98-04-11 87 3 21 25 Plasma 10 Torr
ESR OH COOH Tg 1. 2. 3. CF 4 C 2 F 6 H F 1. OH COOH CO NH 2 2. 3. TiO 2 /Ti
16.5% ( : / :(02)2341-7251 2422) 8 ( ) " xxxx " " chamber chamber slit valve ------------------------------------------------------ 90 1155 90/06/28
xxxx xxx XX xx
closed magnetic circuit open magnetic circuit RF
1-2-25 N S
Chamber Plasma Chamberwall
Plasma Chamber Plasma Pump inlet Slit valve Chamber slit valve pump inlet wafer Chamber chamber plasma chamber slit valve slit valve slit valve damage
what is (PDP) ( ) ( ) PDP PDP (1) PDP (UV ) PDP cell (Ne) (Xe) (He) (Xe) ( ) 147 (nm) cell 147nm PDP (R) (B) (G) cell cell (R) (B) (G)
(2) PDP PDP DC PDP AC PDP DC PDP (DC) ( ) PDP DC PDP DC PDP (cell) PDP cell cell AC PDP (MgO ) (AC) DC AC PDP PDP AC PDP AC PDP (3) AC-PDP AC PDP 1996 ( ) 3.1 : 3.1 (a) Pattern : ITO SnO2 ITO SnO2 ( ) ITO ITO (sputtering) ITO (pattern)( a) SnO2 CVD Pattern lift-off ( b) PDP ITO ITO pattern 3.1 (b) bus : PDP bus bus
/ / (Cr/Cu/Cr) (Ag) ( ) (pattern)( ) (paste) pattern Fodel (dry film) pattern pattern : Cr/Cu/Cr pattern bus pattern (c) (black strip) : PDP pattern pattern 1(d) : 85% 2mm 3.1(e) : PDP PDP MgO (>90%) PDP MgO ion-plating MgO 3.2 : 3.2(a) Data( address) : Data Data 50%
3.2(b) : 3.2(c) (rib): (spacer) PDP 120~150mm : 3.2 (d) : 3.3 (400~500oC) (glass frit) He+Xe Ne+Xe (aging) PDP PDP 3.4 PDP PDP
(frame) (subfield) (false contour) ADS(Address Display Separation: / ) false contour 1998 ALIS(Alternate Lighting of Surface Method) Pioneer CLEAR(Hi-Contrast &Low Energy Address & Reduction of False Contour Sequence ) Plasma AI PDP ( ) CRT CRT PDP PDP ( ) ( ) IC 1998 42 VGA PDP 36 20 2003 PDP 1 3000 42 VGA PDP 13 PDP 10 PDP PDP PDP