Contents Welcome to the premiere edition of Cascade Microtech s Microprobe Access Catalog, a showcase of microprobing supplies and accessories. Call 1

A MICROPROBEAccess Accessory Catalog Innovating Test Technologies

Contents Welcome to the premiere edition of Cascade Microtech s Microprobe Access Catalog, a showcase of microprobing supplies and accessories. Call 1-800-550-3279 or visit www.cascademicrotech.com/access RF Microwave Probes............ 4,5 High Performance Bias Probes... 5 Probe Calibration Substrates..... 6 RF & Microwave Probe Accessories.............. 7,8 Software, Acessories................9 Summit Upgrades, Accessories. 10 Summit Probe Positioners... 10,11 Summit Positioner Probe Mounts..................... 11 DC/Parametric Probe Tips and Holders....................... 12 DC/Parametric Probe Accessories...................13,14 Module Probe Accessories....... 14 Lightwave Probes, Accessories. 15 EZ-Probe Positioner............. 16 Alessi Probes, Micropositioners, Probe Holders, Micropositioner Probe Mounts & Arms........... 17 Alessi Station Accessories...... 18 Microscope Accessories......... 19 Contact Information............... 20 Call 1-800-550-3279 or visit www.cascademicrotech.com/access

RF Microwave Probes A high performance probe series from the inventors of RF Microwave Probing ACP40 Ships in 3 days or less! Air Coplanar Series Probes: ACP40 series, ACP50, ACP65, ACP110, ACP40-Dual, ACP75, ACP110 Unique Air Coplanar tip design DC to 110 GHz models available Low insertion and return loss with ultra-low-loss (-L) versions Patented design for suppression of unwanted modes Excellent crosstalk characteristics Wide operating temperature -65 C to +200 C 100 to 250 µm standard pitch range (50 to 1250 µm available) Choice of beryllium copper (BeCu) or tungsten tip material Precision tip dual configuration available BeCu tip provides rugged, repeatable contact on gold pads Good visibility at probe tip allows accurate placement on DUT contact pads Individually supported contacts provide outstanding compliance for probing non-planar surfaces Stable and repeatable over-temperature measurements Typical probe life of 500,000 contacts on gold pads High Performance Characterization Probes: HPC40, HPC50, HPC65 Special reduced contact area Air Coplanar tip Low insertion loss and VSWR Excellent crosstalk characteristics Designed for suppression of unwanted modes Wide operating temperature range (-65 C to 200 C) 100 or 150 µm standard pitch (125, 200 or 250 µm available) Choice of BeCu or tungsten Compatible with Cascade Microtech WinCal software for automatic VNA calibration Save valuable wafer space by probing pads as small as 50µm (excellent tip visibility/reduced contacts) Increase wafer yield and reduce measurement guardbands (probe repeatability and crosstalk) Ideal for noise parameter or load pull characterization (low insertion loss) Call 1-800-550-3279 or visit www.cascademicrotech.com/access 4

RF Microwave Probes, High Performance Bias Probes New! High Performance Bias Probe The Highest Performance dc bias probe in the industry today. High performance power bypassing provides low-impedance and resonant-free connections to 20GHz Long probe life: >250,000 contacts Flexible configuration; can mix ground, logic, power supply, ac signal, or power supply sense Up to 12 contacts per probe head Beryllium-copper tips for gold pads or tungsten for aluminum pads Fixed Pitch Compliant Series: FPC DC - 40 GHz bandwidth 20 ps rise time Low insertion and return loss 2 mils of tip-to-tip compliance High probing angle and clearance Maintains 50 Ω environment which allows accurate high-frequency measurement of microelectronic modules Compliant tips allow probing of non-planar structures BeCu tips provide longer probing life and reduce probe damage Access contacts close to components, module walls, or other obstructions 104-913 WPH mount to fine pitch adapter Allows mounting of most FP-style probes (FPC, FPM, FPS, FPR, FP Needle Holder, but not FPA) on standard WPH-style probe arms Call 1-800-550-3279 or visit www.cascademicrotech.com/access 5

