V 3.3 1
1 1-1 1.1 1-1 1.1.1 1-1 1.2 1-2 1.2.1 1-2 1.2.2 1-2 1.2.3 1-3 1.2.4 1-3 1.3 1-3 1.3.1 / 1-4 1.4 1-5 1.5 1-7 1.5.1 1-8 1.6 1-8 1.6.1 1-8 1.6.2 1-9 1.6.3 1-9 1.6.4 1-9 1.6.5 RS232 1-9 2 2-1 2.1 2-1 2.2 HLD5000 2-2 3 HLD5000 3-1 3.1 3-1 3.2 HLD5000 3-1 3.3 3-3 3.3.1 3-3 3.3.2 3-3 3.3.3 HLD5000 3-3 3.3.4 3-3 3.3.5 3-5 3.3.6 3-6 3.3.6.1 3-6 3.3.6.2 3-6 3.3.6.3 3-6 3.3.6.4 3-7 3.4 3-7 3.4.1 3-8 3.4.1. 3-8 3.4.1. 3-10 3.4.1. 3-10 3.4.1. 3-11 3.4.1. CAL 3-13 3.4.1. 3-13 3.4.1. INFO 3-14 3.4.2 INFO 3-15 2
3.4.3 STANDBY 3-16 3.5 3-16 3.6 3-17 3.6.1 3-17 3.6.2 HLD5000 3-17 3.6.3 (COOL-Check) 3-18 3.7 3-19 3.8 3-19 4 4-1 4.1 INFICON 4-1 4.2 4-1 4.2.1 4-1 4.2.2 4-3 4.2.3 4-3 4.2.4 4-3 4.2.5 (SF6 / CO2 ) 4-4 5 5-1 A-1 3
1 HLD 5000.,,. 1.1 1.1.1 HLD5000( ).,. HLD 5000,. HLD 5000.. HLD 5000. HLD 5000., : EN 50081-1 EN 61000-6-2 EN 61010-1 1-1 4
1.2 1.2.1 Smart () Smart ( ) 1.0 / (0.04/ ) 0.5 / (0.02/ ) 50 / (1.76/ ) 100 / (3.52/ ) R134a, R22, R404A, R407C, R410A, R744 CO2, SF6 1 30 2 8 1.2.2 100... 230 ± 10 % 50/60 < 60 < 40 IP 30 II 320 / 1-2 5
1.2.3, 365; 260 (14.4 ; 10.25 ) 4.5 (10 ) 390 (0.9 ) 5 50 C;40-120 F 80 % at +31 C, 40 C (104 F) 50% 4.8 (15.5 ) LED, 24 ; 0 200 %; ( = 100 %) 2 <50 dba 100 dba 2000 1.2.4 HLD5000 R134a 510-010 HLD5000 R404A 510-011 HLD5000 R407C 510-012 HLD5000 410A 510-013 HLD5000 R22 510-014 HLD5000 CO2 (R744) 510-015 HLD5000 SF6 510-016 HLD5000 Smart Probe 510-017 1.3 HLD5000. 1.6.. :,, 100 2, EU, US 1-3 6
HLD5000 kima40e2 HLD5000 kina40e1 HLD5000 kins40e1 HLD5000 kiua40e1 kipa40e1 HEX 5 (4 ) 1.3.1 /, 100 511-021, 400, 511-024 400 (20 ) 511-020 (), 45 (20 ) 511-029 511-025 (20 ) 511-027 (20 ) 511-018 COOL-Check 511-010, R134a 511-030 R404A 511-031 R407C 511-032 R410A 511-033 R22 511-034 CO 2 (R744) 511-035 SF 6 511-036 Smart 511-037 1-4 7
1.4 INFICON,.,. " INFICON., ( RMA)...,. 1-1 ( ) 1-5 8
E-Mail A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk L+H Vakuumtechnik Vienna +43.1.611.0270 +43.1.616.0466 lhvakuum@eunet.at Gertner Service Moscow +7 95 9 31 96 46 +7 95 9 31 96 45 akhlestine@gertnergroup.de INFICON GmbH Cologne +49 221 347 42222 +49 221 347 42221 PV Prest Vácuo Ltda. leakdetection.service @inficon.com Santana de Parnaíba +55.11.870.2665 +55.11.870.2665 pv@prestvacuo.com.br A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk Vacuum Products Ontario +905.672.7704 +905.672.2249 Canada Ltd. MEISA S.a. de Mexico +52.442.212.3615 +52.442.212.1940 infomx@meisa.com C.V. Finn-Ley Brno +420 5 44 21 13 39 +420 5 44 21 32 30 navratil@finn-ley.cz INFICON LTD Hongkong +852.2862.8863 +852.2865.6883 Beijing +86.10.6590.0164 +86.10.6590.0521 Guangzhou +86.20.8723.6889 +86.20.8723.6003 Shanghai +86.21.6209.3094 +86.21.6295.2852 reach.china@inficon.com A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk Gertner Service Moscow +7 95 9 31 96 46 +7 95 9 31 96 45 akhlestine@gertnergroup.de A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk INFICON Vif +33.4.7672.5215 +33.4.7672.5235 INFICON GmbH Cologne +49.221.3474.2222 +49.221.3474.2221 leakdetection.service @inficon.com leakdetection.service @inficon.com Kontrade Budaörs +36 06 23 50 38 80 +36 06 23 50 38 96 Lovics@Matavnet.hu A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk INFICON Ltd. Bolton +44 12 04 46 99 30 +44 12 04 69 07 10 Mark Technologies Ltd. reach.unitedkingdom@ inficon.com Kiriat Ono +972.3.534.6822 +972.3.534.2589 urimari@marktec.co.il INFICON GmbH Castelnuovo +39 045 6 40 25 56 +39 045 6 40 24 21 davide.giovanetti @inficon.com INFICON Co. Ibariki-ken +81.45.471.3396 +81.45.471.3387 reach.japan@inficon.com Ltd. INFICON Ltd. Seoul +82.31.708.2891 +82.31.708.3056 reach.korea@inficon.com Gertner Service Moscow +7 95 9 31 96 46 +7 95 9 31 96 45 akhlestine@gertnergroup.de Gertner Service Moscow +7 95 9 31 96 46 +7 95 9 31 96 45 akhlestine@gertnergroup.de MEISA S.a. de C.V. Mexico +52.442.212.3615 +52.442.212.1940 infomx@meisa.com INFICON GmbH Cologne +49 221 347 42222 +49 221 347 42221 leakdetection.service @inficon.com A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk Prevac Rogów +48 32 4 51 25 11 +48 32 451 25 12 office@prevac.pl Sociedade Zickermann S.A.R.L Lissabon +351.213.224.160 +351.213.224.169 zickermann.lis@ mail.telepac.pt E.V.J. Krisch Engineering Company (PTY) Ranburg +27 11 79 36 83 15 +27 11 79 37 17 2 mailcenter@krisch.co.za Ltd Gertner Service Moscow +7 95 9 31 96 46 +7 95 9 31 96 45 akhlestine@gertnergroup.de INFICON PTE LTD. Singapore +65.890.6250 +65.890.6266 reach.singapore @inficon.com 1-6 9
E-Mail Finn-Ley Brno +420 5 44 21 13 39 +420 5 44 21 32 30 navratil@finn-ley.cz Medivac dol pri Ljubljani +386 15 63 91 50 +386 17 22 04 51 medivak@siol.net Leybold Optics Ibérica Barcelona +34.93.666.0778 +34.93.666.4612 jose.munoz@ leyboldoptics. com A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk MEISA S.a. de C.V. Mexico +52.442.212.3615 +52.442.212.1940 infomx@meisa.com A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk INFICON Company Limited Chubei City, Hsinchu +886.3.553.3797 +886.3.553.3794 reach.taiwan@inficon.com Dhaouadi Anis Tunisie + 216 1 434848 +216 1 432450 DhaouadiA@netscape.net A Gramkow Sonderborg +45 74 12 35 40 +45 74 43 36 46 jhj@agramkow.dk Sel Trade Trading Est. Dubai +971.4.266.0315 +971.4.2628.140 Seltrade@emirates.net.ae Gertner Service Moscow +7 95 9 31 96 46 +7 95 9 31 96 45 akhlestine@gertnergroup.de INFICON Ltd. Bolton +44.12 04 46 99 30 +44.120.469.0710 reach.unitedkingdom@ inficon.com Inficon Inc. East Syracuse, NY +1.315.434.1167 +1.315.434.2551 San Jose, CA +1.408.361.1200 +1.408.362.1556 service.usa@inficon.com Austin, TX +1.512.448.0488 +1.512.448.0398 1.5 : HLD 5000., (2-2/1),,. (2-2/1) 2 2 1,. 1-7 10
