INME1(CS)FC_SR77_CH34

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3 Magnescale Co., Ltd. (CS) (1)

4 (2) (CS)

5 [For U.S.A. and Canada] THIS CLASS A DIGITAL DEVICE COMPLIES WITH PART15 OF THE FCC RULES AND THE CANADIAN ICES-003. OPERATION IS SUBJECT TO THE FOLLOWING TWO CONDITIONS. (1) THIS DEVICE MAY NOT CAUSE HARMFUL INTERFERENCE, AND (2) THIS DEVICE MUST ACCEPT ANY INTERFERENCE RECEIVED, INCLUDING INTERFERENCE THAT MAY CAUSE UNDERSIGNED OPERATION. CET APPAREIL NUMÉRIQUE DE LA CLASSE A EST CONFORME À LA NORME NMB-003 DU CANADA. (CS) (3)

OPERATION IS SUBJECT TO THE FOLLOWING TWO CONDITIONS.

6 (4) (CS)

7 (SR77) (CH34) (SR77) (CH34) CH (CS) i

...8 3-2. (CH34)...8 3-2-1. CH34...8 4.... 9 4-1....9 4-2.

8 ii (CS)

9 SR77-XXXR () 0.01/0.05/0.1/0.5/1.0 µm CH34-XXCP, -XXCE, -XXNP, -XXNE SR77-XXXL () CH34-XXCP, -XXCE, -XXNP, -XXNE 1-1 SR77-XXX XXXcm CH34-XXCP XXm CH34-XXCE CH34-XXNP CH34-XXNE 1-2. (CS) 1

10 M8 SR77 M4 M4 CH ( ) ( ) ( ) 2-1 ML (CS)

11 L R M4 20 (2.7 N m) M8 16 (20 N m) M4 10 (2.7 N m) 2-4 (CS) 3

12 1 () : ± MG mm MG 57.9 ± ± ± mm (CS)

13 : MG 0.05 MG 0 ± mm 2-8 (CS) 5

14 2. * * <> 0.1 MG mm (t = 1.0 mm) (t = 1.0 mm) (CS)

15 3. (SR77) (CH34) 0.01/0.05/0.1/0.5/1.0 µm 3-1. (SR77) (CS) 7

16 SR77 DC V 200 ma 2 A * 50 mvp-p * 10 ms (CH34) CH CH34 ( ) SR77 4 ( 1) 2 ( 2) 0 V 0 V 0 V 0 V +5 V +5 V +5 V +5 V CNT ( 3) CNT ( 3) N.C. ( 4) N.C. ( 4) SD N.C. ( 4) SD N.C. ( 4) RQ SD/RQ RQ SD/ RQ +5 V 0 V ( 1) 4 ( 2) 2 ( 3) CNT ( 4) N.C. +5 V 0 V CH34 FANUC 8 (CS)

17 M5 R15 mm M5 6 φ6 φ4 φ8 ( 5 µm) ( 0.3 µm) MPa 1020 kpa 20 kpa kpa 5 60 C 5 µm 0.3 µm 2 Rc PT 1/8 φ8 1 φ kpa (CS) 9

18 SMC AF C 1 SMC AFM C 1 SMC AR G kpa 1 SMC Y30L L 2 SMC KQ2S06-M5 1 NC φ4 5 m 15 mm 20±10 kpa 20±10 kpa (kpa) φ6 φ4 (m) kpa 20 kpa 30 N min 10 (CS)

kpa 20±10 kpa (kpa) 40 35 30 25 20 15 10 5 0 0 1 2 3 4 5

19 30 N min (N /min) (PS) 4-3 (CS) 11

20 4-2. M5 R15 mm M5 6 φ6 φ4 φ8 ( 5 µm) (CS)

