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: 8 MEMS : () 2015 12 09

: 8 MEMS : : : () A10500191000 A10500191000 A10500140500 A10500050500

8 MEMS F2M3 13601297766 100176 F2M3 1 1.1 86600 20 5000 800 [2015]157 39 2017 09 0 0.9 5 Silex Microsystems 98%Silex Microsystems 2000 MEMS MEMS Silex Microsystems MEMS 1.2 MEMS MEMS 1

MEMS MEMS MEMS Foundry MEMS MEMS MEMS MEMS 1.3 8 MEMS 12 8 MEMS F2M3 2# 2015 10 21 [2015]157 33 K 80 80 X 2 2.1 F2M3 116 33 59.57 39 47 6.64 1 2.2 F2M3 2

F2M3 280m 170m 3

0km 1km 2km 1 4

0m 150m 300m 2 5

0m 50m 100m 1 210m 2 3 6

3 86600 8 MEMS 12 8 MEMS 1 4000m 2 F2M3 2 5 2 18417.14 m 2 4 5 800 0.9% 1 / 3000 m 2 8 MEMS 1/ 500 m 2 1. 2100m 3 /h 2. (7/14ºC)2500RT 3 (14/21ºC)2850RT 8 4782.14KW1360RT/ 5500KW 6 3. 21200 m 3 /h 32/37.5, 4 4. 20800m 3 /h 21/17 5.6t/h 1, 6.270000 Nm 3 /h 8 7 1 1 100 m 2 200 m 2 V=2000m 3 460 m 3 / 1844m 3 /d 10 m 3 /s / 20000kVA 12000kW / 2 2t/h 4t/h / 800Nm 3 /h 7

200 m 2 G1 : 40000m 3 /h+ 2 1 1 G2 100000m 3 /h 3 2 1 G3 5000m 3 /h 2 1 1 G4 G2 G5 6t/h 5909 m 3 /h G6 4t/h 3939 m 3 /h 1838 m 3 /d W1 197m 3 /d 240 m 3 /d W2 514m 3 /d 600 m 3 /d+ W3 450m 3 /d 550 m 3 /d W4 128m 3 /d 160 m 3 /d RO 549m 3 /d 6.4m 3 /d / 3.1 / 108t/a 50 m 2 585.8t/a 16.5 t/a / 800m 3 2 2 1 144000 2 24000 3 99.99 50L/ 1068 4 96-984H 2 O 131184 5 31%69 113832 6 2575 28440 7 99.9 121440 8 49.850.2 87408 9 DHF 49%:DI=1:10 33048 8

10 BOE 87.5%[40%]+12.5%[49%] 18504 11 BOE 1-5%+30-35%+>50%DI [SILOX VAPOX III] 1368 12 70.1-72.1%+12.3-13.3%+2-3% [PES 77-19-04] 5712 13 8515 5352 14 37% 29520 15 7030 4824 16 NMP 99.5% 28560 17 MOS 2880 18 100 76200 19 4753 6600 20 TMAH 25%+75% 2088 21 Copper Etch 49-1 1464 22 5%+10%+85% 13440 23 MS6020 1920 24 Protek B3&Primer 840 25 ++3-+ + 912 26 20% 2736 27 8256 28 Kg 816 29 Kg 688.8 30 Kg 768 31 Kg 5760 32 Kg 35136 33 Kg 960 34 100 4272 35 99.999 145080 36 99.99 50L/ 1884 37 99.999% 50L/ 7014 38 99.999 50L/ 828 39 99.99 50L/ 4452 40 99.9 50L/ 474 41 0.5%/ 0.5%+95% 50L/ 3966 42 99.999 50L/ 11094 43 100 50L/ 1128 44 100 400L/ 2940 9

45 99 50L/ 3432 46 (CH3F) 100 50L/ 2082 47 99.999 50L/ 9114 48 99.999% 50L/ 11502 49 99.99 50L/ 1896 50 1.2%/ 1.298.8 50L/ 2562 51 100% 500L/ 18000 52 100% 50L/ 750 53 99.999% 50L/ 198 54 1%/ 0.199.9 800L/ 282 55 100 50L/ 3516 56 99.5% 400L/ 4800 57 BPS-729-B 4080 58 KET188 2280 3.2 3 / 1 4 2 2 3 2 4 4 5 2 6 2 7 2 8 2 9 4 10 2 11 2 12 4 13 8 14 2 10

