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PDP ( ) PET 1 3 () 2 4 3 5 4 6 1
8 12 UV 7 UV 11 6 9 5 7 2
1 PET () 5 51-SY 50-VFE/VPE 5 SY 5 VQC P.2 P.2 P.2 P.2 CJ5S/CG5S P.7 () JS P.7 SUS316 KQG P.10 SUS316 KFG P.10 ASG P.7 FEP TH/TIH P.11 FG P.21 TL/TIL P.11 SRH P.10 IP8000/8100 P.4 IR1000/2000/3000 P.10 P.26 () 3
2 PET CJ5S/CG5S P.7 () JS P.7 SUS316 KQG P.10 SUS316 KFG P.10 ASG P.7 FEP TH/TIH P.11 TL/TIL P.11 HRG P.18 () HRZ P.18 () 4
3 HRG P.18 () HRZ P.18 () 5
4 ( ) MQQ/MQM P.6 CQSY/CQ2Y/CM2Y/CG1Y/CA2Y P.5 ITV0000 P.8 ITV1000/2000/3000 P.9 IR1000/2000/3000 P.10 IZS31 P.12 ( ) LLB2 P.15 6
5 () MQQ/MQM P.6 CQSY CQ2Y CM2Y CG1Y CA2Y P.5 ITV0000 P.8 ITV1000/2000/3000 P.9 IR1000/2000/3000 P.10 IZS31 P.12 () LLB2 P.15 2 VX2 P.17 2 VCA P.17 KP P.10 TPH P.11 P.22 7
() () E P E P 8
6 LV P.17 LQ1 P.17 LQ3 P.17 CJ5S CG5S P.7 () JS P.7 SUS316 KQG P.10 SUS316 KFG P.10 ASG P.7 FEP TH/TIH P.11 TL/TIL P.11 5 51-SY P.2 50-VFE VPE P.2 5 SY P.2 5 VQC P.2 PA PAP P.18 PAF P.18 EX120 P.4 EX510 P.4 SUP SS5Y-X460 P.3 5 51-SY P.2 50-VFE VPE P.2 P.26 ( ) SUP(P.3) 9
HRG P.18 () HRZ P.18 PFM PF2A PF2W P.16 P.27 L XM P.19 XY P.1920 XSA P.20 P.22 IZS31 P.12 () LLB2 P.15 10
7 UV P.22 IZS31 P.12 () LLB2 P.15 UV HRG P.18 () HRZ P.18 11
8 () () MQQ/MQM P.6 CQSY CQ2Y CM2Y CG1Y CA2Y P.5 ITV0000 P.8 ITV1000/2000/3000 P.9 IR1000/2000/3000 P.10 IZS31 P.12 () LLB2 P.15 2 VX2 P.17 2 VCA P.17 KP P.10 TPH P.11 TPS P.11 P.22 12
5 51-SY P.2 ISE50 P.16 50-VFE/VPE P.2 PF2A P.16 5 SY P.2 PF2W P.16 5 VQC P.2 2 PFM P.16 SUP SS5Y-X460 P.3 EX12 140 EX500/510 P.4 P.4 2 VX2 2 VCA LVA/LVC P.17 P.17 P.17 IP8000 8100 P.4 LQ1 LQ3 P.17 P.17 CQSY CQ2Y CM2Y CG1Y CA2Y () MQQ MQM CJ5S CG5S P.5 P.6 P.7 PA/PAX PB PA/PAP PAF P.18 P.18 P.18 ASG () JS P.7 P.7 HRG () HRZ P.18 P.18 ITV0000 ITV1000 2000 3000 IR1000 2000 3000 SRH SUS316 KQG SUS316 KFG KP TPH TPS TL/TIL FEP TH/TIH IZS31 IZD10 IZE11 () LLB2 SFD P.8 P.9 P.10 P.10 P.10 P.10 P.10 P.11 P.11 P.11 P.11 P.12 P.14 P.15 P.15 L XM P.19 XY P.1920 XSA P.20 FG P.21 P.22 P.24 P.25 P.26 P.27 1
5 51-SY Cv 51-SY5000 51-SY7000 51-SY9000 0.90 1.4 2.5 ø63 ø80 ø100 (IP65) ()(IEC79) ExiaBT4() ( ) 50-VFE/VPE Cv (W) 50-VFE3000 50-VFE5000 50-VPE500 50-VPE700 5 3 1.0 2.5 2.3 4.0 3.5 50-VFE d2g4exdbt4 50-VPE 5 : C (W) SY SY3000 1.1dm 3 /(s. bar) ø40 SY5000 2.8dm 3 /(s. bar) ø63 0.35() SY7000 4.5dm 3 /(s. bar) ø80 0.1() SY9000 10 dm 3 /(s. bar) ø100 5 : C (W) VQC VQC1000 1.0dm 3 /(s. bar) ø40 VQC2000 3.2dm 3 /(s. bar) ø63 1.0 VQC4000 7.3dm 3 /(s. bar) ø100 2
