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1 Part ATFT-LCD AOI AOI sstem in TFT-LCD process Defect introduction Part B TFT-LCD AOI Image feature of TFT_LCD FFT(2D,1D,Muti) ICA 論 2

2 TFT-LCD Panel 4 來說 1. CF Panel (): 2. TFT Panel (): RGB CF --TFT Switch: LC Switch :TFT 3. Backlight Module: 利 / 來 -LCD 4. Driver ICBezel 4

3 不 LCDTFT (cell gap) 不 5 CF Cell Module TV Mobil Notebook TFT Plor. ShippingAOI AOI 6

4 TFT 數 TFT device ITO In Ti Oxcide 料金 TFT device 列 Pixel Gate line TFT device Signal line 7 Thin Film Photo Etching sampling sampling sampling AOI AOI AOI Defect Analsis Or SPC Yield improve 8

5 Arra Process Step Images PEP 1 PEP 2 PEP 3 PEP 4 PEP 5 MVA 9 FPI-7090 SCANNER ELECTRONICS CABINET SUN WORK STATION 10

6 Lifter Gauging CV gauging number reading Turn CV Lifter Output Input 8700 Inspection 2 Robot Inspection

7 14

8 Point defect BP; DP; Near point; Adjacent point; Particle Line defect Short, Open, Cross, ESD, Weak Mura 15 16

9 2 adjacent point 3 adjacent point a b a b c c d e f d g h 17 Point Defect-Bright Point(1) : : 30 量亮度說 : 1.30 見綠藍 Sub pixel 亮亮 18

10 Point Defect-Bright Point(2) : :30 量亮度說 : 見 2. 兩亮連 19 Point Defect-Dark Point(3) : : : L255W R G B : 說 : 30 見兩連 20

11 Point Defect-DP Near : : 離說 : 30 見兩 21 Point Defect-Point cluster : : 30 量亮度說 : 見 2. 亮 22

12 Point Defect- Cell Particle : :30 量亮度說 : L0 見亮, 量亮度 2. L92 若 Cell particle 類 MuraMura 23 Point Defect-CF Defect : : 30 量亮度說 : 1.30 見綠藍 Sub pixel 亮亮 24

13 Point Defect PI Spot : 狀不 Mura 見 < 20mm 25 26

14 V-Line & H-Line V-Line H-Line 27 V-ESD 28

15 V-Short & H-Short 說 : 見兩 V-Shot H-Shot 29 V-Open & H-Open 說 : 1. 見 2. V-Open H-Open 30

16 Com-Short 說 : 1. 見 2. 亮 31 X-Short 說 : 見 32

17 33 Rubbing Stripe Rubbing Mura(1) : 45 度

18 Rubbing Stripe V-Line Mura : Mura 35 H-Line Mura : Mura 36

19 V-Band Mura : 見 mura 2-5cm 37 Color Mura : 說 ;1.RB 來 PanelLC Bubble 行 Auto clave 2. R G B 3.MuraRGBG92 38

20 CF Scratch : L0, L23(L92), L63(L255) : Color Filter : 亮度亮. 39 White Spot : 見 2mm 40

21 Black Spot : 見 41 Water Mark : 狀浪狀 42

22 LC DEFECT : 亮, 量 43 LC Bubble : 30 見狀狀 Cell process 狀不,, 流 44

23 Movable Mura : Panel 見亮亮,, Lupe 見漏 45 CF DEFECT : R.G.B 見 46

24 CF DEFECT CF DEFECT : Color Filter 料 47-48

25 49 Glass defect-scratch 50

26 51 52

27 Mura JND 來 53 JND 2.0 JND 2.5 JND 3.0 JND 3.5 JND 4.0 JND

28 JND 55 JND issues 56

29 Line mura issues 57 JND JND

30 Reference paper List and algorithms status 59

31 易 (a) PI mura (b) Rubbing mura (c) (d) 不易 (a) (b) (c) 洞 (d) 61 MVA-LCD 說 MVA-LCDData linegate linetftcommon line TFT (a) Arra (b) MVA-LCD 度 500 pixels/mm (c) TN-LCD 62 度 60 pixels/mm

