2 3 5 MICROSOL mm 1.0MPa 16 C D DC DIN 4 DC12V DC24V DC24V 75mA P P M B M CONTENTS MICROSOL P M B W2P51

MICOOL mm.0ma C D DC DIN 4 DCVDC4V DC4V 7mA M M CONTNT MICOOL 4 6 M W 04 M N 0 0 M MN M MN W -0 MV 0X 0 Total Air Gamma

MICOOL M MN M MN W JI C dm /s bar V -0 MV 0X 0 44 0.09 W 4 4 N N4 M 4 M W 4 N NC (C) () NC (C) () () 4 A (C) (C) () () () A (C) (C) 0.0 0. 0.09 0. 0. 0. 0. 6 6 AC00 AC00 DC DC4 AC0 AC0 AC00 AC00 DC DC4 AC0 AC0 Total Air Gamma () () () N4 0.09 C.0C 4

eries 4N C A 4CD M MN M MN W 04-0 MV 04 0 0X 0 0 Total Air Gamma

eries M MN M MN W -0 MV D D 00mm D : 00mm D00 : 00mm D0 : 000mm D0 : 000mm D0 : 000mm D D C C C : 00mm C00 : 00mm C0 :000mm C0 :000mm C0 :000mm C C D D D : 00mm D0 : 00mm D : 000mm D : 000mm D : 000mm D D M0 M4 M0 M4 M ON OFF 90 AC DC. 0X 0 Total Air Gamma C C L D : 00mm D00 : 00mm D0 : 000mm D0 : 000mm D0 : 000mm C C L M6 N 6

eries () () CCC0C DDD0D M MN () M AC () () () NL NL (L) L CCCC DDDD MN W DC () () () () () () () () DC4V () () () CCC0C DDD0D (L) CCCC DDDD -0 MV 0X 0 Total Air Gamma 7

M MN M MN W -0 MV 0X 0 Total Air Gamma JI (C) () (C) () () 4 A (C) (C) A (C) (C) () () () () () () MICOOL eries 6 TF 6 Ma Ma Ma -00 0 m/s 0 m/s 00 AC V DC AC A DC AC A DC AC W DC 00000 / 60Hz 4 0 00V 0.06 / 0.044 00V 0.04 / 0.06 V 0.0 4V 0.07 00V 0.0 / 0.0 00V 0.07 / 0.0 V 0.0 4V 0.07 00V. /.4.0/.6 00V. /.6./. V..0 AC00V 060HzAC0V 60Hz AC00V 060HzAC0V 60Hz 0.MaON V00.9Ma.0.00kaabs760Torr 4V..0 4 M M Ma.0 0.6 Ma 0. 0. Ma.. M M ms 0 0 g 47 9 47 9 M M W W 4 4 Ma.0 0.6.0 0.6 0.70 Ma 0. 0. 0. 0. Ma....0 M M M M ms 0 60 g 47 9 47 9 6 6

Cdm /s bar b M M M M M M M M 0.0 0. 0. 0.4 eries Cdm /s bar b Cdm /s bar b 0.0 0. 0. 0.7 0. 0.4 0. 0.0 A/ A// Cdm /s bar b Cdm /s bar b W 0. 0. 0. 0.0 M W 0. 0.07 0. 0.4 4 0.09 0. 0. 0.4 4 M C.0C M MN M MN W 9-0 MV 0X 0 Total Air Gamma

M MN M MN W -0 MV 0X 0 Total Air Gamma eries 4 A M6 C M0MM V 4 V 6 DC4V 6X4 7 4-M6-M-U-AC00V 90 W M6 M6 A 4. C D F G M H I U J AC00V M M U U D 7 M F G H I DC4V DC4V DC4V A 6 C M0 M M4 M6 N D V 4 F 0 G M M 06 c/ H 7 X 6 I U U L L J J AC00V AC00V 0/60Hz AC00V AC00V 0/60Hz DC4V DC4V DCV DCV AC0VAC0V 0/60Hz AC0V AC0V 0/60Hz AC4V AC4V DC6V DC4V 4 M M 4 W