SUP SS5Y -X460 SS5Y3-X460 5 SS5Y5-X460 SS5Y7-X460 SY320 SY520 SY720 P(SUP)R(EXH) SUPEXH 220 ) AB P, EA, EB Rc1/8 Rc1/4 Rc1/4 A, B M50.8 C4(ø4) C6(ø6) Rc1/8 C4(ø4) C6(ø6) C8(ø8) Rc1/4 C8(ø8) C10(ø10) Cv (mm 2 ) PA/B 0.17(3) C6: A/BEA/EB 0.19(3.5) PA/B 0.43(7.8) C8: A/BEA/EB 0.46(8.4) C10: PA/B 0.74(13.4) A/BEA/EB 0.7(12.7) )10(SS5Y75)PEAEB P.G Information(PG97-1) 0.1 51-SY SS5Y7-49--X167 VQ40005000VFRVFS (SY3000) (SY3320) (SY3220) (SY3120) A B A B A B A B A B CC-LinkNKE() EA P EB EA P EB () 3
EX120 EX EX121 EX124 EX122 EX140 EX120 EX121 EX122 EX124 EX140 IP20 IP20 IP20 IP65 IP20 DeviceNet PROFIBUS-DP CC-Link JEMA NET (OPCN-1) INTERBUS Actuator Sensor interface(as-i,asi) CAN Open Lon Works Smart Distributed System(SDS) SINX NKE SV1000,2000,3000,4000 VQ1000,2000 SX3000,5000 SY3000,5000 VQ1000 SX3000,5000 VQ2000,4000,5000 SZ3000 SQ1000,2000 EX EX500 IP65 DeviceNet PROFIBUS-DP SV1000,2000,3000,4000 VQC1000,2000,4000,5000 EX510 IP20 CC-Link SY3000,5000,7000,9000 SYJ3000,5000,7000 VQZ1000,2000,3000 IP (MPa) IP80008100 Rc1/4 0.140.7 DC420mA IP65 13% 4
CQSY/CQ2Y/CM2Y/CG1Y/CA2Y (mm) (MPa) CQSY 12,16 20,25 0.03 0.02 CQ2Y 32,40 50,63,80,100 0.02 0.01 CM2Y 20,25,32,40 0.02 CG1Y 20,25,32,40 50,63,80,100 0.02 0.01 CA2Y 40 50,63,80,100 0.02 0.01 0.010.03MPa0.03MPa 0.04 MPa 0.03 0.02 0.01 12 16 20 25 32 40 50 63 80 100 0 0 10 20 30 40 50 60 70 80 90 100 mm 5mm s (JIS B8377) (JIS B8377 ) CQSYB12-30DCM 0.1MPa mm/s mm 3.0 0-3.0 30 15 0 2.60 mm/s OUT 2.52mm/s IN 5 MPa 0.020 0.018 0.016 CA2D50-200N 0.014 0.012 0.010 0.008 0.006 CA2YD50-200 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 MPa CG1YB20-200 0.1MPa mm/s mm 3.0 0-3.0 200 100 0 2.36mm/s OUT 20 2.12mm/s IN (IR) A B f ( ) 5
6 10,000km1 0.3mm/s 0.05N (MQQLMQML) H() 3,000mm/s 50 s (MQMLH) MQQ MQM 0.005 ø60.02,ø10250.005 (MQMLH0.01) 10,16,20,25,30,40 6,10,20,25 MQQ/MQM (mm) (MPa) 0.005MPa () () MQQT () () (PAT.) (VQVQZSQ) (VQVQZSQ) IR () W ITV() IR () W (0.3m) (5m) (5m) (0.01m) (0.3m) (5 m) () () (-10)AM (0.3m)AM+AMD(0.01m) 1) 2)
CJ5S/CG5S CJ5S CG5S (mm) 10,16 20,25,32,40,50, 63,80,100 ASG ASG (mm) 4,6,8,10,12 M5,1/8,1/4,3/8,1/2 : SUS316 : FKM : -560 JS JS (mm) 10,15,16,20,25,32,40,50,63 7
8 W ITV001 ITV003 ITV005 ITV009 0.1MPa 0.5MPa 0.9MPa -100kPa DC24V DC12V 15V 420mA 020mA DC05V DC010V 100 g 15 mm ITV0000 0.0010.1 0.0010.5 0.0010.9-1-100kPa ø4ø5/32 ITV0000 (MPa) DIN ITV0000 ITV0000 ITV0000 L LED L L IP65 1%() 0.5%() 0.5%() 0.1sec() ITV() IR () (5m) (0.01m) (0.3m)
ITV1000 ITV2000 ITV3000 0.0050.1 0.0050.5 0.0050.9 1/8,1/4 1/4,3/8 1/4,3/8,1/2 ITV1000/2000/3000 9 (MPa) 0 /min(anr) () 2 LED 2 (IT) () () ITV2000350g 12%() ITV3000645g 8%() IP65 SUP. OUT. OUT. SUP.
