光子學測試解決方案 VCSEL/TO-CAN/CoC/TOSA/BOSA Turnkey Test & Automation Solution Provider

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1 光子學測試解決方案 VCSEL/TO-CAN/CoC/TOSA/BOSA Turnkey Test & Automation Solution Provider

2 1984 "Chroma" Turnkey LED /IC Paris Madrid Kobenhavn Ede, The Netherlands Augsburg, Germany Roma Beijing Shanghai Chongqing Suzhou Shenzhen Xiamen Dongguan Hong Kong Shinyokohama, Japan Taoyuan, Taiwan Hsinchu Kaohsiung Santa Clara, CA Irvine, CA Foothill Ranch, CA Chandler, AZ Juarez, MX Marlborough, MA Singapore, Southeast Asia Headquarters Overseas branch offices Distributors VCSEL TO-Can TOSA/BOSA

Model 7936 Chroma 7936 7936 LED 7936 4.5 2'' LED 35 msec 7936 2 0.

Size 125umX125um ~1.2mmX1.2mm Chip Height 10um~1.

3 Model 7936 Chroma LED '' LED 35 msec µm 2µm / 8'' ( 10'' ) 98% LED Model 7936 Suitable Chip and Package Type Applicable Ring Grip ring holder or wafer holder Inspection Area 10", suit for 6" LED expanding wafer and 8" sawing wafer Chip Size 125umX125um ~1.2mmX1.2mm Chip Height 10um~1.5mm Suitable Package Vertical chip, flip chip Inspection Camera 5M Color Camera X 2 Light Source LED co-axis light, ring light, back light Magnification 2X, 5X objective lens selectable Throughput For LED, 2" wafer in 4.5 minutes at 2 lights Algorithm Pad defect, mesa defect, chipping defect, double chips and emitting area defect External Interface Provide external algorithm interface to replace or add new inspection algorithm System Loading/ unloading Auto load port X 2 Warpage Compensation Software auto focus to overcome wafer warpage PC X1 Software Function Monitor Real-time wafer map display Image Storage All/ defect image saving selectable Report Including chip position, defect type, inspection results Cassette Selection Programmable cassette selection and scheduling Facility Requirement Dimension 1200mm x 800 mm x 1550mm Weight 800kg Power AC 220V 10%, 50/60 Hz, 1, 2KW Compressed Air 0.6 MPa Operation Temperature +5 C ~40 C Operation Humidity 20%~65% R.H. All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

4 Model 7940 Chroma LED Chroma " LED um 1.5um UI / 3 6 8" ( 10" ) 99% LED

- - - - - - - - - - - - VCSEL VCSEL - - - - - - - - - - Model 7940 Suitable Chip and Package Type

Color Camera x 2 Light Source LED co-axis light, ring light, back light Magnification 2X, 5X

5um/pixel (5X) Throughput 6" wafer in 3 minutes at 2 lights, 2X magnification Algorithm - Pad

interface to replace or add new inspection algorithm System Cassette Load Port Auto load ports x 3

Monitor Real-time wafer map display Image Storage All/defect image saving selectable Report

selection and scheduling Facility Requirement Dimension (WxDxH) 1950 mm x 1650 mm x 1750 mm Weight

5 VCSEL VCSEL Model 7940 Suitable Chip and Package Type Applicable Ring Grip ring or wafer frame Inspection Area 8 inches Chip Size 125um x 125um ~ 2.2mm x 2.2mm at 5X magnification Suitable Package LED vertical chip, flip chip, VCSEL Inspection Camera 25M Color Camera x 2 Light Source LED co-axis light, ring light, back light Magnification 2X, 5X objective lens selectable Resolution 1.28um/pixel (2X), 0.5um/pixel (5X) Throughput 6" wafer in 3 minutes at 2 lights, 2X magnification Algorithm - Pad defect, mesa defect, chipping defect, double chips and emitting area defect - Provide algorithm interface to replace or add new inspection algorithm System Cassette Load Port Auto load ports x 3 Warpage Compensation software auto focus to overcome wafer warpage PC x 1 Software Function Monitor Real-time wafer map display Image Storage All/defect image saving selectable Report Including chip position, defect type, inspection results Cassette Selection Programmable cassette selection and scheduling Facility Requirement Dimension (WxDxH) 1950 mm x 1650 mm x 1750 mm Weight 2000 kg Power AC 220V 10%, 50/60 Hz, 1, 3KW Compressed Air 0.6 MPa Operation Temperature +5 C ~40 C Operation Humidity 20%~60% R.H. All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