LDC A D 00mm C C 00mm C C 00mm 00mm C0 C00000mm C0 000mm C0 000mm C0 00mm C 000mm C 000mm C 000mm C D D 00mm D 00mm D00 00mm D0 000mm D0 000mm D0 000mm D D0 00mm D 000mm D 000mm D 000mm D L L 4 M M 4 W eries M MN M MN W -0 MV 0X 0 Total Air Gamma 9

M MN M MN W -0 MV 0X, eries M0 (C) () M M6 (C) () M0 (C) 6 6 4 () () 4 7 0 7 (C) () 9 6 4 M M6 (C) 7 7 0 (C) () 0 4 6 7 9 () () 9 6 4 0 0 () (C) () () (C) () 0 Total Air Gamma (C) () () (C) () () (C) () (C) () 9

4 M6 A (C) (C) 4 eries M MN () () () 7 M MN W 4 4 6 9 0 0 4 4 6 7 7 9 A 7 () (C) () A(C) () -0 MV 0X C AC () () (C) (C) () () A(C) A(C) () () C AC 9 0 Total Air Gamma

M MN M MN eries 00mm AWG#0.6 W -0 MV 4. 4. 9.6 6 7 6 00mm AWG#0.0 M0M. 7.7 0. 9. -M 9.7. 6.. (C) () 0X 0 4. 4. 9.6 7 6 M0M 0. 9. 9.7 -M. 0.6 6.. () (C) () Total Air Gamma. 7.7 94

eries ( M6 ) ( ) C ( C C0 C C C C ) M MN 7.. CCC M 0 M6 G/4 () () AWG#4. (C,C0,C,C) MN W D ( D D0 D D D D ) ( L ) ( L ) 0 ( ) DDD AWG#4. (D,D0,D,D) 4. 9. 0 (9) 0 g7-0 MV 9 0X 0 Total Air Gamma

M MN M MN M M eries M 6 00mm AWG#0.0 W M6 4.6 6 9 9 9 C M0.4 (C) M0.4 () 6. 0 0. -0 MV M 00mm AWG#0.0 -M 0X 0 4.6 M6 M0.4 () 6 9 6. 0 9 4 9 C () M0.4 (C) Total Air Gamma 0. -M 96

M M eries ( ) C ( C C0 C C C C ) D ( D D0 D D D D ) M MN 4. () G/4 CCC () AWG#4. (C,C0,C,C) 7.7 DDD AWG#4. (D,D0,D,D) 4.7 M MN W ( L ) ( L ) ( ) ( Q ) LL (9) 0 49. () 40.6 00mm AWG#0.0 g7 G/4-0 MV L( L ) 0X 0 7 9 0 4 6-.. 0 Total Air Gamma 97

eries M MN M MN 6 00mm AWG#0.0 M0M W C 6 M0. 6 (C) M0. 7 9 4.. 4.6. 7 4-M 40 6.6 6 M0.6 () -0 MV 6 00mm AWG#0.0 -M M0M 0X 7 40 6.6 0 C 6 M0. 6 (C) 7 M0. 9 4 4.6... 4-M 6 M6 () Total Air Gamma -M 9

eries ( M6 ) M6 0. 7.0 ( ) (). 47. G/4 CCC C.6 ( C C0 C C C C) () M MN AWG#4. (C,C0,C,C) M MN W D ( D D0 D D D D ) DDD 7.6 AWG#4. (D,D0,D,D) ( L ) 6..6 ( L ) (9) 0 g7 ( ).. 47. () G/4-0 MV ( Q ) c /( 06 ) U( U ) 0X 0. 4.0 0 7. M 4-M c/ () 40 0 4 4-. 0 00mm AWG#0.0 c/ (C) 9 4.. Total Air Gamma 99

M MN W eries W M MN W 4-M 4. A(C)(C) 0 4. A C C 00mm AWG#0.0 4 9.6 7 M0M.. 40-0 MV 4. 4.9 9 4 0 4 0 6 0 4 9 4-M 0 4 -M 0X 0 Total Air Gamma 00

( M6 ) M6 0. ( ) G/4 () W eries CCC C ( C C0 C C C C) 4.6 () AWG#4. (C,C0,C,C) M MN M MN W D ( D D0 D D D D ) 60.6 AWG#4. (D,D0,D,D) DDD ( L ) ( L ) 66. (9) 0 g7 ( ). 0. -0 MV ( Q ) 0X 0 00mm AWG#0.0 0. Total Air Gamma 0