1.5.1 PIN,. HLD 5000. HLD 5000. ON... HLD 5000.... 1.6 1.6.1 HLD 5000,...,. HLD5000 HLD5000.,.,.. on,,. 1-8 11
1.6.2 HLD 5000,. 2-1/2...,. 1.6.3 HLD 5000 100 230 ±10% 50/60. 2-1/7. 2-1/8 2-1/7... 1.6.4, HLD5000. ( 2-2/10) HLD5000, (). ( 2 ). 1.6.5 RS232 HLD5000 RS232, ( 1-2). DCE (Data Communications Equipment) PC,. Sub-D. "HLD5000 (kins40e1). 1-9 12
1-2 RS232 : 1. 2. 3. RS232 1-10 13
2 2.1 HLD5000,,, C0 2 SF 6. HLD5000 :.,,., SF 6 CO 2,..,,.,. 2-1 HLD5000 2-1 14
2.2 HLD5000 2-2 1 9 RS232 2 10 3 11 4 ( SF6/CO2 ) 5 LED 12 6 13 7 14 8 15 2-2 15
3 HLD5000 3.1,. HLD 5000. HLD 5000.. 3-1/6. 30,.... PROGRAM, OPTIONS LANGUAGE., OK. HLD 5000,. 3-2/2. 3-1/4 ( : / )., ().,. 3.2 HLD5000 HLD 5000 3.4 : 3-1 16
...... ()( 3.3.6 )., 2.5 / (1 / ).., ( 1 ). HLD 5000 3.4.1., 3-1/5,. 2.1,.. HLD 4000,, HLD 5000.,.., HLD5000 ( 511-020)., 100 (4 )( 3.3.6.3 ). 3-2 17
( 3.4.1 ),,. 3.3 3.3.1 3.3.2 HLD5000,, 3-4. 3-4/6 on off. HLD 5000. 3.3.3 HLD5000 3-4/5...,. 200%. 3.3.4, on, 3-4/4:, R134a. Smart Smart. ( ), 9.0 /. "Program, "Standby "Info, 3-4/3. 3-3 18
3-1 1 4 2 5 LED () 3 6 ( 1 4 5 8) 3-4 19
( ), 09.0 /. ( 0.3 / (0.02/ ), Smart0.2 / (0.02/ ) ).. 3-3 : 1 4 2 5 3 6... 3-4 20
3-2 1 3 2 4 3.3.5 ( 3-2) ;. ( 3-2/2) ( 3-2/3). : off: ():, : ():, : /, : HLD5000 / /. >40%..,., 3.4, HLD 5000, 3.6. 3-2/4,,. 3-5 21
3.3.6 3.3.6.1 3-3 3-3/3. 3-3/2,. ( 3-3/1),., HLD5000., 3-3 1 5 2 6 3 7 4 8 3.3.6.2, 400(511-024).. 3.3.6.3 (), (3-3/5)( 511-020). 3-6 22
3.3.6.4. ( 3-3/8) 400 ( 3-3/6) ;,. 45., ( 3-3/7) (511-025). 3 (). 3-4,,,.,, HLD5000 15( ),. 3.4 () 3-5, HLD5000. PROGRAM(). 3-7 23
STANDBY(),. INFO().., TRIGGER LEVEL( ),., 8, 8 9, 8.,., OK. ESC,.,. 3.4.1 "Program : TRIGGER VOLUME CONTRAST OPTIONS CAL LIST ERRORS INFO 3.4.1.1 : LEVEL ALT LEVEL GAS TYPE ( Smart ) BUTTON UNIT : 3-8 24
LEVEL ( ) LEVEL, 1 / (0.04/ ) 50 / (1.76/ ). : / (0.5)1.0 50.0 / 4 10-6 3.9 10-4 / (1)2 10-3 1.0 10-1 / (0.02)0.04 1.76 / 4 10-7 3.9 10-5 ( Smart ) ALT LEVEL ( ). "ALT (). LEVEL, 50%,, 10 /. GAS TYPE() ( Smart) Smart HLD5000 5....,. Smart.,.,,. INFICON.,.,. 3-9 25
BUTTON () HLD 5000,. OFF ALT SEARCH OFF, 3.6.2. LEVEL,., ALT., LEVEL., ALT LEVEL. SEARCH,., HLD5000 LEVEL.., SEARCH (). UNIT(). /, /, /, / /. Smart /, / /. /. 3.4.1.2 VOLUME () OFF ON. ON,, 1() 20( )... 3.4.1.3 CONTRAST ( ).,. 1 99. 3-10 26