Probe Calibration* Impedance Standard Substrate (ISS) and Support 005-018 Contact substrate Used to adjust probe contact, planarity, and overtravel Dull gold finish to aid in setting probe planarity Dimensions: 0.8 in. x 0.6 in. x 0.025 in. 101-190 Line Reflect Match ISS Provides faster, more accurate on-wafer measurement calibrations for high-frequency applications Accommodates ground-signal-ground probes with pitches from 100 to 250 microns, up to 75 GHz Dimensions: 0.8 in. x 0.6 in. x 0.025 in. Twenty-seven GSG Cal sites with 100-250micron pitches 103-726 ISS, Ground-Signal Provides an optimized layout for ground-signal probing with pitches from 100 to 250 microns Dimensions: 5/8 x 7/8 in. (16 x 22 mm) Twenty-seven GS/SG Cal sites with 100-250 micron pitches 4x More Available Cal Sites than Any Other Commercially Available Substrate! 106-682 ISS, wide pitch, GSG Dimensions: 5/8 x 7/8 in. (16 x 22 mm) Eight GSG Cal sites with 250-1250 micron pitches 106-683 ISS, wide pitch, GS/SG Dimensions: 5/8 x 7/8 in. (16 x 22 mm) Eight GS Cal sites with 250-1250 micron pitches 109-531 Right angle ISS, GSG 100 to 250 micron pitch *For all ISS products: See the ISS Family, Impedance Standard Substrates data sheet Call 1-800-550-3279 or visit www.cascademicrotech.com/access 6

RF & Microwave Probe Accessories RF & Microwave Probe Accessories 018-021 26.5 GHz probe connector/cable kit Compatible with SMA, K and 3.5 mm connectors Two 26.5 GHz semi-rigid K-connector cables (010-044) Four K-connector 90 elbows (100-934) Four Thumbsaver connector wrenches 101-162 40 GHz flexible K-connector cable Compatible with SMA, 3.5 mm, or K connectors Male-female Integrated elbow VSWR: better than 1.45 (0 to 40 GHz) Insertion loss: better than -4.26 db (0 to 40 GHz) 100-934 40 GHz K-connector 90 elbow Compatible with SMA and 3.5 mm connectors Male-female 0.118 Semi-rigid cable 50 ohm VSWR: better than 1.43 (0 to 40 GHz) Insertion loss: better than -0.45 db (0 to 40 GHz) Call 1-800-550-3279 or visit www.cascademicrotech.com/access 7

RF & Microwave Probe Accessories 103-202 50 GHz flexible cable Compatible with 2.4 mm and 1.85 mm connectors Male-female Integrated elbow Connectors: 2.4 mm VSWR: better than 1.45 (0 to 50 GHz) Insertion loss: better than -6.00 db (0 to 50 GHz) 104-540 Cable, 65 GHz flexible, 1.85 mm conn., 60 cm (24 in.) m-f Compatible with 2.4 mm and 1.85 mm connectors Male-female Integrated elbow 1.85 mm connectors 105-010 2.4 mm, 90 elbow Compatible with 1.85 mm connectors Male-female 0.085 semi-rigid coax VSWR: better than 1.50 (0 to 50 GHz) Insertion loss: better than -0.75 db (0 to 50 GHz) Call 1-800-550-3279 or visit www.cascademicrotech.com/access 8

Software, Accessories 125-935 WinCal 3.0 VNA calibration software Used with RF Summit semiautomatic stations Used with RF PS21 automatic station 125-936 WinCal 3.0 VNA calibration software Used with Summit 11K and RF-1 manual stations 125-925 WinCal 3.0 VNA calibration demo software Includes CD and on-line documentation No manual or hardware key FREE! Demo Software 125-937 Upgrade to WinCal 3.0 VNA from previous WinCal versions Upgrades from all previous versions 107-107 GPIB bus breaker kit Enables the Summit station controller to receive commands over the GPIB 112-044 NI IEEE-488 PCI-GPIB card National Instruments 1/2 size card GPIB cable included For use with Windows 95/98 software Call 1-800-550-3279 or visit www.cascademicrotech.com/access 9

Summit Upgrades, Accessories & Summit Probe Positioners 115-737 AttoGuard upgrade kit for Summit 11/12K Probe Stations Converts Summit 1175X to 1186X Converts Summit 1275X to 1286X Customer installable 116-511 MicroChamber large top hat upgrade kit for Summit 11/12K Probe Stations Accommodates all ACP probes including low loss 2 x 2 inch microscope range Standard on all new Summit 11/12K stations 112-960 East positioner, 8510XF, for Summit 9100 112-970 West positioner, 8510XF, for Summit 9100 Designed to hold Agilent 8510XF test head Probe mount provides three axis probe position adjustment Use SQ-MPH-4VL-TH03 and SQ-MPH-4VL-TH01 for 3 or 4 port configuration. Add platen extension 114-037 113-120 West positioner, 8510XF, for Summit 11K/12K series 113-130 East positioner, 8510XF, for Summit 11K/12K series Designed to hold Agilent 8510XF test head Probe mount provides three axis probe position adjustment Use MPHM-6AR for 3 or 4 port configuration. High stability microscope mount is required 114-746 East-west RF positioner for Summit 11/12K series Probe mount provides three axis probe position adjustments. Compatible with north/south positioner (114-845) 0 arm Micrometer set planarity adjustment Cable clamp 114-845 North-south RF positioner for Summit 11/12K series Probe mount provides three axis probe position adjustments Positioner is compatible with the east/west positioner (114-746) 90 arm Micrometer set planarity adjustment Cable clamp 115-597 West RF positioner for Summit 11/12K series Probe mount provides three axis probe position adjustments. Incompatible with the north/south positioners (114-845) 0 arm Micrometer set planarity adjustment Cable clamp Call 1-800-550-3279 or visit www.cascademicrotech.com/access 10