M MN 4 eries 4 M MN W. 7.. 47. M6 00mm AWG#0.0. 7.7. 9.7 9.7. -M () (C) () A(C) () 7 0.7 4... ( ) 7. 0 C ( C C0 C C C C ) CCC. D ( D D0 D D D D) DDD 9. -0 () () MV G/4 AWG#4. (C,C0,C,C) AWG#4. (D,D0,D,D) 0X 0 ( L ) LL (9) g7 ( L ) 0 4. ( ) 7. () G/4 ( Q ) 9. 00mm AWG#0. Total Air Gamma 0

4 eries 4 C C -M4 ACC 9. 0.6 -M4 M () 0 00mm AWG#0.0 4 M6 M MN M MN 4 4.7 -M4 0.4.9 W 6.7 ( ) () G/4 C C ( L ) LL ( L ). C ( C C0 C C C C ) 4. CCC () AWG#4. (C,C0,C,C) C C ( ) 60 7.4 D ( D D0 D D D D ) 4. DDD AWG#4. (D,D0,D,D) ( Q ) C C 00mm AWG#0.0-0 MV (9) g7 0 C C 9. () G/4 60 C C 0X 0 c /( 06 ) 46.7 4. U( U ) 4-4.. 0 9 C C 0 -c/ ()A(C)(C) 40. 6 Total Air Gamma 0

M MN M MN W -0 MV 0X 0 Total Air Gamma JI (C) () (C) () () 04 A (C ) (C ) ( ) () ( ) C 4.AC00V M -M6-M-AC00V M M M M4 M M4 0 0 MICOOL eries 6 AC 00000 / 60Hz V DC 4 0 0 00V 0.06 / 0.044 AC 00V 0.04 / 0.06 Ma A V 0.0 DC Ma 4V 0.07 Ma 00V 0.0 / 0.0 AC -00 00V 0.07 / 0.0 0 A V 0.0 DC 4V 0.07. /.4 00V.0/.6 m/s 0 AC W. /.6 m/s 00 00V.0/. V..0 DC 4V..0 4 AC00V 0/60HzAC0V 60Hz AC00V 0/60HzAC0V 60Hz 4 Ma.0 0.6.0 0.6 0.7 Ma 0. 0. 0. 0. 0. Ma.....0 mm..6..6. ms 0 0 60 n g 7n+ n+ 0.MaON V00.9Ma.0.00kaabs 760Torr MM44 M M M M M4 M4 0

eries Cdm /s bar b 0. 0. 0. 0. Cdm /s bar b Cdm /s bar b 0. 0. 0. 0.4 0. 0. 0. 0.9 A/ A// Cdm /s bar b Cdm /s bar b 4 0.09 0. 0. 0. C.0C M MN M MN W TF 6 0-0 MV 0X 0 Total Air Gamma

M MN M MN W -0 MV 0X eries 7 M6 M DC4V 0 A V M0M V 6 6 DC4V 7 0 4-M6-M-AC00V Total Air Gamma 06 C D. F H M I J K AC00V C D F 7 G H I J K 0 0 A 4 C 4 D. 6.6 M0 M M4 M6 N F 04 G V H M M 06 c/ I 67 X J L L K AC00V 0 / 60Hz AC00VAC00V AC00V 0 / 60Hz DC4V DC4V DCV DCV AC0VAC0V AC0V AC0V 0 / 60Hz 0 / 60Hz AC4V AC4V DC6V DC4V

4LDC 4 F 00mm C C 00mm C C 00mm 00mm C0 C00000mm C0 000mm C0 000mm C0 00mm C 000mm C 000mm C 000mm C D D 00mm D 00mm D00 00mm D0 000mm D0 000mm D0 000mm D D0 00mm D 000mm D 000mm D 000mm D L L A eries M MN M MN W -0 MV 0X 0 Total Air Gamma 07

