VCSEL (Wafer) / (DFB laser) ESD (TO-Can) Wafer Chip Package Model SMU SMU 500mA Amp. (Change kit) Bypass of

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1 雷射二極體測試解決方案 Turnkey Test & Automation Solution Provider

2 VCSEL (Wafer) / (DFB laser) ESD (TO-Can) Wafer Chip Package Model SMU SMU 500mA Amp. (Change kit) Bypass of Failing Devices (Early Infant Mortality) Carrier Change kit CoS CoC probing

3 TO-Can Model TO-Can Burn-In TO 56/46 APC ACC Chassis (Carrier) (DUT) Carrier Chroma TO-Can Tester Turn-Key Solution (64 Channels per module) 300mA APC (External PD monitor) Bypass of Failing Devices Universal Pin Assignment (Early Infant Mortality) Reliability (Life Time) (Carrier) TO 56/46 Socket (or ) (Safety Interlock) Specification Iteam 58601( ) 58603( ) Edge Emission Laser Diodes Edge Emission Laser Diodes or VCSEL CoC, CoS TO-Can, TO56, TO46, TOSA, ROSA, BOSA 390 nm ~ 1700 nm /Carrier Carrier 2 2 ACC APC / ACC 10 sec to 48 hours Ethernet- TCP/IP Change Kit Virtually Unlimited, Customized Yes No 40 to 150 ACC Current Range (CW) 500 ma 300 ma Current Resolution 18 ua 50 µa Current Accuracy 0.1% ua 0.2%+1mA Compliance Voltage (DUT) 5V 4 V Temperature Range 40~120 Temperature Resolution 0.1 Temperature Accuracy 1 Temperature Stability 0.2 Carrier Temperature Uniformity <5 ) PD Stability N/A +/-1% Max Current (CW) 500 ma Max Voltage (CW) 5V 4V Temperature 5~150 Monitor PD Current Range N/A 1µA~10mA Photo Detector Type N/A InGaAs or Silicon All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

4 w w w. c hro m aate. co m 雷射二極體特性測試機 Model 雷射二極體為高科技產品價格不斐多數使用於光通訊 / 醫療 / 國防等領域並與人類社會息息相關傳統的雷射二極體因價格高昂可靠性要求程度極高需要大量的人工與時間來進行光路調整 (Alignment) 測試與封裝後的檢測致茂為一全新概念機種專為雷射二極體 (Laser Diode) 所打造設計搭配自動化特性檢測 All-In-One 設計概念可供不同的測試項目同時進行檢測搭配高容量的載具設計可供多顆激光芯片 (Chip level) 進行大量測試另外藉由光學定位輔助 (AOI) 可提升自動化檢測的速度與可靠性高穩定性的溫控平台設計可讓研發人員精確地了解雷射二極體特性與溫度的關係致茂可應用於研發單位小量試產驗證 (Laboratory) 或是生產單位 (Production) 可有效提高雷射二極體測試產出率 (Throughput) 特點全自動化檢測邊射型雷射二極體芯片高精密及高容量載具設計自動光纖耦合測試對位設計 (Auto-alignment) AOI 輔助定位加速測試時間共用載具設計可搭配燒機測試高精密 TEC 溫度控制穩定度達 0.01 搭配 Chroma PXI-Base SMU/Power meter 軟體分析激光特性 Ith Rs Vf Slope Efficiency λp 等共用載具 Chroma 藉由多年在半導體 IC 測試的經驗與技術發展共用載具與更換治具等概念並應用於雷射二極體產業傳統在雷射二極體前段測試過程中需經過多次的燒機測試 (Burn-In) 與特性檢測製程 (Characterization) 在更換載具的過程中常會損壞待測物減低良率共用載具的好處可讓研發或操作員只需要在第一次將雷射二極體放置於載具中即可在不接觸待測物之下完成所有必要的檢測此設計亦可搭配 Chroma 燒機測試機然而雷射二極體的形式 (Form Factor) 於各家設計皆有所不同而更換治具 (Change Kit) 的概念可符合世界上大多雷射二極體的封裝形式進行修改後即馬上可進行量測目前可使用的形式為 Chip on carrier Chip on sub-mount Laser-bar 等 Carrier Characterization System Model Burn-In system Model 友善使用者介面與參數設定雷射二極體有一大部分的應用於光通訊與電信工業的範疇內如光收發器 (Transceiver) 等產品在組裝前若能了解每顆雷射二極體的特性或與直接測試光纖的耦合後的特性能減低產品的失敗率 Chroma 測試系統中含有自動對焦系統 (Auto alignment) 可搭配不同種類的光纖與 Focuser 進行激光光最大功率點耦合並測試當激光光達一定程度的耦合效率時系統搭配光譜分析儀 (OSA) 進行分析了解雷射二極體共振膜態主次模比 (Side Mode Suppression Ration) 以及波長分析 (λp λc) 等此外利用光學輔助定位的原理 (AOI) 使得 Focuser 快速達到激光發自動對焦系統與光學輔助定位光區 (Emission Region) 並進行搜尋最大發射功率點可加速測試大幅減低光纖耦合調校時間與測試人力

