Micro Solid State Silicon Plate Wind Velocity Sensor

Transcription

1 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Shenzhen, China 5 8 January 2009 Pages IEEE Catalog Number: ISBN: CFP09NME-PRT

2 TABLE OF CONTENTS Micro Solid State Silicon Plate Wind Velocity Sensor...1 Lidong Du, Zhan Zhao, Cheng Pang, Zhen Fang, Yonghong Liu, Youjun Han Performance Comparison of Methods to Evading Notching Effect for SOG Structures in DRIE...5 Haito Ding, Zhenchuan Yang, Guizhen Yan Electrophoresis Deposition and Field Emission Properties of Composites Films ZnO Nanoneedles/CNTs...9 Yu Ling-min, Zhu Chang-chun A Precise Measurement of Quality Factor for Planar Microtoroid Resonators...13 Shubin Yan, Yingzhan Yan, Zhe Ji, Baohua Wang, Shaohui Wang, Guoqing Jiang, Jijun Xiong, Xiongying Ye, Zhaoying Zhou, Wendong Zhang Molecular Dynamics Simulation on the Out-of Plane Thermal Conductivity of Monocrystal Germanium Thin-film...17 Xingli Zhang, Zhaowei Sun, Guoqiang Wu Design and Simulation of 4-Bit 10-14GHz RF MEMS Tunable Filter...21 Xudong Zou, Kenle Chen, Hualiang Zhang, Jinwen Zhang Tunable MEMS Capacitors Considering Deformation Factor...25 Dong-Ming Fang, Hai-Xia Zhang, Xiao-Lin Zhao The Simulation of Frequency-capacitance Characteristics of Fresh Water Conductivity Sensor...29 Jikun Yi, Wei Li, Lingfang Wang, Zhiyu Wen Research on the Output Characteristics of MEMS Convective Accelerometer under Heavy Impact...33 Shao-Chun Sun, Geng-Chen Shi Angularly Parameterized Macromodel Extraction for Microstructures with a Large Number of Terminals...37 Jinghui Xu, Weizheng Yuan, Honglong Chang, Binghe Ma Sigma-delta Modulator Based Control Systems for MEMS Gyroscopes...41 Michael Kraft, Haitao Ding Preparation of Kerosene based Nano-magnetic Fluid and its Application in Pressure Difference Sensors...47 Ruican Hao, Decai Li Theoretical Analysis and Fabrication of PDMS-Based Surface Plasmon Resonance Sensor Chips...51 Zhaoxin Geng, Qing Li, Wei Wang, Zhihong Li The Analysis and Structural Design of Micro SOI Pressure Sensors...55 Bian Tian, Yulong Zhao, Zhuangde Jiang, Ling Zhang, Nansheng Liao, Yuanhao Liu, Chao Meng Research on the Resonant Frequency Formula of V-Shaped Cantilevers...59 Kai Yang, Zhigang Li, Yupeng Jing, Dapeng Chen, Tianchun Ye Emerging Non-CMOS Nanoelectronic Devices - What Are They?...63 Nor Zaidi Haron, Said Hamdioui, Sorin Cotofana

3 Enhancement of Mixing Performance of Water Solutions in a Micro-mixer with Immiscible Ferrofluid...69 Tsung-Han Tsai, Dar-Sun Liou, Ping-Hei Chen, Chin-Ting Yang Design of a Four-arm Structure MEMS Gripper Integrated with Sidewall Force Sensor...75 Tao Chen, Linguo Chen, Baixu Liu, Jiachou Wang, Xinxin Li Design and Simulation of an Active Electrostatic Bearing for MEMS Micromotors...80 Fengtian Han, Zhenbin Fu, Jingxin Dong Silicon Nanowire Fabricated by MEMS Technology and its Application in Biochemical Detection...86 Yibin Gong, Huamin Gao, Xiang Liu, Wenping Liu, Tie Li, Ping Zhou, Yuelin Wang Research on Deep RIE-based Through-Si-Via Micromachining for 3-D System-in-package Integration...90 Min Miao, Yufeng Jin, Hongguang Liao, Liwei Zhao, Yunhui Zhu, Xin Zhu, Yunxia Guo Nanomechanical Mass Sensor for Monitoring Deposition Rates Through Confined Apertures...94 Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Nuria Barniol, Marc A. F. Van Den Boogaaer, Juergen Brugger, Francesc Perez-Murano Design and Fabrication of Microfluidic Chip with Micro/nano Structures...98 X. Chen, D. F. Cui, L. L. Zhang Microfabricated Breath Sensor based on Carbon Nanotubes for Respiration Monitoring Hai Liu, Xiaohang Chen, Dong Xu, Zhongyu Hou, Yafei Zhang Analysis on Electro-Thermal Property of Micro-Bubble Generator Using Carbon Nanotube Heating Elements Wenli Zhou, Sanping Wan, Chao Zhu Novel Synthesis Design of a 3-DOF Silicon Piezoresistive Micro Accelerometer Tan D. Tran, Minh D. Nguyen, Long T. Nguyen, Tue H. Huynh, Thuy P. Nguyen Nanoscale Welding by AFM Tip Induced Electric Field Haibo Yu, Niandong Jiao, Zaili Dong, Yanli Qu, Wen J. Li, Yuechao Wang Effect of Effective Viscosity on Characteristics of Microscale Gas Journal Bearings Haijun Zhang, Changsheng Zhu, Qin Yang Sensitivity Analysis and Structure Design for Tri-mass Structure Micromachined Gyroscope Liqiang Xie, Dingbang Xiao, Haoxu Wang, Xuezhong Wu, Chengyi Li SOI-Based Capacitive Micromechanical Resonator with Submicron Gap-Spacing Yi Liu, Yaquan Tang, Xiaomei Yu Direct Bonding SOI Wafer Based MEMS Cantilever Resonator for Trace Gas Sensor Applicaiton Dong Ying, Gao Wei, You Zheng Fabrication of Nanobeam using Focused Ion Beam (FIB) and KOH Etching Haitao Cheng, Heng Yang, Yuelin Wang Design of Two-Wheel Self-Balanced Electric Vehicle Based on MEMS Hua Sun, Haixu Zhou, Xiang Li, Yanhui Wei, Xiao Li Battery-Powered Miniaturized Electroporation System for In-Situ Gene Transfer in Stem Cell Research Huiqi He, Donald C. Chang, Yi-Kuen Lee