Summit Probe Positioners* DCM-208-ML Probe positioner, magnetic base, left, 80 TPI Used for DC/CV wafer probing Eighty turns per-inch Magnetic break handle release Adjustable probe arm mounting plate 0.5 in. (12.7 mm) x, y, and z axes range Must order dual triax Kelvin adapter (114-818) DCM-208-MR Probe positioner, magnetic base, right, 80 TPI See DCM-208-ML for details DCM-208-VL Probe positioner, vacuum base, left, 80 TPI Eighty turns per-inch Vacuum release (requires 13 in. Hg @ 0.15 CFM) Adjustable probe arm mounting plate 0.5 in. (12.7 mm) x, y, and z axes range Must order dual triax Kelvin adapter (114-818) DCM-208-VR Probe positioner, vacuum base, right, 80 TPI See DCM-208-VL probe positioner, vacuum base, left, 80 TPI for details DCM-210-ML Probe positioner, magnetic base, left, 100 TPI One hundred turns per-inch Magnetic break handle release Adjustable probe arm mounting plate 0.5 in. (12.7 mm) x, y, and z axes range Must order dual triax Kelvin adapter (114-818) DCM-210-MRProbe positioner, magnetic base, right, 100 TPI See DCM-210-ML for details Summit Positioner Probe Mounts for 11/12K Stations 114-818 DCP probe mount with dual triax adapter for DCM series positioners Necessary to connect DCP probe to DCM series positioner Kelvin Mount only DCM-210-VL Probe positioner, vacuum base, left, 100 TPI One hundred turns per-inch Vacuum release (requires 13 in. Hg @ 0.15 CFM) Adjustable probe arm mounting plate 0.5 in. (12.7 mm) x, y, and z axes range Must order dual triax Kelvin adapter (114-818) DCM-210-VR Probe positioner, vacuum base, right, 100 TPI See DCM-210-VL for details *All DCM positioners: See the DCM Series Probe Micropositioner data sheet Call 1-800-550-3279 or visit www.cascademicrotech.com/access 11

DC / Parametric Probe Tips and Holders 107-157 Probe tip, replaceable, 1.5 micron, for DCP-115R, box of ten 107-158 Probe tip, replaceable, 5 micron, for DCP-150R, box of ten 107-159 Probe tip, replaceable, 0.5 micron, for DCP-105R, box of ten 109-946 Probe tip, replaceable, for DCP-HTR, box of ten DCP-105R DC coaxial probe, single line, 0.5 micron radius, replaceable tip DCP-115R DC coaxial probe, single line, 1.5 micron radius, replaceable tip DCP-150R DC coaxial probe, single line, 5.0 micron, replaceable tip DCP-150GP-50 DC coaxial probe with ground needle, 50 micron pitch DCP-150K-25 DC coaxial probe, Kelvin, 25 micron pitch, 5.0 micron tip radius DCP-150K-50 DC coaxial probe, Kelvin, 50 micron pitch, 5.0 micron tip Frequency range: dc - 100 MHz 500 V breakdown voltage, isolation resistance 1E 13 Ω Connector type: SSMC Probe Tip: Tungsten See the DCP 100-Series Probes Precision DC Coaxial Microprobes data sheet DCP-HTR High performance DC probe holder Frequency range: dc - 100 MHz 500 V breakdown voltage, isolation resistance 1E 13 Ω Temperature range -65 to +300 C Leakage noise: ±10 fa, -65 to +200 C ±20 fa, 200 to 300 C Does not include replaceable tip See the DCP-HTR High Performance DC Probe Holder data sheet Call 1-800-550-3279 or visit www.cascademicrotech.com/access 12