5 TO-Can Model 7925 Chroma 7925 TO-Can 30um TO-Can Chroma 7925 TO-Can 3600 Model 7935 Chroma LED '' LED 15msec µm 2µm / Chroma '' ( 10'' ) 98% LED LED All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

6 VCSEL TESTER Model V LED V LED V LIV AOI (Real-time) (mapping) V TEC -40~120 PXI (SMU) (CW) (Pulse) VCSEL (Post Analysis) (Single) (Array) Q Source & Measure Unit VCSEL/LD Wafer PD TEC controller/ PID fiber spectrometer Probe-Card 1 : 2 : CCD -40~120 CW/Pulsed mode SMU L-I-V ITH : IOP : Voltage 25V not to scale Integrating Sphere Fiber/PD Module to Photodiode Meter Fiber to Spectrometer VF : Kink Rollover -25V 200mA Current VCSEL Output Beam TO D VCSEL Chip Thermal Control Chuck 3 : 4 : VCSEL Laser Diode

7 Model SMU - PD (optical power) LIV Chroma SMU I-V ( ) L-I ( ) SMU LED Ch1 (DUT) Photo Diode SMU Ch2 Power (mw) Power Voltage Voltage (V) 5 Chroma SMU (Synchronization) LIV (Ith) (Iop) Kink Chroma Sync Current (ma) LIV ESD Model Chroma ESD PCI ESD ESD STM Human Body Model ESD STM Machine Model : Wafer ESD model ESD ESD Chroma ESD Chroma ESD STM Chroma Chroma ESD : Human body model and Machine model : 5V per-step for Machine model, 20V per-step for Human body model (58154) : 10V per-step for Machine model, 20V per-step for Machine model 30V per-step for Human body model (58154-B) : 10V per-step for Machine model, 30V per-step for Human body model (58154-C) 8000V (58154-C) LED ESD Model 54130/ Chroma W TEC Temp. Stability 0.01 Time 150W (24V/8A) 300W (24V/13A) 800W (40V/20A) -70~ PID 0.01 (1 ) 0.05 (24 ) PC RS232 USB 2.0 LAN Temp. SV PID control chroma Convention on/o control Time Temp. PID/AUTO TUNE SV PID auto tune & optimized(chroma) PID not optimized(others) Time All specifications are subject to change without notice. Please visit our website for the most up to date specifications.

Chroma Turnkey LED /IC Ede, The Netherlands Santa Clara, CA Irvine, CA Foothill Ranch, CA Tempe, AZ Marlborough, MA Beijing Sha

www.chromaate.com Turnkey Test & Automation Solution Provider www.chromaate.com 1984 Chroma Turnkey LED /IC Ede, The Netherlands Santa Clara, CA Irvine, CA Foothill Ranch, CA Tempe, AZ Marlborough, MA