32 理 Target images (scale issues) Image subtraction FFT ICA 64

33 理 A,B difference B,C difference Defect in B column Easle, Effectuall, 65 立

34 流 TFT 兩立葉行不離律路率立葉立葉 67 立葉濾行 TFT-LCD 度 60 pixels/mm 路 Pattern 六列列數 Gate line Line1 ~ Line6 68

35 TFT-LCD Line1 ~ Line6 Line1 Line4 Line2 Line5 Line3 Line6 69 立葉濾立葉 Joseph Fourier 不率離立葉 I 1 N N 1 x = 0 { f ( x) } = F ( u) = f ( x) exp [ j 2π ux N ] I 1 N 1 u = 0 { F ( u) } = f ( x) = F ( u) exp[ j 2π ux N ] 70

36 立葉濾立葉 TFT-LCD 立葉 (a) (b) 立葉立葉立葉理律路立葉留量 71 立葉濾律路立葉律路立葉立葉律 EX. 路律 u 1 u = N x x N x 路 TFT-LCD u EX. 72

37 律路立葉立葉濾 N = 256 (a1) x = 16 (a2) 立葉 u = 256 / 16 = 16 (b1) (b2) 立葉 x = 8 u = 256 / 8 = 律路律 N = 256 (a1) x = 17 (a2) 立葉 u = 256 / 17 = 15 立葉濾 TFT-LCD (b1) (b2) 立葉 x = 5 u = 256 / 5 = 51 74

38 立葉律立葉濾 (a1) (a2) (a1) 立葉 (a3) (a1) 立葉理 (b1) 洞 (b2) (b1) 立葉 (a3) (a1) 立葉理 75 立葉濾立葉立葉 [ w, N w] N w 3 w = 8 律路 Detail 滑 N EX. EX. w N 2 N w N 76

39 立葉濾立葉 w = 48 (a1) 洞 N = 128 (a2) (a1) 立葉 w = 72 (b1) 洞 N = 196 (b2) (b1) 立葉 w = 96 (c1) 洞 N = 256 (c2) (c1) 77 滑立葉濾 (a1) (a2) (a1) 立葉例 (a3) (a2) 律 (a4) (a2) 律 78

40 滑 (b1) 洞 (b2) (b1) 立葉立葉濾洞例 (b3) (b2) 律 (b4) (b2) 律 79 立葉濾 TFT-LCD 立葉 Step1 留量留 w 3 w = 8 N F ( u ) = 0, for 0 u w and N w u N 1 律律路 80

41 立葉濾 TFT-LCD 立葉 Step 2 留若律律律路立葉 * { u u } * u * U = 1, 2,... n 1 u = N x * N u i = ± ( i u) 2 * * F ( u) = 0, for u r u u r, i i + i =1, 2,..., n 81 立葉濾 TFT-LCD 立葉 (a1) (b1) 洞 (a2) (a1) 立葉 (b2) (b1) 立葉 (a3) (a1) 理 (b3) (b1) 理 82

42 83 Line1 Line2 Line3 Line1 理 Line2 理 Line3 理理 Line1 ~ Line6 Line 1~Line 3 84 Line4 Line5 Line6 Line4 理 Line5 理 Line6 理理 Line 4~Line 6 Line1 ~ Line6

43 立葉立葉濾 (a1) (a2) (a1) 立葉理 (b1) 洞 (b2) (b1) 立葉理 85 立葉濾兩 TFT-LCD 異 a' f ( i x) f ( i) i = 0,1, 2,..., x 1 = b' f ( i + x) f ( i) i = N x,..., N 1 = 86