TO-CAN/CoC Model 58603 Chroma 58603 的高密度多功能溫控模組, 提供激光二極管老化測試與壽命測試每個模組可提供高達 128 個通道, 每個通道可以在各式控制模式下供電流量測電壓 (ACC) 自動電流控制模式 (Auto Current Control Mode, ACC), 控制電路提供很穩定的電流給每一個激光二極管

這表示測試期間的輸出光強度一直保持在一定值電壓與電流值則被記錄下來作為品質的參考參數 TO-CAN 載具利設計的加熱板 (heat plate) 能夠很精確地控制激光二極管抽屜箱的溫度, 同時有很好的穩定性與均溫性與烤箱或溫控腔 (oven or chamber) 類型的激光二極管老化系統測試比較,Chroma 的解決方案更加精簡容易操作, 更佳的效能與節省能源

不會有電流或電壓的突波產生傷害待測物電流和電壓的高 / 低限制可以觸發關閉個別通道的保護機制當異常發生時, 系統將關閉特定引發異常的通道, 其他正常通道可正常運作除了將保護功能設計在控制電路內, 通道絕緣 (Isolation) 與靜電 (ESD) 保護也在系統設計的考量之中 CoC 載具老化測試資料儲存在系統的電腦中或選購的遠端伺服器

6 TO-CAN/CoC Model Chroma 的高密度多功能溫控模組, 提供激光二極管老化測試與壽命測試每個模組可提供高達 128 個通道, 每個通道可以在各式控制模式下供電流量測電壓 (ACC) 自動電流控制模式 (Auto Current Control Mode, ACC), 控制電路提供很穩定的電流給每一個激光二極管不管待測的激光二極管的電阻溫度改變, 測試期間的供應電流將保持一定值, 電壓值則被記錄下來作為品質的參考參數 (APC) 在自動功率控制模式 (Auto Power Control Mode, ACC) 下, 依據外部光二極體 (Photo Diode)PCB 板傳送的回饋訊號, 控制電路可以自動調整激光二極管的電流, 保持固定的回饋訊號強度這表示測試期間的輸出光強度一直保持在一定值電壓與電流值則被記錄下來作為品質的參考參數 TO-CAN 載具利設計的加熱板 (heat plate) 能夠很精確地控制激光二極管抽屜箱的溫度, 同時有很好的穩定性與均溫性與烤箱或溫控腔 (oven or chamber) 類型的激光二極管老化系統測試比較,Chroma 的解決方案更加精簡容易操作, 更佳的效能與節省能源 (energy saving) 客戶端的好處是, 激光二極管上留下極小痕跡多樣性運作以及容易維護各個模組都架設於 19" 或 24" 積架上形成一系統, 每個模組由 3U 高度的抽屜外型構成客戶可以在不同的模組設定不同的溫度, 以及不同的開始測試時間與結束測試時間如此測試運作有很大的彈性控制電路同時也設計成激光二極管的保護電路, 不會有電流或電壓的突波產生傷害待測物電流和電壓的高 / 低限制可以觸發關閉個別通道的保護機制當異常發生時, 系統將關閉特定引發異常的通道, 其他正常通道可正常運作除了將保護功能設計在控制電路內, 通道絕緣 (Isolation) 與靜電 (ESD) 保護也在系統設計的考量之中 CoC 載具老化測試資料儲存在系統的電腦中或選購的遠端伺服器當系統模組與遠端伺服器通訊暫時中斷時, 資料可暫存於模組中達 6 小時以上, 通訊恢復連線之後, 暫存於模組中的資料可寫入系統連線的電腦中或遠端伺服器內, 沒有資料遺失可提供老化測試信賴性測試與壽命測試每個系統可提供高達 10 個模組測試支援自動電流控制模式 (ACC) 與自動功率控制模式 (APC) 個別通道 (Channel) 驅動與量測每個通道可供應 500 ma 以上的電流達 120 的精確溫度控制個別模組 (module) 獨立操作老化模組半高機櫃全高機櫃