eries M MN 00mm AWG#0.0 M0M L L M MN W 9 C C C C L 9 n-m (C) 4. 9. 4-M 4.6 4-M 4 6 7. 4. C C C C 0 K 4 0 4-. 44..6-0 MV 0X 0 Total Air Gamma 4 4 6 7 9 0 K 6 4 74 90 06 4 L 4 0 66 9 4 0 46 K 0 0 0 4 4 M6 0 D( D D0 D D D D ).6 ( Q ) DDD 4 00mm AWG#0.0 AWG#4. (D,D0,D,D) ( ). () ( L ) ( L ) (9) 6. 0 c /( 06 ) G/4 g7 n-c/ C C CCC 0 K L 4 6 7 9 0 K 6 4 74 90 06 4 L 4 64 0 96 44 0 76 C C L C(C C0 C C C C) 7 49.6 () ( ) 4 4 47. 4-c/ 4-M () AWG#4. (C,C0,C,C) 4.4 7. 7. 4. 7 7.4 G/4 0

4 4 4 6.9 ( ) 4-M4 K L 4 M 4 6 7 9 0 K 0 4 64 0 96 L 4 64 0 96 44 0 M 4 40 6 7 04 0 ( L ) ( L ) 60 c /( 06 ) C C 4 9. 4 n-m4. ACC 0 0. -M44. () G/4 4 6 7 9 0 K 4 6 0 96 44 L 6 6 4 00 4 4 M 4 64 0 96 44 0 76 0 (9) g7 4.6 6-M ()() 0 4.7..4.9 4 C( C C0 C C C C ) ( ) 4.. 4-M4 00mm AWG#0.0 M6 CCC () AWG#4. (C,C0,C,C) () 60 K L M C C 4 eries L( L ) K C C 7 7-4. L.6 D( D D0 D D D D ) 4. ( Q ) 00mm AWG#0.0 n-c/ 6. 4 7 -M4 6-c/ 0. 6 0. 4 4.7 0 7 DDD 4. 60 AWG#4. (D,D0,D,D) M MN M MN W 09-0 MV 0X 0 Total Air Gamma

M MN M MN W -0 MV JI (C) () (C) () () A (C ) (C ) ( ) () ( ) 4.0Ma MICOOL N eries 6 DIN Ma Ma Ma. -040 40 m/s 0 m/s 00 AC V DC A DC 00000 / 60Hz 4 0 00V 0.06 / 0.044 AC 00V 0.04 / 0.06 V 0.0 4V 0.07 00V 0.0 / 0.0 AC 00V 0.07 / 0.0 A V 0.0 DC 4V 0.07. /.4 00V.0/.6 AC W. /.6 00V./. V..0 DC 4V..0 4 AC00V 0/60HzAC0V 60Hz AC00V 0/60HzAC0V 60Hz 4 Ma.0 0.6.0 0.6 0.7 Ma 0. 0. 0. 0. 0. mm..6..6. ms 0 0 60 0.MaON V00.9Ma.0.00kaabs 760Torr 0X 0 Total Air Gamma 0 g g g DIN g nm N-UH4H4 N4-UH4H4 7 UH6 H6 4 UH6 H6 4 nm

Cdm /s bar b 0. 0. 0. 0. N eries Cdm /s bar b Cdm /s bar b 0. 0. 0. 0.4 0. 0. 0. 0.9 A/ A// Cdm /s bar b Cdm /s bar b 4 0.09 0. 0. 0. C.0C M MN M MN W TF 6-0 MV 0X 0 Total Air Gamma

M MN M MN W -0 MV 0X 0 Total Air Gamma N eries N 7 M6 AC00V A C D 4 V M0M 6 V 6 V 7 0 N7-M0--AC00V MICOOL 7 C D. F G H I J AC00V F 7 G H I 0 N N N 4 C 4 D. 6.6 M0 4 M 4 M4 M6 N F G V 6 H 0 7 I X J J AC00V 0 / 60Hz AC00VAC00V AC00V 0 / 60Hz DC 4V DC 4V DC V DC V AC0VAC0V 0 / 60Hz AC0V AC0V 0 / 60Hz AC4V AC4V DC6V DC4V A

LDC N A N N 4 F 00mm C C 00mm 00mm C0 C00000mm C0 000mm C0 000mm C C 00mm C0 00mm C 000mm C 000mm C 000mm C D D 00mm D 00mm D00 00mm D0 000mm D0 000mm D0 000mm D D0 00mm D 000mm D 000mm D 000mm D L L N eries M MN M MN W -0 MV 0X 0 Total Air Gamma

