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联骨包
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1 1/64 2/64

2 3/64 p. - 4/64

3 p. - 2 Tbit/in 2 5/64 6/64

4 p koe 15 koe 500 emu/cc 500 emu/cc 16 nm 9 nm 33 nm 18 nm 16 nm 9nm 33 nm 18 nm 600 Gbit/in 2 2 Tbit/in 2 ( RIMCOF 7/64 8/64

5 -1 9/64-1 p /64

6 -1 p /64-1 p /64

7 -1 p H k M s k b T 1) P. F. Carcia: J. Appl. Phys., 63(1988) ) S. Tsunashima, M. Hasegawa, K. Nakamura and S. Uchiyama: J. Magn. Magn. Mater., 93(1991) /64-1 p /64

-1 p. -1315 1) A. Inoue, N. Nishiyama and H. Kimura: Mater. Trans. JIM, 38(1997)179. 2) A. Inoue and T. Zhang: Mater.

8 -1 p ) A. Inoue, N. Nishiyama and H. Kimura: Mater. Trans. JIM, 38(1997)179. 2) A. Inoue and T. Zhang: Mater. Trans. JIM, 37(1996)185. 3) W. Zhang, Q. Zhang, C. Qin and A. Inoue: Mater. Sci. Eng., B148(2008)92. 15/64-1 p m 16/64

9 -1 p /64-1 p m 18/64

10 -1 p /64-1 p /64

11 -1 p /64-1 p koe 500 emu/cc 16 nm 33 nm 16 nm 33 nm 1. Co/Pd()7.2 koe =540 emu/cc 90 nm1020 koemfm 2. Fe-B-Si-Nb Co-Fe-B 1.2 T R a =0.5 nm R y =4.0 nm 3. PdZrCu R a =0.5 nm R y =4.0 nm 4. 22/64

12 23/ /64

13 -2-1 p (nm) 1bit (nm) Y. Saotome et al., J. Alloys Comp (2007) / p. - 26/64

14 -2-1 p. -41 Si GC DLC Pd SiC SiO 2 Si 3 N (10-6 /K) (W/mK) (MPa) () () () () () () () () (HV) (Mg/m 3 ) (GPa) / p. -35,37,39,60 Pt, C 28/64

15 -2-1 p / p /64

16 -2-1 p / p /64

17 -2-1 p. -49 :46nm 33nm 25nm 50nm 33/64 :33nm -2-1 p. -52 :25nm Pt 20nm 20nm 20nm 20nm ---RF:, : 34/64

18 -2-1 p RF:, : 35/ p. -56,57 36/64

19 -2-1 p koe 500 emu/cc 16 nm 33 nm 16 nm 33 nm 1. SiO 2/SiGCDLC 2. FIB GC20 nm50 nm DLC 3. FIB + SiO 2 /SiPt&12 nm 25 nm DLC/Al 2 O 3 12 nm 25 nm1tbit/in 2 4. DLC/Al 2 O 3 12 nm25 nm 1Tbit/in 2 37/64 38/64

20 / p. - 40/64

21 -2-2 p / p /64

22 -2-2 p. -69,70, N Si80 nm200 nm Pd Zr Cu 100 nm 100 nm 100 nm 336T g +10) 424 T g +40) 429 T g +40) 10 s 30 s 60 s 3030 MPa 30 MPa 3030 MPa 80 nm 43/ p. -66 Si u.) Intens sity (a. Cu Zr Pd Cu-K 44/64