21 SMC AF C 1 SMC AL C 1 SMC AR G kpa 1 SMC Y30L L 2 INφ8, OUTφ6 NC φ4 5 m 1Houghton AAA #15 2 # min 1 (CS) 13

22 SR77-XXXR (), SR77-XXXL () (ML) mm (26 ) 70, 120, 170, 220, 270, 320, 370, 420, 470, 520, 570, 620, 720, 770, 820, 920, 1020, 1140, 1240, 1340, 1440, 1540, 1640, 1740, 1840, ± / C EIA ML/1000 µmp-p ML/1000 µmp-p (20 C ) ML (mm) 0.01/0.05/0.1/0.5/1.0 µm ( ) DC V ( ) 200 ma (120 Ω ) 2 A ( 10 ms) 200 m/min ( ) 150 m/s 2 (50 Hz 3 khz) 350 m/s 2 (11 ms) IP54 ( ) IP65 ( ) FCC Part15 Subpart B Class A ICES-003 Class A Digital Device EN55011 Gp1 Class A, EN ( 60 V ) C C 0.27 kg kg/m 1 N (CS)

23 5-2. CH34-XXCP CH34-XXCE CH34-XXNP CH34-XXNE ( ) 100 mm PVC PU PVC PU () () () () 3 m 5 m 10 m 15 m 1-30 m 1 m ( ) ( ) IP65 () C C 0.02 kg kg/m 50 mm () 25 mm () 20 mm ( ) () SR77 M ( ) M ( ) M ( ) M4 2 ( ) (t = 0.1 mm) (t = 1.0 mm) (CS) 15

24 MG 0.1 MG ø10 ø15 9 ( M8 16) n ø4.5 ( M4 10) L1 = ML L2 = ML L3 L4 L5 * SR ± ± ML ø ( M4 20) mm ML L1 L2 L3 L4 L5 n CL = 3 m, 5 m, 10 m, 15 m CH ML : CL : MG : * : ML 720 mmml 1440 mm (ML) ML 10 mm 16 (CS)

25 The material contained in this manual consists of information that is the property of Magnescale Co., Ltd. and is intended solely for use by the purchasers of the equipment described in this manual. Magnescale Co., Ltd. expressly prohibits the duplication of any portion of this manual or the use thereof for any purpose other than the operation or maintenance of the equipment described in this manual without the express written permission of Magnescale Co., Ltd. Le matériel contenu dans ce manuel consiste en informations qui sont la propriété de Magnescale Co., Ltd. et sont destinées exclusivement à l'usage des acquéreurs de l'équipement décrit dans ce manuel. Magnescale Co., Ltd. interdit formellement la copie de quelque partie que ce soit de ce manuel ou son emploi pour tout autre but que des opérations ou entretiens de l'équipement à moins d'une permission écrite de Magnescale Co., Ltd. Die in dieser Anleitung enthaltenen Informationen sind Eigentum von Magnescale Co., Ltd. und sind ausschließlich für den Gebrauch durch den Käufer der in dieser Anleitung beschriebenen Ausrüstung bestimmt. Magnescale Co., Ltd. untersagt ausdrücklich die Vervielfältigung jeglicher Teile dieser Anleitung oder den Gebrauch derselben für irgendeinen anderen Zweck als die Bedienung oder Wartung der in dieser Anleitung beschriebenen Ausrüstung ohne ausdrückliche schriftliche Erlaubnis von Magnescale Co., Ltd.

26 Shinagawa Intercity Tower A-18F, , Konan, Minato-ku, Tokyo , Japan Printed in Japan 2009 Magnescale Co., Ltd.

INME1(CS)FC_SR87_CH34

INME1(CS)FC_SR87_CH34 Magnescale Co., Ltd. (CS) (1) (2) (CS) [For U.S.A. and Canada] THIS CLASS A DIGITAL DEVICE COMPLIES WITH PART15 OF THE FCC RULES AND THE CANADIAN ICES-003. OPERATION IS SUBJECT TO THE FOLLOWING TWO CONDITIONS.