4 A Low-loss RF MEMS Switch with Dielectric Layer on the Lower Surface of the Bridge Kenle Chen, Yueyang Dai, Xudong Zou, Jinwen Zhang Etch-back in DDSOG Process by Ultrasonic Agitation and Application to Tunneling Gyroscope Fabrication Lingyun Wang, Yibo Zeng, Wenwang Li, Daoheng Sun Simulation of Levitation Control for A Micromachined Electrostatically Levitated Gyroscope Qijun Xiao, Wenyuan Chen, Gaoyin Ma, Feng Cui, Shengyong Li, Weiping Zhang Effect of Temperature and Elastic Constant Correction on Piezoresistivity of Silicon Nanobeams Jia-Hong Zhang, Qing-An Huang, Hong Yu Integration of Micro Temperature Sensor and Metal Foil as Gas Diffusion Layer for Micro Fuel Cell Chi-Yuan Lee, Shuo-Jen Lee, Yuh-Chung Hu, Chen-Hen Lin, Yu-Ming Lee, Wei-Yuan Fan Fabrication of Micro Temperature Sensor and Heater in a Stainless Steel-based Micro Reformer Chi-Yuan Lee, Shuo-Jen Lee, Wen-Pin Shih, Chen-Hen Lin, Chi-Chang Chang, Pei-Zen Chang Design and Modeling of a Tunable Optical Antenna Enabled by a Micromachined Actuator Siva Panmetsa, Tianhua Zhang, Zhongcheng Gong, Tae-woo Lee, Long Que A White-light Source Operated Polymer-based Micromachined Fabry-perot Chemo/biosensor Tianhua Zhang, Zhongcheng Gong, Long Que Characterization of Si 3 N 4 /SiC Microstructure Derived from UV Curable Polymer Ceramic Precursor Pyrolyzing Ya-Zhou Wang, Li-Xin Chen, Jia-Le Song Design of Movable Contactless Conductivity Detector for Microchip Capillary Electrophoresis Hai-feng Zhang, Xiao-wei Liui, Zhi-cheng Peng, Xi-Lian Wang, Wei Wang, Yu-feng Chen Electroreduction of Nitrite based on Ag/PPy Nanowires Modified Electrodes Xiuling Zhang, Feng Jin, Jianxin Xing Parameter Characterization of Anodic Bonded Electrical Interconnect in MEMS/NEMS Devices Xuejiao Fan, Dacheng Zhang EWOD Using P(VDF-TrFE) Pingan Zhao, Yinqing Li, Xiangyu Zeng, Jia Zhou, Yiping Huang, Ran Liu Integration Micro-Magnetic Sensor and Accelerometer Microsystem for Orienting Application Weihua Li, Wenzhong Lou, Xin Li, Rongsen Hong, Liang Hu Fabrication and Vibration Analysis of Micro-Cross Beams Wei-Hsin Gau, Shin-Chun Huang, Yuh-Chung Hu State Engine Based Validation of MEMS Process Sequences Xu Zhao, Xin Zhao, Guizhang Lu Using Micro-reactors to Synthesize Alloy FeGa 2 O 4 Magnetic Nanoparticles Chen-Hsun Weng, Chih-Chia Huang, Chen-Sheng Yeh, Gwo-Bin Lee A Microfluidic-based Cell Culture Platform for Cellular and Subcellular Imaging Dar-Bin Shieh, Chia-Chun Hsieh, Song-Bin Huang, Gwo-Bin Lee

5 Synthesis of Gold Nanoparticles Using a Vortex-type Micro-mixing System Sung-Yi Yang, Fong-Yu Cheng, Chen-Sheng Yeh, Huan-Yao Lei, Gwo-Bin Lee Chip Scale Atomic Magnetometer Based on SERF Song Xing, Dong Haifeng, Fang Jiancheng A Novel Design of Micro-magnetic Sensor Guidance System for the Blind Liang Hu, Wen-zhong Lou, Renlong Song, Chao Gao, Xin Li Controlling of Micro/Nano Fluidics Array Using Single Ice Valve Yang Yang, Jing Liu Theoretical Characterization on Nano Freeze Tweezer Enabled from Convective Cooling Principle Yang Yang, Jing Liu A Novel SERS Active Particle with Highly Bio-organics Absorption Affinity for the Description of Bacteria Fingerprint Chi-Chang Lin, Chen-Yuan Yu, Ying-Mei Yang, Yung-Ming Chu, Hong-Ping Lin, Hsien-Chang Chang A Novel Method for the Manufacture of MEMS Devices with Large Exposed Area Based on SOI Wafers Jianbing Xie, Wiezheng Yuan, Honglong Chang Development of a novel Perfusion Microfluidic Cell Culture Device for Cell-based Assays Yunhuan Zheng, Jianzhang Wu, Jianbo Shao, Qinghui Jin, Jianlong Zhao A Novel Multi-direction High Shock Reliability Test on MEMS Devices Wenzhong Lou, Renlong Song, Yunjian Liu, Xiaosong Liu, Weihua Li, Wanfeng Lin Numerical and Experimental Study of Microscale Laser Shock Processing Using Excimer Laser Zhigang Che, Liangcai Xiong, Tielin Shi, Zirong Tang, Huayang Cheng, Likun Yang An Advantageous Fabrication Technology to Integrate Pressure Sensor into Multi-sensor for Micro Weather Station Cheng Pang, Zhan Zhao, Jiangang Zhang, Li Shi, Lidong Du, Zhen Fang, Yonghong Liu Comparison of Methods for Sensing Contact Potential Difference of Nanocrystalline Alloy Films Using a Kelvin Actuating Capacitor C. K. Chung, W. T. Chang A Patch-clamp Device with Integrated Actuators for Cell Selection and Positioning Zhongcheng Gong, Krithika Nagarajan, Siva Penmetsa, David Mills, Long Que Single-neuron Spinning Control System for a Non-silicon Micromachined Rotational Gyro Gaoyin Ma, Wenyuan Chen, Qijun Xiao, Weiping Zhang, Feng Cui, Kai Li Study on PSZT Thin Films for Microforce Sensors Yan Cui, Huilin Chen, Jinsong Xia, Jiaxin Zhao, Jing Wang, Liding Wang Design and Analysis of Novel Solid Biaxial Micro-Gyroscope with Special Mode Excitation Yipeng Lu, Weiping Zhang, Xiaosheng Wu, Wenyuan Chen, Feng Cui A Micro Amperometric Immunosensor immobilized with Electropolymerized Staphylococcal Protein A for the Detection of Salmonella Typhimurium Sun Jizhou, Bian Chao, Qu Lan, Xia Shanhong Characterization of Line Edge Roughness and Line Width Roughness of Nano-scale Typical Structures Zhuangde Jiang, Fengxia Zhao, Weixuan Jing, Philip D. Prewett, Kyle Jiang

