untitled

Size: px

Start display at page:

Download "untitled"

浒版梅
7 years ago
Views:

1 na na na na na na na na na na nano no no no no no no no no note te te te te te te te tech ch ch ch ch ch chno no no no no no nolo lo lo lo lo lo lo l gy gy gy gy gy gy gy gy

2 EM 200 ISBN

3 (There s Plenty of Room at the Bottom) DualBeam

4 2 (There s Plenty of Room at the Bottom) (Richard Feynman) (Caltech) (There s Plenty of Room at the Bottom) nm 20 FEI EM100 FEI FEI

5 mikros skopeo 17 (Antony van Leeuwenhoek) ( ) 400 (Leeuwenhoek) mm 0.2 mm LCD

6 4 (7 μm) (100 μm) LM nm 100 nm 10 Ernst Ruska 1931 (TEM) nm 0.05 nm Ernst Ruska TU Berlin TEM (1 pm = m) ( nm) 10 high frequency low frequency wavelength wavelength good resolution poor resolution

7 5 light microscope electron source TEM first condenser lens objective lens light beam specimen light source SEM electron source anode gun align coils lens 1 lens 2 electron beam scan & stig coils lens 3 collector system condenser aperture objective aperture selected area aperture second condenser lens objective condenser lens minicondenser lens specimen (thin) objective imaging lens diffraction lens intermediate lens first projector lens second projector lens Ga + LMI source suppresser extractor lens 1 projection chamber fluorescent screen FIB octopole alignment blanking plates blanking aperture scan & stig octopoles lens 2 continuous dinode detector 1800 secondary electrons electron beam impact area specimen (thick) secondary electrons or ions ion beam impact area specimen (thick) vacuum turbo/diff pump turbo/diff pump roughing line roughing line 1

8 6 Max Knoll 1935 Manfred von Ardenne 1937 (SEM) 1942 Zworykin Hillier Snijder 50 nm 1 nm 1 projector screen fluorescent screen aperture objective lens objective lens slide condenser lens specimen (thin) 2 slide projector light source condenser lens TEM electron beam electron source (nanobridge) Titan

9 7 TEM SEM (STEM) Manfred von Ardenne 1938 Philips EM200 (Philips Electronic Instruments) Ong Sing Poen STEM nm STEM TEM STEM 0.05 nm (FIB) SEM (Ga + ) FIB FIB FIB SEM (FIB/SEM) FEI DualBeam FIB/SEM SEM 2000 nm (10 9 ) μm (10-6 ) 1000 nm Ångström, Å 0.1 nm micron (10-12 )

10 8 ant 200 nm 1000 (200 nm) (0.2 mm) 10-2 (1 cm) 10-3 (1 mm) plant cell Antony van Leeuwenhoek (10 μm) 10-6 (1 μm) 10-8 (10 nm) animal cell yeast virus Robert Hooke Ernst Abe Ernst Ruska protein complex (0.1 nm) 3

11 9 / 0.5 μm Al-Cu-Li-Mg-Ag STEM Titan

12 10 (LaB 6 lab 6 ) (FEG) 1000 LaB 6 Wehnelt 2700 C 2000 Wehnelt 4). LaB 6 LaB 6 10 LaB 6 TEM electron source condenser system specimen (thin) objective lens projector lens

13 11 X Schottky Schottky Schottky (FEI XFEG) LaB kv 150,000 / (1.5 x 10 8 m/s)300 kv 230,000 / (2.3 x 10 8 m/s) λ h p m 0 e U v c Wehnelt cylinder HIV filament electron beam filament source high voltage generator kv 12.3 x m (12.3 pm) 200 kv 2.5 pm 10 (1 pa = A) 1 / 1.6 x ,000 / 3 anode 4

14 12 X X TEM STEM Otto Scherzer (C) (P) 6): ( C s ) ( C c ) C electron beam C P P P P C C 5 C P

15 13 Titan TEM 6 C s C c d s = 1/2 C s 3 d c = C c ( E/E 0 ) 300 kv Si<110> C s HR-TEM Tecnai F20

16 14 CCD CCD CCD

17 Pa (ETEM) ETEM ETEM (EFTEM) EFTEM EFTEM X (Pa) (SI) torr mbar = 1 bar = 1000 mbar = Pa = 760 torr = x 10 5 Pa 7 x 10 12

18 16 X Y Z X Y Z

19 nm nm 0.5 μm 3 mm 0.1 μm (LACBED)