IR1000/2000/3000 IR1000 IR2000 IR3000 1/8 1/4 1/4,3/8,1/2 (MPa) 0.0050.2 0.0050.4 0.0050.8 0.010.2 0.010.4 0.010.8 :0.2F.S. :0.5F.S. SRH (MPa) SRH Rc1/8,1/4,3/8,1/2 9/16-18UNF,7/8-14UNF Rc1/8,1/4,3/8,1/2 : 0.010.2 : 0.050.7 SUS316 KQG KQG (mm) 4,6,8,10,12 : SUS316 : FKM : -5150 M5,1/8,1/4,3/8,1/2 SUS316 KFG (mm) KFG 4,6,8,10,12 1/8,1/4,3/8,1/2 : SUS316 : -5150 KP (mm) KP 4,6,8,10,12 1/8,1/4,3/8,1/2 10
TPH (mm) TPH 4,6,8,10,12 TPS (mm) TPS 4,6,8,10,12 TL/TIL TL/TIL 4,6,8,10,12,19 1/8,3/16,1/4,3/8 1/2,3/4,1 : 260() FEP TH/TIH TH/TIH 4,6,8,10,12 1/8,3/16,1/4 3/8,1/2,3/4 : FEP() : 200() 11
IZS31 IZS31 DC DC DC 7000V 30V (0.3) : 50 ( V ) 25 0-25 -50 3 2 1 0-1 -2-3 sec 20 15 10 5 0.1MPa [ 7 /min(anr)] 10mm L 1 2 3 sec 4 0 500 1000 1500 2000 (L)mm (:30V) : : DC30V0V 30V 30V DC DC DC DC 12
Max60Hz (DC) 1V5V PLC PLC +200V ) 0 1. (DC) 2. (DC/) LED OK 400V 100V 400V 30V 100V 30V 30V 100V 100V 400V 400V 4Hz (DC) LED 3 (30V) (30V) (100V) IZS31--X10 -X10 30038062078011001260150019002300 4605407008609401020118013401420 15801660174018201980206021402220 40mm : -X15 (1260mm) )80mm 40mm 13
IZD10/IZE11 IZD10 15V 0.4kV(25mm) 20 kv(50mm) IZD10 IZE11 2 15V 420mA 0.001kV IZE11 IZD10 13 11 M3 () 16.6 9 87.5 10mm IZD10-110 (0.4kV) IZD10-110 1)0.4kV (mm) (mm) 10 45 20 85 25 1) 100 30 120 IZD10-510 2)20kV (mm) (mm) 25 100 30 120 40 150 50 2) 180 25mm IZD10-510 (20kV) 40 50 150 180 60 70 75 205 225 235 IZE11 2( ) ON OFF ESD MONITOR kv OUT1 OUT2 SET ESD MONITOR kv OUT1 OUT2 SET ESD MONITOR kv OUT1 OUT2 SET 30mm () e-con 14
LLB2 (m) ( /min) (MPa) LLB2 0.01 550 10100 0.050.4 ø10 ON/OFF SFD ( /min) SFD100 100 () SFD200 500 SFD101 100 () SFD102 100 0.01m(99.99%) 0.03MPa(10.7MPa) 2.0MPa(20) 15
ISE50 ISE50-0.11MPa PF2A PF2A ( /min) 112000 LED PF2W PF2W ( /min) 0.5100 LED 2 PFM ( /min) PFM 0.2100 N2ArCO2 1%F.S. () 0.01 /min 16
2 VX ømm VX21/22/23 N.C./N.O. 1/8,1/4,1/2,3/8 210 2 VCA ømm VCA20/30/40 N.C. Rc1/43/4 310 LV ømm LVA N.C. N.O. C.O. 1/81 222 LVC N.C. N.O. C.O. ø4ø25 1/81 422 ) LVC LQ1 LQ1 (MPa) 0.7 () 0150 LQ3 (MPa) () LQ3 1.0 0150(PVDF) 0200(PFA) 17