15 2 16 6 17 2 18 3 19 3 20 2 21 2 22 3 23 2 24 3 25 12 26 2 27 4 28 2 29 3 30 3 31 1 32 2 33 2 34 2 35 2 36 2 37 2 38 10 39 8 40 4 41 10 42 10 142 11

G6 G5 G1 G3 G2/G4 4 12

5 13

4 200 43 8 330 24 7920 5 5.1 4 6 4 5.2 6 1 2 4 2 5 2 2t/h 14

4t/h 6 7 15

6 16

() 1 39443947 11627 11634 3.5km 7km 16.5km 25km F2M3 2 1163359.79 39472.36 1 2 2 2733m 1/1000 75150m 8 F2M3 1 3 11.5 7 261-6 2.6m/s 580mm 69 80% 4 17

4 14.8km 3.5km HCO 3 -Ca Mg HCO 3 -Cl-Ca Mg HCO 3 -Cl-Mg Ca HCO 3 -Ca Na 2030m 15003000m 3 /d 5.526.5m/d 20m 1500m 3 /d 2km 5 18

() -20142015216 12014 997.4 9.2% 1.756.741.6 1.656.541.9 2 120 19.7% 27.2 37.5 12.3% 43.6% 15.4 2.4% 112.1 9.9% 3 750.6 1.4% 507.1 4.6% 12014 2380.3 3.6% 22014 240.8 2.9% 246.3 48.8% 32014 2665.9 30.2% 1695.1 51.2% 325.1 13.3% 31.3%24% 22.4% 12014 391 4.2% 22014 152.7 7.6% 85.1 19.6% 96.1% 32.4 36.6% 2014 41.7 7.1%2014 19

296 1.7% 448 360.2 5.3% 1170.5 3.5% 2014 98% 2014 36.6 11.2% 34.9 12.7% 29.1 3.9% 27 3.4% 24.9 3.9% 5 1 9 1 1.8 1 240 60 12 3 170 20

( ) 1 GB3095-2012 2015 4 2014 2014 PM 2.5 104.0µg/m 3 197%SO 2 24.2µg/m 3 NO2 56.9µg/m 3 42.3%PM 10 123.0µg/m 3 75.7%SO 2 GB3095-2012PM 2.5 PM 10 NO 2 PM 2.5 PM 10 NO 2 2 120m V 2015 12 21 2015 11 V3 3 2014 2014 4 24 2013 4 2012.11 3 21

2015 12 18 1 5 5 db(a) 1 53.8 50.1 2 55.4 48.8 3 51.3 49.3 4 50.8 50.2 65 55 GB3096-2008 3 65dB(A) 55dB(A) 5 22

() m 1 210 2 1800 3 1200 4 1800 5 1300 6 1600 7 1200 8 1600 9 1700 (GB3095-2012) 23

1 GB3095-2012 6 6 μg/m 3 1 2.5m 35 24 75 2 10m 70 24 150 3 TSP 200 24 300 4 5 6 SO 2 NO 2 NO x 60 24 150 1 500 40 24 80 1 200 50 24 100 1 250 2 7 GB3838-2002 V 7 mg/l V 1 ph 69 2 COD 40 3 BOD 5 10 4 NH 3 -N 2.0 5 2 6 15 7 0.4 8 0.3 9 1.0 24

3 GB3096-20083 8 8 dba 3 65 55 1 DB11/501-2007 II DB11/501-2007 VOCs 9 kg/h mg/m 3 m mg/m 3 1 5.0 30 0.41 0.020 2 30 30 1.0 0.050 3 30 30 20 1.0 4 20 30 35 2.0 5 200 30 2.6 0.12 6 5.0 30 0.61 0.10 DB11/501-2007 7 5.0 30 6.2 0.30 8 200 30 8.8 0.4 9 30 30 14 1.0 10 1.0 30 0.12 0.0060 11 5.0 30 0.05 25

