British Compressed Gases Association 18 Code of Practice 18 The Safe Storage, Handling and Use of Special Gases in the Micro-electronic Industry - 1 -
- 2 -
1 5 2 6 3 7 4 8 5 10 6 11 7 12 8 14 9 18 10 20 11 21 12 23-3 -
13 24 14 27 15 28 16 29 17 31 18 35 19 36 20 41 I II III - 4 -
1. American Board of Industrial Hygiene Canadian Registration Board of Occupational Hygienists British Institute of Occupational Hygienists Australian Institute of Occupational Hygienists 1.4 1.5 30 1.6 Material Safety Data Sheet (MSDS) - 5 -
2. 2.1 86 3 2.2-6 -
3. 3.1 3.2 3.3 3.4 3.5-7 -
4. ( ) ( 295B ) 62 2 - (a) (b) (c) (d) (e) ( ) 4.2 (a) ( ) (b) I (c) - 8 -
(d) (e) (f) 4.3-9 -
5. 5.1 (a) 3 4 (b) (c) 5.2 5.3 ( ) 5.4-10 -
6. 6.1 6.2 6.3 6.4 ( ) - 11 -
7. 7.1 8 7.2 7.3 7.4 7.5 II - 12 -
7.6 7.7 7.8 7.9 7.10-13 -
8. 8.1 8.1.1 6 8.1.2 8.1.3 8.1.4 8.1.5 8.2 8.2.1-14 -
8.2.2 8.2.3 8.2.4 8.2.5 8.3 8.3.1 10 8.3.2 8.3.3-15 -
8.3.4 8.3.5 8.3.6 BS476 4 ( ) - 16 -
8.3.7 8.3.8 8.3.9 8.3.10 8.3.11-17 -
9. 2 BS476 4-18 -
0.01% 10-19 -
10. - 20 -
11. 11.1 11.2 OEL-TWA 19 OEL-STEL OEL-C IDLH 11.3 20 25% - 21 -
11.4 11.5-22 -
12. 12.1 12.2 12.3-23 -
13. 13.1 13.1.1 13.1.2 13.1.3 13.1.4 13.1.5 1-24 -
13.1.6 13.1.7 13.1.8 13.1.9 13.1.10 13.2 13.2.1 13.2.2-25 -
13.2.3 13.2.4 13.2.5 13.2.6 13.2.7 13.2.8 13.2.9 13.2.10-26 -
14. 24-27 -
15. 15.1 6 (UPS) 15.2 1.5 (BS EN 60079) 15.3 406 ( ) 15.4 ( ) 406 ( ) - 28 -
16. 16.1 (a) BS5045 BS EN 1975 DOT (b) (c) 30 (d) (e) ( ) 65 (f) (g) ( ) - 29 -
16.2 16.2.1 17.4 16.2.2 16.2.3 16.2.4 16.2.5 16.2.6 16.2.7-30 -
17. 17.1 17.1.1 17.1.2 17.2 17.2.1 17.2.2-31 -
17.2.3 17.2.4 17.3 17.3.1 17.3.2 (a) (b) (c) (d) (e) (f) - 32 -
(g) (h) 17.4 17.4.1 17.4.2 (a) (b) (c) (d) (e) - 33 -
(f) (g) (h) (i) (j) (k) 17.4.3 17.5-34 -
18. http://www.hkfsd.gov.hk - 35 -
19. (a) ( III) (b) (c) 19.1 19.1.1 19.1.2-36 -
19.1.3 18% 19.2 19.2.1 ( ) 1 4 (LC50/1 LC50/4 ) LC50 LC50 19.2.2 LC50/4 0.5 0.5 0.5 2 LC50/4 2 10 (OSHA) LC50/4 200 200 2000-37 -
19.3 19.3.1 (TWA) (STEL) (ceiling) 8 15 19.3.2 (NIOSH) (IDLH) 30 30 19.3.3 American Conference of Governmental Industrial Hygienists (ACGIH) (TLVs) American Industrial Hygiene Association (AIHA) (WEEL) Health and Safety Commission (HSC) (MEL) (OES) - 38 -
19.3.4 ( ACGIH AIHA NIOSH HSC) 19.4 19.4.1 (LFL) (UFL) 19.4.2-39 -
19.4.3-40 -
20. 86 3 2417 5757 2413 0873 fsdgd@hkfsd.gov.hk - 41 -
1 6 1. 2. 2.2 3. 3.1 3.2 3.3 3.4 100 3.5
4. 5. 5.1 5.2 5.3 6. 6.1 7. 8.
