Contents Welcome to the premiere edition of Cascade Microtech s Microprobe Access Catalog, a showcase of microprobing supplies and accessories. Call 1

Transcription

1 A MICROPROBEAccess Accessory Catalog Innovating Test Technologies

2 Contents Welcome to the premiere edition of Cascade Microtech s Microprobe Access Catalog, a showcase of microprobing supplies and accessories. Call or visit RF Microwave Probes ,5 High Performance Bias Probes... 5 Probe Calibration Substrates RF & Microwave Probe Accessories ,8 Software, Acessories Summit Upgrades, Accessories. 10 Summit Probe Positioners... 10,11 Summit Positioner Probe Mounts DC/Parametric Probe Tips and Holders DC/Parametric Probe Accessories ,14 Module Probe Accessories Lightwave Probes, Accessories. 15 EZ-Probe Positioner Alessi Probes, Micropositioners, Probe Holders, Micropositioner Probe Mounts & Arms Alessi Station Accessories Microscope Accessories Contact Information Call or visit

3 RF Microwave Probes A high performance probe series from the inventors of RF Microwave Probing ACP40 Ships in 3 days or less! Air Coplanar Series Probes: ACP40 series, ACP50, ACP65, ACP110, ACP40-Dual, ACP75, ACP110 Unique Air Coplanar tip design DC to 110 GHz models available Low insertion and return loss with ultra-low-loss (-L) versions Patented design for suppression of unwanted modes Excellent crosstalk characteristics Wide operating temperature -65 C to +200 C 100 to 250 µm standard pitch range (50 to 1250 µm available) Choice of beryllium copper (BeCu) or tungsten tip material Precision tip dual configuration available BeCu tip provides rugged, repeatable contact on gold pads Good visibility at probe tip allows accurate placement on DUT contact pads Individually supported contacts provide outstanding compliance for probing non-planar surfaces Stable and repeatable over-temperature measurements Typical probe life of 500,000 contacts on gold pads High Performance Characterization Probes: HPC40, HPC50, HPC65 Special reduced contact area Air Coplanar tip Low insertion loss and VSWR Excellent crosstalk characteristics Designed for suppression of unwanted modes Wide operating temperature range (-65 C to 200 C) 100 or 150 µm standard pitch (125, 200 or 250 µm available) Choice of BeCu or tungsten Compatible with Cascade Microtech WinCal software for automatic VNA calibration Save valuable wafer space by probing pads as small as 50µm (excellent tip visibility/reduced contacts) Increase wafer yield and reduce measurement guardbands (probe repeatability and crosstalk) Ideal for noise parameter or load pull characterization (low insertion loss) Call or visit 4

4 RF Microwave Probes, High Performance Bias Probes New! High Performance Bias Probe The Highest Performance dc bias probe in the industry today. High performance power bypassing provides low-impedance and resonant-free connections to 20GHz Long probe life: >250,000 contacts Flexible configuration; can mix ground, logic, power supply, ac signal, or power supply sense Up to 12 contacts per probe head Beryllium-copper tips for gold pads or tungsten for aluminum pads Fixed Pitch Compliant Series: FPC DC - 40 GHz bandwidth 20 ps rise time Low insertion and return loss 2 mils of tip-to-tip compliance High probing angle and clearance Maintains 50 Ω environment which allows accurate high-frequency measurement of microelectronic modules Compliant tips allow probing of non-planar structures BeCu tips provide longer probing life and reduce probe damage Access contacts close to components, module walls, or other obstructions WPH mount to fine pitch adapter Allows mounting of most FP-style probes (FPC, FPM, FPS, FPR, FP Needle Holder, but not FPA) on standard WPH-style probe arms Call or visit 5

