The 7th Japan-China-Korea Joint Conference on MEMS/NEMS :00-18:00 Welcome Registration < the 3rd floor Room 303 > Wednesday, September 21, 2016

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1 17:00-18:00 Welcome Registration < the 3rd floor Room 303 > Wednesday, September 21, :10-09:40 Registration Thursday, September 22, 2016 < the 3rd floor Room 305 > 09:40-09:50 Opening Address Prof. Toshihiro Itoh, The University of Tokyo, JAPAN, Dr. Nak-kyu Lee, Korea Institute of Industrial Technology, KOREA, Prof. Zhuangde Jiang, Xi'An Jiao Tong University, 09:50-10:20 Memorial Invited Talk Surface melting of ice crystals observed by advanced optical microscopy Prof. Gen Sazaki, Hokkaido University, JAPAN 10:20-10:50 Plenary Talk 1 Research of MEMS and Nanotechnology at XJTU IPE Prof. Zhuangde Jiang, Xi'An Jiao Tong University, CHINA 10:50-11:20 Plenary Talk 2 Road Infrastructure Monitoring System Development Project (RIMS) Prof. Isao Shimoyama, The University of Tokyo, JAPAN 11:20-11:35 Break Opening, Memorial Invited Talk, Plenary Talk Chair: Dr. Ryutaro Maeda Oral Presentation ; Micro & Nano Systems Chair: Prof. Jongbaeg Kim, Prof. Zhan Yang 11:35-11:50 Fluorescence polarization imaging for bioanalysis using a liquid crystal and an O-01 image sensor Osamu Wakao 1, Masatoshi Maeki 2, Akihiko Ishida 2, Hirofumi Tani 2, Akihide Hibara 3, and Manabu Tokeshi 2 1 Graduate School of Chemical Sciences and Engineering, Hokkaido University, JAPAN, 2 Division of Applied Chemistry, Faculty of Engineering, Hokkaido University, JAPAN, 3 IMRAM, Tohoku University, JAPAN 11:50-12:05 Development of Electrochemical Immunochromatography Platform for Simple and O-02 Quantitative Hormone Measurement Wataru Iwasaki 1, Ryoji Kurita 1,2, Osamu Niwa 1,2,3 and Masaya Miyazaki 1,4 1 Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, JAPAN, 2 Biomedical Research Institute, National Institute of Advanced Industrial Science and Technology, JAPAN, 3 Advanced Science Research Laboratory, Saitama Institute of Technology, JAPAN, 12:05-12:20 Development of a Multifunctional Micro-Nano Device for Cancer Diagnosis O-03 Taiga Ajiri, 1 Takao Yasui, 2,3 Masatoshi Maeki, 4 Akihiko Ishida, 4 Hirofumi Tani, 4 Yoshinobu Baba, 2,3 and Manabu Tokeshi 3,4 1 Graduate School of Chemical Sciences and Engineering, Hokkaido University, JAPAN, 2 Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, JAPAN, 3 ImPACT Research Center for Advanced Nanobiodevices, Nagoya University, JAPAN, 4 Division of Applied Chemistry, Faculty of Engineering, Hokkaido University, JAPAN

2 12:20-12:35 Nanomanipulating and Nanosoldering with an Enhanced Near-field Effects O-04 Induced by Combining Laser and AFM Probe LiJun Yang Harbin Institute of Technology, CHINA 12:35-13:45 < the 4th floor Gallery > 13:45-14:00 A Prototype of Solid Type ph Sensor for Real-time Monitoring the Rumen ph O-05 Value of Wagyu in Japan Lan Zhang 1, Jian Lu 1, Hironao Okada 1, Hirofumi Nogami 1, 2, Toshihiro Itoh 1, 3, Shozo Arai 4 1 National Institute of Advanced Industrial Science and Technology, JAPAN, 2 Kyushu University, JAPAN, 3 The University of Tokyo, JAPAN, 4 National Agriculture and Food Research Organization 14:00-14:15 Wireless Probe for Estrus Detection in Cows O-06 Mattias Andersson 1, Hironao Okada 1, Yi Zhang 1, Toshihiro Itoh 1 and Koji Yoshioka 2 1 National Institute of Advanced Industrial Science and Technology, JAPAN, 2 National Institute of