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MS-LFR, MS q/w : : : Festo 80% Festo q24 Festo 13 2200 w 5 4 6x10 12

MS-LFR, MS MS [bar] [μm] 0.05 0.05 0.1 0.3 0.1 0.5 0.7 2.5 4 7 12 16 0.01 1 5 40 AG /AQ D2 D4 D5 D6 D7 D8 A B C E MSB-FRC 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 12 ( Internet: msb4, msb6 msb9) MSB 4 G¼ Gx,G¼,Gy 6 G½ G¼,Gy,G½,G¾ 9 12 MS-LFR 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 MS-LF MS-LFM MS-LFX 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 MS-LWS 4 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 2 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS-LFR, MS MS /Internet MS EN Gx EN G¼ R U M H V E VS AG A8 A4 AD AS E11 S Z MSB-FRC 4 msb4 6 msb6 9 12 MSB 4 msb4 6 msb6 9 12 MS-LFR 4 8 6 8 9 26 12 40 MS-LF MS-LFM MS-LFX 4 ms4-lf 6 ms6-lf 9 ms9-lf 12 ms12-lf 4 ms4-lfm 6 ms6-lfm 9 ms9-lfm 12 ms12-lfm 4 ms4-lfx 6 ms6-lfx 9 ms9-lfx 12 ms12-lfx MS-LWS 4 6 ms6-lws 9 ms9-lws 12 ms12-lws 2017.05 Subject to change Internet: www.festo.com/catalogue/... 3

MS-LFR, MS MS [bar] 24 V DC EN 175301 24 V DC M12 IEC 61076-2-101 110 V AC EN 175301 230 V AC EN 175301 0.05 0.05 0.1 0.3 0.1 0.5 0.7 2.5 4 7 12 16 AG /AQ D2 D4 D5 D6 D7 D8 V24 V24P V110 V230 MS-LR MS-LRB MS-LRP MS-LRPB MS-LRE 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 4 G¼ Gx,G¼,Gy 6 G½ G¼,Gy,G½,G¾ 9 12 4 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 12 4 6 G½ G¼,Gy,G½,G¾ 9 12 4 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 12 MS-LOE 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 MS-EM(1) MS-EE MS-DL MS-DE 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 12 G1, G1¼,G1½,G2 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 12 G1, G1¼,G1½,G2 4 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS-LFR, MS MS /Internet MS EN Gx EN G¼ R U VS AG A8 A4 AD AS E11 S Z MS-LR MS-LRB MS-LRP MS-LRPB MS-LRE 4 ms4-lr 6 ms6-lr 9 ms9-lr 12 ms12-lr 4 ms4-lrb 6 ms6-lrb 9 12 4 6 ms6-lrp 9 12 4 6 ms6-lrpb 9 12 4 6 ms6-lre 9 12 MS-LOE 4 ms4-loe 6 ms6-loe 9 ms9-loe 12 ms12-loe MS-EM(1) MS-EE MS-DL MS-DE 4 ms4-em1 6 ms6-em1 9 ms9-em 12 ms12-em 4 ms4-ee 6 ms6-ee 9 ms9-ee 12 ms12-ee 4 ms4-dl 6 ms6-dl 9 12 ms12-dl 4 ms4-de 6 ms6-de 9 12 ms12-de 2017.05 Subject to change Internet: www.festo.com/catalogue/... 5

MS-LFR, MS MS 1, 1 3, 2 4, 2 24 V DC, Sub-D, 9 24 V DC EN 175301 AG /AQ C D E 10V24 10V24/ V24 MS-SV-C MS-SV-D MS-SV-E 24 V DC M12 IEC 61076-2-101 110/230 V AC EN 175301 10V24P V110/ V230 22 31.6 V DC M12, AS-i Safety at Work 4 6 G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 4 6 G½ G¼,Gy,G½,G¾ 9 12 4 6 G½ G¼,Gy,G½,G¾ 9 12 ASIS MS-LDM1 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 12 MS-FRM MS-FRM-FRZ 4 Gx,G¼ Gx,G¼,Gy 6 G¼,Gy,G½ G¼,Gy,G½,G¾ 9 G¾,G1 G½,G¾,G1,G1¼,G1½ 12 G1, G1¼,G1½,G2 4 G¼ 6 G½ 9 12 SFAM 4 6 G½ G½ 9 G1, G1½ 12 6 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS-LFR, MS MS /Internet MS EN Gx EN G¼ 2x PNP NPN, 1 4 20 ma 2x PNP NPN, 1 0 10 V R U VS AG A8 A4 AD 2SA 2SV S Z/R MS-SV-C MS-SV-D MS-SV-E 4 6 ms6-sv 9 ms9-sv 12 4 6 ms6-sv 9 12 4 6 ms6-sv 9 12 MS-LDM1 4 ms4-ldm1 6 ms6-ldm1 9 12 MS-FRM MS-FRM-FRZ 4 ms4-frm 6 ms6-frm 9 ms9-frm 12 ms12-frm 4 ms4-frm 6 ms6-frm 9 12 SFAM 4 6 sfam-62 9 sfam-90 12 2017.05 Subject to change Internet: www.festo.com/catalogue/... 7