DB11/139-2015 10 10 SO 2 NOx mg/nm 3 mg/nm 3 mg/nm 3 5 10 80 1 2 DB11/307-2013 11 11 3 1 ph 6.5-9 2 COD Cr 500 3 BOD 5 300 4 SS 400 5 45 6 10 7 P 8.0 8 1600 GB12523-2011 12 12 db(a) 70 55 GB12348-2008 3 13 26

13 LeqdBA 3 65 55 201097 COD Cr 37.7t/a 1.87t/a NOx 4.36t/aSO 2 0.484t/a 0.248t/a 4.98t/a [2015]19 2 COD Cr 75.4t/a 3.74t/aNOx 8.72t/aSO 2 0.968t/a 0.496t/a 9.96t/a 27

1 2 1 28

H 2 SO 4 +H 2 O 2 (4:1) NH 4 OH+H 2 O 2 +H 2 O(1:1:5) HF+H 2 O (1:50) 7 硅晶圆片移动 1 2 3 检测回用废液收集系统废水处理系统 7 G1G2G3 W1W2W3W4 S1 S2 S3 29

2 CVD 800~1200 SiO 2 SiO 2 Si + O 2 SiO 2 Si + 2 H 2 O SiO 2 2H 2 H 2 G2 CVD PN 30

SiH 4 +2 N 2 O SiO 2 + 2 N 2 + 2 H 2 SiCl 4 + 2 CO 2 + 2 H 2 SiO 2 + 4 HCl + 2 CO SiH 4 Si + 2 H 2 3SiH 4 + 4 NH 3 Si 3 N 4 + 12 H 2 3 SiH 2 Cl 2 + 4 NH 3 Si 3 N 4 + 6 HCl + 6 H 2 WF 6 + 3 H 2 W + 6 HF 2 WF 6 + 3 SiH 4 2 W + 3SiF 4 + 6H 2 WF 6 + 2SiH 4 WSi 2 + 6 HF + H 2 6 TiCl 4 + 8 NH 3 6 TiN+ 24 HCl + N 2 G2 800-1100 PH 3 B 2 H 6 2PH 3 2P + 3H 2 31

2BCl 3 2B + 3Cl 2 4BCl 3 + 3O 2 2B 2 O 3 + 6Cl 2 800-1100 SiH 4 Si + 2 H 2 SiH 4 +2O 2 SiO 2 +2H 2 O 3 SiH 2 Cl 2 + 4 NH 3 Si 3 N 4 + 6 HCl + 6 H 2 G2 BF 3 PH 3 G2 PVD 32

99% 3 ++3-++ 5% TMAHKOH G1 G3 S3 光刻胶基片涂胶后基片显影后基片光刻后基片 8 4 33

G1 G2 G3 S1 S2 S3 CF 4 C*+4F * SF 6 S*+6F * Si +4F *Si F 4 Si +6F * Si F 4 + F 2 34

Si O 2 +4F *Si F 4 + O 2 W+F * W F x Cl 2 2 Cl* Si +2 Cl* Si Cl 2 Si Cl 2 +2 Cl* Si Cl 4 G2 MOS G2 G1 S1 S3 COCO 2 H 2 O 35

5 TSV TSV TSV 6, 36

14 G1 G2 G3 G4 PGMEAMEA +PGMEA+N- NMP POU+ W1 phcod Cr BOD 5 F - W2 3- phcod Cr BOD 5 SSPO 4 W3 phcod Cr BOD 5 SSNH 3 -N W4 SS 37

Cu Au PI N-NMP S1 38

1. 1 HClSiCl 4 POU HCl 2 TMAH NH 3 POU NH 3 NOx 3 1%+99% POU 40

4 15~18 15 kg/a 3457 3457 1037 23 1046 1017 355 8 2777 62 305 7 4475 4475 100 16 kg/a 326 269 117 11 TMAH 3822 540 12 1 539 216 140 13 159 35 791 75 1060 1060 100 17 kg/a 13695 4332 1.9 0.0 5.3 4.8 4.3 0.1 86.7 2 4243.8 97.9 4337 4337 100 18 kg/a 29.4 29.4 4.98 1.7 41