DC / Parametric Probe Accessories 103-775 Cable kit for current or capacitance parametric tests Used with the Agilent 4142 Includes (4) each the following: 104-330-LC Triax cable 104-365 Coaxial cable 104-341 Triax-to-BNC adapter Real Deal! 104-330-LC Triax cable, large to small triax connector, low noise, 60 cm (24 in.) Recommended for measurements below 20 fa Connects triax block on positioner to triax connection panel on rear of probe 104-334 Triax extension cable, 53 cm (21 in.) 3-lug triaxial connectors 104-341 Adapter, triax-to-bnc, guard shorted Adapts LCR meter BNC cable to probe station triaxial input. 104-365 Coaxial Cable with BNC connectors, 140 cm (55 in.) Used with triax-to-bnc adapters (104-341) to connect probe to LCR meter 104-372 Ground unit adapter kit Converts Agilent 4142B GNDU force and sense connections to standard SMV format 104-740 Triax shorting plug Connects chuck or probe to ground (MicroChamber shield) by shorting triax center, guard, and shield together 104-803 Triax-to-BNC adapter, guard removed Allows sources with BNC connection to interface to prober triaxial environment 104-806 Triax tee, single male to dual female Call 1-800-550-3279 or visit www.cascademicrotech.com/access 13

DC / Parametric Probe, Module Probe Accessories 106-837 Adapter, triax to BNC, guard thru, no shield Used to connect driven guard instruments to coaxial accessories 108-138 Triax cable, large to small triax connector, low noise, 180 cm (72 in.) 108-714 Adapter, BNC female to triax female, guard short 108-715 Adapter, BNC to BNC coupler 108-716 Adapter, BNC male to triax female, guard short 108-717 Adapter, BNC tee, female 108-718 Adapter, BNC tee, female-male-female 108-719 Wiring harness, triax, 24 pin for Summit low-leakage probe card, 2 meter Triax 24 pin for Summit low-leakage probe card 2 meter Module Probe Accessory 104-913 WPH mount to fine pitch adapter Allows mounting of most FP-style probes (FPC, FPM, FPS, FPR, FP Needle Holder, but not FPA) on standard WPH-style probe arms Summit Positioner Probe Mounts for 11/12K Stations 114-818 DCP probe mount with dual triax adapter for DCM series positioners Necessary to connect DCP probe to DCM series positioner Kelvin Mount only Call 1-800-550-3279 or visit www.cascademicrotech.com/access 14

Ligtwave Probe & Accessories LWP-CLV-MM Lightwave probe, cleaved fiber, 62.5 mm core, multi-mode LWP-CLV-SM Lightwave probe, cleaved fiber, single-mode LWP-LEN-MM Lightwave probe, lensed fiber, 62.5 mm core, multi-mode LWP-LEN-SM Lightwave probe, lensed fiber, single-mode Choice of cleaved (CLV) or lensed (LEN) optical fiber Choice of single mode (SM) or multi-mode (MM) optical fiber Wavelength: Single mode 1300 or 1550 nm NA = 0.13 Wavelength: Multimode 850 to 1300 nm NA = 0.22 Insertion loss 0.5 db max. Spot size: Cleaved 25 microns, lensed 5 microns Field-interchangeable fiber-optic pigtails Standard FC type fiber optic connection Low-cost, field-replaceable optical fibers Accessories include two eyepiece filters for safe viewing of CDRH Class 1 lasers and an alternate mounting bracket for use in a Summit 11/12K MicroChamber. See the Lightwave Probe Data Sheet Lightwave Probe Fiber Tips* FT-CLV-MM Cleaved, 62.5 mm core, multi-mode fiber tip FT-CLV50-MM Cleaved, 50 mm core, multi-mode fiber tip FT-CLV-SM Cleaved, single-mode fiber tip FT-LEN-MM Lensed, 62.5 mm core, multi-mode fiber tip FT-LEN50-MM Lensed, 50 mm core, multi-mode fiber tip FT-LEN-SM Lensed, single-mode fiber tip * Replacement fibers for LWP Lightwave Probes Call 1-800-550-3279 or visit www.cascademicrotech.com/access 15

EZ-Probe Positioner EZ-PROBE EZ-Probe positioner with joystick, base, articulating arm Provides easy, precise manual probe positioning control in 3 axes Positioning range: 0.65 x 0.65 x 0.5 in. (17 x 17 x 13 mm) Placement: 50 microns (2 mil) Operates with vacuum (requires -15.75 in. Hg) or weighted gravity base Three dimensional joystick with 3:1 motion reduction Weight: 2.65 lbs. (1.2 kg) Adjustable arm reach: 3.9-8.7 in. (100-220 mm) Arm sweep angle: +90 See the EZ-Probe Positioner data sheet Call 1-800-550-3279 or visit www.cascademicrotech.com/access 16