MS4/MS6-LFR, MS MS4/MS6-LFR 7 -H- 4 5 6 af 1 3 2 3 MS4/MS6 MS9 Internet: amv, rmv, armv Internet: ipm-80, ipm-40-80, ipm-80-80 ad 1 ac 3 aa 2 9 3 8 aj ab ae 8 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS4/MS6-LFR, MS 1 MS4/6-END 2 -SET MS4/6-AG -SET MS4/6-AQ 3 MS4/6-MV 4 MS4/6-WB 5 MS4-WBM 6 MS4/6-WR 7 MS4/6-WRS 8 VS 9 EN x/¼ A8/A4 aj MA aa AD7 AD10 ab NEBU-M8 -LE3 ac AD1 AD4 ad NEBU-M8 -LE3/NEBU-M12 -LE4 /Internet ms4-end, ms6-end ms4-ag, ms6-ag ms4-aq, ms6-aq ms4-mv, ms6-mv ms4-wb, ms6-wb ms4-wbm ae E2/E3/E4 24 af 50 LRVS-D MS4/6-WP/WPB/WPE/WPM ms4-wr, ms6-wr ms4-wrs, ms6-wrs 24 24 50 24 50 24 50 ms4-wp, ms6-wp 2017.05 Subject to change Internet: www.festo.com/catalogue/... 9

MS4/MS6-LFR, MS MS 6 LFR ½ D7 E R M AS MS 4 40 mm 6 62 mm LFR MS4 x ¼ Gx G¼ MS6 ¼ y ½ G¼ Gy G½ D6 D7 0.3 7bar 0.5 12 bar C E 5 μm 40 μm R U M V AS 24 EU UL 10 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS4/MS6-LFR, MS S -M- 850 7,200 l/min -Q- 10 +60 C -L- 0.8 20 bar -W- www.festo.com 0.3 4bar,0.3 7bar, 0.5 12 bar 0.5 16 bar 2 1 EX4 1, 2, 21 22 5 μm 40 μm 49 MS4 MS6 1, 2 Gx G¼ G¼,Gy G½ AG Gx,G¼ Gy G¼,Gy,G½ G¾ AQ NPTx,NPT¼ NPTy NPT¼,NPTy,NPT½ NPT¾ ±5 [μm] 5 40 ISO 8573-1:2010 [6:4:4] ( 5 μm) ISO 8573-1:2010 [7:4:4] ( 40 μm) -H- ISO 1179-1 ISO 228-1 2017.05 Subject to change Internet: www.festo.com/catalogue/... 11

MS4/MS6-LFR, MS MS4 MS6 D5 [bar] 0.3 4 D6 [bar] 0.3 7 D7 [bar] 0.5 12 (0.5 10 AD UL ) D8 [bar] 0.5 16 (0.5 10UL ) [bar] 0.25 LCD Gx G¼ [cm 3 ] 19 () 25 () 38 qnn 1) [l/min] MS4 MS6 Gx G¼ G¼ Gy G½ D5 0.3 4bar 5 μm 900 2) 1,800 2) 2,000 2) 5,500 2) 6,900 2) 40 μm 1,100 2) 1,900 2) 2,200 2) 6,000 2) 7,200 2) D6 0.3 7bar 5 μm 900 1,500 2,700 5,000 5,600 40 μm 1,000 1,700 2,800 5,700 6,200 D7 0.5 12 bar 5 μm 850 1,200 2,200 3,500 4,000 40 μm 900 1,500 2,500 4,000 4,500 D8 0.5 16 bar 5 μm 2,000 3,300 3,800 40 μm 2,300 3,500 4,000 1) p1 = 10 bar p2 = 6 bar, Δp=1bar 2) p1 = 10 bar p2 = 3 bar, Δp=1bar M H V E2/E3/E4 MS4 MS6 MS4 MS6 MS4 MS6 MS6 [bar] 0.8 14 (0.8 10) 1) 0.8 20 (0.8 10) 1) 1.5 12 (1.5 10) 1) 1.5 12 (1.5 10) 1) 2 12 (2 10) 1) 2 12 (2 10) 1) 0.8 16 (0.8 10) 1) ISO 8573-1:2010 [ :4: ] ISO 8573-1:2010 [ :4: ] ISO 8573-1:2010 [7:4: ] ISO 8573-1:2010 [ :4: ] [ C] 10 +60(0 +50) 2) +5 +60 (+5 +50) 2) +5 +60 (+5 +50) 2) +1 +60 (+1 +50) 2) [ C] 10 +60(0 +50) 2) +5 +60 (+5 +50) 2) +5 +60 (+5 +50) 2) +1 +60 (+1 +50) 2) [ C] 10 +60 10 +60 10 +60 +1 +60 CRC 3) 2 UL culus recognized (OL) 1) MS4/MS6-LFRUL. 2) MS4/MS6-LFR AD. 3) 2 Festo FN 940 070 12 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS4/MS6-LFR, MS ATEX EU EX4 ATEX II 2G Ex ct6x ATEX II 2D EX c60 CX ATEX 10 C Ta +60 C ( M) +5 C Ta +60 C ( H/V) CE (ATEX) [g] MS4 MS6 E11 E11 E11 E11 R 275 400 875 1,145 U 475 600 1,087 1,627 U E2/E3/E4 1,800 2,070 6 8 2 aa aj 1 5 7 9 3 4 1 2 PA/POM E11 3 PC 4, PA 5 PE 6 POM 7 POM 8 POM 9 POM aj NBR aa NBR RoHS ( E2, E3 E4) VS 2017.05 Subject to change Internet: www.festo.com/catalogue/... 13