軟體介面操作容易體面板提供直覺式的視覺介面, 在測試期間簡單地使用滑鼠直接點選想查看的某個模組的某個測試元件, 查詢方便老化測試原始資料儲存於 Microsoft Excel 相容的檔案中, 可做日後進一步分析之用選購的條碼機系統可以運用在測試管理可自由的選定待測物條件一目了然的測試數據簡便的校正設定介面 Model 58603 Module Channel Number up to

Current Range 0~500 ma *1 Currnt Setting Resolution 0.

PD type Si or InGaAs *2 Wavelength Range 390 to 1700 nm PD Current Stability 1% LD Current Range 0~500 ma LD Current Measurement Accuracy 1%+1mA LD Compliant Voltage 4 V LD Voltage Measurement

7 軟體介面操作容易體面板提供直覺式的視覺介面, 在測試期間簡單地使用滑鼠直接點選想查看的某個模組的某個測試元件, 查詢方便老化測試原始資料儲存於 Microsoft Excel 相容的檔案中, 可做日後進一步分析之用選購的條碼機系統可以運用在測試管理可自由的選定待測物條件一目了然的測試數據簡便的校正設定介面 Model Module Channel Number up to 128 Laser Diode Type TO-46, TO-56, CoC, CoS Test Function ACC, APC (optional) Burn-in Record Time 1 min to 5000 hours Communication Port RS232 Change Kit DUT carrier board Auto Current Control Mode Current Range 0~500 ma *1 Currnt Setting Resolution 0.02 ma Current Accuracy 1%+1mA Compliant Voltage 4 V Voltage Measurement Range 4 V Voltage Measurement Resolution 200uV Voltage Measurement Accuracy 1%+10mV Auto Power Control Mode (Optional) External PD type Si or InGaAs *2 Wavelength Range 390 to 1700 nm PD Current Stability 1% LD Current Range 0~500 ma LD Current Measurement Accuracy 1%+1mA LD Compliant Voltage 4 V LD Voltage Measurement Accuracy 1% + 10mV Temperature Control Temperature Measuring Range 0~150 Temperature Setting Range 40~120 Temperature Setting/Reading Resolution 0.1 Temperature Stability 0.2 Temperature Accuracy 1 Temperature Uniformity ( % T) System Configuration 23" rack, half or full height Number of Modules up to 10 (For full height rack) DUTs per system up to 1280 (For full height rack) CommunicationPort Ethernet to server Dimensions Half height rack, 3 modules 1600 x 600 x 900 mm (H x W x D) Full height rack, 10 modules 2000 x 600 x 900 mm Weights Half height rack, 3 modules 230kg Full height rack, 10 modules 500kg Power Requirements Half height rack, 3 modules AC 220V 10%, 50/60Hz, 11.4A, 2.5KW Full height rack, 10 modules AC 220V 10%, 50/60Hz, 20A, 4.4KW Environment Temperature 20~30 Humidity <80% RH, non-condensing Note *1 : Can be customized for other specifications Note *2 : Wavelength dependent, customized PD types upon request Note *3 : Thermal platform temperature without DUT loading, T = ambient temperature - setting temperature All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

8 Model Chroma SMU (ACC) (Auto Current Control Mode, ACC) (APC) (Auto Power Control Mode, ACC) (Photo Diode)PCB (heat plate) (oven or chamber) Chroma (energy saving) / (Isolation) (ESD) 6 (ACC) (APC) (Channel) 500 ma 125 (module) CoC

Microsoft Excel Model 58604 SMU Module Channel Number up to 256 Laser Diode Type TO-46, TO-56, CoC Test Function ACC (standard) APC, LIV (optional) Burn-in Record Time 1 min to 5000 hours Auto

Compliant Voltage ±7 V Voltage Measurement Range ±7 V Voltage Measurement Accuracy 0.2% F.S.