NMP 29.2 29.2 16.01 5.5 2.3 2.3 44.82 15.4 37.4 37.4 225.35 77.4 TMAH 0.5 0.5 15.2 15.2 44.9 44.9 132.5 132.5 291.2 291.2 100 2 2.1 4G1G2G3 G4 1G1 + / + 90% 1140000m 3 /h90% 130m 2G2 42

32150000m 3 /h 7090 130m 25% ph 3G3 TMAHNH 3 2115000m 3 /h 95130m 50% 4G4 20000m 3 /h G2 90% G2 30m 43

2.2 G5/G6 22t/h14t/h 6t/h50% 12024330 24NOx SO 2 50% 30m 2.3 19 20 DB11/501-2007 II 1t/h80Nm 3 /h12.31nm 3 /Nm 3 DB11/139-2015 20 NOxSO 2 DB11/139-2015 3 1844m 3 /d 1838m 3 /d 6.4m 3 /d 3.1 W1W2W3W4RO 1 W1 SiO 2 193 m 3 /d 4 m 3 /d 44

F ph12 CaCl 2 F CaF 2 197 m 3 /d 240 m 3 /d 2 W2 ph ph ph 514m 3 /d 600 m 3 /d 3 W3 COD Cr / 450m 3 /d 550 m 3 /d 4 W4 SS ph NaOH FeCl 3 H 2 SO 4 ph 128m 3 /d 160 m 3 /d 5RO RO 549m 3 /d RO 1 45

3.2 6.4m 3 /d CODcrBOD 5 SSNH 4 -N 3.3 21 21 DB11/307-2013 4 22 1 2 3 22 db(a) 65 4 70 5 8590 6 8085 75 7 75 65 65 46

8 100 7580 5 710.3t/a 3 5.1 100t/a 5.2 591.8t/a 1 15t/a 2 13.7t/a 3 181.8t/a 4 355.3t/a 5 20t/a 6 2t/a 7 4t/a/ Al 2 O 3 8 2t/a 5.3 16.5t/a 47

23 23 t/a 100 100 HW34 15 HW42 13.7 HW42 181.8 HW42 355.3 HW32 20 HW49 2 Al2O3 HW49 4 HW49 2 593.8 16.5 710.3 48

19 1 99.9 3120 12 37440 99.9% 37402.6 0.785 29.36 60% 17.62 2 99.5% 2380 12 28560 99.5% 28417.2 1.028 29.21 3% 0.88 3 240 12 2880 100.0% 2880 0.789 2.27 90% 2.05 4 100 3950 12 47400 100.0% 47400 0.788 37.35 60% 22.41 5 25% TMAH +75% 174 12 2088 25.0% 522 0.866 0.45 3% 0.01 + 6 +3-+ + 1181.4 12 14176.8 100.0% 14176.8 1.07 15.17 10% 1.52 7 18702 12 224424 20.0% 44884.8 1 44.88 3% 1.35 8 13798 12 165576 80.0% 132460.8 1 132.46 3% 3.97 49.80 49

20 1 1 2 4 5 G1 G2/G4 G3 6t/h G5 4t/h G6 + / 1 1 2 1 1 1 m 3 /h m m 40000 40000 1 30 1 50000 100000 1 30 2 kg/h mg/m 3 kg/h mg/m 3 kg/h mg/m 3 6.29 157.3 0.629 15.7 90 35 20 0.018 0.5 0.018 0.5 0 2.6 200 0.0018 0.05 0.0018 0.05 0 8.8 200 0.001 0.03 0.001 0.03 0 14 30 0.6 6 0.06 0.6 90 6.2 5.0 0.28 2.8 0.056 0.6 80 2.6 200 0.8 7.7 0.23 2.3 70 0.41 5.0 0.2 2 0.06 0.6 70 1.0 30 0.8 8 0.24 2.4 70 0.61 5.0 0.00005 0.0005 0.00005 0.0005 0 0.12 0.006 0.0001 0.0010 0.0001 0.001 0 0.05 / 5000 5000 1 30 0.5 0.12 23.3 0.004 0.7 97 20 30 1 5909 5909 1 30 1 1 3939 3939 1 30 1 0.473 80.0 0.4727 80.0 0 / 80 0.059 10.0 0.0591 10.0 0 / 10 0.030 5.0 0.0295 5.0 0 / 5 0.315 80.0 0.3151 80.0 0 / 80 0.039 10.0 0.0394 10.0 0 / 10 0.020 5.0 0.0197 5.0 0 / 5 50