MS4/MS6-LFR, MS qn p2 D6 D7 5 μm 40 μm MS4-LFR-x p1 = 10 bar p2 [bar] p2 [bar] D6: 0.3 7 bar D7: 0.5 12 bar qn [l/min] qn [l/min] MS4-LFR-¼ p1 = 10 bar p2 [bar] p2 [bar] D6: 0.3 7 bar D7: 0.5 12 bar qn [l/min] qn [l/min] 14 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS4/MS6-LFR, MS qn p2 D6 D7 5 μm 40 μm MS6-LFR-¼ p1 = 10 bar p2 [bar] p2 [bar] D6: 0.3 7 bar D7: 0.5 12 bar qn [l/min] qn [l/min] MS6-LFR-y p1 = 10 bar p2 [bar] p2 [bar] D6: 0.3 7 bar D7: 0.5 12 bar qn [l/min] qn [l/min] MS6-LFR-½ p1 = 10 bar p2 [bar] p2 [bar] D6: 0.3 7 bar D7: 0.5 12 bar qn [l/min] qn [l/min] 2017.05 Subject to change Internet: www.festo.com/catalogue/... 15

MS4/MS6-LFR, MS MS4-LFR MS,, R U CAD www.festo.com 1 B1 B2 B3 D1 D2 L1 L2 L3 L4 L5 L6 MS4-LFR-x Gx 40 21 57 MS4-LFR-¼ G¼ 37.2 140.6 158 27 60.2 58.5 25 17.7 -H- ISO 1179-1 ISO 228-1 16 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS4/MS6-LFR, MS MS6-LFR MS,, CAD www.festo.com R U 1 B1 B2 B3 D1 D2 L1 L2 L3 L4 L5 L6 MS6-LFR-¼ G¼ MS6-LFR-y 62 31 77 Gy 51.2 190 218 39 95.1 85 68 15.8 MS6-LFR-½ G½ -H- ISO 1179-1 ISO 228-1 2017.05 Subject to change Internet: www.festo.com/catalogue/... 17

MS4/MS6-LFR, MS VS CAD www.festo.com A8/A4EN x/¼ B2 B3 D1 D4 MS4-LFR-x- -VS MS4-LFR-¼- -VS 21 54 Gx G¼ MS4-LFR-x- -A8 MS4-LFR-¼- -A8 21 58.5 Gx G¼ Gx MS4-LFR-x- -A4 MS4-LFR-¼- -A4 21 58.5 Gx G¼ G¼ MS6-LFR-¼- -VS G¼ MS6-LFR-y- -VS 31 76 Gy MS6-LFR-½- -VS G½ MS6-LFR-¼- -A4 G¼ MS6-LFR-y- -A4 31 78.5 Gy G¼ MS6-LFR-½- -A4 G½ -H- ISO 1179-1 ISO 228-1 18 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS4/MS6-LFR, MS MS RG CAD www.festo.com B2 B3 D1 MS4-LFR-x- -RG MS4-LFR-¼- -RG 21 58.5 Gx G¼ MS6-LFR-¼- -RG MS6-LFR-y- -RG MS6-LFR-½- -RG 31 78.5 G¼ Gy G½ -H- ISO 1179-1 ISO 228-1 2017.05 Subject to change Internet: www.festo.com/catalogue/... 19

MS4/MS6-LFR, MS LCD AD1 AD4 CAD www.festo.com Internet: sde1 AD1: SDE1-D10-G2-MS- L-P1-M83 M8x1, 1 PNP AD2: SDE1-D10-G2-MS- L-N1-M83 M8x1, 1 NPN AD3: SDE1-D10-G2-MS-L- PI-M124 M12x1, 1 PNP 4 20mA AD4: SDE1-D10-G2-MS-L- NI-M124 M12x1, 1 NPN 4 20mA LCD () AD7 AD10 Internet: sde5 AD7: SDE5-D10-O- -P-M83 M8x1,,1 PNP, AD9: SDE5-D10-O3- -P-M83 M8x1,, 1 PNP, AD8: SDE5-D10-C- -P-M83 M8x1,,1 PNP, AD10: SDE5-D10-C3- -P-M83 M8x1,, 1 PNP, B2 B3 D1 D6 L5 L6 MS4-LFR-x- -AD1/AD2 MS4-LFR-¼- -AD1/AD2 21 82.6 Gx G¼ M8x1 35.1 46.7 MS4-LFR-x- -AD3/AD4 MS4-LFR-¼- -AD3/AD4 21 82.6 Gx G¼ M12x1 35.1 55.8 MS4-LFR-x- -AD7/AD8/AD9/AD10 MS4-LFR-¼- -AD7/AD8/AD9/AD10 21 59.1 Gx G¼ M8x1 MS6-LFR-¼- -AD1/AD2 G¼ MS6-LFR-y- -AD1/AD2 31 103 Gy M8x1 35.1 46.7 MS6-LFR-½- -AD1/AD2 G½ MS6-LFR-¼- -AD3/AD4 G¼ MS6-LFR-y- -AD3/AD4 31 103 Gy M12x1 35.1 55.8 MS6-LFR-½- -AD3/AD4 G½ MS6-LFR-¼- -AD7/AD8/AD9/AD10 G¼ MS6-LFR-y- -AD7/AD8/AD9/AD10 31 79 Gy M8x1 MS6-LFR-½- -AD7/AD8/AD9/AD10 G½ -H- ISO 1179-1 ISO 228-1 20 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS4/MS6-LFR, MS MS4/6-WRS ( ) AS E11 CAD www.festo.com 2 LD-AS 3 B4 B5 D2 D3 L3 L8 L9 L10 L11 ß 1 MS4-LFR- -AS 48.6 30 60.2 37.2 M30x1.5 13 6 6 36 MS4-LFR- -E11 76 60 MS4-LFR- -LD-AS 48.6 30 37.2 60 85.7 MS6-LFR- -AS 64.4 38.8 95.1 12 5 51.2 M44x1 7 55 MS6-LFR- -E11 110 22.1 14 60 MS6-LFR- -LD-AS 64.4 38,8 51.2 95.5 148.5 2017.05 Subject to change Internet: www.festo.com/catalogue/... 21