6 Modeling Analysis of Piezoelectric Micromachined Modal Gyroscope (PMMG) Xiaosheng Wu, Wenyuan Chen, Weiping Zhang, Yipeng Lu, Feng Cui, Xiaolin Zhao Investigations on ElectroHydroDynamical Drop-On-Demand Inkjet Printing Yinhong Dai, Donghang Chen, Lingyun Wang, Daoheng Sun The Micropatterns of Glutaraldehyde-crosslinked Gelatin as ECM for Attachment of Tumor Cells Yu-Cheng Ou, Chih-Wen Hsu, Lung-Jieh Yang, Hsieh-Cheng Han, Yi-Wen Liu, Chien-Yuan Chen Optimization of Corona-triggered PDMS-PDMS Bonding Method Chenying Yang, Wei Wang, Zhihong Li Artifical Fish Flocked Surface as a Possible Anti-biofoulant Jing Wang, Bing Qu, Yan Ming Su, Chao Pan, Wei Guo Cai Boron Doped Hydrogenated Nanocrystalline Silicon Thin Films Prepared by Layer-bylayer Technique and Its Application in N-I-P Flexible Amorphous Silicon Thin Film Solar Cells Ke Tao, Dexian Zhang, Yun Sun, Linshen Wang, Jingfang Zhao, Ying Xue, Yuanjian Jiang, Hongkun Cai, Yanping Sui, Jin Wang Vehicle Supervision System Based on MEMS Geomagnetic Sensor Jin Wang, Guofeng Li, Yiyi Liu, Yi Lu, Xianhu Gao, Yong Zhang, Ke Tao Nafion Coated Enzyme Free Glucose Micro-biosensors for Anti-fouling of Protein Yi Jae Lee, Jung Doo Kim, Jae Yeong Park Analyzing the Frequency Response of Micromachined Capacitive Inertial Devices by the Third Harmonic Detection Dingbang Xiao, Liqiang Xie, Zhanqiang Hou, Xuezhong Wu, Shengyi Li Design and Parametric Study of a Tubular Passive Micro Direct Methanol Fuel Cell Xiuling Ji, Yunjian Liu, Wenzhong Lou Effect of Calcination on Photocatalytic Activity of Fe 3 +-doped TiO 2 Nanoparticles for Degradation of Phenol Under Uv Irradiation Kashif Naeem, Ouyang Feng Using the Improved DSMC Method to Predict the Reliability of Micro-flow Channels Ping Tang, Jian Yang, Jianjun Ye, Jinyang Zheng, Chikong Lam, Ieong Wong, Yanbao Ma The Arrowed Surface Ratchets with Hydrophobic Parylene for Droplet Transportation Fu-Wen Yeh, Lung-Jieh Yang, Guo-Yuan Hess, Ching-Jiun Lee, Che-Chien Chu, Horn-Jiunn Sheen Diffraction Angle Prediction of Surface Micromachined Planar Curved Grating and Crossed Grating Kuan-Yu Chen, Ju-Nan Kuo Synthesis and Studies of Spindle-shaped Lead Selenide Nanocrystals Guangmei Zhai, Daoli Zhang, Lin Yuan, Jianbing Zhang Improvement of a Micro-Beam in a Smart Gas Sensor with Resonating Mechanism Jia Hao Zhao, Shi Jie Yu, Ke Li, Ying Dong, Qin Zhou, Zheng You Study on the Electrical Contract Property at the Interface of the NiCr/TiW Films Guanggui Cheng, Jianning Ding, Biao Kan, Junxiong Wang, Ningyi Yuan Effect of Pressure on the Q factor and the Resonance Frequency of SiN Microcantilevers Khashayar Babaei Gavan, Joost Van Der Heijden, Emile W. J. M. Van Der Drift, Herre S. J. Van Der Zant DNA Ligation Using Coplanar Electrodes Electro-wetting-ondielectric (EWOD) Device Hung-Chia Lin, Yi-Ju Liu, Da-Jeng Yao