PA/PAX/PB /min PA3000 PA5000 PA30 PA50 PA313 PA513 120 545 0.112 124 PAX1000 PAX112 0.510 PB1000 PB1011 PB1013 0.0082 0.0080.5 PA/PAP () (RcGNPTNPTF) PA3000 PAP3000 New PFA IPA 0100 PA:3/8 PAP:3/83/8",1/2" PAF ( /min) PAF3410 PAF5410 PAF3413 PAF5413 NewPFA 120 545 115 538 ()(PA5000) HRG HRG 1.00.5 1.1kW,2.3kW,4.8kW 535 HFC407 HRZ HRZ 0.3 1kW8kW -2040 2090 HFC404A 18
L XMA/XMC XMA (N.C.) SCS13 (SUS304) SUS316L 16,25,40 50,63,80 XMC SCS13 (SUS304) SUS316L 16,25,40 50,63,80 L XMD XMD O (N.C.) SCS13 (SUS304) SUS316L 25,40 50,63,80 L XMH XMH SCS13 (SUS304) SUS316L 16,25,40,50 XYA XYA (N.C.) SCS13 (SUS304) SUS316L 25,40 50,63,80 19
XYC XYC SCS13 (SUS304) SUS316L 25,40 50,63,80 XYD XYD O (N.C.) SCS13 (SUS304) SUS316L 25,40 50,63,80 XYH XYH SCS13 (SUS304) SUS316L 25,40,50 XSA XSA 2 (SUS405) R VCR R swage lock 1/4B,3/8B 20
FGA FGA JIS 10K1 B 6 B () MAX.80 FGC FGC JISANSI 1/2 B 1 B () MAX.80 FGD () FGD Rc3/8,1/2,3/4 MAX.80 FGE () FGE R1,2 MAX.80 21
SMC SMC 14 Class M2.5(ISO class4) Class M3.5(ISO class5) Class M4.5(ISO class6) Class M5.5(ISO class7) 1 2 3 4 SMC(CAT.02-23) () )11-12- 13-10-/11-/12-/13-21-/22-22 () )22-
10 5 (/m 3 ) 10 4 10 3 10 2 10 3 (Class M3.5) 2 (Class M2.5) 1 4 (Class M4.5) (Class M1.5) 1 0.1 0.5 (m) 1 Fed.Std.209E SMC SI 1 M1.5 2 M2.5 3 M3.5 4 M4.5 M5.5 M6.5 ISO 14644-1 ISO Class3 ISO Class4 ISO Class5 ISO Class6 ISO Class7 ISO Class8 SMCNo. ( )Fed.Std.209E-1992 SMC(CAT.02-23) 24 23 ) 10-KQ() 12 (KF)(MMS)(KPKPQKPG (AS-FPQ/FPG) ( Class M3.5) 10-/11-/12-/13-() () Class M6.5 () Class 100.000 Class M3.5 () Class M6.5 () Class M3.5 Class M5.5 Class M3.5 21-/22-() 23
(),() SMC G4 4 G6 G8 8 11 (SUS316L) (Class100), () 1 2 :0.05mm 40%() () 37 22 24
() : 20N(0.4MPa) : 0.1mm 30 ø60 N 20 10 P1=0.2MPa P1=0.3MPa P1=0.4MPa P1=0.3MPa ø1(1%) P1=0.4MPa P1=0.1MPa P1=0.2MPa P1=0.1MPa 0 0 20 40 60 80 100 120 140 /min(anr) 25
,,(-1050) 33AB,,,(20ms),(,) SY/VQZ 0.35W : DC24V,12V,6V,5V,3V 0.1W : ()DC24V,12V SY3000/5000/7000/9000 SYJ3000/5000/7000 VQZ1000/2000/3000 VQ/SQ/VQC VQZ1000/2000/3000 0.1W() 0.5W : ()DC24V,12V 0.3W : ()DC24V,12V(SQ) VQ0000/1000/2000/4000 SQ1000/2000 VQC1000/2000/4000 N.O.() 26
(NBR) 1 2 3 1 2 3 27