MS4/MS6-LFR, MS M H V MS4- -R/U-M MS6- -R-M MS6- -U-M MS4- -R/U-H MS6- -R-H MS6- -U-H MS4- -R/U-V MS6- -R-V CAD www.festo.com MS6- -U-V PUN(-H)-8x1,25 PUN-6/PAN-6 PUN(-H)-8x1,25 D6 L6 D6 L6 D6 L6 R R R MS4-LFR- -M 17.7 MS4-LFR- -H 22.1 MS4-LFR- -V 20.4 5.6 6.2 5.6 MS6-LFR- -M 15.8 MS6-LFR- -H 20.4 MS6-LFR- -V 18.5 U U U MS4-LFR- -M 17.7 MS4-LFR- -H 22.1 MS4-LFR- -V 20.4 5.6 6.2 5.6 MS6-LFR- -M MS6-LFR- -H MS6-LFR- -V E2/E3/E4 PWEA: 2 : PG9 3 360 PUN-H-12x2 Internet: pwea B6 B7 B8 B9 L12 MS6-LFR- -E2/E3/E4 72 140 108 15 174.5 22 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS4/MS6-LFR, MS q 5 μm 40 μm 0.3 7bar,, MS [bar], MS4 G¼ q529144 MS4-LFR-¼-D6-CRM-AS q529148 MS4-LFR-¼-D6-ERM-AS q529146 MS4-LFR-¼-D6-CRV-AS q529150 MS4-LFR-¼-D6-ERV-AS MS6 G½ q529176 MS6-LFR-½-D6-CRM-AS q529180 MS6-LFR-½-D6-ERM-AS q529178 MS6-LFR-½-D6-CRV-AS q529182 MS6-LFR-½-D6-ERV-AS 0.5 12 bar,, MS [bar], MS4 G¼ q529152 MS4-LFR-¼-D7-CRM-AS q529156 MS4-LFR-¼-D7-ERM-AS q529154 MS4-LFR-¼-D7-CRV-AS q529158 MS4-LFR-¼-D7-ERV-AS MS6 G½ q529184 MS6-LFR-½-D7-CRM-AS q529188 MS6-LFR-½-D7-ERM-AS q529186 MS6-LFR-½-D7-CRV-AS q529190 MS6-LFR-½-D7-ERV-AS 0.5 12 bar,, MS [bar], MS4 G¼ q535724 MS4-LFR-¼-D7-EUM-AS q535720 MS4-LFR-¼-D7-CUV-AS q535722 MS4-LFR-¼-D7-EUV-AS MS6 G½ q530338 MS6-LFR-½-D7-CUM-AS q529192 MS6-LFR-½-D7-EUM-AS q530340 MS6-LFR-½-D7-CUV-AS q529194 MS6-LFR-½-D7-EUV-AS 5 μm 40 μm 0.3 7bar,, MS [bar], MS4 Gx 529160 MS4-LFR-x-D6-CRM-AS 529164 MS4-LFR-x-D6-ERM-AS 529162 MS4-LFR-x-D6-CRV-AS 529166 MS4-LFR-x-D6-ERV-AS MS6 G¼ 529196 MS6-LFR-¼-D6-CRM-AS 529200 MS6-LFR-¼-D6-ERM-AS 529202 MS6-LFR-¼-D6-ERV-AS Gy 529216 MS6-LFR-y-D6-CRM-AS 529220 MS6-LFR-y-D6-ERM-AS 529218 MS6-LFR-y-D6-CRV-AS 529222 MS6-LFR-y-D6-ERV-AS 0.5 12 bar,, MS [bar], MS4 Gx 529168 MS4-LFR-x-D7-CRM-AS 529172 MS4-LFR-x-D7-ERM-AS 529170 MS4-LFR-x-D7-CRV-AS 529174 MS4-LFR-x-D7-ERV-AS MS6 G¼ 529204 MS6-LFR-¼-D7-CRM-AS 529208 MS6-LFR-¼-D7-ERM-AS 529206 MS6-LFR-¼-D7-CRV-AS 529210 MS6-LFR-¼-D7-ERV-AS Gy 529224 MS6-LFR-y-D7-CRM-AS 529228 MS6-LFR-y-D7-ERM-AS 529226 MS6-LFR-y-D7-CRV-AS 529230 MS6-LFR-y-D7-ERV-AS 0.5 12 bar,, MS [bar], MS6 Gy 529232 MS6-LFR-y-D7-EUM-AS 530348 MS6-LFR-y-D7-CUV-AS 529234 MS6-LFR-y-D7-EUV-AS Festo q24 Festo w 5 2017.05 Subject to change Internet: www.festo.com/catalogue/... 23