7 Lamb Wave Excitation on Non-Piezoelectric Materials Using Lorentz Force Induced by Current in Meander Line Structure Fei-Bin Hsiao, Yung-Chun Lee, Lee Chang Hsiang Analysis of the Self-Test Characteristics of a Micromachined Accelerometer Weiping Chen, Xiaoliang Chen, Guoguang Zheng, Xiaowei Liu, Haifeng Zhang Surface Contamination-induced Resonance Frequency Shift of Cantilevers Hamed Sadeghian, Chung Kai Yang, Khashayar Babaei Gavan, Hans Goosen, Emile Van Der Drift, Here Van Der Zant, Paddy J. French, Andre Bossche, Fred Van Keulen Vehicle Detection and Recognition Based on a MEMS Magnetic Sensor Jinhui Lan, Yuqiao Shi Solution Growth of HgTe Nanoweires at LowTemperature Aimiao Qin, Yuzi Liu, Zhong Lin Wang Influence of Post-Annealing on the Mechanical and Electrical Properties of Boron-doped Nanocrystalline Silicon Thin Films J. N. Ding, H. S. Qi, N. Y. Yuan, Y. L. He, G. G. Cheng SiN-based Micro Cantilever Actuators Using NdFeB/Ta Permanent Magnetic Thin Film Sen Yao, Shunji Goto, Junpei Sakurai, Tadahiko Shunshi, Minoru Uehara, Hitoshi Yamamoto Optimization of Process Parameters Based on ANN When Synthesizing Nano-size Hydroxyapatite Using Solgel Method Zongwei Niu, Zhiyong Li, Li Li, Rongguo Hou Thermodynamics Analyse of The Synthesizing of Nano-size Hydroxyapatite Using Sol-gel Method Zongwei Niu, Zhiyong Li, Li Li, Rongguo Hou Fabrication of Bulk Titanium Out-of-plane Microneedles Gang Zhao, Wen Li, Guanrong Tang, Jing Chen Spiral Capacitor based on Copper Electroplating Yue Chen, Xiuhan Li, Dongming Fang, Quan Yuan, Haixia Zhang Structural and Strain Relaxation Study of Epitaxially Grown Nano- thick Nd 2 O 3 /Si(111) Heterostructure Jinxing Wang, Apurba Laha, Andreas Fissel, Dominik Schwendt, Rytis Dargis, Tatsuro Watahiki, Roman Shayduk, Wolfgang Braun, Tianmo Liu, H. Jorg Osten Bottom-Up Fabrication of Special Parylene Films Based on Selective Growth on Au-coated Surface Yi Zhou, Fei Ding, Chao Ni, Wei Wang, Wengang Wu Layer-by-layer Nanoscale-coating of Microparticles with a Droplet Microfluidic Device Shailesh Madisetti, Zhiguo Zheng, Zhongcheng Gong, Siva Penmatsa, Yuri Lvov, Long Que Design and Optimization of Parylene Nanomechanical Cantilevers with Integrated Piezoresistors for Surfacestress Based Biochemical Sensing Qinglong Zheng, Zhuo Wang, Yong Xu A Study on Inteference between 3D MEMS Inductor and VCO Sewan Park, Joonyeop Lee, Hyeon Cheol Kim, Kukjin Chun UV absorption and Photoluminescence of Nanometer-sized ZnS Prepared by Different Routes Yuguang Li, Yinfeng Liu, Liping Wang, Beilei Gu, Haiyan Mao, Hefeng Hu, Ying Gu, Yiben Xia Battery-Powered Miniaturized Electroporation System for In-Situ Gene Transfer in Stem Cell Research Huiqi He, Donald C. Chang, Yi-Kuen Lee

8 The Design and Fabrication of a New Blood-filtering Chip Based on SU-8 and PDMS Chaohui Wang, Peng Ye, Kerun Lee, Jingju Wang, Jing Wang Low Temperature Direct Bonding for Hermetic Wafer level Packaging Lei Nie, Tielin Shi, Zirong Tang, Shiyuan Liu, Guanglan Liao Design, Fabrication and Characterization of A Solid Propellant Micro-Thruster Xuezhong Wu, Peitao Dong, Zhaoze Li, Shengyi Li, Qinghui Liu, Chao Xu, Hong Wan A Novel p+ Poly-SiGe Gate CMOS Device Jing Zhang, Kaizhou Tan, Siliu Xu, Zhengfan Zhang, Yukui Liu, Guangbing Chen, Kaicheng Li, Heming Zhang, Huiyong Hu Investigation of InGaN/GaN Multiple Quantum Wells with Strain Relief Behavior for Light-Emitting Diodes T. W. Chang, T. J. Chung, T. Ru, T. E. Nee, H. C. Lu, G. M. Wu Multi-Category Human Motion Recognition based on MEMS Inertial Sensing Data Guangyi Shi, Yuexian Zoui, Yufeng Jin, Yali Zheng, Wen J. Li Distributed MEMS Transmission Line-Based Uniplanar Compact Electromagnetic Bandgap (UC-EBG) Tunable Filters Li Zhang, Jun Yao, Dajia Wang, Hongsheng Zhong Piezoresistive Properties of Heavily Doped P-type Polysilicon Films Xuebin Lu, Xiaowei Liu, Rongyan Chuai, Changzhi Shi, Mingxue Huo, Weiping Chen A Low-Noise CMOS Interface Circuit for Closed-Loop Accelerometer Liang Yin, Xiaowei Liu, Wei Chen, Weiping Chen, Zhiping Zhou The Method of Prevent Footing Effect in Making SOI Micro-mechanical Structure Xu Mao, Zhenchuan Yang, Zhihong Li, Guizhen Yan CMOS Interface Circuitry for a Closed-loop Capacitive MEMS Accelerometer Yuntao Liu, Xiaowei Liu, Liang Yin, Weiping Chen, Qun Wu Evalution of Bulk Titanium DRIE Using SU-8 As Soft Mask Gang Zhao, Yao Tian, Qiong Shu, Jing Chen Shape and Thermal Effects of Metal Films on Stress-Induced Bending of Surface Micromachined Curved Grating Chen-Chieh Liao, Ju-Nan Kuo Structure Optimization of a Monolithic High-Shock Three-Axis Piezoresistive Accelerometer Using Ant Colony Optimization Qingzhou Li, Ping Song, Kejie Li Simulation of the Novel Micro-valve Using Dynamic Analysis C. K. Chung, T. R. Shih, B. H. Wu Metrology of Deep Trench Structures with Polarized FTIR Reflectance Spectrum Chuanwei Zhang, Shiyuan Liu, Tielin Shi Characteristics of Truncate-angle Rhombic Micromixer and Rapid Mold Fabrication Using CO 2 Laser Micromachining C. K. Chung, T. R. Shih, B. H. Wu Mechanical and Dynamical Behavior of Carbon Nanotube with Defects:A Molecular Dynamics Simulation Jenn-Sen Lin, Shin-Pon Ju, Shih-Wen Yung, Wen-Shian Wu, Meng-Hsiung Weng, Wen-Jay Lee Design of Pt electrode in a SO 2 gas sensor based on LaF 3 solid electrolyte Guo L. Sun, Hai R. Wang, Zhuang D. Jiang, Xian N. Gao, Tian S. Yin, Guo Q. Han