Animal Health, JAPAN 14:15-14:30 Use of a pulse wave sensor to detect cow s stress condition for their health care O-07 Ryo Inoue 1, Hirofumi Nogami 2, Yasutaka Nagatomo 1 and Renshi Sawada 1,2 1 Graduate School of Systems Life Sciences, Kyushu University, JAPAN, 2 Department of Mechanical Engineering, Kyushu University, JAPAN 14:30-14:45 Laser Doppler blood flowmeter for animal health monitoring system O-08 Hirofumi Nogami 1, Ryuta Shiraisi 1, Ryo Inoue 2 and Renshi Sawada 1,2 1 Faculty of Engineering, Kyushu University, JAPAN, 2 Graduate School of Systems Life Sciences, Kyushu University, JAPAN 14:45-15:30 < the 4th floor Gallery > Oral Presentation ; IoT & Sensor Network Chair: Dr. Suk Hee Park, Prof. Xueyong Wei Oral Presentation ; Physical Transducers Chair: Prof. Renshi Sawada, Dr. Nak-kyu Lee 15:30-15:45 A robot-aided cell manipulation system for high speed cell manipulation O-09 Xiangpeng Li Soochow University, CHINA 15:45-16:00 Simulation of a MEMS optical scanner device in order to fabricate it without O-10 deformation Toshihiro Takeshita 1, Natsumi Makimoto 1 and Takeshi Kobayashi 1 National Institute of Advanced Industrial Science and Technology, JAPAN 16:00-16:15 Synchronized oscillation in micro-mechanically coupled oscillator system - Part II: O-11 Synchronized region analysis and mass sensing verifications of U shaped coupling cantilevers Xu Du 1, Guowen Zheng 1, Mengyuan Mao 1, Linjie Zhao 1, Yang Chen 1, Zhiyu Zhang 2, Xin Wang 1, Xu Yang 1, Xin Liu 1, Tsuyoshi Ikehara 3, Ryutaro Maeda 3, Dong F. Wang 1, 3 1 Jilin University, CHINA, 2 CAS, CHINA, 3 AIST, JAPAN

3 16:15-16:30 Highly Responsive and Flexible Pressure Sensor Based on Piezoelectric Electrospun O-12 Nanofibers Suk-Hee Park 1, Han Bit Lee 1, Jean Ho Park 1 and Nak Kyu Lee 1 1 KOREA Institute of Industrial Technology, KOREA 16:30-16:45 MEMS Mechanomyogram Sensor O-13 Yusuke Takei 1, Ryo Aoki 1, Nguyen Minh-Dung 1, Tomoyuki Takahata 1, Kiyoshi Matsumoto 2 and Isao Shimoyama 1 1 The University of Tokyo, JAPAN, 2 Toyo University,JAPAN 16:45-17:00 Development of ultra-small vcsel-type MEMS blood flow sensor O-14 Hirotaka Nozaki 1, Hirofumi Nogami 1, Renshi Sawada 1,2 1 Graduate School of Systems Life Sciences, Kyushu University, JAPAN, 2 Mechanical engineering, Kyushu University, JAPAN 17:00-17:15 MEMS resonant tilt sensor with a high sensitivity maintained in the 360 O-15 measurement range S. Wang, X. Wei, Y. Weng, J. Ren and Z. Jiang 17:15-17:30 Triple Finger Gripper for Multi-Targets Micromanipulation O-16 Tao Chen Soochow University 18:30-20:30 < Sapporo TV Tower > 09:10-09:40 Plenary Talk 3 Microfluidic droplet/particle handling systems for biochemical applications Prof. Joonwon Kim, Pohang University of Science and Technology, KOREA 09:40-10:10 Invited Talk 1 Wafer-level hetero-integration and packaging using metal bonding based technology Prof. Hideki Hirano, Tohoku Uniersity, JAPAN 10:10-10:40 Invited Talk 2 MEMS Applications on Robotics in China Prof. Lining Sun, Soochow University, CHINA 10:40-10:55 Break Banquet Chair: Prof. Masatoshi Maeki, Prof. Dong F. Wang Friday, September 23, 2016 < the 3rd floor Room 305 > Plenary Talk, Invited Talk Chair: Prof. Jong Soo Ko, Dr. Sungwon Youn Oral Presentation ; Material & Processes, Closing Chair: Prof. Eiji Higurashi, Dr. Jian Lu 10:55-11:10 Electron Beam Induced Metallic Nanowire Growth O-17 Zhan Yang 1 and Lining Sun 1 1 Soochow University, CHINA.