N eries M MN M N L K MN. W 6 4 4 A 40 6 4 7. 6. 4.7 9. 6. (76) -0 MV 4 6 7 9 0 4 7 9 0 4 K 4 64 0 96 44 0 76 9 0 4 40 6 7 04 0 6 6 4 400 4 4 L 0 96 44 0 76 9 0 4 40 6 7 04 0 6 6 4 400 4 4 44 464 ( ) G/4 () 6. C( C C0 C C C C ) AWG4. (C,C0,C,C) () CCC 60. D( D D0 D D D D ) AWG4. (D,D0,D,D) DDD 66. 0X 0 ( L ) ( L ) g7 (9) 0 0 ( ) LL g7 7. ( ) () G/4 44. 6. ( Q ) 4.7 00mm AWG#0.0 44. 4. Total Air Gamma 4

N eries N M L K MN M. 40 MN 9. 6 4 4 4 A 6 44 7 0 6. (7.) 7. 6. 4.7 W 4 6 7 9 0 4 7 9 0 4 K 4 64 0 96 44 0 76 9 0 4 40 6 7 04 0 6 6 4 400 4 4 L 0 96 44 0 76 9 0 4 40 6 7 04 0 6 6 4 400 4 4 44 464 ( ) G/4 () 6. C( C C0 C C C C ) AWG#4. (C,C0,C,C) () CCC 60. D( D D0 D D D D ) AWG#4. (D,D0,D,D) DDD 66. -0 MV ( L ) ( L ) g7 (9) 0 LL ( ) () G/4 ( Q ) 00mm AWG#0.0 0X 0 ( ) 7. 44. 6.9 44. 4. 0 Total Air Gamma

M MN M MN N eries A L N-LUH6 N-LH6 N-UH6 N-H6 6 6 6 6 W L N-LUH6 N-LH6 N-UH6 N-H6 6 6 6 6-0 MV C M N-MUH4 N-MH4 4 4 D M4 N4-M4UH4 N4-M4H4 0X 0 Total Air Gamma A 4 N N M6 00 AC00V N M6 UH4 AC00V C A D H G F K A 4 I J A K C D K UH4 4 H4 4 00

F M N-MUH6 6 N-MH6 6 N eries M MN M MN G M N-MUH6 N-MH6 W 6 6 H AA.. L AA 00 00 AA000 000 L. GW4 7. 4 7 9-6 -0 MV LW-H6 6 F- 04 4. 0 U-9 04 0. mm 0.mm NU 04 A 04 4 06 6 0X 0 0.mm A 04 4 06 6 0. mm 0.mm A 04 4 06 6 Total Air Gamma 7

N eries M MN M MN W N DIN DIN DIN mm mm -0 MV 0X 0 DIN 6 D 0 CD 6 4 F4-6040 0 6 AWG 0.0.mm C 90 0.N m CKD 9 4 0.0.7m Total Air Gamma 0.N m JI C06VCTF 46.

N eries 6 4K9-0 707-90 6 0.N m 4 : (0.0.7mm ) 0 90 4 M MN M MN W -0 MV 9 0X 0 Total Air Gamma

MICOOL M MN M MN N - - - C D F. M6 00mm 6.6 N 4 M0 C 00mm W M C00 C C0 000mm M0MV C0 000mm C G H I C 00mm C0 V 0 C C 000mm V C 000mm 00mm 00.9Ma DC4V C 000mm.0.0kaabs C 760Torr X D 00mm D00 00mm D0 000mm D D0 000mm D0 000mm D J K D 00mm D0 00mm AC00V UH4 4 D D 000mm AC00V H4 4 D DCV 000mm C L(n) D 000mm DC4V D AC0V -0 AC0V MV 0X 0 Total Air Gamma 0 A L H6 L H6 H6 H6 C 7 N N N M H6 M H6 6 F 4 C D F G H I J c d k LW-H6 GW4- n- n n L L Q 00mm 4 6 7 9 0 4 7 9 0 4 6 7 9 0 L 4L n M4 C0 000mm

9 MICOOL M 4 X 0min M MN M MN W -0 MV 0X 0 Total Air Gamma