44 立葉濾 (a1) (a2)(a1) (a3) (a1) (b1) 洞 (b2)(b1) (b3) (b1) 87 立葉濾 (a1) (a2)(a1) (a3) (a1) (b1) 洞 (b2)(b1) (b3) (b1) 88

45 立葉濾 TFT-LCD 不立葉理 TFT-LCD 不不不立葉 (a)tft-lcd (b) 立葉 (c) 89 立葉濾 TFT-LCD 不不濾濾 L 濾 H L s1 s0 H d1 滑 s1( x ) = 1 I I 1 i = 0 L ( i) fˆ ( x + i) i = 0,1,2,..., I d 1( x ) = 1 J J 1 j = 0 H ( j ) fˆ ( x + j ) j = 0,1,2,..., J 90

46 立葉濾立葉 () s1( x) d1( x) 立葉 (Pinhole) s1( x) d1( x) 91 立葉濾利 d1( x) 行 N 1 1 µ = d1( x) N σ = N N 0 x= x= UCL : µ + k σ CL : µ LCL : µ k σ 1 0 ( d1( x) µ ) 2 g (x) = 255, if otherwi LCL d1( x) UCL 0, se 92

47 立葉濾行行 HaarD2 93 立葉濾 k = 3 D2 (a1) (b1) 洞 (c1) (d1) (a2) (a1) (b2) (b1) (c2) (c1) (d2) (d1) 94

48 立葉濾行 Noise 60 pixels/mm 不 pixel 說度 95 立葉濾利濾 and 1 行 g (x) = 0, if g = 0 and = (x) g 1(x) 0 255, otherwise 例 -1 96

49 立葉濾例 k = 3 (a1) (a2)(a1) (a3)(a2) (b1) 洞 (b2)(b1) (b3)(b2) 97 不度度 1300LUX 率立葉度度度 98

50 不度 200LUX~1000LUX (a1) 1300LUX (b1) 200LUX (c1) 500LUX (d1) 1000LUX (a2) (a1) (b2) (b1) (c2) (c1) (d2) (d1) 99 不度 1500LUX~3000LUX (e1) 1500LUX (f1) 2000LUX (g1) 2500LUX (h1) 3000LUX (e2) (e1) (f2) (f1) (g2) (g1) (h2) (h1) 100

51 不度度律度 1000LUX~2000LUX 101 類 TFT-LCD 度 60 pixels/mm 類 k = 3 (a1) (b1) 洞 (c1) (d1) (a2) (a1) (b2) (b1) (c2) (c1) (d2) (d1) 102

52 類 TFT-LCD 度 20 pixels/mm k = 2.5 (a1) (b1) (a2) (a1) (b2) (b1) 103

53 MVA-LCD ( 度 500 pixels/mm ) (a) (b) () (c) () (d) TFT() 105 MVA-LCD ( 度 500 pixels/mm ) (e) (f) 106

54 (Line scan) 行率令行數行度率令切立葉律路濾留 107 率率狀率

55 率行 MVA-LCD 度 500 pixels/mm 路 Pattern47 度路度 47 pixels 109 TN-LCD 1x256 Line1 ~ Line6 (1) Row 1 (4) Row 4 (2) Row 2 (3) Row 3 (5) Row 5 (6) Row 6 110

56 MVA-LCD () 1x298 (1) Row 50 (2) Row 51 (3) Row 52 (4) Row 53 (5) Row 54 (6) Row MVA-LCD () (1) Row 88 (2) Row 89 (3) Row 90 (4) Row 91 (5) Row 92 (6) Row

57 MVA-LCD (TFT) (1) Row 14 (2) Row 15 (4) Row 19 (5) Row 22 (3) Row 18 (6) Row 率了度切若數數臨來 114

58 流率 TFT () 度切數臨數 115 切切數度切 [ P M ] 1 M S = { ˆ ( j); j = 0,1, 2,..., P 1} i f i P ={ ( i P + j); j = 0,1, 2,..., P 1} M f, i = 0,1, 2,...,[ ] 1 P P P P P 切 116