20 18 3 mm 0.3 mm ( 0.1 μm) (FIB) (Vitrobot ) vitrobot

21 19 CAT MRI SPA SPA SPA SPA

22 20 1 nm (SE) SEM electron source anode gun align coils lens 1 lens 2 electron beam scan & stig coils lens 3 collector system secondary electrons electron beam impact area specimen (thick) vacuum turbo/diff pump roughing line

23 (BSE) X STEM (ev) X SE BSE SE BSE X 600 FEI Quanta

24 22 EBIC SE BSE 1 nm 1 kv X X-ray 7 SE X BSE SE STEM X BSE 1 kv 1

25 23 50 ev 8 BSE BSE SE 2000 = 0.25 mm 2000 nm (2 μm) 250,000 H 2 O 0 C 600 Pa 4.6 torr 4.6 mm Pa (5-10 torr)

26 24 (ESEM) ESEM 9) / ESEM X 1-10 nm

27 25 X Y Z detector signal amplification in the ESEM primary electron beam gaseous environments cascade amplification X Y secondary electrons 9 ESEM STEM STEM X X

28 26 STEM STEM X STEM 0.05 nm STEM STEM (SE) STEM (BSE) STEM (HAADF) BSE HAADF Z X X X X (EDX) X 100nm STEM 10-20nm STEM X Ångstrom X X X X X X FEI Tecnai Osiris

29 27 1 X (WDX) X X X WDX EDX X X (EELS) EELS STEM X X X X X X X

30 28 DualBeam (FIB) FIB FEI DualBeam FIB 52 FIB FIB 1nA v2a EE IB milling-002 FIB

31 29 FIB / FIB (LMIS) LMIS ZnO FIB (LMIS)

32 LMIS 100 // FIB 50 LIMIS SEM FIB 10 DualBeam 52 FIB 100 Å 1000 Å Taylor cone 11 Boersch

33 31 LMIS LMIS FEI 1000 FEI (ALU)

34 32 X NMR EM (MEMS) FIB DualBeam S/TEM S/TEM

35 33 - (nanocharacterization) STEM TEM DualBeam (EBSD) X (EDSX) TEM (EFTEM) nanoprocesses ESEM ETEM nanoprocesses nanoprototyping Nanoprototyping

36 34 (SEM, FIB) (TEM) (Ångström) nm ( ) EDX X EDSX X X EELS (FIB) ESEM

37 35 ETEM X / X FEG FIB (DualBeam) FIB SEM LMIS 1 (μm) (10-6 m) 1000 nm 1 (nm) (10-9 ) 360

38 36 SEM STEM TEM WDX X X WDX X Wehnelt X X nm X FEI Daniel Beniac Public Health Agency of Canada Lyubov Belova, Royal Institute of Technology Randy Burgess, Hewlett Packard Clifford Barnes University of Ulster Laura Tormo Cifuentes, Museo Nacional de Ciencias Naturales-CSIC Philippe Crassous, Ifremer Angela DiFiore, RJ Lee Group, Inc Christian Gspan, Institut für Elektronenmikroskopie Paul Gunning, Smith & Nephew Frans Holthuysen, Philips Research Jim Ito Yorkhill Hospital Glascow Scotland, UK Wann-Neng Jane, Academia Sinica Craig Johnson Avigail Keller C.Kisielowski NCEM, UC Berkley Alexey Kolomiytsev, Taganrog University Daniel Mathys, ZMB, Universität Basel Oliver Meckes, Eye of Science Nicole Ottawa, Eye of Science Harald Plank, Institute for Electron Microscopy Francisco Rangel, MCT/INT/CETENE Michael Rogers, Institut für Elektronenmikroskopie Hagen Roetz, Infi neon Technologies Dresden GmbH & Co.OHG Harald Rösner Institut für Materialphysik J.Thibault, Marseille Matthew Weyland Monash Centre for Electron Microscopy Hong Zhou, University of California at Los Angeles, USA FEI NanoPort and Applications Engineers

39 FEI.com FEI FPO 30% TÜV FEI DualBeam Nova Magellan Titan Tecnai Osiris V400ACE Vitrobot FEI FEI 0T0005-CN

40 Leeuwenho

Microsoft PowerPoint - TEM and SEM [相容模式]

Microsoft PowerPoint - TEM and SEM [相容模式] Transmission electron microscopy (TEM) 穿透式電子顯微鏡 1-1 1 前言 1-2 發展沿革 1-3 電子束與物質作用 1-4 近年發展趨向 1-5 電子顯微鏡在材料科學上的應用 1-6 電子顯微鏡與光學顯微鏡 x 光繞射儀特性及功能之比較 1-11