5 Probe Calibration* Impedance Standard Substrate (ISS) and Support Contact substrate Used to adjust probe contact, planarity, and overtravel Dull gold finish to aid in setting probe planarity Dimensions: 0.8 in. x 0.6 in. x in Line Reflect Match ISS Provides faster, more accurate on-wafer measurement calibrations for high-frequency applications Accommodates ground-signal-ground probes with pitches from 100 to 250 microns, up to 75 GHz Dimensions: 0.8 in. x 0.6 in. x in. Twenty-seven GSG Cal sites with micron pitches ISS, Ground-Signal Provides an optimized layout for ground-signal probing with pitches from 100 to 250 microns Dimensions: 5/8 x 7/8 in. (16 x 22 mm) Twenty-seven GS/SG Cal sites with micron pitches 4x More Available Cal Sites than Any Other Commercially Available Substrate! ISS, wide pitch, GSG Dimensions: 5/8 x 7/8 in. (16 x 22 mm) Eight GSG Cal sites with micron pitches ISS, wide pitch, GS/SG Dimensions: 5/8 x 7/8 in. (16 x 22 mm) Eight GS Cal sites with micron pitches Right angle ISS, GSG 100 to 250 micron pitch *For all ISS products: See the ISS Family, Impedance Standard Substrates data sheet Call or visit 6

6 RF & Microwave Probe Accessories RF & Microwave Probe Accessories GHz probe connector/cable kit Compatible with SMA, K and 3.5 mm connectors Two 26.5 GHz semi-rigid K-connector cables ( ) Four K-connector 90 elbows ( ) Four Thumbsaver connector wrenches GHz flexible K-connector cable Compatible with SMA, 3.5 mm, or K connectors Male-female Integrated elbow VSWR: better than 1.45 (0 to 40 GHz) Insertion loss: better than db (0 to 40 GHz) GHz K-connector 90 elbow Compatible with SMA and 3.5 mm connectors Male-female Semi-rigid cable 50 ohm VSWR: better than 1.43 (0 to 40 GHz) Insertion loss: better than db (0 to 40 GHz) Call or visit 7

7 RF & Microwave Probe Accessories GHz flexible cable Compatible with 2.4 mm and 1.85 mm connectors Male-female Integrated elbow Connectors: 2.4 mm VSWR: better than 1.45 (0 to 50 GHz) Insertion loss: better than db (0 to 50 GHz) Cable, 65 GHz flexible, 1.85 mm conn., 60 cm (24 in.) m-f Compatible with 2.4 mm and 1.85 mm connectors Male-female Integrated elbow 1.85 mm connectors mm, 90 elbow Compatible with 1.85 mm connectors Male-female semi-rigid coax VSWR: better than 1.50 (0 to 50 GHz) Insertion loss: better than db (0 to 50 GHz) Call or visit 8

8 Software, Accessories WinCal 3.0 VNA calibration software Used with RF Summit semiautomatic stations Used with RF PS21 automatic station WinCal 3.0 VNA calibration software Used with Summit 11K and RF-1 manual stations WinCal 3.0 VNA calibration demo software Includes CD and on-line documentation No manual or hardware key FREE! Demo Software Upgrade to WinCal 3.0 VNA from previous WinCal versions Upgrades from all previous versions GPIB bus breaker kit Enables the Summit station controller to receive commands over the GPIB NI IEEE-488 PCI-GPIB card National Instruments 1/2 size card GPIB cable included For use with Windows 95/98 software Call or visit 9

9 Summit Upgrades, Accessories & Summit Probe Positioners AttoGuard upgrade kit for Summit 11/12K Probe Stations Converts Summit 1175X to 1186X Converts Summit 1275X to 1286X Customer installable MicroChamber large top hat upgrade kit for Summit 11/12K Probe Stations Accommodates all ACP probes including low loss 2 x 2 inch microscope range Standard on all new Summit 11/12K stations East positioner, 8510XF, for Summit West positioner, 8510XF, for Summit 9100 Designed to hold Agilent 8510XF test head Probe mount provides three axis probe position adjustment Use SQ-MPH-4VL-TH03 and SQ-MPH-4VL-TH01 for 3 or 4 port configuration. Add platen extension West positioner, 8510XF, for Summit 11K/12K series East positioner, 8510XF, for Summit 11K/12K series Designed to hold Agilent 8510XF test head Probe mount provides three axis probe position adjustment Use MPHM-6AR for 3 or 4 port configuration. High stability microscope mount is required East-west RF positioner for Summit 11/12K series Probe mount provides three axis probe position adjustments. Compatible with north/south positioner ( ) 0 arm Micrometer set planarity adjustment Cable clamp North-south RF positioner for Summit 11/12K series Probe mount provides three axis probe position adjustments Positioner is compatible with the east/west positioner ( ) 90 arm Micrometer set planarity adjustment Cable clamp West RF positioner for Summit 11/12K series Probe mount provides three axis probe position adjustments. Incompatible with the north/south positioners ( ) 0 arm Micrometer set planarity adjustment Cable clamp Call or visit 10