59 數切數行數兩令切度 P = 47 δ ( S i, S j ) = ( P 1 k= 0 P 1 j= 0 2 fˆ ( k) P µ ) ( 2 i fˆ ( k) fˆ i j ( k) P µ µ i P 1 k= 0 fˆ 2 j i j 2 ( k) P µ ) j 兩 δ µ = ˆ f ( k) i P i = j k = 0 P k = i 1 1 P = 1 { δ ( S, S ) + (, i δ S i+ S i 2 i 1 1 P S ˆ i S S i i 1 µ f ( k) 1 + j ) } 數 ( P 切 ) 117 切數行數 (b) (c) (b) (d) (b) 數 (a) (c) TFT (e) (c) 數 118

60 切行數數 A δ i B C A B C (a) (b) 數臨令 fractal 119 切數 KatzGeorge1985 度度度度 characteristic fractal dimension, CFD 令 p j 輪廓 D sum 度 D max D sum N 1 d j 1 = j= 兩, 離 max = max p i, j 度 (CFD) D i p j d j = p j+ 1 p j, j = 1, 2,..., N log D CFD = log D sum max D max 數, CFD Dsum 120

61 切數令 L (x) I 度 I I = D max L ( x) = D sum 兩異 L ( x) I 1 = 2 I 1 i= 2 f ( x + i) f ( x + i 1), x = I 1 I 1,..., M 2 2 (a) (b)(i=11) 121 (TFT) (a) TFT (b) I = 3 (c) I = 7 (d) I = 9 (e) I = 11 (f) I = 13 (g) I =

(TFT) (c) I = 7 (e) I = 11 (a) TFT (b) I = 3 (d) I = 9 (f) I = 13 (g) I = 17 123 (a1) (b1) TFT 數

62 (TFT) (c) I = 7 (e) I = 11 (a) TFT (b) I = 3 (d) I = 9 (f) I = 13 (g) I = (a1) (b1) TFT 數 δ i (a2) (a1) 數 δ i δ i (a3) I=3 數 (a4) I=11 數 δ i (b2) (b1) 數 δ i δ i (b3) I=3 數 (b4) I=11 數 124

63 切數數臨 T δ 來 g i 255 ( j) = fˆ ( j) i,if δ, if δ i i > T < T 來 ˆ f i ( j) g i ( j) I=11 數臨 T δ =0.7 δ δ j j 125 切數 δ i (b1) 數 (b2) δ i (a) (c1) 數 I = 11 (c2) 126

64 切數 δ i (b1) 數 (b2) δ i (a) TFT (c1) 數 I = 11 (c2) 127 切數 (a1) (a2) (a3) I =11 ( ) (b1) (b2) 128 (b3)

65 I 臨 T δ MVA-LCD 狀率狀 129 率立葉理 MVA-LCD 2003 TN-LCD 行立葉理率 (a1) (a2) 立葉 (a3) 率 (a4) (a5) 130 (b1) (b2) 立葉 (b3) 率 (b4) (b5)

66 立葉理 MVA-LCD 率 MVA-LCD 不律路濾 (a1) (a2) 立葉 (a3) 率 (a4) (a5) (b1) (b2) 立葉 (b3) 率 (b4) (b5) 131 率率切律路立葉立葉更易律路量律路率立葉濾律路留 132

67 率流率 TFT () 理兩度切切行立葉 ( 利離 ) 立葉律路率 133 切立葉理理量不來理量不 f ( x) = 255 f ( x), x = 0,1,..., M 1 (a) (b) 134

