1 R W R 20 20 R20 R R 20 1/2 W 20 W20 W W 20 1/2 R 20 20 R20 R R 1/2 R 20 20 R20 R R 20 1/2 W 20 20 W20 W W 1/2.R.. 20. 20. 20. 20.11 20.13 R20.20 R20.2 W20.31 W20.
2 03 1 Rc T 20...O. 0.020.2a ø6ø SI SI 20 20 20 20 20 20 20 20 20 20 1 2 3 6 8 R W Y Z S V 3 20 20 20 20 20 20 20 20 20 20 R[] W[] R[S] [S]R [S]R R[V] W[V] R[V] R[V] W[V] 20 8 0.3a 0.2a 10 T SI 6 2 R Y 1 20 2 3 20 T T ø" 20 5 1 6 01 02 03 0 1/2 20 20 1/2 I I R a O USHto a O USHto 0 1
T.R. 20 20 20 20 20..... 1 2 3 6 8 R W Y Z (..) (.O.) 0.020.2a -1-2 -3-6 -8 - - - -R -W -Y SI -Z.15.16 3. 1/2.1 3
20 1.5a 1.0a +0.05a 0.1 /min(r) -5~60 5µm 1 ISO V32 0.05~0.85a 20 0.8 1.11 1.8 20 R20 20 R R (g) 20 2-10S 2-3S 2 Y200 Y200T 2000-01( 02) IS1000-20 VHS20-01 02 3-10S 3-3S 3 38 Y0 Y0T 00-(01) 02 IS1000- VHS-02 03-10S -3S 8 Y0 Y0T 00-(02) 03 IS1000- VHS-02 03 0 / 20 1 2 1 SI 2.O.0.1 a..0.15 a SI 3 5 R -Y 3 3 0~1.0a 0~0.3a...O. 1/2
20 0.a 20 0.6 Rc 0.6 Rc 0.6 Rc1/2 a 0.5 0. 0.3 0.2 a 0.5 0. 0.3 0.2 a 0.5 0. 0.3 0.2 0.1 0.1 0.1 0 0 200 0 600 800 /min (R) 0 0 500 1000 1500 /min (R) 0 0 1000 2000 00 /min (R) 20 a 0.25 0.2 0.15 Rc a 0.25 0.2 0.15 Rc 0.a 0.2a 20 /min(r) a 0.25 0.2 0.15 Rc1/2 0 0 0.2 0.3 0. 0.5 0.6 0. 0.8 0. 1.0 a 0 0 0.2 0.3 0. 0.5 0.6 0. 0.8 0. 1.0 a 0 0 0.2 0.3 0. 0.5 0.6 0. 0.8 0. 1.0 a 3 XH.O. 0.5kw 100 /min(r) 2 2 1.5kw200 /min(r) 0.1a.. 1 20.1a 3 0.15a 3 3 3 5µm 5
6 20(-Y) 20 (-Y) 20 1/2 126 16 220 8 115 1 36 1 8 60 80 110 28.5 38 1.5 55 2.5 3 5 5 1 50 2 1) 1) 1) 1 1) 3.2 1 20 2 20 3 3 3 3 3 3 2 20 8 108.5 11.5 2 33 12 1 105 156 6 123 155 1 122 15 8 128 160 0 2-2- 2-2- - - 2-2- - - 2-2- S S O S S S 20 (..) (.O./..) / 1 T060 1 50.8..:.O.: ø10 I I I I 20
20 1.5a 1.0a 0.050.85a +0.05a 0.1 /min(r) -5~60 5µm 1 ISO V32 20 0.65 0.86 1.55 W20 20 W W (g) 20 1/2 2-10S 2-3S 2 Y200 Y200T 2000-01( 02) VHS20-01 02 3-10S 3-3S 3 38 Y0 Y0T 00-(01) 02 VHS-02 03-10S -3S 8 Y0 Y0T 00-(02) 03 VHS-02 03 0 / 20 1 2 1 SI 2.O.0.1 a..0.15 a SI 3 3 3 0~1.0a 0~0.3a...O.