10 Summit Probe Positioners* DCM-208-ML Probe positioner, magnetic base, left, 80 TPI Used for DC/CV wafer probing Eighty turns per-inch Magnetic break handle release Adjustable probe arm mounting plate 0.5 in. (12.7 mm) x, y, and z axes range Must order dual triax Kelvin adapter ( ) DCM-208-MR Probe positioner, magnetic base, right, 80 TPI See DCM-208-ML for details DCM-208-VL Probe positioner, vacuum base, left, 80 TPI Eighty turns per-inch Vacuum release (requires 13 in CFM) Adjustable probe arm mounting plate 0.5 in. (12.7 mm) x, y, and z axes range Must order dual triax Kelvin adapter ( ) DCM-208-VR Probe positioner, vacuum base, right, 80 TPI See DCM-208-VL probe positioner, vacuum base, left, 80 TPI for details DCM-210-ML Probe positioner, magnetic base, left, 100 TPI One hundred turns per-inch Magnetic break handle release Adjustable probe arm mounting plate 0.5 in. (12.7 mm) x, y, and z axes range Must order dual triax Kelvin adapter ( ) DCM-210-MRProbe positioner, magnetic base, right, 100 TPI See DCM-210-ML for details Summit Positioner Probe Mounts for 11/12K Stations DCP probe mount with dual triax adapter for DCM series positioners Necessary to connect DCP probe to DCM series positioner Kelvin Mount only DCM-210-VL Probe positioner, vacuum base, left, 100 TPI One hundred turns per-inch Vacuum release (requires 13 in CFM) Adjustable probe arm mounting plate 0.5 in. (12.7 mm) x, y, and z axes range Must order dual triax Kelvin adapter ( ) DCM-210-VR Probe positioner, vacuum base, right, 100 TPI See DCM-210-VL for details *All DCM positioners: See the DCM Series Probe Micropositioner data sheet Call or visit 11

11 DC / Parametric Probe Tips and Holders Probe tip, replaceable, 1.5 micron, for DCP-115R, box of ten Probe tip, replaceable, 5 micron, for DCP-150R, box of ten Probe tip, replaceable, 0.5 micron, for DCP-105R, box of ten Probe tip, replaceable, for DCP-HTR, box of ten DCP-105R DC coaxial probe, single line, 0.5 micron radius, replaceable tip DCP-115R DC coaxial probe, single line, 1.5 micron radius, replaceable tip DCP-150R DC coaxial probe, single line, 5.0 micron, replaceable tip DCP-150GP-50 DC coaxial probe with ground needle, 50 micron pitch DCP-150K-25 DC coaxial probe, Kelvin, 25 micron pitch, 5.0 micron tip radius DCP-150K-50 DC coaxial probe, Kelvin, 50 micron pitch, 5.0 micron tip Frequency range: dc MHz 500 V breakdown voltage, isolation resistance 1E 13 Ω Connector type: SSMC Probe Tip: Tungsten See the DCP 100-Series Probes Precision DC Coaxial Microprobes data sheet DCP-HTR High performance DC probe holder Frequency range: dc MHz 500 V breakdown voltage, isolation resistance 1E 13 Ω Temperature range -65 to +300 C Leakage noise: ±10 fa, -65 to +200 C ±20 fa, 200 to 300 C Does not include replaceable tip See the DCP-HTR High Performance DC Probe Holder data sheet Call or visit 12