9 Design and Implementation of Software System of E-beam Lithography Based on SEM Shuhua Wei, Jinzhao Zhang, Li Han Influence of Substrate Bias on the Resistivity and TCR of Nanostructured Ta-Si-N Films C. K. Chung, Y. L. Chang, T. S. Chen Surface Acoustic Wave Linear Motor for Two-dimensional Optical Positioning System Yumei Xing, Yigui Li, Junfeng Zhang, Gaoyang Gao Synthesis of Horizontally Aligned Single-walled Carbon Nanotubes Without External Force and Their Growth Characteristics Fubo Rao, Tie Li, Yuelin Wang Extraocular Image Processing for Retinal Prosthesis Based on DSP Yuexian Zou, Guangyi Shi, Yufeng Jin, Yali Zheng A Novel Integrated Micro-scale Closed Synthetic-jet-like Flow Field as Gas Lubrication in MEMS Devices Fei Ding, Wenxuan Yu, Tingting Yu, Chao Ni, Ruyan Tang, Wengang Wu Electrical and Optical Testing System for Microplasma in Scanning Plasma Etching Weiwei Xiang, Li Wen, Hai Wang, Qiuping Zhang, Jiaru Chu Design and Fabrication of the Microplasma Reactor for Maskless Scanning Plasma Etching Li Wen, Qiuping Zhang, Weiwei Xiang, Hai Wang, Jiaru Chu Low Voltage Plug Dispersion Compensation for Moving Field Capillary Electrophoresis with Flow Loss via the Side Channels Lujun Zhang, Andre Bossche A New 2D Structure for Chemotaxis Measurement of Adhesive Cells Yeon H. Kwak, Soon S. Park, Sung M. Hong Patterned Deposition of PEO Nanofibers Dezhi Wu, Lingyun Wang, Daoheng Sun Calculation of Phase Transformation of Vanadium Oxide Using MD Simulation and its Validation by Experimental Values Di Wang, Xiaodong Chen, Qun Zhang, Yu Liu, Jincheng Liu, Lijiang Hu Electrochemical Synthesis of Gold Nanoparticles in Polypyrrole for Antibody Immobilization Lan Qu, Chao Bian, Jizhou Sun, Zhenxing Ren, Jinghong Han, Shanhong Xia Fabrication of Compact Collateral Silicon Nanowires Based on Continuously Alternating Deposition D. Wu, H.Y. Mao, W.G Wu Study on Phenolic-Resin/Carbon-fiber Ablation Composites Modified with Polyhedral Oligomeric Silsesquioxanes Yu Liu, Zushun Lu, Xiaodong Chen, Di Wang, Jincheng Liu, Lijiang Hu Design of a Multi-walled Carbon Nanotubes Vacuum Gauge Ki-Young Dong, Youngmin Park, Seung-Il Moon, Jinwoo Lee, Jinnil Choi, Byeong-Kwon Ju Chip Scale Packaging with Surface Mountable Solder Ball Terminals for Microsensors Ahra Lee, SangChul Lee, Sungsik Lee, Chang Han Je, Sunghae Jung, Myoung-Lae Lee, Gunn Hwang, Byoung-Gon Yu, Chang Auck Choi A High Sensitivity Quartz Tuning Fork Temperature Sensor Jun Xu, Bo You, Xin Li, Jing Ma

10 Research on a Novel SAW Actuator of Floating Electrode Unidirectional Transducer Junfeng Zhang, YiGui Li, Chun Hui, Yumei Xing, Yang Gao Improved Adhesion Between C-MEMS and Substrate by Micromechanical Interlocking Jie Gong, Zirong Tang, Tielin Shi, Guanglan Liao, Lei Nie, Shiyuan Liu SOI Digital Accelerometer Based on Pull-in Time Configuration Lukasz S. Pakula, Vijayekumar Rajaraman, Patrick J. French Signal Modulation Schemes Comparison in the Telemetry Unit for Retinal Prosthesis System Yuexian Zou, Yali Zheng, Yufeng Jin, Guangyi Shi Integration of Micro Flow Sensor and Flexible Substrate as GDL in Micro Fuel Cell Chi-Yuan Lee, Shuo-Jen Lee, Yu-Ming Lee, Kuan-Yu Chu Effect of Al Thickness on the Al Induced Low Temperature Poly-Si Film Crystallization Process Hsiao-Yeh Chu, Ming-Hang Weng, Ru-Yuan Yang, Chien-Wei Huang, Chia-Hsing Li Design of a MEMS Sensor to Detect the Casimir Force Chakravarthy Yamarthy, Shamus McNamara Ferroelectric and Dielectric Properties of Pb(Zr,Ti)O 3 Thin Film Capacitors M. D. Nguyen, R. J. A. Steenwelle, P. M. Te Riele, J. M. Dekkers, D. H. A. Blank, G. Rijnders Cell Affinity of PHBV Thin Films Evaluated by a Parallel Plate Flow Chamber Yuping Zhang, Yanyan Wang, Lanxin Lv, Shancheng Yan, Haitao Wang, Yong Zhang, Dan Zhu, Ningping Huang, Zhongdang Xiao Effect of Opposite Side Electrodes in Organic Field-Effect Transistor Structure Rawat Jaisutti, Wittawat Yamwong, Sirapat Pratotep, Tanakorn Osotchan Research and Evaluation of a High Temperature Pressure Sensor Chip Zhuangde Jiang, Libo Zhao, Yulong Zhao, Philip D. Prewett, Kyle Jiang Effects of Wall Temperature on the Heat and Mass Transfer in Microchannels Using the DSMC Method Jianjun Ye, Jian Yang, Jinyang Zheng, Ping Xu, Chikong Lam, Ieong Wong, Yanbao Ma Memory Characteristics of Double-layer Metal and Semiconductor Heterogeneous Nanocrystals Embedded in SiO Henan Ni, Liangcai Wu, Zhitang Song, Chun Hui Finite Elements Study of High Mechanical Stress in Nanostructures for Innovative NEMS Sensors Xin Xu, Bogdan Bercu, Francois Lime, Laurent Montes A Uncooled a-si Infrared Detector with Novel Thermal Isolation Method Huajun Fang, Xingming Liu, Litian Liu DC Electrical Trimming Characteristics of Polysilicon Nanofilms with Different Doping Concentrations Chang-Zhi Shi, Xiao-Wei Liu, Rong-Yan Chuai High Sensitivity, Low Operational Temperature ITO Nano Gas Sensor with Integrated Circuits Chiyou Xu, Yong Shi Effect of Mixing Hopping Sites for Carrier Transport in Organic Semiconductor Nanodevices Surachai Pengmanayol, Tanakorn Osotchan