MS4/MS6-LFR, MS [mm] 40 62 0M 526489 526490 MS MS 4 6 -LFR -LFR Gx 1 -x G¼ G¼ 1 w-¼ Gy 1 -y G½ 1 w-½ Gx -AGA G¼ G¼ w-agb Gy Gy -AGC G½ w-agd G¾ -AGE NPTx 1 -AQK NPT¼ NPT¼ 1 -AQN NPTy NPTy 1 -AQP NPT½ 1 -AQR NPT¾ 1 -AQS 0.3 4bar w-d5 0.3 7bar w-d6 0.5 12 bar w-d7 0.5 16 bar 1 -D8 40 μm w-e 5 μm w-c w-r -U w-m (P1max.12bar) 2 -H (P1max.12bar) 2 w-v 110 V AC 13 -E2 230 V AC 13 -E3 24 V DC 13 -E4 1 x, ¼, y, ½, AQK,AQN,AQP,AQR,AQS,D8,E2,E3,E4,AD1 AD4, AD7 AD10, E11, WPM EU EX4 2 H, V D8 3 E2, E3, E4 U M O MS LFR Festo q24 Festo w 5 24 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS4/MS6-LFR, MS [mm] 40 62 0O w-vs EN -A8 x EN ¼ -A4, 4 -RG LCD, M8, 1 PNP, 3 15 -AD1 LCD, M8, 1 NPN, 3 15 -AD2 LCD, M12, 1 PNP, 4, 4 20mA 15 -AD3 LCD, M12, 1 NPN, 4, 4 20mA 15 -AD4, M8,,PNP, 15 -AD7, M8,,PNP, 15 -AD8, M8,,PNP, 15 -AD9, M8,,PNP, 15 -AD10 psi 6 -PSI MPa 6 -MPA -OS 7 -LD 0M w-as 1 -E11 0O 8 w-wr 9 -WP 19 -WPM w-wb -WBM EU II 2GD (ATEX) -EX4 UL culus, -UL1 -Z 4 RG PSI 5 AD1 AD4, AD7 AD10 max. 10 bar D8 6 PSI, MPA VS, A8, A4, AD1 AD4, AD7 AD10 7 LD E11 8 WR LD 9 WP, WPM AGA, AGB, AGC, AGD, AGE, AQK, AQN, AQP, AQR AQS M O Festo q24 Festo w 5 2017.05 Subject to change Internet: www.festo.com/catalogue/... 25

MS9-LFR, MS 3 4 5 -H- MS6, MS9 MS12 Internet: rmv, armv ab 2 1 6 1 8 aj aa 2/3/4/5 7 9 2/3/4/5 ac 26 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS9-LFR, MS AG /AQ /Internet ¾/1/N¾/N1 EX4 EX4 G/NG 1 -SET ms9-ag MS9-AG -SET ms9-aq MS9-AQ 2 ms9-mv MS9-MV 3 ms9-wp MS9-WP 4 ms9-wp MS9-WPB 5 ms9-wp MS9-WPM 6 MS 38 AG 7 38 VS 8 38 AD7 AD10 9 50 NEBU-M8 -LE3 aj EN ¼ 38 A4 aa 50 MA ab 50 LRVS-D ac, E2/E3/E4 38 2017.05 Subject to change Internet: www.festo.com/catalogue/... 27

MS9-LFR, MS MS 9 LFR G D6 E U M DI AG BAR AS MS 9 90 mm LFR G NG (inch) / D6 D7 0.5 7bar, 0.5 12 bar, C E 5 μm 40 μm U M V DI AG MS BAR PSI bar psi AS 38 EU UL 28 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS9-LFR, MS S -M- 6,000 23,000 l/min -Q- 10 +60 C -L- 1 20bar -W- www.festo.com 0.5 4bar,0.5 7bar, 0.5 12 bar 0.5 16 bar 5 μm 40 μm 49 EX4 1, 2, 21 22 1, 2 AG AQ G/NG G¾,G1,NPT¾ NPT1 G½,G¾,G1,G1¼ G1½ NPT½,NPT¾,NPT1,NPT1¼ NPT1½ ±5 [μm] 5(ISO 8573-1:2010 [6:4:4]) 40 (ISO 8573-1:2010 [7:4:4]) / D5 [bar] 0.5 4, D6 [bar] 0.5 7, D7 [bar] 0.5 12, (0.5 10 AD ) D8 [bar] 0.5 16, (0.5 10 AD ) -H- ISO 1179-1 ISO 228-1 2017.05 Subject to change Internet: www.festo.com/catalogue/... 29