12 DC / Parametric Probe Accessories Cable kit for current or capacitance parametric tests Used with the Agilent 4142 Includes (4) each the following: LC Triax cable Coaxial cable Triax-to-BNC adapter Real Deal! LC Triax cable, large to small triax connector, low noise, 60 cm (24 in.) Recommended for measurements below 20 fa Connects triax block on positioner to triax connection panel on rear of probe Triax extension cable, 53 cm (21 in.) 3-lug triaxial connectors Adapter, triax-to-bnc, guard shorted Adapts LCR meter BNC cable to probe station triaxial input Coaxial Cable with BNC connectors, 140 cm (55 in.) Used with triax-to-bnc adapters ( ) to connect probe to LCR meter Ground unit adapter kit Converts Agilent 4142B GNDU force and sense connections to standard SMV format Triax shorting plug Connects chuck or probe to ground (MicroChamber shield) by shorting triax center, guard, and shield together Triax-to-BNC adapter, guard removed Allows sources with BNC connection to interface to prober triaxial environment Triax tee, single male to dual female Call or visit 13

13 DC / Parametric Probe, Module Probe Accessories Adapter, triax to BNC, guard thru, no shield Used to connect driven guard instruments to coaxial accessories Triax cable, large to small triax connector, low noise, 180 cm (72 in.) Adapter, BNC female to triax female, guard short Adapter, BNC to BNC coupler Adapter, BNC male to triax female, guard short Adapter, BNC tee, female Adapter, BNC tee, female-male-female Wiring harness, triax, 24 pin for Summit low-leakage probe card, 2 meter Triax 24 pin for Summit low-leakage probe card 2 meter Module Probe Accessory WPH mount to fine pitch adapter Allows mounting of most FP-style probes (FPC, FPM, FPS, FPR, FP Needle Holder, but not FPA) on standard WPH-style probe arms Summit Positioner Probe Mounts for 11/12K Stations DCP probe mount with dual triax adapter for DCM series positioners Necessary to connect DCP probe to DCM series positioner Kelvin Mount only Call or visit 14

14 Ligtwave Probe & Accessories LWP-CLV-MM Lightwave probe, cleaved fiber, 62.5 mm core, multi-mode LWP-CLV-SM Lightwave probe, cleaved fiber, single-mode LWP-LEN-MM Lightwave probe, lensed fiber, 62.5 mm core, multi-mode LWP-LEN-SM Lightwave probe, lensed fiber, single-mode Choice of cleaved (CLV) or lensed (LEN) optical fiber Choice of single mode (SM) or multi-mode (MM) optical fiber Wavelength: Single mode 1300 or 1550 nm NA = 0.13 Wavelength: Multimode 850 to 1300 nm NA = 0.22 Insertion loss 0.5 db max. Spot size: Cleaved 25 microns, lensed 5 microns Field-interchangeable fiber-optic pigtails Standard FC type fiber optic connection Low-cost, field-replaceable optical fibers Accessories include two eyepiece filters for safe viewing of CDRH Class 1 lasers and an alternate mounting bracket for use in a Summit 11/12K MicroChamber. See the Lightwave Probe Data Sheet Lightwave Probe Fiber Tips* FT-CLV-MM Cleaved, 62.5 mm core, multi-mode fiber tip FT-CLV50-MM Cleaved, 50 mm core, multi-mode fiber tip FT-CLV-SM Cleaved, single-mode fiber tip FT-LEN-MM Lensed, 62.5 mm core, multi-mode fiber tip FT-LEN50-MM Lensed, 50 mm core, multi-mode fiber tip FT-LEN-SM Lensed, single-mode fiber tip * Replacement fibers for LWP Lightwave Probes Call or visit 15

