:,,, Matlab R = 29.9003 2.4% 400 Z 200 0 400 400 200 200 X 0 0 Y /20
µ m z z = 0 z = 99 2/20
3/20 Q Q
( x, y ) R z Z 0 0 0 0 O ( x, y, z ) z = x = φ ( t) y = ϕ ( t) ( 2 2 n n ) Q ( ) Q z n = { ϕ ϕ 2 φ } + φ 2 O, R O = Q + R n O = Q + R n 2 2 Q Q 2 R 4/20
x, y ) ( φ ( n), ϕ ( n) n φ ( n), ϕ ( n) φ ( n ), ϕ ( n ) φ ( n + ), ϕ ( n + ) n φ ( n), ϕ ( n) (n) k ϕ ( n + n) ϕ ( n n) φ ( n + n) φ ( n n) φ ( n + n) φ ( n n) k ( n) = ϕ ( n + n) ϕ ( n n) y ϕ ( n) = k ( n) ( x φ ( n)) φ ( n ), ϕ ( n ) φ ( n ), ϕ ( n ) φ ( n ), ϕ ( n ) ( n ) k ( n) k ( n ) = k ( n) = k ( n ) ε > 0 k ( n) k ( n ) < ε k φ ( n), ϕ ( n) φ ( n ), ϕ ( n ) φ ( n), ϕ ( n) φ ( n ), ϕ ( n ) 5/20
XY, YZ, XZ 400 350 300 80 00 50 200 250 300 350 400 450 60 40 20 00 50 200 250 300 350 400 450 80 60 40 20 300 350 400 6/20
A φ n ), ϕ ( n ) B φ n ), ϕ ( n ) ( A A ( B B O AB O AB AB A, B AB A, B n n n XY, YZ, XZ 32 3 30 29 28 27 0 20 30 40 50 7/20
n 5 0 9 0 AB OXY OYZ A B A B AB M ( x, y, z) OXY OYZ S( x, y) S2( x2, y2) Q OXY OYZ B M B M y = y2 = y x = x, z = z2 OXZ ( x, z2) Y 8/20
OYZ OXZ OYZ O OYZ O O O O 2 P P A O O 2 A P P 2 OYZ P P 2 Q P P2 OO2 O O 2 P P 2 P P 2 Q O O 2 OYZ P P OYZ 2 P P2 P P2 P P OYZ O OYZ P P 2 OYZ O O P P P P 2 2 OOO2O2 Q O O 2 OOO2O2 P P2 P P 2 P P O 2 O2 Q P P P P 2 2 9/20
O O 2 P P P 2 P P P 2 O O 2 P OYZ P P OYZ O O P P P P 2 2 2 O O 2 2 2 Q Q Q Q 2 Q 2 Q Q 2 OYZ OXY oo2 OXY P OXY P 2 0/20
OYZ OXZ P P P 2 P P 2 OXY P P 2 P 2 P P 2 OXY P P 2 P P 2 OXY OYZ OXZ 52 52 T( x, y) T2 ( x, y) /20
T T2 x = φ ( t) y = ϕ ( t) x = φ2 ( t) y = ϕ2 ( t) { ϕ φ } T P ( x, y ) n = 2 ϕ + φ 2 T2 T P 2 P = P + 2R n R P 2 P 2 O ( x, y ) P + R n n 2 R = R = O = O } n { OXZ OXY 2/20
OXY 35 34 33 32 3 R 30 29 28 27 26 25 0 50 00 50 200 250 X R = OYZ OXZ O ( x, y ) P + R n O x, y ) ( O O n 3/20
OYZ OXZ OXY OXY OXY R R R δ = 00% R 2.02% OYZ OXZ Max [ R R ] j = δ max R 3.30% R = R R = n R R R R δ = R 4/20 n
OXZ OYZ OXY OXY OXY OYZ OXZ OYZ OXZ OXY OXY OYZ OXZ 5/20
, ) 6/20
7/20
8/20
Z X Y Z X Y 0 254.7436 96 5 367 4 254.7436 96 52 372 46 2 254.7436 96 53 377 50.5 3 255.7436 96 54 38 56 4 255.7436 96 55 385.5 6.5 5 256.7436 96 56 389.5 68 6 257.7436 96 57 394 74 7 258.7436 96 58 397.5 80.5 8 259.7436 96 59 40 87 9 258.7436 96 60 404.5 94.5 0 260.5436 96 6 408 20 26.3436 96 62 40.5 209 2 263.436 96 63 43.5 27 9/20
3 263.9436 95.5 64 46 225.5 4 265.7436 95.5 65 48 235.5 5 267.5436 95.5 67 420 245 6 268.3436 95.5 66 42.5 256 7 270.436 95.5 68 422.5 267 8 27.9436 96 69 422.5 277 9 272.7436 95.5 70 422 286.5 20 274.5436 95.5 7 42.5 295.5 2 276.3436 95.5 72 420 304 22 277.436 95.5 73 48.5 3.5 23 277.9436 95.5 74 47 32.5 24 278.7436 95.5 75 44 330 25 284.7436 95.5 76 4 383.5 26 285.7436 95.5 77 407.5 346.5 27 285.7436 96 78 404 353 28 286.7436 96 79 400.5 363 29 286.7436 96 80 395 37 30 286.7436 97.5 8 389.5 377.5 3 292 97.5 82 385 384 32 293 97.5 83 379.5 39 33 294 98.5 84 373.5 397 34 295 99 85 367.5 403 35 297 00 86 36 407.5 36 30 00 87 356 44 37 30 0.5 88 347.5 47.5 38 307 03.5 89 342.5 423 39 33 05 90 333.5 428.5 40 37 05.5 9 323 434 4 38.5 07 92 3 436 42 322 08.5 93 305.5 438 43 325.5 2.5 94 299.5 440 44 333.5 5.5 95 293.5 44.5 45 339.5 9 96 287.5 442 46 345 2.5 97 285.5 443 47 349 25 98 280.5 444.5 48 354 27.5 99 272 445 49 357 32.5 00 270.5446 449.2564 50 363.5 36 20/20