11 Thermo-Oxidative Stability of Nano-SiO 2 /Bismaleimide Composite Dongbing Geng, Liming Zeng, Yi Li High Sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology Ji-Hong Kim, Sung-Min Hong, Jang-Sub Lee, Byung-Moo Moon, Kunnyun Kim Fabrication of Carbon Nanocoils Based Tactile Sensor C. C. Su, C. H. Li, N. K. Chang, T. C. Wu, S. H. Chang A Backstepping Controller for Piezoelectric Actuators with Hysteresis in Nanopositioning Amir Farrokh Payam, Morteza Fathipour, Mohammad Java Yazdanpanah Design of a Feedforward Controller for AFM Nanopositioning Based on Neural Network Control Theory Amir Farrokh Payam, Mohammad Javad Yazdanpanah, Morteza Fathipour Fabrication and Characterization of Nano-scale Lines through Anodic Porous Alumina Membrane Guo Q. Han, Zhuang D. Jiang, Wei X. Jing, Hai R. Wang, Guo L. Sun, Ming Z. Zhu Experimental and Numerical Investigations Into High-Voltage Pulsed DC Electric Fields For Enhancing CE Chip Performance JIng-Hui Wang, Meng-Ku Chi, Lung-Ming Fu, Che-Hsin Lin Microfabrication of Conductive PDMS on Flexible Substrates for Biomedical Applications Hailin Cong, Tingrui Pan Micropattern-Assisted Nanoassembly: Ordered Nanocolloidal Array on PEG Microstructures Hailin Cong, Alexander Revzin, Tingrui Pan A Novel Method of Anodic Bonding Wei Tang, Zhe Chen, Haixia Zhang Effect of Laser Annealing on Amorphous Silicon Carbide Films Prepared by PECVD Pin Lv, Zhe Chen, Alice H.X. Zhang New Pumping Mechanism by Surface Waves in a Microchannel Tzong-Shyng Leu, Horng-Jiann Song Numerical Investigation of Biochemical Binding Kinetics on the Microfluidic Chip with FO-LPR Chun-Ping Jen, Ching-Te Huang, Yun-Hung Lu Design and Modeling of an Electromagnetically Excited Silicon Nitride Beam Resonant Pressure Sensor Deyong Chen, Zhengwei Wu, Xiaojing Shi, Junbo Wang, Lei Liu On the Mechanical Behavior of LIGA Nickel Guang He, Geng-Chen Shi Transcutaneous Power Link Design for Implanted Systems Kui Zou, Xiuhan Li, Haixia Zhang Fabrication of Seamless Roller Mold with Excimer Laser Direct Writing Technology Yung-Chun Lee, Pin-Chang Chen, Hung-Yi Lin An Investigation of Buckypapers Young s Modulus Utilizing Nanoscale Modeling and Molecular Dynamics Simulation Yunguang Ji, Yueh-Jaw Lin, Alper Buldum A Novel Method for Fabricating Aspheric Fiber Lens and Its Applications Yung-Chun Lee, Yi-Chien Lin, Chen-Hui Tsai

12 Infrared Heating and Roller-Based Contact Printing Technology for the Fabrication of Micro/Nano-Structures Yung-Chun Lee, Hsueh-Liang Chen, Chun-Hung Chen, Hung-Yi Lin Effect of Nitrogen Flow Ratios on Microstructure and Mechanical Properties of Nanocomposite Ti-Si-N Thin Flims C. K. Chung, J. J. Jhu Microfluidic Mixing with Electrokinetic Instability in a Double T-shaped Microchannel Shou-Ping Hsu, Kao-Feng Yarn, Win-jet Luo, I-Ting Hsieh, Hong-Jun Ye, Meng-Hua Chung Raman Descrimination of Helicobacter Pylori Fingerprint in Dielectrophoresis Chip Chi-Chang Lin, Ying-Mei Yang, Hsien-Chang Chang A Biocompatible Affinity MEMS Sensor for Continuous Monitoring of Glucose Xian Huang, Siqi Li, Jerome Schultz, Qian Wang, Qiao Lin Development of Vacuum Packaged CMOS Thermoelectric Energy Harvester Chengkuo Lee, Jin Xie Nanomechanical Cantilever Sensor Using Optical Nanocavity Resonator Chenghuo Lee, Wenfeng Xiang, Jayaraj Thillaigovindan, Fu-Li Hsiao Experimental Investigation on the Dynamic Response of Thermal EG-CNT Flow Sensors Yan-li Qu, Zai-li Dong, Steve C.H. Tung, Wen J. Li Microfluidic Patterning of Nanoparticle Monolayer: Mechanism Analysis and Noncontinuously Patterning Approach Zhen Chen, Yu Zhao, Wei Wang, Zhihong Li Plasma Lithography for Control of Cell Morphology and Proliferation Michael Junkin, Donna D. Zhang, Pak Kin Wong An Electrothermal Micromixer for Molecular Analysis Mandy L. Y. Sin, Vinay Gidwani, Vincent Gau, Pak Kin Wong Nanoengineered Platforms for Cancer Chemoprevention Vinay Gidwani, Yi Lu, Donna D. Zhang, Pak Kin Wong Kinetic and Processing Studies on a Novel Technology of Producing High Purity Nano- Silicon Dioxide from an Alumina Rich Coal Fly Ash with Carbon Dioxide Guanghui Bai, Wei Teng, Xianggang Wang, Hui Zhang, Peng Xu Investigation of Thermal and Methanol-Vapor Treatments for MgTPP as an Optical Gas Sensor Sumana Kladsomboon, Sirapat Pratontep, Theeraporn Puntheeranurak, Teerakiat Kerdcharoen Current Capacity and Thermal Transport in Carbon Nanofiber Interconnects Drazen Fabris, Tsutomu Saito, Toshishige Yamada, Xuhui Sun, Patrick Wilhite, Cary Y. Yang A DEP Chip with Arc-Shape Microelectrode Arrays for the Separation of Different-size Particles Cheng-Hsin Chunag, Yu-Chi Chen, You-Ming Hsu, Huei-Sheng Huang, Fei-Bin Hsiao, Chin-Hung Wang Single Cell Imaging Using Electrical Impedance Tomography Tao Sun, Soishiro Tsuda, Klaus-Peter Zauner, Hywel Morgan Nanolayer Effects in Cooling Performance of a Microchannel Heat sink with Nanofluids Containing CNTs Sadollah Ebrahimi, Jamshid Sabbaghzadeh, Maryamalsadat Lajvardi, Iraj Hadi An Improved Method to Remove Anti-Footing Al Layer after DRIE Yuan Li, Zhenchuan Yang, Guizhen Yan