m 3 /d) 21 (kg/d) () (mg/l) (kg/d) (mg/l) CaF 2 ph 2.5-4 6.5-7.5 COD Cr 22.2 113 17.7 90 20 197 BOD 5 8.1 41 6.9 35 15 W1 SS 2 10 1.4 7 30 F - 137.9 700 1.4 7 99 +Ca 3 (PO 4 ) 2 ph ph 3-11 6-9 COD Cr 64.3 125 51.4 100 20 514 BOD 5 32.7 64 27.8 54 15 W2 SS 154 300 7.7 15 95 PO 4 3-41.1 80 0.4 0.8 99 Bardenpho ph 6.5-7.5 6.5-7.5 CODCr 414.0 920 42.8 95.2 85 450 BOD 5 207.0 460 9.0 20 90 W3 SS 149 330 4.5 10 80 NH 3 -N 2.3 5 5.4 12 90 W4 128 SS 51 400 7.7 60 85 ph 6.5-7.5 6.5-7.5 CODCr 112.0 60.9 112.0 60.9 0 BOD 5 43.7 23.7 43.7 23.7 0 1838 SS 21.3 11.6 21.3 11.6 0 NH 3 -N 5.4 2.9 5.4 2.9 0 PO 4 3-5.4 2.9 5.4 2.9 0 F - 1.4 0.8 1.4 0.8 0 TDS 600.0 326.4 600.0 326.4 1 ph 6.5-7.5 6.5-7.5 CODCr 2.3 353 1.9 300 15 6.4 BOD 5 1.9 294 1.6 250 15 SS 2 300 1.0 150 50 NH 3 -N 0.3 40 0.2 38 5 51

1844 ph 6.5-7.5 6.5-7.5 CODCr 114.2 61.9 114.2 61.9 0 BOD 5 45.5 24.7 45.5 24.7 0 SS 23.2 12.6 23.2 12.6 0 NH 3 -N 5.7 3.1 5.7 3.1 0 PO 4 3-5.4 2.9 5.4 2.9 0 F - 1.4 0.7 1.4 0.7 0 TDS 600.0 325.4 600.0 325.4 0 52

TDS 325.4mg/L198t/a 325.4mg/L198t/a () () () 5.0 mg/m 3 0.06 t/a 5.0 mg/m 3 0.06 t/a G1 G2/G4 G3 6t/h G5 4t/h G6 157.3 mg/m 3 49.80 t/a 15.7 mg/m 3 4.98 t/a 0.5 mg/m 3 0.14 t/a 0.5 mg/m 3 0.14 t/a 0.05 mg/m 3 0.014 t/a 0.05 mg/m 3 0.014 t/a 0.03 mg/m 3 0.008 t/a 0.03 mg/m 3 0.008 t/a 6mg/m 3 4.75t/a 0.6 mg/m 3 0.48 t/a 2.6 mg/m 3 2.06 t/a 0.5 mg/m 3 0.41 t/a 7.7mg/m 3 6.07 t/a 2.3 mg/m 3 1.82 t/a 2 mg/m 3 1.58 t/a 0.6 mg/m 3 0.48 t/a 8 mg/m 3 6.34 t/a 2.4 mg/m 3 1.90 t/a 0.0005 mg/m 3 0.4kg/a 0.0005 mg/m 3 0.4kg/a 0.001 mg/m 3 0.8kg/a 0.001 mg/m 3 0.8kg/a 23.3 mg/m 3 0.92 t/a 0.7 mg/m 3 0.03 t/a 80.0 mg/m 3 3.74 t/a 80.0 mg/m 3 3.74 t/a 10.0 mg/m 3 0.47 t/a 10.0 mg/m 3 0.47 t/a 5.0 mg/m 3 0.23 t/a 5.0 mg/m 3 0.23 t/a 80.0 mg/m 3 0.91 t/a 80.0 mg/m 3 0.91 t/a 10.0 mg/m 3 0.11 t/a 10.0 mg/m 3 0.11 t/a 60.85 m 3 /a 60.65 m 3 /a 0.2 m 3 /a 60.85 m 3 /a 60.65 m 3 /a 0.2 m 3 /a COD Cr 203.6mg/L123.51t/a 61.9mg/L37.7t/a BOD 5 72.2mg/L43.77t/a 24.7mg/L15.03t/a SS 126.1mg/L76.49t/a 12.6mg/L7.65t/a NH 3 -N 29.5mg/L17.90t/a 3.1mg/L1.87t/a PO 4 3-22.4mg/L13.57t/a 2.9mg/L1.78t/a F - 75.0mg/L45.51t/a 0.7mg/L0.46t/a 100t/a 0t/a 593.8t/a 0t/a 16.5t/a 0t/a 65-100dB(A) <65dB(A) 53