II 6 6 6 ( ) ) ) ) ) ) ) ) 6 2 2 (1995) 18 ( 1)
( ) - III CHIP IGC LC50/1 ISO/DIS 10298 ( ( )) ( ) ( =1) ( = 1) 20 (bar abs) * T T,C 7,338 15-30 0.6 0.7 8.6 - T+,C 20 5.9 16.7 - F+, T+ 20 3.9-77.8 2.7 1.6 15 T+,C T,C 2,541 4 1.3 1.6 T+,C T,C 387 2.4 1.6 2.2 (R40B1) T, Xi F+, T 850 8.6-20.0 3.1 1.7 1.9 1,3 F+ F+, T 1.4-16.3 1.9 0.65 2.4 F, T F+, T 3,760 12.5-74 1 0.79 - T, C 360 2.2 0.7 - F+, T 1,700 12-28.5 2 1.2 11 * T O, T, C 293 2.5 1.6 6.8 - O, T+, C 122 4.5 1.9 3.4 - O, T, C 299 2.8 1.9 1.5 (R1113) - F+, T 2,000 4.6-64.3 4 1.5 5.1 F, T F+, T 350 3.9-36.6 1.8 0.95 4.8 - T+, C 80 2.1 1.2 1.3 - F+, T+ 80 0.8-98P 1 0.42 - F+, T, C 314 2.5-80 3.5 1.3 1.6 F+, T F+, T 2,900 3-100 1.5 0.89 1.4 T+,C O, T+, C 185 1.3 1.5 - F+, T+ 20 2.6 - T, C 470 5.8 1.5 5.9 C, Xi T, C 2,860 2.8 2.2 21
CHIP CHIP LC50/1 ISO/DIS 10298 ( ( )) ( ) ( =1) ( = 1) 20 (bar abs) C, Xi T, C 3,120 1.3 1.2 21 C, Xi T, C 2,860 4.5 2.8 7.5 - F+, T+ 2 2.8 2 9.5 F+, T+ F+, T 712 4.3-45.5 1.2 0.92 18.8 - F+, T+ 2 4.5 F, Xn F+, T 1,350 3.9-21.8 1.6 0.89 1.7 - O, T+, C 115 1 1.3 T+, Xi O, T+, C 115 2.8 1.4 1 - T+, C 35 2.3 1.4 2.7 T+ T+, C 5 3.5 1.4 1.6 - F+, T+ 20 / P 1.2 0.74 34.6 - T+, C 190 4.5 - T, C 320 3 1.6 - T+, C 50 6.7 - F+ / P 1.1 0.55 - T, C 450 3.6 - F+, T+ 20 4.3 2.2 - T+, C 40 3.7 - T 3,020 3.7 1.7 16 T, Xi T, C 2,520 2.3 1.5 3.3 (R1140) F, T F+, T 3.8-31 2.2 0.97 3.4
( ) CHIP IGC LC50/1 ISO/DIS 10298 ( ( )) ( ) ( =1) ( = 1) 20 (bar abs) T+, C T+, C 1,276 0.7 0.97 1 - T+, C 160-10.3 3.4 1.1 F - 1,040 1.2-90.5 5 1 1 O - CHIP - F+ - IGC - F - ISO/DIS 10298 - T+ - T Xn C Xi P - - - - - (1995) 18 ( 1). * ( )