4 11:10-11:25 Introduction of hydrogen radical treatment for the removal of indium surface oxide O-18 Kohta Furuyama, Kazuyuki Yamanaka, Eiji Higurashi, and Tadatomo Suga The University of Tokyo, JAPAN 11:25-11:40 In situ fabrication of Fe 3 O 4 and Ag nanoparticles in hydrogels and potential O-19 applications of the soft nanocomposite Yong Mei Chen, Hu Chen, Yang Gao 11:40-11:55 Electrical nanoimprint on Soda-lime Silicate Glass O-20 Junji Nishii, Takahiro Misawa, Masaya Fujioka and Hideo Kaiju Hokkaido University, JAPAN 11:55-12:10 Development of a MEMS electrostatic condenser lens array for nc-si surface O-21 electron emitters of the Massively Parallel Electron Beam Direct-Write system A. Kojima 1, N. Ikegami 1, T. Yoshida 1, H. Miyaguchi 1, M. Muroyama 1, S. Yoshida 1, K. Totsu 1, R. Suda 2, N. Koshida 2, and M. Esashi 1 1 Tohoku University, JAPAN, 2 Tokyo University of Agriculture and Technology, JAPAN 12:10-12:25 Large area microfabrication of PTFE by using synchrotron radiation O-22 Masaya Takeuchi 1, Akinobu Yamaguchi 1, Mitsuyoshi Kishihara 2, Yuichi Utsumi 1 1 Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, JAPAN, 2 Okayama Prefectural University, JAPAN 12:25-12:40 Energy Harvesting Techniques for Self-Powered Wireless Sensor Nodes O-23 Huicong Liu, Zhan Yang, Tao Chen and Lining Sun Soochow University, CHINA 12:40 Closing Remarks Dr. Hiroshi Hiroshima, Director, UMEMSME, National Institute of Advanced Industrial Science and Technology, JAPAN P-01 Towards the Real-time Monitoring of Animals in IoT Age Lu Jian 1, Zhang Lan 1, Serizawa Kouichi 2, Gotoh Takaufmi 3, Matsumoto Sohei 1, Hiroshima Hiroshi 1 1 National Institute of Advanced Industrial Science and Technology, JAPAN, 2 Tokyo University of Science, JAPAN, 3 Kyushu University, JAPAN P-02 Design and Optimization of Stationary Electrode in a Micromachined Vibration Threshold Sensor for Contact Enhancement Qiu Xu, Zhuoqing Yang, Mengyuan Zhao, Xiaojian Xiang, Guifu Ding and Xiaolin Zhao Shanghai Jiao Tong University, Shanghai, , CHINA P-03 Process monitor for AlN MEMS with longitudinal piezoelectric constant d 33,f Natsumi Makimoto 1, Ryohei Takei 1, Tatsuo Tabaru 1, Morito Akiyama 1, Toshihiro Itoh 2, and Takeshi Kobayashi 1 1 National Institute of Advanced Industrial Science and Technology, JAPAN, 2 The University of Tokyo, JAPAN P-04 Die Shift Compensation Caused by Flow Drag Force in Wafer-Level Molding Process Simo Yeon 1, Yong Son 1, Sung-Jun Park 2 and Hye-Jin Lee 1 1 Korea Institute of Industrial Technology, KOREA, 2 Korea National University of Transportation, KOREA