8 20 (..) (.O./..) / 1 T060 1 50.8..:.O.: ø10 20 20 1/2 83 110 15 8 115 1 1 108.5 11.5 60 80 110 2.5 2.5 0 26 38 1.5 55 2.5 1 50 2 2 33 12 1 3.2 20 105 156 6 123 155 1 122 15 8 128 160 0 2-2- S S O S O S I I 20
20 20 0.56 0. 1.25 20 R20 R R (g) 20 2-10S 2-3S 2 Y200 Y200T IS1000-20 VHS20-01 02 3-10S 3-3S 3 38 Y0 Y0T IS1000- VHS-02 03-10S -3S 8 Y0 Y0T IS1000- VHS-02 03 0 / 20 1 2 1 SI 2.O.0.1 a..0.15 a SI 3 R -Y 3 3 0~1.0a 0~0.3a 1/2...O. 1.5a 1.0a 0.050.85a +0.05a 0.1 /min(r) -5~60 5µm
10 20 20(-Y) 20 (-Y) 1 20 2 20 3 3 3 3 3 3 2 20 8 108.5 11.5 2 2 33 12 1 105 156 6 123 155 1 122 15 8 128 160 0 20 (..) (.O./..) / 1 1 50.8 T060..:.O.: ø10 2-2- 2-2- S S O S o s S S o s 20 1/2 83 110 15 8 115 1 2 1 8 60 80 110 2.5 2.5 0 28.5 2.5 38 1.5 55 2.5 1 50 1 1 1 1 1 1 1 3.2 I I I I
20 { /min(r)} 1 (g) 1 10.a 0.5a 2 mgf/m 3 20 20 20 20 R20 R 1.5a 1.0a 0.05~0.85a 200 50 1100 +0.05a 0.1 /min(r) -5~60 : 5µm: 0.3µm5% 2 ax1.0mgf/m 3 ( 0.8ppm) R 1/2 0. 1.06 1.8 / 0~1.0a 1 0~0.3a 2...O. 3 33 20 2-10S 2-3S 2 Y200 Y200T IS1000-20 3-10S 3-3S 3 38 Y0 Y0T IS1000- -10S -3S 8 Y0 Y0T IS1000- VHS20-01 02 VHS-02 03 VHS-02 03 0 1 SI 2.O.0.1 a..0.15 SI 3 R -Y 11
12 20 1 20 2 20 3 20 8 108.5 11.5 2 33 12 1 105 156 6 123 155 1 122 15 8 128 160 0 20 1/2 126 16 220 8 115 1 2 1 8 60 80 110 2.5 2.5 0 28.5 38 1.5 55 2.5 3 5 5 1 50 2 1 1 1 1 1 3.2 2-2- 2-2- - - 2-2- - - 2-2- S o s S o s S o s S O S o s I I I I 20(-Y) 20 (-Y) 3 3 3 3 3 2 20 (..) (.O./..) / 1 1 50.8 T060..:.O.: ø10
20 { /min(r)} 1 (g) 1 10.a 0.5a 2 mgf/m 3 20 20 W20 W W 20 1/2 1.5a 1.0a 0.05~0.85a 150 3 800 +0.05a 0.1 /min(r) -5~60 W: 5µm: 0.3µm5% 2 ax1.0mgf/m 3 ( 0.8ppm) 0.63 0.85 1.52 / 0~1.0a 1 0~0.3a 2...O. 33 20 2-10S 2-3S 2 Y200 Y200T 3-10S 3-3S 3 38 Y0 Y0T -10S -3S 8 Y0 Y0T VHS20-01 02 VHS-02 03 VHS-02 03 0 1 SI 2.O.0.1 a..0.15 SI 3 13
1 20 20 20 1/2 83 110 15 8 115 1 1 108.5 11.5 60 80 110 2.5 2.5 0 26 38 1.5 55 2.5 1 50 2 2 33 12 1 3.2 20 105 156 6 123 155 1 122 15 8 128 160 0 20 (..) (.O./..) / 1 T060 1..:.O.: ø10 50.8 2-2- S S S O O S O S I I
15 2000 00 00 2020 53 0 8 5 28 3 2 11 1 11 13 15 2000 00 00 (mm 2 ) 28 55 111 01 00 () I. Rc T 01 02 03 20 20 I
(S) 15 23 500.R.. ( O) 1.0a 0.a 0.10.a 0.08a 560 () IS1000-20 IS1000- IS1000-11 13 15 6 86 5 66 2 28 36 20, 20, 20,,,, 1) 2)R(-Y) 1a 2V2W 100V 12V2V50m 8Vm 100V20m IS1000 X201 20 20 X201 X202 3m 0.10.6a X20 a, SI 3m X215 0.10.6a )(SI ) 16
3 :(V) 3 3 øi 2-ø10 H VHS20 VHS VHS I, 1/2 XH. mm 2 ( )v I 10 (0.5) 1 (0.6) 16 (0.8) 31 (1.68) 2 (1.6) 38 (2.06) 55 (2.8) IS () 2 1 3 () (R) XH. 11 (0.60) 16 (0.8) 1 (0.6) 2 (1.5) 36 (1.5) (2.1) 2 (2.28) I SU XH. VHS 3 20 20 03 RZ Rc T 20 01 02 03 0 1/2 VHS20 VHS VHS 5 8 10 20 2 3 53 0 3 6 63 22 1.3 2.VHS20 XH. (VHS) VHS20 VHS R 1) Z 5 55 58 33 2 H 28 36 2 mm.si 1 T SI 5 5 I 5 55 63 1
: (X) HR Y200 Y200-060S Y0 Y0-060S Y0 Y0-060S : (Z) Y0T.R.. X X Y200 Y0 Y0 20 3 5.5 5.5 26 31 8 5 65 20 3 5-82 6 6 - - 2 1 8 53 68 81.5 2 33 - - ø Y200T Y0T Y0T 12 1 3.2 1 50 H 1 21 26 (Y200T) H ø (Y100TY200T).R.. X X HR Y200T Y200-060S Y0T Y0-060S Y0T Y0-060S Y200T Y200 RS 1 2 RS 1 2 Y0 X-X X-X