1. (OC 2. ph 3. 4. 3 ph 5. O17 NMR 100Hz 50 Hz 2 6. 7.
2H2O+2e- = 2OH- + H2 E0=0-0.0591pH H2O = 2H+ + 1/2O2 + 2e- E0=1.228-0.0591pH
1 µ µ µ
µ µ µ
2 2mM 3 - (2mM NaCl )
5 5mM NaCl
2 (NMR)O17
6 O17 (Hz) 7
3 4
5
6 π 10
1. June 29 2. 2. p23 8 8 3. 3. No.31994 4. 4. 5. 5. Vol.20 No.2 1994 6. 6. 61 88 2 7. 7.- 8711p 10 E-1~E- 8. Hidemitsu Aoki etc. Cleaning Technologies using Electrolytic Ionized Water and Analysis Technology of Fine Structures for Next Generation Device Manufacturing mat.res.soc.symplproc. vol. 4771997