15 EZ-Probe Positioner EZ-PROBE EZ-Probe positioner with joystick, base, articulating arm Provides easy, precise manual probe positioning control in 3 axes Positioning range: 0.65 x 0.65 x 0.5 in. (17 x 17 x 13 mm) Placement: 50 microns (2 mil) Operates with vacuum (requires in. Hg) or weighted gravity base Three dimensional joystick with 3:1 motion reduction Weight: 2.65 lbs. (1.2 kg) Adjustable arm reach: in. ( mm) Arm sweep angle: +90 See the EZ-Probe Positioner data sheet Call or visit 16

16 Alessi Probes, Micropositioners, Holders, Micropositioner Probe Mounts & Arms Alessi MD Micropositioners & Probe Holders PE5-01 Coaxial probe for MD series 50 ohm holder, 30 in. cable and BNC connector Alessi MH & MS Micropositioner Probe Mounts & Arms PE5-02 Coaxial probe for RHM, R32, & R41 Used with RHM, R41, & R32 stations Cable length is 32 in. (762 mm) PE5-32 Triaxial probe Impedance: 50 Ω Cable length is 9 ft. (229 mm) General purpose tungsten tip probes PTT Straight 0.6 micron PTT-06/ Bend 0.6 micron PTT Straight 1.2 micron PTT-12/ Bend 1.2 micron PTT Straight 2.4 microns PTT-24/ Bend 2.4 microns PTT Straight 12 microns PTT-120/ Bend 12 microns PTT Straight 25 microns PTT-250/ Bend 25 microns PTT Catwisker 0.07 microns Used with Alessi Probes Packets of 25 PE5-32/5 Triaxial probe for R48, R55, & R61 Impedance: 50 Ohm Cable length is 6 ft. (152 mm) MMP-12 Pico probe mount for RHM, R32, R41 MMP-12/5 Pico probe mount for R48, R55, R61 Call or visit 17

17 Alessi Station Accessories & General Purpose Probe Tips RAC-03 Packaged device holder Accepts 4 1/2 in. wide socket card Used on REL-3200 or REL-4100 stations RAC-31 Socket card Accepts 14 to 40 pin 3 5/8 in. wide DIP or ZIF sockets RAC-31/# Socket card with ZIF socket # = pin numbers 14, 16, 24, 28, 36, 40 RAC-30 Packaged device holder Accepts 3 5/8 in. wide socket card Illustration shown is twodimensional, front view RAC-41 Die mount Center hole (0.018 in.) allows vacuum mount of single die 2.25 in./ 57 mm.12 in./ 3 mm Side View Top View Call or visit 18

18 Microscope Accessories A-Zoom Mitutoyo objective mount Used to secure Mitutoyo objectives to A-Zoom microscopes Replacement halogen illuminator bulb Use with Olympus ZoomStereo (video ready), Mitutoyo Finescope and A-Zoom microscopes Polarizer/analyzer for A-Zoom microscopes Mitutoyo objective, 5X Working distance: 34 mm (0.14 N.A.) Order Today! Call or visit 19

19 Order Information Boni Hughes Northeast US, Southeast US, Canada Theresa Snow Western US Moon Lee PacRim, International (except Europe & Japan) Linda Jaffe US and PacRim Probe Sales Jody Hegenbarth Worldwide Service Support Order Today! We re Here to Help! Toll Free: (800) Fax: (503) Please mention Access in your order. Sally Boyd Midwest US, Texas Contact us: Cascade Microtech, Inc NW 206th Avenue, Beaverton, Oregon 97006, USA Toll Free: Tel: (503) Fax: (503) Cascade Microtech Europe Phone: Fax: Cascade Microtech Japan Phone: Fax: Call or visit Innovating Test Technologies Cascade Microtech, Inc., 2430 NW 206th Avenue, Beaverton, Oregon 97006, USA Toll Free: Phone: Fax: Europe: Japan: Copyright 2001 Cascade Microtech, Inc. MicroChamber, FemtoGuard, AttoGuard, Air Coplanar, EZ-Probe, Pyramid Probe and the Cascade Microtech logo are trademarks of Cascade Microtech, Inc. All other trademarks are the property of their respective owners. All specifications subject to change. ACCESS-IN-1101 Data subject to change without notice

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