() 55

8095dB(A) 56

1. 2.1 DB11/501-2007 II NOxSO 2 DB11/139-2015 G1 G2/G4 G3 6t/h G5 4t/h G6 () (m 3 /a) 24 t/a H 2 SO 4 HCl Cl 2 HF NH 3 SO 2 NOx 31680 4.98 0.014 0.14 0.008 79200 0.48 0.48 1.90 1.82 0.48 3960 0.03 4680 0.47 3.74 0.23 1134 0.11 0.91 0.06 1134-0.11-0.91-0.06 0.48 0.48 1.90 1.82 0.03 4.98 0.484 4.36 0.238 2.2 1 90% 57

200 VOCs 99% 65% CO 2 90% CO 2 H 2 O 90% 300 180 120 500Pa 9 58

9 2 +1 1 1 1 40000m 3 /h 30m 90% 2 90% G2 30m 59

25% 7090 ph 3 2 1 50000m 3 /h 7090 1 30m 3 TMAH 50% 95 2 1 1 5000m 3 /h 95 1 30m 50% 2. 60

2.1 2.1.1 W1W2W3 W4RO COD Cr BOD 5 SS NH 3 -N DB11/307-2013 25 mg/lph t/a t/a ph 6.5-7.5 / 69 60.85 COD Cr 61.9 37.7 500 BOD 5 24.7 15.03 300 SS 12.6 7.65 400 NH 3 -N 3.1 1.87 45 2.9 1.78 8.0 0.7 0.46 10 DB11/307-2013 2.1.2 1 193m 3 /d SiO 2 240m 3 /d 90% 61

CaCl 2 2F - +Ca 2+ CaF 2 8mg/L 4-93000 mg /L 0.88.8 mg/l HF CaCl 2 ph 12 CaCl 2 F CaF 2 30% 10 10 2 62

514m 3 /d ph 600m 3 /d ph ph 69 ph ph PLC ph ph PLC 3 450m 3 /d / 550m 3 /d CODcr BOD 5 90% / B/C ph 63

ph ph 1 1 1 1 2 2 PAC PAM PAC PAM 11 NaOH H 2 SO 4 NaOH H 2 SO 4 1 2 1 2 PAM PAC 11 64

4 128m 3 /d 160 m 3 /d SS ph NaOH FeCl 3 H 2 SO 4 ph SS 5 RO ph 1838 m 3 /d 2.1.3 1 1 1 12 65

12 2.1.4 2008 5 5 5.0 /SBR+ MBBR+CMF (DB11/307-2013) 5 / 4.5 m 3 /d 5000m 3 /d 1844m 3 /d 3.69% 66

2.2 26 GB18597-2001 3. 70 db(a)70 db(a) L P2 = L P1 10 Lgr 2 / r 1 2 L p2 r 2 db(a) GB18597-2001 10-10 cm/s GB18599-2001 10-7 cm/s 67

L p1 r 1 db(a) L p1 70dB(A) L p2 r 1 1m r 2 m 27 29 23 86 57 83 25 47 69 L p = 10 Lg10 Lp1/10 + 10 Lp2/10 + L p db(a) L p1 L p2 db(a) L p1 1m L p2 28 1 29.77 2 31.78 3 20.36 4 23.91 28 db(a) 65 55 65 55 65 55 65 55 23 23.91~31.78dB(A) GB12348-2008 3 4. 4.1 68