MS9-LFR, MS [bar] 0.4 G¼ [ml] 220 qnn 1)2) [l/min] DI G¾/NPT¾ G1/NPT1 G¾/NPT¾ G1/NPT1 D5 0.5 4bar 5 μm 17,000 3) 20,000 3) 16,000 3) 18,000 3) 40 μm 18,000 3) 23,000 3) 16,000 3) 20,000 3) D6 0.5 7bar 5 μm 15,000 18,000 12,000 10,000 40 μm 16,000 20,000 12,000 10,000 D7 0.5 12 bar 5 μm 15,000 18,000 40 μm 16,000 20,000 D8 0.5 16 bar 5 μm 15,000 18,000 40 μm 16,000 20,000 1) ±15% 2) p1 = 10 bar p2 = 6 bar, Δp=1bar 3) p1 = 10 bar p2 = 4 bar, Δp=1bar E2/E3/E4 M H V [bar] 1 20 1.5 12 2 12 1 16 ISO 8573-1:2010 [ :4: ] ISO 8573-1:2010 [ :4: ] ISO 8573-1:2010 [7:4: ] ISO 8573-1:2010 [ :4: ] [ C] 10 +60 +5 +60 +5 +60 +1 +60 [ C] 0 +50 +5 +50 +5 +50 +1 +50 AD [ C] 10 +60 +5 +60 +5 +60 +1 +60 [ C] 0 +50 +5 +50 +5 +50 +1 +50 AD [ C] 10 +60 +5 +60 +5 +60 +1 +60 CRC 1) 2 ( UL1) culus recognized (OL) 1) 2 Festo FN 940 070 ATEX EU EX4 ATEX II 2G Ex ct6x ATEX II 2D EX ct60 CX ATEX 10 C Ta +60 C ( M) +5 C Ta +60 C ( H/V) CE (ATEX) 30 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS9-LFR, MS [g] E11 E11 U 2,400 2,700 U E2/E3/E4 2,800 3,100 9 5 7 2 8 1 4 6 3 1 2 PA E11 3 PA 4 PE 5 POM 6 POM 7 POM 8 NBR 9,NBR,POM NBR RoHS ( E2, E3 E4) qn p2 p1 = 10 bar 5 μm, G¾/NPT¾ 40 μm, G¾/NPT¾ MS9-LFR- -D5 MS9-LFR- -D6/D7/D8 MS9-LFR- -D5 MS9-LFR- -D6/D8 MS9-LFR- -D7 2017.05 Subject to change Internet: www.festo.com/catalogue/... 31

MS9-LFR, MS qn p2 p1 = 10 bar 5 μm, G1/NPT1 40 μm, G1/NPT1 MS9-LFR- -D5 MS9-LFR- -D6/D7/D8 qn p2 p1 = 10 bar DI 5 μm, G¾/NPT¾ 40 μm, G¾/NPT¾ 5 μm, G1/NPT1 40 μm, G1/NPT1 MS9-LFR- -D5 MS9-LFR- -D6 32 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS9-LFR, MS G/NG, VS, CAD www.festo.com 1 B1 B2 B3 L1 L2 L3 L4 L5 L6 MS9-LFR-G/NG 90 45 109 320.5 71.5 94.5 127 150 34.5 2017.05 Subject to change Internet: www.festo.com/catalogue/... 33

MS9-LFR, MS / ¾/1/N¾/N1 AG /AQ CAD www.festo.com 2 M6xmin.90 DIN 912 ( ) 3 M4x8 ( MS9- -EX4) B4 B5 B6 B7 B8 D1 D4 D5 L7 L8 T1 ß EX4 EX4 MS9-LFR-¾ G¾ 90 104 91.5 MS9-LFR-1 G1 11 6.5 66 6 MS9-LFR-AGD 132 G½ 30 MS9-LFR-AGE 132 G¾ 36 MS9-LFR-AGF 112 122 142 G1 35 41 MS9-LFR-AGG 162 G1¼ 50 MS9-LFR-AGH 176 G1½ 55 MS9-LFR-N¾ NPT¾-14 90 104 91.5 MS9-LFR-N1 NPT1-11½ 11 6.5 66 6 MS9-LFR-AQR 132 NPT½-14 30 MS9-LFR-AQS 132 NPT¾-14 36 MS9-LFR-AQT 112 142 NPT1-11½ 41 MS9-LFR-AQU 162 NPT1¼-11½ 50 MS9-LFR-AQV 176 NPT1½-11½ 55 -H- ISO 1179-1 ISO 228-1 34 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS9-LFR, MS MS AG RG CAD www.festo.com A4EN ¼ B2 B3 B9 D2 MS9-LFR- -AG/RG 109 45 MS9-LFR- -A4 110 G¼ -H- ISO 1179-1 ISO 228-1 LCD () AD7 AD10 AD7: SDE5-D10-O- -P-M83 M8x1,,1 PNP, CAD www.festo.com Internet: sde5 AD9: SDE5-D10-O3- -P-M83 M8x1,, 1 PNP, AD8: SDE5-D10-C- -P-M83 M8x1,,1 PNP, AD10: SDE5-D10-C3- -P-M83 M8x1,, 1 PNP, B2 B11 D3 MS9-LFR- -AD7/AD8/AD9/AD10 45 112 M8x1 2017.05 Subject to change Internet: www.festo.com/catalogue/... 35