Alessi Probes, Micropositioners, Holders, Micropositioner Probe Mounts & Arms Alessi MD Micropositioners & Probe Holders PE5-01 Coaxial probe for MD series 50 ohm holder, 30 in. cable and BNC connector Alessi MH & MS Micropositioner Probe Mounts & Arms PE5-02 Coaxial probe for RHM, R32, & R41 Used with RHM, R41, & R32 stations Cable length is 32 in. (762 mm) PE5-32 Triaxial probe Impedance: 50 Ω Cable length is 9 ft. (229 mm) General purpose tungsten tip probes PTT-06-25 Straight 0.6 micron PTT-06/4-25 45 Bend 0.6 micron PTT-12-25 Straight 1.2 micron PTT-12/4-25 45 Bend 1.2 micron PTT-24-25 Straight 2.4 microns PTT-24/4-25 45 Bend 2.4 microns PTT-120-25 Straight 12 microns PTT-120/4-25 45 Bend 12 microns PTT-250-25 Straight 25 microns PTT-250/4-25 45 Bend 25 microns PTT-70-25 Catwisker 0.07 microns Used with Alessi Probes Packets of 25 PE5-32/5 Triaxial probe for R48, R55, & R61 Impedance: 50 Ohm Cable length is 6 ft. (152 mm) MMP-12 Pico probe mount for RHM, R32, R41 MMP-12/5 Pico probe mount for R48, R55, R61 Call 1-800-550-3279 or visit www.cascademicrotech.com/access 17

Alessi Station Accessories & General Purpose Probe Tips RAC-03 Packaged device holder Accepts 4 1/2 in. wide socket card Used on REL-3200 or REL-4100 stations RAC-31 Socket card Accepts 14 to 40 pin 3 5/8 in. wide DIP or ZIF sockets RAC-31/# Socket card with ZIF socket # = pin numbers 14, 16, 24, 28, 36, 40 RAC-30 Packaged device holder Accepts 3 5/8 in. wide socket card Illustration shown is twodimensional, front view RAC-41 Die mount Center hole (0.018 in.) allows vacuum mount of single die 2.25 in./ 57 mm.12 in./ 3 mm Side View Top View Call 1-800-550-3279 or visit www.cascademicrotech.com/access 18

Microscope Accessories 106-763 A-Zoom Mitutoyo objective mount Used to secure Mitutoyo objectives to A-Zoom microscopes 101-454 Replacement halogen illuminator bulb Use with Olympus ZoomStereo (video ready), Mitutoyo Finescope and A-Zoom microscopes 108-791 Polarizer/analyzer for A-Zoom microscopes 106-762 Mitutoyo objective, 5X Working distance: 34 mm (0.14 N.A.) Order Today! Call 1-800-550-3279 or visit www.cascademicrotech.com/access 19

Order Information Boni Hughes Northeast US, Southeast US, Canada Theresa Snow Western US Moon Lee PacRim, International (except Europe & Japan) Linda Jaffe US and PacRim Probe Sales Jody Hegenbarth Worldwide Service Support Order Today! We re Here to Help! Toll Free: (800) 550-3279 Fax: (503) 601-1002 Email: sales@cmicro.com Please mention Access in your order. Sally Boyd Midwest US, Texas Contact us: Cascade Microtech, Inc. 2430 NW 206th Avenue, Beaverton, Oregon 97006, USA Toll Free: 1-800-550-3279 Tel: (503) 601-1000 Fax: (503) 601-1002 E-mail: sales@cmicro.com Cascade Microtech Europe Phone: +44 1295-812828 Fax: +44 1295-812829 E-mail: cmesales@cmicro.com Cascade Microtech Japan Phone: 03 5478 6100 Fax: 03 5478 6105 E-mail: sales@cmj.co.jp http://www.cmj.co.jp Call 1-800-550-3279 or visit www.cascademicrotech.com/access Innovating Test Technologies Cascade Microtech, Inc., 2430 NW 206th Avenue, Beaverton, Oregon 97006, USA Toll Free: 1-800-550-3279 Phone: 503-601-1000 Fax: 503-601-1002 Europe: +44 1295-812828 Japan: 03-5478-6100 Email: sales@cmicro.com www.cascademicrotech.com Copyright 2001 Cascade Microtech, Inc. MicroChamber, FemtoGuard, AttoGuard, Air Coplanar, EZ-Probe, Pyramid Probe and the Cascade Microtech logo are trademarks of Cascade Microtech, Inc. All other trademarks are the property of their respective owners. All specifications subject to change. ACCESS-IN-1101 Data subject to change without notice

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