1100µm 30µm 1100µm 30µm 2 2
µ µ
50 E ph3.52ml 25ml ph3.52ml15ml 25ml ph3.52ml 25ml ph3.52ml15ml 25ml 56 P [A 125/(854 W)] 1000 [A 5/(854 W)] 1000 58 R 0.45µm25mm13mm 3mm10µm 525µm 0.45µm25mm13mm3mm 10µm10µm5 25µm25µm