MS9-LFR, MS AS E11 CAD www.festo.com 2 B1 D1 D2 L2 L3 L4 MS9-LFR- -AS 64.4 94.5 51.2 M44x1 MS9-LFR- -E11 103.5 13.5 60 M/ V H CAD www.festo.com PUN(-H)-8x1,25 PUN-6/PAN-6 E2/E3/E4 PWEA 2 : PG9 3 360 PUN-H-12x2 Internet: pwea B1 D1 H1 L1 L2 L3 MS9-LFR- -M/V 5.6 34.5 MS9-LFR- -H 6.2 MS9-LFR- -E2/E3/E4 72 178 140 108 15 36 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS9-LFR, MS 5 μm 40 μm 0.5 7bar,, MS AG [bar], MS9 564114 MS9-LFR-G-D6-CUM-AG-BAR-AS 564110 MS9-LFR-G-D6-EUM-AG-BAR-AS 564115 MS9-LFR-G-D6-CUV-AG-BAR-AS 564111 MS9-LFR-G-D6-EUV-AG-BAR-AS 0.5 7bar,, MS AG [bar], MS9 564116 MS9-LFR-G-D6-CUM-DI-AG-BAR-AS 564112 MS9-LFR-G-D6-EUM-DI-AG-BAR-AS 564117 MS9-LFR-G-D6-CUV-DI-AG-BAR-AS 564113 MS9-LFR-G-D6-EUV-DI-AG-BAR-AS 0.5 7bar,, MS AG [psi], MS9 564128 MS9-LFR-NG-D6-CUM-DI-AG-PSI-AS 564124 MS9-LFR-NG-D6-EUM-DI-AG-PSI-AS 564129 MS9-LFR-NG-D6-CUV-DI-AG-PSI-AS 564125 MS9-LFR-NG-D6-EUV-DI-AG-PSI-AS 0.5 12 bar,, MS AG [bar], MS9 564120 MS9-LFR-G-D7-CUM-AG-BAR-AS 564118 MS9-LFR-G-D7-EUM-AG-BAR-AS 564121 MS9-LFR-G-D7-CUV-AG-BAR-AS 564119 MS9-LFR-G-D7-EUV-AG-BAR-AS 2017.05 Subject to change Internet: www.festo.com/catalogue/... 37

MS9-LFR, MS [mm] 90 0M 562531 MS MS 9 9 9 -LFR -LFR G¾ 1 -¾ G1 1-1 G½ -AGD G¾ -AGE G1 -AGF G1¼ -AGG G1½ -AGH NPT¾ 1 -N¾ NPT1 1 -N1 NPT½ 1 -AQR NPT¾ 1 -AQS NPT1 1 -AQT NPT1¼ 1 -AQU NPT1½ 1 -AQV 1 -G (inch) 1 -NG / 0.5 4bar, -D5 0.5 7bar, -D6 0.5 12 bar, -D7 0.5 16 bar, 1 -D8 40 μm -E 5 μm -C -U -U -M (P1max.12bar) -H (P1max.12bar) -V 110 V AC (P1max.16bar) 1 -E2 230 V AC (P1max.16bar) 1 -E3 24 V DC (P1max.16bar) 1 -E4 1 ¾, 1,N¾, N1,AQR,AQS,AQT,AQU,AQV,G,NG,D8,E2,E3,E4,AD7,AD8,AD9,AD10,E11,WPM EU EX4 M O 562531 MS 9 LFR U 38 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS9-LFR, MS [mm] 90 0O 2 -DI 0M / MS -AG -VS EN ¼ -A4, 3 -RG, M8,,PNP, 14 -AD7, M8,,PNP, 14 -AD8, M8,,PNP, 14 -AD9, M8,,PNP, 14 -AD10 0O psi 5 -PSI MPa 5 -MPA bar 5 -BAR 6 -OS 0M -AS 1 -E11 0O 7 -WP 17 -WPM 7 -WPB EU II 2GD (ATEX) -EX4 UL culus, -UL1 -Z 1 ¾, 1,N¾, N1,AQR,AQS,AQT,AQU,AQV,G,NG,D8,E2,E3,E4,AD7,AD8,AD9,AD10, E11, WPM EU EX4 2 DI D7, D8 3 RG PSI PSI 4 AD7 AD10 max. 10 bar 5 PSI, MPA, BAR VS, A4, AD7, AD8, AD9, AD10 6 OS DI 7 WP,WPM,WPB G/NG M O 2017.05 Subject to change Internet: www.festo.com/catalogue/... 39

MS12-LFR, MS MS12-LFR 2 3 4 -H- MS9 Internet: armv 2 3 1 3 2 1 6 7 3 5 2 1 -SET MS12-AG 2 MS12-WP 3 MS12-MV 4 LRVS-D 5 VS 6 EN ¼ A4 7 MA /Internet ms12-ag ms12-wp ms12-mv 50 48 48 50 40 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS12-LFR, MS MS 12 LFR G D7 C U V LD AS MS 12 124 mm LFR G D7 0.5 12 bar C E 5 μm 40 μm U V LD AS 48 2017.05 Subject to change Internet: www.festo.com/catalogue/... 41