2% F.S. Temperature Control Temperature Measuring Range Ambient ~ 125 Temperature Setting Range 45~125 Temperature Setting/Reading Resolution 0.

9 Microsoft Excel Model SMU Module Channel Number up to 256 Laser Diode Type TO-46, TO-56, CoC Test Function ACC (standard) APC, LIV (optional) Burn-in Record Time 1 min to 5000 hours Auto Current Control Mode Current Range ±500 ma Current Accuracy 0.2% F.S. Compliant Voltage ±7 V Voltage Measurement Range ±7 V Voltage Measurement Accuracy 0.2% F.S. Auto Power Control Mode (Optional) External PD type Si or InGaAs *1 Wavelength Range 400 ~ 1600 nm *1 LD Current Range ±500 ma LD Current Measurement Accuracy 0.2% F.S. LD Compliant Voltage ±7V LD Voltage Measurement Accuracy 0.2% F.S. Temperature Control Temperature Measuring Range Ambient ~ 125 Temperature Setting Range 45~125 Temperature Setting/Reading Resolution 0.1 Temperature Stability *3 1 Temperature Uniformity ±( % ΔT) *2 System CommunicationPort Ethernet to server Dimensions (D x W x H) 1,300 mm x 900 mm x 1,900 mm Weights 500±50 kg Power Requirements 187 ~ 250 Vac (3 Phase 4 Wire, Δ Connection ) or 323 ~ 437 Vac (3 Phase 5 Wire, Y Connection) / 45 ~ 65 Hz Environment Temperature 20~30 Humidity <80% RH, non-condensing Compressed Air 5 kgf/cm 3, 30 L/min. ; 0.5 Mpa Note *1 : Wavelength dependent, customized PD types upon request Note *2 : Thermal platform temperature without DUT loading, ΔT = ambient temperature - setting temperature Note *3 : 1 = (Max T - Min T) within 48 hrs burn-in time All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

10 Model / / (Alignment) (Laser Diode) All-In-One (Chip level) (AOI) (Auto-alignment) AOI TEC 0.01 Chroma PXI-Base SMU/Power meter Ith Rs Vf Slope Efficiency SMSR / Chroma IC (Burn-In) (Characterization) Chroma (Form Factor) (Change Kit) Chip on carrier Chip on sub-mount Laser-bar Model Model 58603

(Transceiver) Chroma 58620 (Auto alignment) Focuser (OSA) (Side Mode Suppression Ration) (Peek wavelength) (AOI) Focuser (Emission Region) Model 58620 Device Under Test Form Factor CoC, CoS Channels

6nA/ 16nA/ 160nA/ 1.6µA Current Accuracy (Source & Measurement) I range 1mA : 0.1% + 0.1% FS ; I range < 1mA : 0.05%+0.2% FS Voltage Ranges Compliance Voltage Range 0.5V/1V/2.