23 㐿 ᕈ䊶䊅䊉 ㅧㇱ᧚ᛛⴚ䈱㐿㽲-2-2 䉟䊮䊒䊥䊮䊃 p. Υ-69,70 䋳䋮㐿 ᚑᨐ ᢱ 㪍㪄㪈㪄㪈䉟䊮䊒䊥䊮䊃ടᎿਇ ㇱ䊒㊄ ਛᔃᣇะ ㊄ ਛᔃᣇะ 䊄䉾䊃䈱䈐䉵䊧㊄ ᄖ ㇱ䈱䉟䊮䊒䊥䊮䊃㕙 200 nm Zrၮ㊄ዻ䉧䊤䉴㕙䈱㊄䈱㔌㊄ ᄖ ㇱ䈱䉟䊮䊒䊥䊮䊃㕙 100 nm 䉟䊮䊒䊥䊮䊃ᓟ䈱㊄㕙 100 nm 100 nm 䊶䈩䈱㕖 ᕈ㊄ዻ䉧䊤䉴䈱㊄ ᄖ ㇱ䈪䊄䉾䊃䈱䉵䊧䈍䉋䈶䈐䉕䊶Zrၮ䈍䉋䈶Cuၮ㊄ዻ䉧䊤䉴䈲㔌䈏㔍 45/64 㪉㪇㪇㪐㪅㪏㪅㪈㪉䋺ਛ㑆 ଔ ᣈ䋺ᄢᚻ 䉰䊮䉴䉦䉟䊦䊷䊛㪘ળ ቶ 㐿䋳䋮㐿 ᚑᨐ ᕈ䊶䊅䊉 ㅧㇱ᧚ᛛⴚ䈱㐿㽲-2-2 䉟䊮䊒䊥䊮䊃 p. Υ-71 㪧㪻ၮ㊄ዻ䉧䊤䉴䈱䉟䊮䊒䊥䊮䊃㛎䋨㪐㪇㩷㫅㫄ᓘ䊄䉾䊃㊄䋩䉧䊒䊄䊶Ꮢ 䊄䉾䊃㊄䋨N ᧚ 䋺Si䇮ᦨዊ䊄䉾䊃ᓘ䋺90 nm䇮䊄䉾䊃㜞䈘䋺100 nm䋩䊶䉟䊮䊒䊥䊮䊃᧚䋺Pdၮ㊄ዻ䉧䊤䉴䊶ᚑᒻ ᐲ䋺609 K䋨Tg+10 K)䇮ᚑᒻ 㑆䋺10 s䇮䊒䊧䉴䋺30 MPa 㪉㪇㪇㪐㪅㪏㪅㪈㪉䋺ਛ㑆 ଔ ᣈ䋺ᄢᚻ 䉰䊮䉴䉦䉟䊦䊷䊛㪘ળ ቶ ᢱ 㪍㪄㪈㪄㪈 100 nm 46/64

24 -2-2 p nm 50 nm 90 nmsem 100 nm 40 nm 90 nm 90 nmafm 90 nm40 nm Pd 47/ p. -74 N Si60 60 nm30 30 nm30 30 nm Pd 609 KT g +10 K)10 s60 MPa 20 nm 48/64

25 -2-2 p m m SEM 20 nm 100 nm 10 m 20 nm SEM SEM 49/ p. -77, nm 27 nm 60 nm 21 nm 6 nm 110 nm 50 nm 50 nm 170 nm27 nm 110 nm6 nm 50/64

26 -2-2 p. -79,80 CMP 14 nm 100 nm CMPCo/Pd10 nm EDSCo/Pd 51/ p Tbit/in 2 52/64

27 -2-2 p. -91 ) 53/ p nm 33nm/25msec +6kOe -1kOe (1) (2) (3) 54/64

28 -2-2 p (AFM) 86 (AFM) nm (MFM) 200nm 0 (1/10) (MFM) 30 nm S 50 N N R=50 nm S N S N N S 200 nm S S N AFM 10 nm MFM nm (SI-MF40) N N 30 nm S 55/ p koe 500 emu/cc 16 nm 33 nm 16 nm 33 nm 1. FeZrCuPd FeZrCu Pd nm 30 nm nmsio 2 /Si 600Gbit/in 2 FIB+25 nm DLC /Al 2 O 3 1Tbit/in 2 4. Co/Pd20 koe 56/64

29 57/64 p /64

30 p koe 1. Co/Pd 500 emu/cc 2. () 9 nm 18 nm 9 nm 18 nm FIB + AFM or 59/64 p /64

31 61/64 p /64

32 p. -1 (Intermag 2008 GA-01(Se) AE-05(Sh) DA-06(Se) GA-06(Ca) 63/64 p. - 64/64

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P P 4 P 4 P 5 P 6 P P 11 P 11 P P 14 P 15 P 15 P 16 P 16 P 17 P 18 P P P 23 P 23 OP-100 0.5mm OP100 F L OP100 F M OP100 M N OP-120 0.5mm OP120 F L OP120 F M SG-1 L-435 SG-1 L-435 - - - - - - - - - - -