, : off on. 3 7 3-4. 1, 8. "CONTRAST ( ), EEPROM., on,. 3.4.1.4 OPTIONS () "OPTIONS : LANGUAGE () :,,,., 2 6. CLOCK ()., DD, MM, YY, 24, HH, MM. CHANGE PIN (PIN) PIN. PIN,. PIN. PIN 0000 PIN. PIN. PIN INFICON PIN. 3-11 27
REQUEST ().. on off,, 30., 30 24., HLD5000.. ON OFF., 40!. ( 4.2.1). 40.. AUTO STANDBY () RS232, HLD 5000. 1 15., HLD 5000.,, 2., HLD5000 RS232. Protocol () : "OFF, "Normal "Simple. RS232, "OFF,. " HLD5000 (kins40e1). Baud rate ( ) RS232. 300, 600 1200, 2400, 4800 9600. 9600. 3-12 28
External Calibrated Leak ( ). 3.4, OK. / HLD5000 /. 3.4.1.5 CAL () HLD 5000. SF6 CO 2 HLD 5000,., : Sniff external test leak ( ),. : Ext. Test leak ( ). CAL. LED.. calibration successful (). The HLD5000. 3.4.1.6 LIST ERRORS () 12,, View ().. : E: / R: / M: Power Up ( kipa40e). 3-13 29
3.4.1.7 INFO () INFO HLD 5000. 6. : Main Unit Info ( ) Probe Info 1 (1) S p1 p2 AD Probe Info 2 (2) HEX CAL Info () CAL, R134a R404A,. Test leak info () 20 C. 3-14 30
U / I-Info (U / I-) + 12 (U+) - 12 (U-) U I U 3.4.2 INFO INFO. 1 2. 1: 2: TRIGGER LEVEL ( ) 10 /. ALT. TRIGGER LEVEL ( ) %. BUTTON () (OFF, ALT, TEST). VOLUME (). 3-15 31
DATE () :,,. TIME () :,,. NEXT CALIBRATION ( ) ( ). 3.4.3 STANDBY STANDBYHLD 5000,.. "Standby ("AUTO STANDBY ), 25.,. 3.5, ( 510-010 510-016 511-030 511-036),. Smart, 53. ( 3.4.1.1 Gas Type() ) 3-16 32
3.6 HLD 5000,. 2.. SF 6 CO 2 HLD5000. ( 3.4.1.1 Gas Type ). Smart,,.,,.., on,, 5. 3.6.1. OK. (3.4.1.4 )., LED, 100%.,. LED,.,.,... 3.6.2 HLD5000 HLD5000,,...,. 3-17 33
,,.,. 511-020,,. 3-6 3-7 3.6.3 (COOL-Check).,.. "Leak nearly empty. Please replace! (, ). 3-18 34
. COOL-Check 4.2.5.,,. 3.7,, HLD 5000.,. 3.8 HLD5000 HLD5000,,.. 3-19 35
4 4.1 INFICON INFICON,..,. :..,., INFICON. 4.2 HLD 5000,.. 4.2.1,.. HLD5000,,. 1,. Request for filter replacement( ), 40 Please replace filter holder!( )., 40.. flow at measuring line too low() flow at reference line too low( ).,.,. 4-1 36
HLD5000.,.., :. 20 511-027.., :.... 20 511-018. 2,. HLD5000., (). 4-2 37
, 200 000 086. 4.2.2,. 4.2.3 HLD 5000. (, ).. 4.2.4,. HLD 5000 2-2/8. :,.. T 1 A ( Ø 5 x 20 )..., HLD 5000, on. 4-3 38
4.2.5 ( SF 6 / CO 2 ) " Leak nearly empty. Please replace! (). :,.,.... ().,.,..,. on, 5., ( 5 )., COOL-Check, INFICON /. 4-4 39
5, HLD 5000.,. HLD 5000.. HLD 5000... OK.,.. (kipa40d1). / Cool Check 3 Cool Check! Cool Check! LEMO! :!!!! CPU- ( ) CPU- ( )!, CPU- ( ) 5-1 40
/! CPU- ( ).! Cool Check Cool Check () () Cool Check!, HLD50001 2..... 02: Smart CO2 SF6 Smart CO2 SF6,.,. 5-2 41
()!, /, / ( ) /,.. / 5-1 5-3 42
EEC INFICON GmbH, EEC,. :,. : : : : 5-2 5-4 43
44 A-1, BUTTON,,,,,, (ALT),
RS232, A-2 45