11 (Transceiver) Chroma (Auto alignment) Focuser (OSA) (Side Mode Suppression Ration) (Peek wavelength) (AOI) Focuser (Emission Region) Model Device Under Test Form Factor CoC, CoS Channels in Carrier 80 Channels per cycle *1 Current Ranges (Chroma Model 52401) Current Range (Source & Measurement) 200nA / 2µA / 20µA / 200µA /2mA / 20mA / 200mA Current Resolution 1.6pA/ 16pA/ 160pA/ 1.6nA/ 16nA/ 160nA/ 1.6µA Current Accuracy (Source & Measurement) I range 1mA : 0.1% + 0.1% FS ; I range < 1mA : 0.05%+0.2% FS Voltage Ranges Compliance Voltage Range 0.5V/1V/2.5V/5V/10V/25V Compliance Voltage Accuracy 1V: 0.05% %FS ; <1V: 0.05% + 0.1%FS Voltage Measurement 3.8nV~ 25V Voltage Measurement Accuracy 0.05% + to 0.05% + Test Parameters Electrical L-I-V Curves, Ith, Vf, Rs, Linearity (Kink) Spectral Peak wavelength, SMSR, etc. Optical Spectrum Analyzer*(Optional) Wavelength Range 700 nm to 1700 nm Resolution Bandwidth < 0.1 nm SMSR Measurement > 40 db Wavelength Accuracy 0.03 nm Temperature Control Temperature Range 25 ~85 ; -5 ~85 (optional) Temperature Accuracy 0.3 Temperature Uniformity (0.5 +1% T) *3 Mechanical Specification Motion Stage Travel Distance 400 mm Minima Fine Stage Resolution 20 nm System Size (W x D x H) 1000 mm x 1200 mm x 1350 mm System Weight Kg Power Input 220V single phase 50/60 Hz Water flow Rate <3~5 lpm Operating Environment Temperature : 20 ~25 ; Humidity : <70% Software Operating System Supported Microsoft Windows 2000, XP or 7 Note *1 : Capacity of carrier depends on the DUT size and form factor Note *2 : Chroma is compatible with multiple Optical Spectrum Analyzers. Please inquire for further details. Note *3 : T = l Ambient temperature - setting temperature l All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

TOSA/BOSA Model 58690/58691 TOSA(Transmitter

Optical Sub Assembly) : TOSA BOSA Chroma

(Fixture) TOSA/BOSA, TO-56 TOSA 72 58690/58691

12 TOSA/BOSA Model 58690/58691 TOSA(Transmitter Optical Sub Assembly) BOSA(Bi-directional Optical Sub Assembly) : TOSA BOSA Chroma 58690/58691 TOSA BOSA 58690/58691 TOSA BOSA 58690/58691 Chroma W TEC TOSA/BOSA 58690/58691 Chroma TEC 25 ( ) (Fixture) TOSA/BOSA, TO-56 TOSA /58691 Chroma TEC TEC VS / PID (-40 ~85 ), 0.5, 72*, TOSA/BOSA : - - *

TOSA/BOSA (58690) TOSA/BOSA (58691) 85 25 (No overshoot) 25min.

(mm) 440 x 350 (mm) DUT Number *1 20 typically 72 typically Communication Port Ethernet Ethernet Temperature Control

01 Temperature Control Stability *2 < 0.5 < 0.

Mechanical Specifications Dimension (W x D x H) 700mm x 900mm x 1511mm 700mm x 900mm x 1511mm System Weight 220kg 220kg

Meets ISO 8573.1:2001 Class 2.1.2 Flow Rate 50 LPM Note *1 : Dependent on DUT form factor (e.g.

13 TOSA/BOSA (58690) TOSA/BOSA (58691) (No overshoot) 25min. -40 Model Device Under Thermal Control Form Factor QFSP TOSA Cylindrical TOSA, BOSA Temperature Area 440 x 350 (mm) 440 x 350 (mm) DUT Number *1 20 typically 72 typically Communication Port Ethernet Ethernet Temperature Control Temperature Setting Range -40 to to 85 Temperature Setting/Reading Resolution Temperature Control Stability *2 < 0.5 < 0.5 Temperature Uniformity < (1+1% T) *3 < (1+1% T) *3 Temperature Cycle *2 25 minutes typically 25 minutes typically Mechanical Specifications Dimension (W x D x H) 700mm x 900mm x 1511mm 700mm x 900mm x 1511mm System Weight 220kg 220kg Facility Power Requirement 220 VAC, 50/60Hz, 2kW 220 VAC, 50/60Hz, 2kW Operation Temperature 10 to to 35 Dry Air Meets ISO :2001 Class Flow Rate 50 LPM Note *1 : Dependent on DUT form factor (e.g. 64 channel for TOSA TO-CAN form factor) Note *2 : Under the condition that is without loading and stable thermal loading Note *3 : T = ambient temperature setting temperature Meets ISO :2001 Class Flow Rate 50 LPM All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