5 P-05 Micro/Nano Manufacturing and Its Applications - Under One Roof Report Part IV Huan Liu 1, Xiaodong Li 1, Xu Du 1, Yupeng Fu 1, Jie Song 1, Xin Wang 1, Xu Yang 1, Xin Liu 1, Yue Wu 1, Zhenhua Yan 1, Zhiyu Zhang 2, Toshihiro Itoh 3, Ryutaro Maeda 4, Ji Zhao 1, Dong F. Wang 1,4 1 Jilin University, CHINA, 2 Chinese Academy of Science, CHINA, 3 The University of Tokyo, JAPAN, P-06 Fabrication and Surface Modification of Flexible Implantable Microelectrode Array Sun Bin 1, Kai Xia 1, Tianzhun Wu 1 and Mark S. Humayun 1, 2 1 Chinese Academy of Sciences, CHINA, 2 University of Southern California, USA P-07 Bidirectional microbead retention device for efficient molecular binding assay Sanghyun Lee, Hojin Kim and Joonwon Kim Pohang University of Science and Technology, KOREA P-08 Development of Microfluidic Particle Pairing Device for Single Cell Analysis Wonhyung Lee, Hojin Kim, Sanghyun Lee and Joonwon Kim Pohang University of Science and Technology, KOREA P-09 Air Flowmeter of Drag Force Type with the bending corrugation structure for Vehicle Applications Dae Keun Choi 1,2, Jeanho Park 2, and Sang Hoon Lee 1 1 Seoul National University of Science and Technology, KOREA, 2 KOREA Institute of Industrial Technology, KOREA P-10 Low-cost, Hydrodynamic single cell trapping device for Malaria detection Nobuhiko Amagata 1, Ryohei Ueno 1, Kanako Komaki-Yasuda 2, Kazuhiko Yano 2, Shigeyuki Kano 2, and Beomjoon Kim 1 1 The University of Tokyo, JAPAN, 2 Research Institute National Center for Global Health and Medicine, JAPAN P-11 Mold Pattern Design for Control of Residual layer Uniformity in Nanoimprint Lithography Sung-Won Youn 1, Kenta Suzuki 1, and Hiroshi Hiroshima 1 1 National Institute of Advanced Industrial Science and Technology, JAPAN P-12 Vapor Chamber Type Micro Thermal Diode Takashiro Tsukamoto, Takashi Hirayanagi, Koichi Sato and Shuji Tanaka Tohoku University, JAPAN P-13 Attachable PLGA microneedle arrays for transdermally delivering water-insoluble drugs Ikuko Morita 1, Shohei Yoshizawa 1, Machiko Makita 2, Yasuhisa Ando 1, Hye-Sook Kim 2, and Yun Jung Heo 3 1 Tokyo University of Agriculture and Technology, JAPAN, 2 Okayama University, JAPAN, 3 Kyung Hee University, KOREA P-14 Development of a Sensor Node of Wireless Sensor Network System for Water Quality Monitoring Tomokai Kageyama, Masashi Miura and Sang-Seok Lee Tottori University, JAPAN P-15 Synthesis of ZnS Urchin-like Nanostructures for Electrochemical Determination of Uric Acid Yao Zhao, Niancai Peng, Xueyong Wei, Zhuangde Jiang P-16 MEMS Viscosity & Density Sensor with Micro-cantilever under Different Excitations Excitations Excitations Libo Zhao 1, Yingjie Hu 1, Guoying Yuan 1, Yulong Zhao 1 and Zhuangde Jiang 1 1

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