4.2 1 GB18597-2001 5 2 GB18597-2001 3 GB18597-2001 4.3 4.4 69

1 2 3GB18597-2001 4 344 70

1 29 2 30 71

3 31 72

4 32 0.78945g/cm 3 73

5 33 6 28 8.1-83.1 19.54 772.62mmHg(20) 74

2.044 380 75

1 2 34 76

35 5%+10% +85% Copper Etch 49-1 MS6020 + +3- ++ C 3 H 6 O C 3 H 8 O C 5 H 9 NO C 2 H 5 OH DHF 49%:DI=1:10 BOE 87.5%[40% ]+12.5%[49% ] BOE 1-5% +30-35% +>50%DI [SILOX VAPOX III] 77

GB18218-20091 1 1 70 80 2 3 10~100 36 36 / 78

1 3.3 10-6 2 3.3 10-4 3 2.0 10-5 37 2004-4-20 20m 3 2 282 0 2011-10-17 4 165 1 2012-4-9 1 180 0 38 2009-8-5 246 0 2011-8-28 8 4 2012-10-22 479 0 2013-4-1 40 0 2013-4-21 24 4 2013-4-7 0 0 2013-8-25 0 0 1QL 2( p p0 ) Q0 Cd A 2gh 25 QL kg/s Cd 0.6-0.64 Re 39 79

>100 0.65 0.60 0.55 100 0.50 0.45 0.40 Re=DU/μReDm Um/sμPa s Cd0.64 A m 2 ρ kg/m 3 P Pa P 0 Pa g,9.8m/s 2 h m UQL/Cd A ρ t=[u0/cd g]at/a U0 m/s AT m 2 FV= CpTLG-TC/ H FV Cp J/kg K TLG K TC K H J/kg FV1FV FV0.2 2 0 0 80

() P Pa P 0 Pa κ Cp C V Q G Q G kg/s P Pa Cd 1.00 0.95 0.90 A m 2 M R J/(mol k) T G K Y Y=1.0 81

1 30 Fv= 0.214256055363322Fv>0.2 0.00001256m 2 0.004m 886085.26Pa301m 0.039635154 kg/s 2 30 Fv=0.213029981362612Fv>0.2 0.00001256m 2 0.004m 1157962.9Pa301m 0.025244765kg/s 3 30 Fv=0.395391367959034Fv>0.2 0.00001256m 2 0.004m 4171298.13Pa30 1m0.128009975kg/s PH 3 +N 2 PH 3 1%0.00128 kg/s 5.4.1 HJ/T169-2004 82

C -- mg m -3 -- Q-- σ X σyσz XYZ m σ X =σy -- i w (x,y,0) --mg mg.s-1 s -- w xy z m -- w i x y t 83

n f 1 5.4.2 LC 50 lethal oncentration 40 14h 14 50% 41 41 mg/m 3 LC 50 8501h 13904h 15.34h 5.4.3 1 2.42m/s D 45.48% EF 30.77% BB-CCC-D 23.75% D 41.37%-48.70% 41.81% 36.38% 30.75% 29.34% 2.4 m/sd 1.5m/sF 2 2.4m/s D 1.5m/s F 1 588kg328kgPH 3 0.1kg 5min 60min 84

2.4m/s D 1.5m/s F 2.4m/s D 1.5m/s F [min] 42 Cl 2 [mg/m 3 ] [m] LC 50 [m] m 5 33.676 94.7 462 10 33.676 94.7 799.4 15 3.7422 479.4 1,041.40 20 1.1155 945.3 1,080.10 30 0.3295 1,863.00 40 0.1518 2,696.70 50 0.0829 3,501.80 60 0.0503 4,299.90 5 674.3694 52.3 272.8 10 674.3694 52.3 519.9 15 111.8021 257.1 758.8 20 37.0858 507.1 992.3 30 11.7932 1,011.60 1,451.00 40 6.5985 1,509.40 1,899.20 50 4.317 1,988.40 2,338.30 60 3.0276 2,448.40 2,768.80 [min] 43 NH 3 [mg/m 3 ] [m] LC 50 [m] m 5 3.4322 256.1 10 3.4322 256.1 15 1.8396 494.9 20 0.6584 953 30 0.2053 1,866.00 40 0.0956 2,697.90 50 0.0524 3,502.50 60 0.0319 4,300.50 5 258.5375 69.6 234.8 10 258.5375 69.6 419.8 15 67.6491 257.7 448.7 20 23.2088 507.5 30 7.4668 1,011.80 40 4.1869 1,509.60 50 2.742 1,988.50 60 1.9241 2,448.40 85