13 Improvement of Au Cantilever Fabrication Process with Cu As a Sacrificial Layer Qiuang Liu, Bo Liu, Zhihong Li Functionalized Bio-nanoparticles in Immunosensing Using Surface-enhanced Raman Scattering Methods Chi-Chang Lin, Chen-Yuan Yu, Ying-Mei, Yang, Yan-Fu Chen, Hsien-Chang Chang A New Design Methodology for Electro-Mechanical Sigma- Delta-Modulators Jian Luo, Haitao Ding, Michael Kraft Fabrication of a Novel Micro Liquid Flow Sensor Using a TaN Thin Film C. K. Chung, T. C. Chen, T. R. Shih, W. T. Chang Design of a Novel MEMS IDT Dual Axes Surface Acoustic Wave Gyroscope Qinghui Liu, Xuezhong Wu, Di Di, Peitao Dong, Dapeng Fan Calibration of MEMS Accelerometer Based on Plane Optical Tracking Technique and Measurements Zhuxin Dong, Uchechukwu C. Wejinya, Wen J. Li Analysis on Thermal Balance and Design Principles of Catalytic Combustion Gas Sensor Ding-jun Xu, Zheng-yong Zhang, Zhen Yu Application of Microfluidic System to Construct Cross-Linked Chitosan Microfibers by PDMS chip Chia-Hsien Yeh, Po-Wen Lin, Qiaole Zhao, Tsung-Che Chou, Yu-Cheng Lin A Novel 3D Flexible Parylene-Metal Structure Fabrication Technique Xianju Huang, Yu Tang, Renxin Wang, Chuang Qian, Wei Wang, Zhihong Li Analysis and Design of A Micromachined Rb-85 Filter in Passive Rubidium Atomic Clock Shenggui Wang, Liwei Lin, Hang Guo Growth and Characterization of PZT Thin Films with A Pt/Ti Layer on Silicon Substrate Yi Zhang, Daqun Bao, Hang Guo Anticancer Drug Delivery for Tumor Targeting and Therapy Yu Jin Kim, Il-Kyu Park, Jin Soo Kim, Joon Hwang, Eui-Sik Chung, Kang Moo Huh, Yong-kyu Lee The Development of Piezoelectric Biosensor Based on Nano-crystalline PZT/Quarts Anzhou Hou, Henan Ni, Chun Hui, Ailan Xu Study on Self-Alignment Property of Silicon Nanowire in Temperature Gradient Yanfeng Jiang, Xiaobo Zhang, Bing Yang Research on Mixing Mechanism of Micromixer Based on Segmented Gas-Liquid Flow Yi-feng Wang, Rui-jin Wang, Ling-na Wang Gesture Recognition for Interactive Controllers Using MEMS Motion Sensors Shengli Zhou, Qing Shan, Fei Fei, Wen J. Li, Chung Ping Kwong, Patrick C.K. Wu, Bojun Meng, Christina K.H. Chan, Jay Y.J. Liou Fabrication and Analysis of Microfluidic Mold Insert by Micro Electrical Discharge Machining Jeou-Long Lee, Yung-Kang Shen, Yi Lin, Ping-Tun Teng, Chuan-Min Huang Two New Micro Programmable Gratings and Their Potential Applications Yiting Yu, Weizheng Yuan, Bin Yang, Taiping Li, Lanlan Wang Design and Analysis of Helical Flagella Propelled Nanorobots S. Subramanian, J.S. Rathore, N.N. Sharma