TO-Can Model 7925 Chroma 7925 TO-Can 30um Chroma 7925 3600 TO-Can Model 7925 Target TO-CAN package Tray Size < 6 (width) X 6

lighting) Stages X, Y axis motorized stages Algorithm Provide enable/ disable function and external algorithm interface Image Save

14 TO-Can Model 7925 Chroma 7925 TO-Can 30um Chroma TO-Can Model 7925 Target TO-CAN package Tray Size < 6 (width) X 6 (Length) Optical side inspector X1 Station Layout Auto cassette X 2 Picker X1 Throughput UPH 3600 (depends on the numbers of lighting) Stages X, Y axis motorized stages Algorithm Provide enable/ disable function and external algorithm interface Image Save All/ defect/ none image selectable Monitor Real-time tray map Report *.txt, including chip position, defect type Dimension 1500mm x 1200 mm x 1800mm

Model 54130/54180 58620 Chroma 54130 300W TEC 51101 25 Temp. Stability 0.01 Time 150W (24V/8A) 300W (24V/13A) 800W (40V/20A) -70~250 0.01 0.3 PID 0.01 (1 ) 0.05 (24 ) PC RS232 USB 2.0 LAN Temp.

PID/AUTO TUNE 54130 SV PID auto tune & optimized(chroma) PID not optimized(others) Time Model 54115-24-8 54130-27-12 54180-40-20 TEC Output Voltage 24VDC 27VDC 40VDC TEC Output Current 8A 12A 20A TEC

01 Monitoring Temperature Relative Accuracy < 0.3 Monitoring Temperature Absolute Accuracy < (0.3+0.

15 Model 54130/ Chroma W TEC Temp. Stability 0.01 Time 150W (24V/8A) 300W (24V/13A) 800W (40V/20A) -70~ PID 0.01 (1 ) 0.05 (24 ) PC RS232 USB 2.0 LAN Temp SV PID control chroma Convention on/off control Time Temp. PID/AUTO TUNE SV PID auto tune & optimized(chroma) PID not optimized(others) Time Model TEC Output Voltage 24VDC 27VDC 40VDC TEC Output Current 8A 12A 20A TEC Driving Output Power 150W 300W 800W Temperature Control Setting Temperature Range -49 to to 250 *1 Setting Temperature Resolution 0.01 Temperature Control Stability Short Term : 0.01 ; Long Term : 0.05 Temperature Monitoring Monitoring Temperature Range -49 to to 250 *1 Temperature Sensor Type T-type thermocouple Standard : T-type Optional : K-type Monitoring Temperature Resolution 0.01 Monitoring Temperature Relative Accuracy < 0.3 Monitoring Temperature Absolute Accuracy < ( T-25 ) Note *1 : Platform temperature range is highly relating to the structure and design and will need to apply external elements to reach extreme conditions. To reach below -30 degree, it will need extra coolant. To reach beyond 150 degree, other heating material will need to be considered. Model 52400e - PD (optical power) LIV Chroma SMU I-V ( ) L-I ( ) Chroma SMU (Synchronization) LIV (Ith) (Iop) Kink Chroma PXI Express Peripheral Module (x1 PCI Express Link) 18-bit ( ) (100k s/s) DIO/ - & (Guarding) SMU Ch1 LED (DUT) Sync Photo Diode SMU Ch2 Power (mw) Power Voltage Current (ma) LIV Voltage (V) All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

33383 66 T +886-3-327-9999 F +886-3-327-8898 info@chromaate.

Chroma Turnkey LED /IC Ede, The Netherlands Santa Clara, CA Irvine, CA Foothill Ranch, CA Tempe, AZ Marlborough, MA Beijing Sha

www.chromaate.com Turnkey Test & Automation Solution Provider www.chromaate.com 1984 Chroma Turnkey LED /IC Ede, The Netherlands Santa Clara, CA Irvine, CA Foothill Ranch, CA Tempe, AZ Marlborough, MA