2.4m/s D 1.5m/s F [min] 44 PH 3 [mg/m 3 ] [m] LC 50 [m] m 5 94.6601 13.1 34.4 323.5 10 0.1271 476.7 15 0.0361 931.4 20 0.0163 1,345.20 30 0.0053 2,142.50 40 0.0024 2,934.60 50 0.0013 3,726.10 60 0.0008 4,517.70 5 99.7504 22.5 112.4 254.5 10 3.819 256.5 479.9 15 1.221 506.8 692.2 20 0.6196 755.5 891.2 30 0.2612 1,225.40 40 0.1425 1,677.00 50 0.0871 2,126.70 60 0.0576 2,575.90 39LC 50 13 45 LC 50 m 8501h 13904h 15.34h 34.4 112.4 86

0m 100m 200m 13 F 1.5m/s 45 LC 50 LC 50 F LC 50 112.4m 1800m 2 1.5m/sF LC 50 LC 50 112.4m 112.4m 112.4m 210m 87

7 88

46 46 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 91

5.6 92

5.7 93

6. 6.1 1 2 ( ) 3 47 94

47 1 phcodcr SSBOD 5 1 VOCs 1 1 1 / 2 NOxSO 2 1 / 1 NOxSO 2 1 4 6.2 1 2 1996470 DB 11/ 1195 2015 DB 11/ 1195 2015 95

3 15562.1-1995 GB15562.2-1995 2m 4 A B GB/T 18284 5 6 96

6.3 48 1 240m 3 /d 2 600m 3 /d 3 550m 3 /d 4 160m 3 /d 5 6 1 4 m 3 /h 2 10 m 3 /h 3 5000m 3 /h 4 500m 3 /h 48 + +1 1 h=30m 2 1 h=30m 1 1 h=30m h=30m 5 DB11/307-2013 DB11/501-2007 II DB11/501-2007 VOCs 6 h=30m DB11/139-2015 97

98 (GB12348-2008)3 7. [2013]103 http://www.ceedi.com.cn/templates/second/index.aspx?nodeid=125

() G1 G2/G4 G3 G5/6 +>90% 25% 7090 50% 95 50% COD Cr BOD 5 SS NH 3 -N PO 4 3 - F - 5 99

1.1 8 MEMS 12 8 MEMS F2M3 2# 86600 800 200 330 24 X 1.2 1 2015 4 2014 2014 PM 2.5 104.0µg/m 3 197%SO 2 24.2µg/m 3 NO 2 56.9µg/m 3 42.3% PM 10 123.0µg/m 3 75.7%SO 2 GB3095-2012PM 2.5 PM 10 NO 2 PM 2.5 PM 10 NO 2 2 120m V 2015 12 21 2015 11 V3 V 3 GB3096-2008 3 65dB(A) 55dB(A) 100

1.3 1 DB11/501-2007 II NOxSO 2 DB11/139-2015 2 W1W2W3 W4RO COD Cr BOD 5 SSNH 3 -N DB11/307-2013 3 23.91~31.78dB(A) GB12348-2008 3 65dB(A) 55dB(A) 4 602.3t/a 3 101

5 201097 [2015]19 COD Cr 37.7t/a 1.87t/a NOx 4.36t/aSO 2 0.484t/a 0.248t/a 4.98t/a [2015]19 2 COD Cr 75.4t/a 3.74t/a NOx 8.72t/aSO 2 0.968t/a 0.496t/a 9.96t/a 6 8 MEMS 8 MEMS 102