MS12-LFR, MS -M- 11,000 17,000 l/min -Q- 10 +60 C -L- 0.8 20 bar -W- www.festo.com 0.3 7bar, 0.5 12 bar 0.5 16 bar 5 μm 40 μm 49 1, 2 AG G G1, G1¼,G1½ G2 ±5 [μm] 5 40 ISO 8573-1:2010 [6:4:4] ( 5 μm) ISO 8573-1:2010 [7:4:4] ( 40 μm) D6 [bar] 0.3 7 D7 [bar] 0.5 12 D8 [bar] 0.5 16 [bar] 0.4 [cm 3 ] 400 -H- ISO 1179-1 ISO 228-1 42 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS12-LFR, MS qnn 1) [l/min] G1 G1¼ G1½ G2 5 μm 11,000 11,500 12,000 14,000 40 μm 12,000 12,500 13,000 17,000 1) Internet: ms12-ag p1 = 10 bar p2 = 6 bar, Δp=0.5bar M V E2/E3/E4 [bar] 0.8 20 2 12 0.8 16 ISO 8573-1:2010 [ :4: ] ISO 8573-1:2010 [7:4: ] [ C] 10 +60 +5 +60 +1 +60 [ C] 10 +60 +5 +60 +1 +60 [ C] 10 +60 10 +60 +1 +60 CRC 1) 2 ISO 8573-1:2010 [ :4: ] 1) 2 Festo FN 940 070 [g] E11 E11 U 7,000 7,300 U E2/E3/E4 7,700 8,000 7 2 ab aa 1 6 8 1 2 PA E11 4 6 7 POM 8 POM 9 POM aj POM aa NBR ab NBR 9 4 aj 2017.05 Subject to change Internet: www.festo.com/catalogue/... 43

MS12-LFR, MS qn p2 40 μm p1 = 10 bar MS12-AGF G1 MS12-AGG G1¼ p2 [bar] p2 [bar] qn [l/min] qn [l/min] p1 = 10 bar MS12-AGH G1½ MS12-AGI G2 p2 [bar] p2 [bar] qn [l/min] qn [l/min] 44 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS12-LFR, MS, MS, CAD www.festo.com 1 B1 B2 B3 B4 B5 L1 L2 L3 L4 L5 MS12-LFR-G 124 122 61 148 51.2 577 168 88 250 39 2017.05 Subject to change Internet: www.festo.com/catalogue/... 45

MS12-LFR, MS VS CAD www.festo.com A4EN ¼ B3 B4 D4 MS12-LFR- -VS 61 148 MS12-LFR- -A4 61 148 G¼ -H- ISO 1179-1 ISO 228-1 LD-AS E11 CAD www.festo.com 1 B5 D1 L6 L7 L8 MS12-LFR- -LD-AS 64.4 51.2 96 12 MS12-LFR- -E11 51.8 112 172 46 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS12-LFR, MS M V CAD www.festo.com PUN(-H)-8x1,25 PUN(-H)-8x1,25 E2/E3/E4 PWEA: 2 : PG9 3 360 PUN-H-12x2 Internet: pwea B1 D2 H1 L1 L2 L3 L9 ß 1 MS12-LFR- -M 5.6 4 MS12-LFR- -V 5.6 2 MS12-LFR- -E2/E3/E4 72 164 140 108 15 50 5 μm 40 μm 0.5 12 bar,, MS [bar], MS12 537150 MS12-LFR-G-D7-CUV-LD-AS 537149 MS12-LFR-G-D7-EUV-LD-AS 2017.05 Subject to change Internet: www.festo.com/catalogue/... 47

MS12-LFR, MS [mm] 124 0M 535022 MS MS 12 12 12 -LFR -LFR G1 -AGF G1¼ -AGG G1½ -AGH G2 -AGI -G 0.3 7bar -D6 0.5 12 bar -D7 0.5 16 bar -D8 40 μm -E 5 μm -C -U -U -M (P1max.12bar) 1 -V 110 V AC, -E2 230 V AC, -E3 24 V DC, -E4 0O -VS EN ¼ -A4 psi 2 -PSI MPa 2 -MPA 3 -LD 0M 4 -AS -E11 0O 5 -WP -Z 1 V D8 2 PSI, MPA VS, A4 3 LD E11 4 AS LD 5 WP AGF, AGG, AGH AGI M O 535022 MS 12 LFR U 48 Internet: www.festo.com/catalogue/... Subject to change 2017.05

MS-LFR, MS [μm] MS4 5() 534501 MS4-LFP-C 40 () 534502 MS4-LFP-E MS6 5() 534499 MS6-LFP-C 40 () 534500 MS6-LFP-E MS9 5 570309 MS9-LFP-C 40 570310 MS9-LFP-E MS12 5 537143 MS12-LFP-C 40 537144 MS12-LFP-E 2017.05 Subject to change Internet: www.festo.com/catalogue/... 49

MS-LFR, MS NEBU-M8 [m] Internet: nebu M8x1, 3 2.5 q541333 NEBU-M8G3-K-2.5-LE3 5 q541334 NEBU-M8G3-K-5-LE3 M8x1, 3 2.5 q541338 NEBU-M8W3-K-2.5-LE3 5 q541341 NEBU-M8W3-K-5-LE3 NEBU-M12 [m] Internet: nebu M12x1, 4 2.5 q550326 NEBU-M12G5-K-2.5-LE4 5 q541328 NEBU-M12G5-K-5-LE4 M12x1, 4 2.5 550325 NEBU-M12W5-K-2.5-LE4 5 541329 NEBU-M12W5-K-5-LE4 MA [bar] [psi] MA, DIN EN 837-1 Internet: ma 40 R¼ 0 16 0 232 187080 MA-40-16-R¼-EN G¼ 0 16 0 232 183901 MA-40-16-G¼-EN MA, DIN EN 837-1 Internet: ma 40 Rx 0 16 525726 MA-40-16-Rx-E-RG 50 R¼ 0 16 525729 MA-50-16-R¼-E-RG LRVS-D [g] 120 193786 LRVS-D Festo q24 Festo w 5 50 Internet: www.festo.com/catalogue/... Subject to change 2017.05