68 立葉律路量律 MVA-LCD 律律量量 (a1) TN-LCD (a2) (a1) 立葉 (a3) 率量 (a4) (b1) MVA-LCD (b2) (b1) 立葉 (b3) 率量 (b4) 135 切立葉理切立葉立葉更易律路量度 1xM 度切 (P=47, M=298) f (x) P M [ ] P (8x47) M [ ] P P ˆ M f ( i, j) = f ( j), i = 0,1, 2,...,[ ] 1, j = 0,1, 2,..., P 1 i P 136

69 切立葉理立葉 (a) (b) (c) (d) 立葉 137 切立葉立葉理 12 路列立葉路量立葉 F M [ ] 1 P P 1 1 M ( u, v) fˆ ( i, j) exp j 2π ux [ + v P = ] M i= 0 j= 0 P 138

70 切立葉理律路率度 w 率濾律路量 M M F ( u, v) = 0 for all v, and [ ] w < u < [ ] + w 2P 2P M 度 ([ ], [ P ] ) 率 2P 2 P P F ( u, v) = 0 for all u and [ ] w < v < [ ] + w 2 2 M 度 ([ ], [ P ] ) 率 2P 2 w F ( u, v) = 0 8 w 切立葉理立葉復率濾行立葉 fˆ M [ ] 1 P P 1 ( i, j) F ( u, v) exp j 2π ( ui [ ] + vj P) = u= 0 v= 0 行 M P f ˆ M ( i P + j) f ( i, j) i = 1, 2,...,[ ] 2 i P ' = j = 0,1, 2,..., P 1 140

71 律路率 () 率度 (w =12) 切立葉理 (a1) (b1) (a1) (a2) w=1 立葉 (a3) w=2 立葉 (b1) (b2) w=1 立葉 141 (b3) w=2 立葉切立葉理律路率 () 率度 (w =12) (a1) (b1) (a1) (a2) w=1 立葉 (a3) w=2 立葉濾律路 (b1) (b2) w=1 立葉 142 (b3) w=2 立葉

72 律路率 (TFT) 率度 (w =12) (a1) TFT (a2) w=1 立葉 (a3) w=2 立葉切立葉理 (a1) (b1) 濾律路 (b1)tft (b2) w=1 立葉 (b3) w=2 立葉 143 切立葉理路率律路量了略了 (w =2) 兩度 r F ( u, v) = 0 for all v, and u r and u P r 1 度 r 度 r F ( u, v) = 0 F ( u, v) = 0 u=r u=p-r-1 0 P-1 144

73 切立葉理兩度 r () 率 (w=2) (a1) (b1) (a1) (a2) w=2 立葉 (a3) (a2) 略 r =17 立葉 (b1) (b2) w=2 立葉 (b3) (b2) 略 145 r =17 立葉切立葉理兩度 r (TFT) 率 (w=2) (a1) (b1) (a1) TFT (a2) w=2 立葉 (a3) (a2) 略 r =17 立葉 (b1)tft (b2) w=2 立葉 (b3) (b2) 略 146 r =17 立葉

74 切立葉理不度 r (TFT) 率 (w=2) (a) TFT() (b) r =5 (c) r =15 (d) r =20 (e) r = 切立葉理不度 r (TFT) 率 (w=2) (a) TFT (b) r =5 (c) r =15 (d) r =20 (e) r =22 兩 r =15~20 r =17 148

75 切立葉理行路 1 1 M ' µ = f ( x) 1 = ( f M σ M x= 0 1 M x= 0 UCL : µ + k σ CL : µ LCL : µ k σ g (x) = ' 255, if LCL f ( x) UCL 0, otherwise ' ( x) µ ) 2 x x 149 切立葉理率率 w =2 參數 r = 17 k = 4 (a1) (a2) (a3) 150 (b1) (b2) (b3)

76 切立葉理率率 w =2 參數 r = 17 k = 4 (c1) (c2) (c3) (d1) TFT (d2) (d3) 151 率狀率 223x 率 (CPU 2.4GB 256MB) 152