3 1 2 (0.03ppm) 80-() 80- )80-VK3140-5G-01 3 28
80 SJ2000,3000 SV1000,2000,3000,4000 SZ3000 SY3000,5000,7000,9000 SYJ3000,5000,7000 SX3000,5000,7000 VQC1000,2000,4000 SQ1000,2000 VQ0000,1000,2000 VQ4000 VQ5000 VQZ1000,2000,3000 VQD1000 V100 SY100 SY300,500 SYJ300,500,700 VQ100 VQZ100,200,300 VP450,470 VP3145,3165,3185 VPA3145,3165,3185 SYA3000,5000,7000 SYJA3000,5000,7000 VPA450,470 SYJA300,500,700 VH VHS2050 AN AMC VK3000 VZ1000,3000,5000 VF1000,3000,5000 VQ7-6,7-8 VP7-6,7-8 VPN-6,-8 VFR20006000 VK300 VKF300 VZ100,300,500 VT307,317 VT301,315,325 VP300,500,700 VG342 VS3115,3110,3135,3145 VFA3000,4000,5000 VFRA3000,5000 VTA301,315 VPA300,500,700 VM,VZM,VFM VR2110 VR1210,1220 VR3200,3201 VR3100,3110 VHS40 VHS50 VHS20004000 VHS25004500 VEX1 VEX3 VFR20006000 VFS10006000 VS410 VZ200,400 VZA2000,4000 VSA420,430,440 VZA200,400 VGA342 VHK VEX5 VKF300 1 2 3 45 45 45 3 3 3 5 3 3 3 3 3,80-29
80 30 ZX ZU ZQ ZMA ZM ZH ZFC ZFB ZFA AMJ ASD-F-T ASD-F-D ASD AS20-T AS20-D ASF() AS1F-T AS1F-D AS1F-3 ASM ASFM ASFG ASFE ASE AS21FPQ AS21FPG AS() ASUni ASP ASV ASN2 AQF ASR,ASQ ZR AQ AKH AKB AK AS() AS() ZL ASS(SSC) ZYY,ZYX ZP,ZPT,ZPTX ZCUK 1 2 3
31 AF AFM AFD SF AR ARK ARG ARGK AL AW AWK AWG AWGK AWM AWD AF800,900 ARJ AR25,35 ARM ARM5 ARM10/11 ACG ARP3000 SRP1000 ARBYJ5000,7000 ARBQ4000,5000 AMR AV5000 VMG VEA G G46E G49 G46---SRA,B GP46 GS40 PPA AL800,900 ALF ALT ALD ALB KJ KQ2,KQ2 Uni KS,KX KM KF M H,D,L,LL KC KK KK13 KKA KKH DM 1 80 IR1000,2000,3000 VEX130,133 ITV0000 ITV0000 ITV2000,3000 ITV209 VBA AV2000,3000,4000 IRV1000,2000,3000 AU ARX20 VEF,VEP VER2000,4000 VY1 KG KA MS T TKS,TM,TMA,TK,TG VBAT05A,10A,20A,38A VBAT05S,10S,20S,38S 2 3 MR
ZSE30,ISE30 ZSE40,ISE40 PSE510 PSE530 PSE540 PSE550 PSE560 ZSE4D,ISE4D ZSE5B,ISE5B ZSE6B,ISE6B ZSE3,ISE3 PS1000 ZSE1,ISE1 ZSE2,ISE2 ZSP1 IS1000 IS3000 ISE70,ISE75(H) ISE35 ISA ISA2 IS2761 ISG ZSM1 PF2A IFW5 IF3 PFM7 HAA HAW AT IDU,IDF ID IDG AMG AFF AM AMD AMH AME AMF AD402,600 ADM200 ADH4000 GD40-2-01 VDW10,20,30 VDW200,300 VX2 VXD2 VXP2 VX3 VXA VXZ VXH VXF VNA VNB VNC VNH SGC PA PAX PB VCA VCB VCL VCS VCW VQ20,30 VXR2 VND LV LQ TL,TIL PA(P)33 PAF 1 1 3 23 23 32