14 Chemical Modification and Thermal Stability Study of ß-cyclodextrin- and PAMAMtrypsin Conjugates Benjaporn Treetharnmathurot, Chitchamai Ovatlarnporn, Juraithip Wungsinthaweekul, Ruedeekorn Wiwattanapatapee Microfluidic Chip of Fast DNA Hybridization Using Denature and Motion of Nucleic Acids Yung-Chiang Chung, Yu-Cheng Lin, Chaung-Di Chueh, Chuan-You Ye, Li-Wei Lai, Wei-Chieh Liao The Improvement of Electrochemical Etching Process for Silicon Microchannel Plates Ding Yuan, Pengliang Ci, Fei Tian, Jing Shi, Shaohui Xu, Peisheng Xin, Lianwei Wang Numerical Simulation of an Electrokinetic Micromixer Using Harmonic and Chaotic Electric Fields Her-Terng Yau, Cheng-Chi Wang, Ching-Chang Cho, Ming-Jyi Jang Influence of the Bearing Number on Micro Gas Bearing System Cheng-Chi Wang, Her-Terng Yau, Yen-Liang Yeh, Ming-Jyi Jang, Jing-Fung Lin Research of Nano-material Doped Fiber in SBS Slow Light System Ru Zhang, Ying Zhang, Peilin Lang, Yuwen Duan Scratch of Submicron Grooves on Aluminum Film with AFM Diamond Tip Ping Peng, Tielin Shi, Guanglan Liao, Zirong Tang, Chang Liu Novel Optical Nanobiosensor Assembled with Silver Nanoparticles on Gold Surface Zhong Cao, Meng-Xue Zeng, Ling Zhang, Xi-Xi Huang, Ming-Xing Wang, Fu-Chun Gong, Shu-Zhen Tan The Analysis of Microtoroid Cavity Coupling System Based on Fullwave Shubin Yan, Baohua Wang, Yingzhan Yan, Nini Hao, Shaohui Wang, Xiaohong Ren, Xiongying Ye, Zhaoying Zhou, Chenyang Xue, Jun Liu Flat Suppercontinuum Generation in the Inner Cladding Fiber with InP Nano Thin Film Yuwen Duan, Ru Zhang, Peilin Lang, Ying Zhang Integrated High Sensitivity Displacement Sensor Based on Micro Ring Resonator Xin Liu, Chenyang Xue, Shubin Yan, Jijun Xiong, Wendong Zhang Magnetic Nanowire-Enhanced Optomagnetic Tweezers Karan K. Mehta, Ting-Hsiang Wu, Eric P. Y. Chiou Design of the Miniature Optical Fiber Voltage Sensor Jun Liu, Guoqing Jiang, Shubin Yan, Shaohui Wang, Yingzhan Yan, Yanfeng Jing, Jijin Xiong, Xiongying Ye, Zhaoying Zhou, Wendong Zhang Trilayer Nanoimprint Fabrication and Simulation of the Silicon Nanowire Sensor for Gas Detection Jing Wan, Shao-Ren Deng, Yifang Chen, Ejaz Huq, Ran Liu, Xin-Ping Qu Superhydrophilic Anti-Fog Polyester Film by Oxygen Plasma Treatment Min Nie, Pragnesh Patel, Kai Sun, Dennis Desheng Meng Wedging Leakage Flow and Its Impact on the Maximum Pressure Head of Bubble-Driven Micropumping Ryan Lemmens, Dennis Desheng Meng Fuzzy Adaptive Extended Kalman Filter for Miniature Attitude and Heading Reference System Wei Qin, Weizheng Yuan, Honglong Chang, Liang Xue, Guangmin Yuan MEMS-based Multi-sensor Integrated Attitude Estimation Technology For MAV Applications Liang Xue, Weizheng Yuan, Honglong Chang, Chengyu Jiang

15 Acting Force Comparison of Microbeads and Hemocytes in Microchannel Using Optical Tweezers System Yung-Chiang Chung, Yen-Wen Hu, Tsong-Long Hwang, Po-Wen Chen, Fong-Jian Sie Extreme-Low-Power Thermal Convective Accelerometer Based on CNT Sensing Element Yu Zhang, Wen J. Li, Osamu Tabata Experimental Investigation of CNT-Based Micro Bubble Generation Inside Microchannels Peng Xiao, Wen J. Li, Ruxu Du Extreme-Low Power NaOCl Sensor Using EG-CNTs as Sensing Element Li Yang, Menxing Ouyang, Wen J. Li 2 x 3 Array Oxygen Sensor for Measuring Cellular Respiration Level Jungil Park, Sunyoung Ahn, Youngmi Kim Pak, James Jungho Pak Micromachined Interferometric Accelerometer Fabricated Using SGADER Process Kang Wu, Xiongying Ye, Litao Liu, Linrui Guo, Zhaoying Zhou, Feng Chen Highly Effective Bacterial Removal System Using Carbon Nanotube Clusters Jin-Woo Kim, Hyung-Mo Moon, Steve Tung, Hyun-Ho Lee Exploring the Potential of Microarray Technology for Bio/Nano Sensing Ju Seok Lee, Joon Jin Song, Russell Deaton, Jin-Woo Kim Fabrication of a Stepped Shape Tip using a Self-descending Phenomena of Meniscus Mi-Hyun Kang, Chang-Sin Park, Bo Young Choi, Dong-Weon Lee Effect of Sacrificial Layer Compliance on Thermal Stresses of Composite MEMS Beams Jin Qiu, Arthur Morris, Shawn Cunningham Microfluidic High Viability Separation of Neural Cells Zhigang Wu, Grzegorz Wicher, Asa Fex Svenningsen, Klas Hjort Multi-wall Carbon Nanotubes Film Used for Determination of Salbutamol Sulfate Shu Long, Zhong Cao, Yu-Ting Zhao, Yi Zhou, Ming-Xing Wang, Yun-Lin Dai, Fu-Chun Gong, Shu- Zhen Tan Low Temperature Growth of ZnO Rods by EDTA-assisted Hydrothermal Synthesis Guangmei Zhai, Hua Gong, Minqiang Wang, Zhonghai Lin, Kaiping Liu, Daoli Zhang A Novel Micro-Electrostatic Field Sensor Based on Parallel-Plate Resonator Chunrong Peng, Shanhong Xia Investigation of Electrostatic Bonding Time Model with Point Cathode Jialu Tang, Xiaowei Liu, Haifeng Zhang, Xilian Wang The Study of the Improved Wavelet Thresholding with Translation Invariant De-noising on Capillary Electrophoresis Signal Hai-feng Zhang, Xiao-wei Liui, Xian-hui Shao, Xi-Lian Wang, Bin Zhou Design of A Novel Sensor Based on Piezo-Resistive Effect of GaAs/AlGaAs/InGaAs PHEMT Jing Cui, Bingzhen Zhang, Jun Liu, Chengyang Xue, Guowen Liu, Xiaojuan Jia Fabrication of Complicated Three Dimensional Structures Utilizing Multi-stack Bonding Mingda Zhou, Yilong Hao, Chengchen Gao, Zhihong Li, Qifang Hu Electron Mobility in Enhanced N-type Silicon Nanowire MOSFET Jie Chen, Tao Guo, Hang Guo Analysis of High Frequency Breakdown of Noble Gases in A MEMS-based Rb-87 Lamp for Miniaturized Passive Rubidium Atomic Clock Jie Chen, Tao Guo, Hang Guo Author Index