77 不數臨 T = 0.6 = 0.7 = 0. 8 δ T δ T δ 153 不數 k 率 k =3 k =4 k =5 154

率度 1 584 率參數 : P = 47,,, w = 2 r = 17 k = 4 (a) (b) 率

78 率度率參數 : P = 47,,, w = 2 r = 17 k = 4 (a) (b) 率 155 率 (a1) (a2) (a1) (b1) (b2) (b1) (C1) TFT (c2) (c1) 率 156

79 類 (a) (b) (c) 率 (a) (b) (c) 率 (a) (b) (c) 率 157 類 (a)tft (b) (c) 率 (a) (b) (c) 率 (a) (b) (c) 率 158

80 (1) (a1) 750 LUX (a2) (a3) 率 (b1) 250 LUX (b2) (b3) 率 (c1) 500LUX (c2) (c3) 率 159 (2) (d1) 1000 LUX (d2) (d3) 率 (e1) 1250 LUX (e2) (e3) 率 (f1) 1500LUX (f2) (f3) 率 160

81 兩率行率降行率參數,, 率,, P = 47 I = 11 = 0. 8 T δ w = 2 r = 17 k = 兩流 TFT () 行率行 162

82 兩 (a1) (a2) 率 (a3) 兩 (b1) (b2) 率 (b3) 兩 163 兩 (c1) (c2) 率 (c3) 兩 (d1) TFT (d2) 率 (d3) 兩 164

83 路不 166

84 ICA 濾 TFT-LCD 不不立來利立來不利 ICA 練濾濾 167 利濾 (1) 濾 (2) 利數臨濾値値異 168

85 濾令 f ( x, ) ( x, ) 値 H ( x, ) m n 濾 H ( x, f ( x, ) ) Q( x, ) = m 1 n 1 i= 0 j= 0 f ( x + i, + j) H( i, j) (1) 臨若 µ Q Kσ Q < Q( x, ) < µ Q + Kσ ( x, ) Q Q ( x, ) : 濾値 ( x, ) 169 濾練 m n h 値行量 f f M f m1 f f f M m2 L L O L f f 1n M mn m n x11 x 12 M x1k kx1 = x 1 k = m n h 練料 x x M x 11 1k x x 2k [ x x x ] h2 X = =..., x 21 M L L L xh 1 x M xhk 1, 2, h 170

86 X 濾練練料 PSO-ICA 料 W W 列量 w 濾 * * * * w = ( w1, w2,..., w k ) 不練不立來不 171 濾 (a) (b) (c) 濾値 (d) 濾値 172

87 濾 (a) (c) 濾値 (b) (d) 濾値 173 g( x, ) 値 g( x, ) = 0 g( x, ) = 255 g( x, 255, ) = 0, if µ Q K otherwise σ Q Q( x, ) µ Q + K σ Q µ Q σ Q K Q( x, ) 濾値濾數濾値 174

88 (a1) (b1) (c1) ( K = 3) (a2) (b2) (c2) ( K = 3) 175 (a1) (b1) (c1) ( K = 2.5) (a2) 洞 (b2) (c2) 176 ( K = 2.5)

89 (a1) (b1) (c1) (a2) (b2) (c2) 177 (a3) (b3) (c3) (a4) (b4) (c4) 178

90 (a1) (a2) (a3) (b1) (b2) (b3) 179 TFT-LCD (a1) (a2) 洞 (a3) (a4) (b1) (b2) (b3) (b4)180

91 (a1) (b1) (c1) (a2) (b2) (c2) 181 (a3) (b3) (c3) (a4) (b4) (c4) 182

92 類

93 行 Sorting Bar test In-Line Test Go No Go sstem in between of process SPC information sstem Test results classification

94 論

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untitled TFT-LCD Mura & Y.H. Tseng 2006.12.4 Outline Mura Mura Mura 類度 Mura Mura JND Mura Convolution filter (Filter design) Statistical method (ANOVA,EWMA) Backgroup estimation (LSD) 2 What is Mura- Mura Mura