 0.841*0.905 T18-103A-E0069 0.841*0.905 T18-103A-E0071 1.200*1.200 T18-103A-E0072 0.954*0.626 T18-103A-E0073 1.193*1.193 T18-103A-E0074-1.037*1.059 T18-103A-E0075a O 0.637*0.623 T18-103A-E0076 K-band 0.426*0.507 T18-103A-E0078a VLSI 1.200*1.200 34

T18-103A-E0079 0.500*0.498 T18-103A-E0080 0.18 um CMOS75 GHz 0.830*0.415 T18-103A-E0081 0.746*0.690 T18-103A-E0082 0.866*0.617 T18-103A-E0083 0.18um CMOS5.8GHz 0.545*0.800 T18-103A-E0084 0.804*0.785 T18-103A-E0087 1.018*1.018 T18-103A-E0088 1.013*1.013 T18-103A-E0089 1.044*0.683 T18-103A-E0090 24GHz 0.490*0.720 T18-103A-E0091 10Gb/s 0.410*0.450 T18-103A-E0092 0.460*0.460 T18-103A-E0093 1.170*0.900 T18-103A-E0094 0.760*1.079 T18-103A-E0095 1.180*1.180 T18-103A-E0096 T18-103A-E0097 3.1~10.6GHz 0.947*1.067 1.150*1.130 T18-103A-E0098 1.199*0.999 T18-103A-E0100 1.097*1.079 T18-103A-E0101 0.841*0.993 T18-103A-E0102 1.097*1.079 T18-103A-E0103 4 1.009*0.548 T18-103A-E0105 2.6 12.9GHz 0.798*0.971 T18-103A-E0106 T18-103A-E0107 CMOS 1.018*1.018 0.660*0.670 T18-103A-E0108 0.18um CMOS 0.917*0.900 35

T18-103A-E0109 1.097*1.079 T18-103A-E0110 0.400*0.400 T18-103A-E0111a, 17 1.171*1.169 T18-103A-E0112a, 0.763*0.761 T18-103A-E0113 1.198*1.063 Wafer Mapping (IC) 36

GIPD-103A ()/() GIPD-103A-A0004 WPAN60GHz 1.707*2.490 GIPD-103A-A0006 1.500*1.250 GIPD-103A-A0007 6.000*4.000 GIPD-103A-A0012 1.492*3.781 GIPD-103A-A0013 2.886*8.188 GIPD-103A-A0014 7.937*7.773 GIPD-103A-A0015 7.688*9.352 GIPD-103A-A0016 4.122*3.114 GIPD-103A-A0017 峯 3.326*3.096 GIPD-103A-A0018 1 4 4.595*4.618 GIPD-103A-A0019 4.595*4.612 GIPD-103A-A0021 3.245*4.612 GIPD-103A-E0002 (RF and Microwave Wireless Systems) 1.750*1.700 GIPD-103A- E0003M (Radio Frequency Integrated Circuit Desing) 3.370*2.200 GIPD-103A-N0001, 3.080*5.000 GIPD-103A- P0001M 0. 1 8 u m C M O S / GIPD 8.038*2.438 37

Wafer Mapping (IC) 38